JP5479224B2 - 反射屈折光学系及びそれを有する撮像装置 - Google Patents

反射屈折光学系及びそれを有する撮像装置 Download PDF

Info

Publication number
JP5479224B2
JP5479224B2 JP2010121751A JP2010121751A JP5479224B2 JP 5479224 B2 JP5479224 B2 JP 5479224B2 JP 2010121751 A JP2010121751 A JP 2010121751A JP 2010121751 A JP2010121751 A JP 2010121751A JP 5479224 B2 JP5479224 B2 JP 5479224B2
Authority
JP
Japan
Prior art keywords
optical system
refractive power
image
catadioptric
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010121751A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011248122A (ja
JP2011248122A5 (enExample
Inventor
悠二 片芝
和彦 梶山
雅之 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2010121751A priority Critical patent/JP5479224B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to US13/581,663 priority patent/US9019633B2/en
Priority to KR1020127030187A priority patent/KR101387823B1/ko
Priority to PCT/JP2011/062039 priority patent/WO2011148999A1/en
Priority to EP11786698.8A priority patent/EP2577377A1/en
Priority to CN201180025349.5A priority patent/CN102906619B/zh
Publication of JP2011248122A publication Critical patent/JP2011248122A/ja
Publication of JP2011248122A5 publication Critical patent/JP2011248122A5/ja
Application granted granted Critical
Publication of JP5479224B2 publication Critical patent/JP5479224B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
JP2010121751A 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置 Expired - Fee Related JP5479224B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置
KR1020127030187A KR101387823B1 (ko) 2010-05-27 2011-05-19 반사굴절 광학계 및 촬상 장치
PCT/JP2011/062039 WO2011148999A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
EP11786698.8A EP2577377A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
US13/581,663 US9019633B2 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus
CN201180025349.5A CN102906619B (zh) 2010-05-27 2011-05-19 反射折射系统和图像拾取装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置

Publications (3)

Publication Number Publication Date
JP2011248122A JP2011248122A (ja) 2011-12-08
JP2011248122A5 JP2011248122A5 (enExample) 2013-07-04
JP5479224B2 true JP5479224B2 (ja) 2014-04-23

Family

ID=45003985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010121751A Expired - Fee Related JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置

Country Status (6)

Country Link
US (1) US9019633B2 (enExample)
EP (1) EP2577377A1 (enExample)
JP (1) JP5479224B2 (enExample)
KR (1) KR101387823B1 (enExample)
CN (1) CN102906619B (enExample)
WO (1) WO2011148999A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101453309B1 (ko) 2014-04-03 2014-10-22 조성구 카메라용 광학렌즈 시스템
CN109154715A (zh) * 2016-08-23 2019-01-04 美利坚合众国,由健康及人类服务部部长代表 用于即时内部反射荧光/结构化照明显微术的系统和方法
WO2018066313A1 (ja) 2016-10-03 2018-04-12 株式会社ニコン 反射屈折光学系および光学装置
JP2019101181A (ja) * 2017-11-30 2019-06-24 キヤノン株式会社 撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
KR20010041257A (ko) * 1998-12-25 2001-05-15 오노 시게오 반사굴절 결상 광학계 및 그 광학계를 구비한 투영 노광장치
JP2002082285A (ja) * 2000-09-07 2002-03-22 Nikon Corp 反射屈折光学系および該光学系を備えた露光装置
JP2004061959A (ja) 2002-07-30 2004-02-26 Canon Inc 投射光学系、投射型画像表示装置および画像表示システム
US6984044B2 (en) 2002-07-30 2006-01-10 Canon Kabushiki Kaisha Projection optical system, projection type image display apparatus, and image display system
US7348575B2 (en) 2003-05-06 2008-03-25 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
JP2005115127A (ja) * 2003-10-09 2005-04-28 Nikon Corp 反射屈折投影光学系、露光装置及び露光方法
KR101171131B1 (ko) * 2004-07-14 2012-08-07 칼 짜이스 에스엠티 게엠베하 반사굴절식 투영 대물렌즈
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
EP2294471A4 (en) * 2008-06-17 2014-01-22 Kla Tencor Corp EXTERNAL BEAM DELIVERY SYSTEM USING A CATADIOPTRIC OBJECTIVE WITH ASPHEREIC SURFACES

Also Published As

Publication number Publication date
US9019633B2 (en) 2015-04-28
CN102906619A (zh) 2013-01-30
CN102906619B (zh) 2015-01-14
EP2577377A1 (en) 2013-04-10
WO2011148999A1 (en) 2011-12-01
KR20130006696A (ko) 2013-01-17
JP2011248122A (ja) 2011-12-08
US20120320187A1 (en) 2012-12-20
KR101387823B1 (ko) 2014-04-22

Similar Documents

Publication Publication Date Title
JP5675892B2 (ja) 高い開口数を有する反射屈折光学系
JP5479206B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP5479224B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP5836686B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP2003161886A (ja) 対物レンズ及びそれを用いた光学装置
JP5868063B2 (ja) 撮像装置
JP2013061530A (ja) 反射屈折光学系及びそれを有する撮像装置
JP5656682B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP2015036706A (ja) 撮像装置
JP2015036706A5 (enExample)
JP2013015718A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2015184544A (ja) 反射屈折光学系及びそれを有する撮像装置
JP5627476B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP2015176134A (ja) 撮像装置
JP2014081511A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2013015717A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2017207772A (ja) 液浸顕微鏡対物レンズ及びそれを用いた顕微鏡
JP2008026226A (ja) 表面検査装置
JP3365026B2 (ja) 顕微鏡用拡大レンズ
JP2014056172A (ja) 対物光学装置および撮像装置
JP2015118215A (ja) 光学装置および撮像装置
JP2012163747A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2019191271A (ja) 液浸系の顕微鏡対物レンズ
JP2012150245A5 (enExample)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130520

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130520

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140114

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140212

R151 Written notification of patent or utility model registration

Ref document number: 5479224

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: R3D03

LAPS Cancellation because of no payment of annual fees