JP2013029654A5 - - Google Patents

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Publication number
JP2013029654A5
JP2013029654A5 JP2011165389A JP2011165389A JP2013029654A5 JP 2013029654 A5 JP2013029654 A5 JP 2013029654A5 JP 2011165389 A JP2011165389 A JP 2011165389A JP 2011165389 A JP2011165389 A JP 2011165389A JP 2013029654 A5 JP2013029654 A5 JP 2013029654A5
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JP
Japan
Prior art keywords
optical system
catadioptric
imaging
image
aperture stop
Prior art date
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Application number
JP2011165389A
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English (en)
Japanese (ja)
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JP2013029654A (ja
JP5836686B2 (ja
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Priority to JP2011165389A priority Critical patent/JP5836686B2/ja
Priority claimed from JP2011165389A external-priority patent/JP5836686B2/ja
Priority to US13/558,522 priority patent/US8810711B2/en
Publication of JP2013029654A publication Critical patent/JP2013029654A/ja
Publication of JP2013029654A5 publication Critical patent/JP2013029654A5/ja
Application granted granted Critical
Publication of JP5836686B2 publication Critical patent/JP5836686B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011165389A 2011-07-28 2011-07-28 反射屈折光学系及びそれを有する撮像装置 Expired - Fee Related JP5836686B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011165389A JP5836686B2 (ja) 2011-07-28 2011-07-28 反射屈折光学系及びそれを有する撮像装置
US13/558,522 US8810711B2 (en) 2011-07-28 2012-07-26 Catadioptric optical system and image pickup apparatus having the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011165389A JP5836686B2 (ja) 2011-07-28 2011-07-28 反射屈折光学系及びそれを有する撮像装置

Publications (3)

Publication Number Publication Date
JP2013029654A JP2013029654A (ja) 2013-02-07
JP2013029654A5 true JP2013029654A5 (enExample) 2014-09-11
JP5836686B2 JP5836686B2 (ja) 2015-12-24

Family

ID=47596944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011165389A Expired - Fee Related JP5836686B2 (ja) 2011-07-28 2011-07-28 反射屈折光学系及びそれを有する撮像装置

Country Status (2)

Country Link
US (1) US8810711B2 (enExample)
JP (1) JP5836686B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5656682B2 (ja) * 2011-02-22 2015-01-21 キヤノン株式会社 反射屈折光学系及びそれを有する撮像装置
JP6379209B2 (ja) * 2014-09-26 2018-08-22 株式会社日立国際電気 固体撮像装置及び撮像方法
JP2019101181A (ja) * 2017-11-30 2019-06-24 キヤノン株式会社 撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备
JP7379112B2 (ja) * 2019-11-21 2023-11-14 キヤノン株式会社 光学系及びそれを備える撮像装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
DE19639586A1 (de) * 1996-09-26 1998-04-02 Zeiss Carl Fa Katadioptrisches Mikrolithographie-Reduktionsobjektiv
US6631036B2 (en) * 1996-09-26 2003-10-07 Carl-Zeiss-Stiftung Catadioptric objective
EP1059550A4 (en) * 1998-12-25 2003-03-19 Nikon Corp REFRACTION REFLECTION IMAGE FORMING SYSTEM AND PROJECTION EXPOSURE APPARATUS INCLUDING THE OPTICAL SYSTEM
JP2003015046A (ja) * 2001-06-28 2003-01-15 Nikon Corp 液浸系顕微鏡対物レンズ
JP4066079B2 (ja) * 2001-11-26 2008-03-26 株式会社ニコン 対物レンズ及びそれを用いた光学装置
US7180658B2 (en) * 2003-02-21 2007-02-20 Kla-Tencor Technologies Corporation High performance catadioptric imaging system
US8675276B2 (en) * 2003-02-21 2014-03-18 Kla-Tencor Corporation Catadioptric imaging system for broad band microscopy
US7672043B2 (en) * 2003-02-21 2010-03-02 Kla-Tencor Technologies Corporation Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
CN1922528A (zh) * 2004-02-18 2007-02-28 康宁股份有限公司 用于具有深紫外光的高数值孔径成象的反折射成象系统
JP2007047228A (ja) * 2005-08-05 2007-02-22 Olympus Corp 結像光学装置、及び光学ユニット
JP2008185965A (ja) * 2007-01-31 2008-08-14 Olympus Corp 顕微鏡対物レンズ
WO2009046137A1 (en) * 2007-10-02 2009-04-09 Kla-Tencor Corporation Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths

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