CN102906619B - 反射折射系统和图像拾取装置 - Google Patents

反射折射系统和图像拾取装置 Download PDF

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Publication number
CN102906619B
CN102906619B CN201180025349.5A CN201180025349A CN102906619B CN 102906619 B CN102906619 B CN 102906619B CN 201180025349 A CN201180025349 A CN 201180025349A CN 102906619 B CN102906619 B CN 102906619B
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CN
China
Prior art keywords
image
refractive power
optical
optical element
catadioptric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180025349.5A
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English (en)
Chinese (zh)
Other versions
CN102906619A (zh
Inventor
片芝悠二
梶山和彦
铃木雅之
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Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN102906619A publication Critical patent/CN102906619A/zh
Application granted granted Critical
Publication of CN102906619B publication Critical patent/CN102906619B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
CN201180025349.5A 2010-05-27 2011-05-19 反射折射系统和图像拾取装置 Expired - Fee Related CN102906619B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置
JP2010-121751 2010-05-27
PCT/JP2011/062039 WO2011148999A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus

Publications (2)

Publication Number Publication Date
CN102906619A CN102906619A (zh) 2013-01-30
CN102906619B true CN102906619B (zh) 2015-01-14

Family

ID=45003985

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180025349.5A Expired - Fee Related CN102906619B (zh) 2010-05-27 2011-05-19 反射折射系统和图像拾取装置

Country Status (6)

Country Link
US (1) US9019633B2 (enExample)
EP (1) EP2577377A1 (enExample)
JP (1) JP5479224B2 (enExample)
KR (1) KR101387823B1 (enExample)
CN (1) CN102906619B (enExample)
WO (1) WO2011148999A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101453309B1 (ko) * 2014-04-03 2014-10-22 조성구 카메라용 광학렌즈 시스템
US10520714B2 (en) * 2016-08-23 2019-12-31 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services Systems and methods for instant total internal reflection fluorescence/ structured illumination microscopy
JP6652198B2 (ja) 2016-10-03 2020-02-19 株式会社ニコン 反射屈折光学系および光学装置
JP2019101181A (ja) * 2017-11-30 2019-06-24 キヤノン株式会社 撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1387207A2 (en) * 2002-07-30 2004-02-04 Canon Kabushiki Kaisha Projection optical system, projection type image display apparatus, and image display system
JP2005115127A (ja) * 2003-10-09 2005-04-28 Nikon Corp 反射屈折投影光学系、露光装置及び露光方法
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
WO2009154731A2 (en) * 2008-06-17 2009-12-23 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
KR20010041257A (ko) * 1998-12-25 2001-05-15 오노 시게오 반사굴절 결상 광학계 및 그 광학계를 구비한 투영 노광장치
JP2002082285A (ja) * 2000-09-07 2002-03-22 Nikon Corp 反射屈折光学系および該光学系を備えた露光装置
US6984044B2 (en) 2002-07-30 2006-01-10 Canon Kabushiki Kaisha Projection optical system, projection type image display apparatus, and image display system
US7348575B2 (en) 2003-05-06 2008-03-25 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
KR101171131B1 (ko) * 2004-07-14 2012-08-07 칼 짜이스 에스엠티 게엠베하 반사굴절식 투영 대물렌즈

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1387207A2 (en) * 2002-07-30 2004-02-04 Canon Kabushiki Kaisha Projection optical system, projection type image display apparatus, and image display system
JP2005115127A (ja) * 2003-10-09 2005-04-28 Nikon Corp 反射屈折投影光学系、露光装置及び露光方法
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
WO2009154731A2 (en) * 2008-06-17 2009-12-23 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2002-82285A 2002.03.22 *
JP特开2005-115127A 2005.04.28 *

Also Published As

Publication number Publication date
EP2577377A1 (en) 2013-04-10
US9019633B2 (en) 2015-04-28
WO2011148999A1 (en) 2011-12-01
KR20130006696A (ko) 2013-01-17
JP2011248122A (ja) 2011-12-08
KR101387823B1 (ko) 2014-04-22
JP5479224B2 (ja) 2014-04-23
CN102906619A (zh) 2013-01-30
US20120320187A1 (en) 2012-12-20

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Granted publication date: 20150114

Termination date: 20210519