JP2011248122A5 - - Google Patents

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Publication number
JP2011248122A5
JP2011248122A5 JP2010121751A JP2010121751A JP2011248122A5 JP 2011248122 A5 JP2011248122 A5 JP 2011248122A5 JP 2010121751 A JP2010121751 A JP 2010121751A JP 2010121751 A JP2010121751 A JP 2010121751A JP 2011248122 A5 JP2011248122 A5 JP 2011248122A5
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JP
Japan
Prior art keywords
optical system
image
refractive power
catadioptric
max
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010121751A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011248122A (ja
JP5479224B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2010121751A external-priority patent/JP5479224B2/ja
Priority to JP2010121751A priority Critical patent/JP5479224B2/ja
Priority to EP11786698.8A priority patent/EP2577377A1/en
Priority to CN201180025349.5A priority patent/CN102906619B/zh
Priority to PCT/JP2011/062039 priority patent/WO2011148999A1/en
Priority to US13/581,663 priority patent/US9019633B2/en
Priority to KR1020127030187A priority patent/KR101387823B1/ko
Publication of JP2011248122A publication Critical patent/JP2011248122A/ja
Publication of JP2011248122A5 publication Critical patent/JP2011248122A5/ja
Publication of JP5479224B2 publication Critical patent/JP5479224B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010121751A 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置 Expired - Fee Related JP5479224B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置
US13/581,663 US9019633B2 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
CN201180025349.5A CN102906619B (zh) 2010-05-27 2011-05-19 反射折射系统和图像拾取装置
PCT/JP2011/062039 WO2011148999A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
EP11786698.8A EP2577377A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
KR1020127030187A KR101387823B1 (ko) 2010-05-27 2011-05-19 반사굴절 광학계 및 촬상 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置

Publications (3)

Publication Number Publication Date
JP2011248122A JP2011248122A (ja) 2011-12-08
JP2011248122A5 true JP2011248122A5 (enExample) 2013-07-04
JP5479224B2 JP5479224B2 (ja) 2014-04-23

Family

ID=45003985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010121751A Expired - Fee Related JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置

Country Status (6)

Country Link
US (1) US9019633B2 (enExample)
EP (1) EP2577377A1 (enExample)
JP (1) JP5479224B2 (enExample)
KR (1) KR101387823B1 (enExample)
CN (1) CN102906619B (enExample)
WO (1) WO2011148999A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101453309B1 (ko) * 2014-04-03 2014-10-22 조성구 카메라용 광학렌즈 시스템
US10520714B2 (en) * 2016-08-23 2019-12-31 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services Systems and methods for instant total internal reflection fluorescence/ structured illumination microscopy
WO2018066313A1 (ja) 2016-10-03 2018-04-12 株式会社ニコン 反射屈折光学系および光学装置
JP2019101181A (ja) * 2017-11-30 2019-06-24 キヤノン株式会社 撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
EP1059550A4 (en) * 1998-12-25 2003-03-19 Nikon Corp REFRACTION REFLECTION IMAGE FORMING SYSTEM AND PROJECTION EXPOSURE APPARATUS INCLUDING THE OPTICAL SYSTEM
JP2002082285A (ja) * 2000-09-07 2002-03-22 Nikon Corp 反射屈折光学系および該光学系を備えた露光装置
US6984044B2 (en) 2002-07-30 2006-01-10 Canon Kabushiki Kaisha Projection optical system, projection type image display apparatus, and image display system
JP2004061959A (ja) 2002-07-30 2004-02-26 Canon Inc 投射光学系、投射型画像表示装置および画像表示システム
JP2005115127A (ja) * 2003-10-09 2005-04-28 Nikon Corp 反射屈折投影光学系、露光装置及び露光方法
US7348575B2 (en) 2003-05-06 2008-03-25 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
KR101171131B1 (ko) * 2004-07-14 2012-08-07 칼 짜이스 에스엠티 게엠베하 반사굴절식 투영 대물렌즈
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
US8896917B2 (en) * 2008-06-17 2014-11-25 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

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