JP2011174901A - サーボ型加速度計 - Google Patents
サーボ型加速度計 Download PDFInfo
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- JP2011174901A JP2011174901A JP2010041199A JP2010041199A JP2011174901A JP 2011174901 A JP2011174901 A JP 2011174901A JP 2010041199 A JP2010041199 A JP 2010041199A JP 2010041199 A JP2010041199 A JP 2010041199A JP 2011174901 A JP2011174901 A JP 2011174901A
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- 230000005291 magnetic effect Effects 0.000 claims abstract description 121
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 40
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 claims description 22
- 230000001133 acceleration Effects 0.000 claims description 15
- 229910052742 iron Inorganic materials 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 238000007747 plating Methods 0.000 claims description 5
- 230000007935 neutral effect Effects 0.000 claims description 4
- 230000002787 reinforcement Effects 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 239000003302 ferromagnetic material Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 6
- 230000005294 ferromagnetic effect Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 description 17
- 229910001374 Invar Inorganic materials 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Micromachines (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
【解決手段】磁気ヨーク11,12の内側に磁気ヨーク11,12のキュリー温度よりもキュリー温度が高い強磁性体からなるつぼ形状の磁気補強体31,32を設けて、磁気補強体31,32の開口部の内周面31a,32aをポールピーストップ51,52の外周面51a,52aと対向させ、磁気補強体31,32の開口部の内周面31a,32aとポールピーストップ51,52の外周面51a,52aとの間にトルカコイル61,62を位置させる。磁気ヨーク11,12の内側に設けられ、独立した磁気回路を構成する磁気補強体31,32のキュリー温度は、磁気ヨーク11,12のキュリー温度よりも高いため、高温域において従来よりも加速度の計測精度が高くなる。
【選択図】図1
Description
特許文献1のようにカップ形状の磁気ヨーク91,92の外側底面に、磁気ヨーク91,92よりも高い飽和磁束密度を有する磁気補強板97,98を取り付けた場合には、図9の領域Rにおいて磁界飽和が生じやすくインバーのキュリー温度(約210℃)に近い温度(この例では180℃前後以上)になると、図4に実線で示すように感度変化率が大きく上昇する。図4の破線は同一の条件の下で磁気飽和が生じないとした場合の温度変化による感度温度特性を示す。
11a,12a 閉塞板
111,121 本体部
113,123 ピックオフリング
23 振子
31,32 磁気補強体
31a,32a 内周面
41,42 磁石
51,52 ポールピーストップ
51a,52a 外周面
61,62 トルカコイル
Claims (4)
- 中立点にある振子の揺動した位置を検出し、その振子の揺動に基づき電磁的作用によりその振子を中立点に戻し、その電磁的作用に要した電流量により加速度を検出するサーボ型加速度計において、
一端側が開放され、他端側が閉塞板で閉塞されたカップ形状の2個の磁気ヨークと、
上記2個の磁気ヨークの一端側で挟まれ、揺動可能な振子を有する振子部と、
各上記磁気ヨークの内側にそれぞれ配置され、上記磁気ヨークのキュリー温度よりもキュリー温度が高い強磁性体からなるつぼ形状の磁気補強体と、
上記磁気補強体の底面に配置された磁石と、
上記磁石の上に配置されたポールピーストップと、
上記振子に取り付けられたトルカコイルと、を含み、
上記磁気補強体の開口部の内周面は、上記ポールピーストップの外周面と対向しており、上記磁気補強体の開口部の内周面と上記ポールピーストップの外周面との間に上記トルカコイルが位置している、
ことを特徴とするサーボ型加速度計。 - 請求項1に記載のサーボ型加速度計において、
上記磁気ヨークは、上記磁気補強体よりも熱膨張率が低い材料から成り、
上記磁気補強体は、その外側底面の中央部で上記磁気ヨークに溶接されている、
ことを特徴とするサーボ型加速度計。 - 請求項1又は2に記載のサーボ型加速度計において、
上記磁気ヨークは、上記一端側を含む中空円板形状であるピックオフリングと、上記他端側を含む本体部とが一体形成されたものである、
ことを特徴とするサーボ型加速度計。 - 請求項1に記載のサーボ型加速度計において、
上記磁気補強体は、上記磁気ヨークの内側に施された鉄めっきである、
ことを特徴とするサーボ型加速度計。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010041199A JP5530219B2 (ja) | 2010-02-26 | 2010-02-26 | サーボ型加速度計 |
US13/013,614 US8459113B2 (en) | 2010-02-26 | 2011-01-25 | Magnetically reinforced servo accelerometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010041199A JP5530219B2 (ja) | 2010-02-26 | 2010-02-26 | サーボ型加速度計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011174901A true JP2011174901A (ja) | 2011-09-08 |
JP5530219B2 JP5530219B2 (ja) | 2014-06-25 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2010041199A Expired - Fee Related JP5530219B2 (ja) | 2010-02-26 | 2010-02-26 | サーボ型加速度計 |
Country Status (2)
Country | Link |
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US (1) | US8459113B2 (ja) |
JP (1) | JP5530219B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015004539A (ja) * | 2013-06-19 | 2015-01-08 | 株式会社ミツトヨ | 高温対応型検出器 |
EP3865881A1 (en) * | 2020-02-11 | 2021-08-18 | Honeywell International Inc. | Multilayer excitation ring |
US11521772B2 (en) | 2020-02-11 | 2022-12-06 | Honeywell International Inc. | Multilayer magnetic circuit assembly |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL215656A0 (en) * | 2011-10-10 | 2011-11-30 | Israel Aerospace Ind Ltd | Accelerometer |
RU2528119C2 (ru) * | 2012-12-26 | 2014-09-10 | Федеральное государственное унитарное предприятие "Научно-производственный центр автоматики и приборостроения имени академика Н.А. Пилюгина" (ФГУП "НПЦАП") | Термоинвариантный измеритель линейного ускорения |
RU2548377C1 (ru) * | 2013-11-25 | 2015-04-20 | Федеральное государственное унитарное предприятие "Научно-производственный центр автоматики и приборостроения имени академика Н.А. Пилюгина" (ФГУП "НПЦАП") | Безобогревной термоинвариантный электромеханический поплавковый измеритель угловой скорости |
CN109085383A (zh) * | 2018-09-19 | 2018-12-25 | 中国船舶重工集团公司第七0七研究所 | 一种新型摆式加速度计 |
US20240118306A1 (en) * | 2022-10-05 | 2024-04-11 | Honeywell International Inc. | Accelerometer including protective housing |
Citations (11)
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JPS6117959A (ja) * | 1984-07-05 | 1986-01-25 | Japan Aviation Electronics Ind Ltd | 加速度計 |
JPS627101A (ja) * | 1985-07-03 | 1987-01-14 | Hitachi Metals Ltd | 複合磁心を用いたコモンモ−ドチヨ−クコイル |
JPS6412273A (en) * | 1987-07-06 | 1989-01-17 | Japan Aviation Electron | Magnet construction body in accelerometer |
JPH0681084A (ja) * | 1990-12-18 | 1994-03-22 | Nippon Steel Corp | 電子管用の鋼板材料 |
JPH08292208A (ja) * | 1995-04-21 | 1996-11-05 | Japan Aviation Electron Ind Ltd | サーボ加速度計 |
JP2001167935A (ja) * | 1999-12-08 | 2001-06-22 | Matsushita Electric Ind Co Ltd | チョークコイル |
JP2001284219A (ja) * | 2000-03-30 | 2001-10-12 | Toshiba Corp | 荷電粒子ビーム装置及び荷電粒子ビーム装置用試料室 |
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JP2004031274A (ja) * | 2002-06-28 | 2004-01-29 | Matsushita Electric Works Ltd | 感温スイッチ |
JP2005206944A (ja) * | 2003-12-26 | 2005-08-04 | Jfe Steel Kk | フェライト系Cr含有鋼材及びその製造方法 |
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US4983112A (en) * | 1988-07-30 | 1991-01-08 | Kabushiki Kaisha Kobe Seiko Sho | Interlocking device for hot isostatic pressurizing equipment |
JPH03245675A (ja) | 1990-02-23 | 1991-11-01 | Matsushita Electric Ind Co Ltd | 画像処理装置 |
JP3245675B2 (ja) | 1998-03-30 | 2002-01-15 | 日本航空電子工業株式会社 | サーボ加速度計の構造 |
TW510807B (en) * | 1999-08-31 | 2002-11-21 | Kobe Steel Ltd | Pressure processing device |
CA2596304C (en) * | 2006-08-16 | 2011-03-29 | Japan Aviation Electronics Industry Limited | Servo accelerometer |
JP2010175453A (ja) * | 2009-01-30 | 2010-08-12 | Japan Aviation Electronics Industry Ltd | サーボ加速度計 |
-
2010
- 2010-02-26 JP JP2010041199A patent/JP5530219B2/ja not_active Expired - Fee Related
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2011
- 2011-01-25 US US13/013,614 patent/US8459113B2/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6117959A (ja) * | 1984-07-05 | 1986-01-25 | Japan Aviation Electronics Ind Ltd | 加速度計 |
JPS627101A (ja) * | 1985-07-03 | 1987-01-14 | Hitachi Metals Ltd | 複合磁心を用いたコモンモ−ドチヨ−クコイル |
JPS6412273A (en) * | 1987-07-06 | 1989-01-17 | Japan Aviation Electron | Magnet construction body in accelerometer |
JPH0681084A (ja) * | 1990-12-18 | 1994-03-22 | Nippon Steel Corp | 電子管用の鋼板材料 |
JPH08292208A (ja) * | 1995-04-21 | 1996-11-05 | Japan Aviation Electron Ind Ltd | サーボ加速度計 |
JP2001167935A (ja) * | 1999-12-08 | 2001-06-22 | Matsushita Electric Ind Co Ltd | チョークコイル |
JP2001284219A (ja) * | 2000-03-30 | 2001-10-12 | Toshiba Corp | 荷電粒子ビーム装置及び荷電粒子ビーム装置用試料室 |
JP2002168878A (ja) * | 2000-11-29 | 2002-06-14 | Japan Aviation Electronics Industry Ltd | サーボ形加速度計 |
JP2003290031A (ja) * | 2002-04-05 | 2003-10-14 | Dia Alum Kk | 電磁誘導加熱調理器具 |
JP2004031274A (ja) * | 2002-06-28 | 2004-01-29 | Matsushita Electric Works Ltd | 感温スイッチ |
JP2005206944A (ja) * | 2003-12-26 | 2005-08-04 | Jfe Steel Kk | フェライト系Cr含有鋼材及びその製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015004539A (ja) * | 2013-06-19 | 2015-01-08 | 株式会社ミツトヨ | 高温対応型検出器 |
EP3865881A1 (en) * | 2020-02-11 | 2021-08-18 | Honeywell International Inc. | Multilayer excitation ring |
US11169175B2 (en) | 2020-02-11 | 2021-11-09 | Honeywell International Inc. | Multilayer excitation ring |
US11521772B2 (en) | 2020-02-11 | 2022-12-06 | Honeywell International Inc. | Multilayer magnetic circuit assembly |
Also Published As
Publication number | Publication date |
---|---|
US8459113B2 (en) | 2013-06-11 |
JP5530219B2 (ja) | 2014-06-25 |
US20110209545A1 (en) | 2011-09-01 |
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