JP2012173525A5 - - Google Patents

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Publication number
JP2012173525A5
JP2012173525A5 JP2011035746A JP2011035746A JP2012173525A5 JP 2012173525 A5 JP2012173525 A5 JP 2012173525A5 JP 2011035746 A JP2011035746 A JP 2011035746A JP 2011035746 A JP2011035746 A JP 2011035746A JP 2012173525 A5 JP2012173525 A5 JP 2012173525A5
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JP
Japan
Prior art keywords
optical element
optical system
image
negative lens
catadioptric
Prior art date
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Granted
Application number
JP2011035746A
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English (en)
Japanese (ja)
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JP2012173525A (ja
JP5656682B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2011035746A priority Critical patent/JP5656682B2/ja
Priority claimed from JP2011035746A external-priority patent/JP5656682B2/ja
Priority to US13/401,999 priority patent/US8947774B2/en
Publication of JP2012173525A publication Critical patent/JP2012173525A/ja
Publication of JP2012173525A5 publication Critical patent/JP2012173525A5/ja
Application granted granted Critical
Publication of JP5656682B2 publication Critical patent/JP5656682B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011035746A 2011-02-22 2011-02-22 反射屈折光学系及びそれを有する撮像装置 Expired - Fee Related JP5656682B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011035746A JP5656682B2 (ja) 2011-02-22 2011-02-22 反射屈折光学系及びそれを有する撮像装置
US13/401,999 US8947774B2 (en) 2011-02-22 2012-02-22 Catadioptric optical system and image pickup apparatus having the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011035746A JP5656682B2 (ja) 2011-02-22 2011-02-22 反射屈折光学系及びそれを有する撮像装置

Publications (3)

Publication Number Publication Date
JP2012173525A JP2012173525A (ja) 2012-09-10
JP2012173525A5 true JP2012173525A5 (enExample) 2014-03-06
JP5656682B2 JP5656682B2 (ja) 2015-01-21

Family

ID=46652404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011035746A Expired - Fee Related JP5656682B2 (ja) 2011-02-22 2011-02-22 反射屈折光学系及びそれを有する撮像装置

Country Status (2)

Country Link
US (1) US8947774B2 (enExample)
JP (1) JP5656682B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5915489B2 (ja) * 2012-10-04 2016-05-11 ソニー株式会社 反射屈折型レンズ系および撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7017A (en) * 1850-01-15 Brick-pbess
US4346989A (en) * 1976-11-18 1982-08-31 Hewlett-Packard Company Surveying instrument
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
US5031976A (en) * 1990-09-24 1991-07-16 Kla Instruments, Corporation Catadioptric imaging system
US5999310A (en) * 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
US5717518A (en) * 1996-07-22 1998-02-10 Kla Instruments Corporation Broad spectrum ultraviolet catadioptric imaging system
US6483638B1 (en) * 1996-07-22 2002-11-19 Kla-Tencor Corporation Ultra-broadband UV microscope imaging system with wide range zoom capability
WO1999052004A1 (en) * 1998-04-07 1999-10-14 Nikon Corporation Projection exposure apparatus and method, and reflection refraction optical system
KR20010041257A (ko) 1998-12-25 2001-05-15 오노 시게오 반사굴절 결상 광학계 및 그 광학계를 구비한 투영 노광장치
US6862142B2 (en) * 2000-03-10 2005-03-01 Kla-Tencor Technologies Corporation Multi-detector microscopic inspection system
US7136234B2 (en) * 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US6842298B1 (en) 2000-09-12 2005-01-11 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US7136159B2 (en) * 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Excimer laser inspection system
US7646533B2 (en) * 2003-02-21 2010-01-12 Kla-Tencor Technologies Corporation Small ultra-high NA catadioptric objective
US8675276B2 (en) * 2003-02-21 2014-03-18 Kla-Tencor Corporation Catadioptric imaging system for broad band microscopy
US7672043B2 (en) * 2003-02-21 2010-03-02 Kla-Tencor Technologies Corporation Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
DE102005042005A1 (de) * 2004-12-23 2006-07-06 Carl Zeiss Smt Ag Hochaperturiges Objektiv mit obskurierter Pupille
TWI454731B (zh) * 2005-05-27 2014-10-01 Zeiss Carl Smt Gmbh 用於改進投影物鏡的成像性質之方法以及該投影物鏡
US7345825B2 (en) * 2005-06-30 2008-03-18 Kla-Tencor Technologies Corporation Beam delivery system for laser dark-field illumination in a catadioptric optical system
US8896917B2 (en) * 2008-06-17 2014-11-25 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces
JP5836686B2 (ja) * 2011-07-28 2015-12-24 キヤノン株式会社 反射屈折光学系及びそれを有する撮像装置

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