JP5836686B2 - 反射屈折光学系及びそれを有する撮像装置 - Google Patents

反射屈折光学系及びそれを有する撮像装置 Download PDF

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Publication number
JP5836686B2
JP5836686B2 JP2011165389A JP2011165389A JP5836686B2 JP 5836686 B2 JP5836686 B2 JP 5836686B2 JP 2011165389 A JP2011165389 A JP 2011165389A JP 2011165389 A JP2011165389 A JP 2011165389A JP 5836686 B2 JP5836686 B2 JP 5836686B2
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JP
Japan
Prior art keywords
optical system
imaging
catadioptric
image
aperture stop
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011165389A
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English (en)
Japanese (ja)
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JP2013029654A5 (enExample
JP2013029654A (ja
Inventor
功児 前澤
功児 前澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011165389A priority Critical patent/JP5836686B2/ja
Priority to US13/558,522 priority patent/US8810711B2/en
Publication of JP2013029654A publication Critical patent/JP2013029654A/ja
Publication of JP2013029654A5 publication Critical patent/JP2013029654A5/ja
Application granted granted Critical
Publication of JP5836686B2 publication Critical patent/JP5836686B2/ja
Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/04—Objectives involving mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/086—Condensers for transillumination only

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
JP2011165389A 2011-07-28 2011-07-28 反射屈折光学系及びそれを有する撮像装置 Expired - Fee Related JP5836686B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011165389A JP5836686B2 (ja) 2011-07-28 2011-07-28 反射屈折光学系及びそれを有する撮像装置
US13/558,522 US8810711B2 (en) 2011-07-28 2012-07-26 Catadioptric optical system and image pickup apparatus having the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011165389A JP5836686B2 (ja) 2011-07-28 2011-07-28 反射屈折光学系及びそれを有する撮像装置

Publications (3)

Publication Number Publication Date
JP2013029654A JP2013029654A (ja) 2013-02-07
JP2013029654A5 JP2013029654A5 (enExample) 2014-09-11
JP5836686B2 true JP5836686B2 (ja) 2015-12-24

Family

ID=47596944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011165389A Expired - Fee Related JP5836686B2 (ja) 2011-07-28 2011-07-28 反射屈折光学系及びそれを有する撮像装置

Country Status (2)

Country Link
US (1) US8810711B2 (enExample)
JP (1) JP5836686B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5656682B2 (ja) * 2011-02-22 2015-01-21 キヤノン株式会社 反射屈折光学系及びそれを有する撮像装置
WO2016047383A1 (ja) * 2014-09-26 2016-03-31 株式会社日立国際電気 固体撮像装置及び撮像方法
JP2019101181A (ja) * 2017-11-30 2019-06-24 キヤノン株式会社 撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备
JP7379112B2 (ja) * 2019-11-21 2023-11-14 キヤノン株式会社 光学系及びそれを備える撮像装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
DE19639586A1 (de) * 1996-09-26 1998-04-02 Zeiss Carl Fa Katadioptrisches Mikrolithographie-Reduktionsobjektiv
US6631036B2 (en) * 1996-09-26 2003-10-07 Carl-Zeiss-Stiftung Catadioptric objective
KR20010041257A (ko) * 1998-12-25 2001-05-15 오노 시게오 반사굴절 결상 광학계 및 그 광학계를 구비한 투영 노광장치
JP2003015046A (ja) * 2001-06-28 2003-01-15 Nikon Corp 液浸系顕微鏡対物レンズ
JP4066079B2 (ja) * 2001-11-26 2008-03-26 株式会社ニコン 対物レンズ及びそれを用いた光学装置
US7180658B2 (en) * 2003-02-21 2007-02-20 Kla-Tencor Technologies Corporation High performance catadioptric imaging system
US8675276B2 (en) * 2003-02-21 2014-03-18 Kla-Tencor Corporation Catadioptric imaging system for broad band microscopy
US7672043B2 (en) * 2003-02-21 2010-03-02 Kla-Tencor Technologies Corporation Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
CN1922528A (zh) * 2004-02-18 2007-02-28 康宁股份有限公司 用于具有深紫外光的高数值孔径成象的反折射成象系统
JP2007047228A (ja) * 2005-08-05 2007-02-22 Olympus Corp 結像光学装置、及び光学ユニット
JP2008185965A (ja) * 2007-01-31 2008-08-14 Olympus Corp 顕微鏡対物レンズ
WO2009046137A1 (en) * 2007-10-02 2009-04-09 Kla-Tencor Corporation Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths

Also Published As

Publication number Publication date
US8810711B2 (en) 2014-08-19
JP2013029654A (ja) 2013-02-07
US20130027603A1 (en) 2013-01-31

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