JP2011148795A - 有機銀錯体化合物、これの製造方法及びこれを用いた薄膜形成方法 - Google Patents
有機銀錯体化合物、これの製造方法及びこれを用いた薄膜形成方法 Download PDFInfo
- Publication number
- JP2011148795A JP2011148795A JP2011006755A JP2011006755A JP2011148795A JP 2011148795 A JP2011148795 A JP 2011148795A JP 2011006755 A JP2011006755 A JP 2011006755A JP 2011006755 A JP2011006755 A JP 2011006755A JP 2011148795 A JP2011148795 A JP 2011148795A
- Authority
- JP
- Japan
- Prior art keywords
- silver
- complex compound
- carbamate
- ammonium
- silver complex
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims abstract description 227
- 229910052709 silver Inorganic materials 0.000 title claims abstract description 183
- 239000004332 silver Substances 0.000 title claims abstract description 183
- 150000001875 compounds Chemical class 0.000 title claims abstract description 138
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 title claims description 22
- 239000010409 thin film Substances 0.000 title claims description 15
- -1 ammonium carbamate compound Chemical class 0.000 claims abstract description 60
- JMPXSWBXXUOKFP-UHFFFAOYSA-N 2-ethylhexylazanium;n-(2-ethylhexyl)carbamate Chemical compound CCCCC(CC)C[NH3+].CCCCC(CC)CNC([O-])=O JMPXSWBXXUOKFP-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229940100890 silver compound Drugs 0.000 claims abstract description 20
- 150000003379 silver compounds Chemical class 0.000 claims abstract description 20
- KXDHJXZQYSOELW-UHFFFAOYSA-N carbonic acid monoamide Natural products NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 claims abstract description 19
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical group [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims abstract description 7
- ZMZDMBWJUHKJPS-UHFFFAOYSA-M Thiocyanate anion Chemical group [S-]C#N ZMZDMBWJUHKJPS-UHFFFAOYSA-M 0.000 claims abstract description 5
- 150000007942 carboxylates Chemical group 0.000 claims abstract description 5
- ZMZDMBWJUHKJPS-UHFFFAOYSA-N hydrogen thiocyanate Chemical group SC#N ZMZDMBWJUHKJPS-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910002651 NO3 Inorganic materials 0.000 claims abstract description 4
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical group [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims abstract description 4
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical group [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 claims abstract description 4
- 229910019142 PO4 Inorganic materials 0.000 claims abstract description 4
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical group [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims abstract description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 4
- IBAHLNWTOIHLKE-UHFFFAOYSA-N cyano cyanate Chemical group N#COC#N IBAHLNWTOIHLKE-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 4
- 150000002367 halogens Chemical group 0.000 claims abstract description 4
- 239000001301 oxygen Substances 0.000 claims abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 4
- VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 claims abstract description 4
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical group OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims abstract description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical group [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims abstract description 4
- 239000010452 phosphate Chemical group 0.000 claims abstract description 4
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 4
- 239000011593 sulfur Chemical group 0.000 claims abstract description 4
- NNHMJLWANZZIRG-UHFFFAOYSA-N 2-methoxyethanamine 2-methoxyethyl carbamate Chemical compound COCCN.COCCOC(N)=O NNHMJLWANZZIRG-UHFFFAOYSA-N 0.000 claims abstract description 3
- PMPXTVNEQKJCMX-UHFFFAOYSA-N 3-aminopropanenitrile 2-cyanoethyl carbamate Chemical compound NCCC#N.NC(=O)OCCC#N PMPXTVNEQKJCMX-UHFFFAOYSA-N 0.000 claims abstract description 3
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 claims description 144
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 132
- 229910001923 silver oxide Inorganic materials 0.000 claims description 72
- 239000002904 solvent Substances 0.000 claims description 62
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 51
- 239000000126 substance Substances 0.000 claims description 33
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 21
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 19
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 18
- ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 claims description 16
- LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 claims description 16
- 229910001958 silver carbonate Inorganic materials 0.000 claims description 16
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 claims description 16
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 15
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 15
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 15
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims description 15
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 15
- BVCZEBOGSOYJJT-UHFFFAOYSA-N ammonium carbamate Chemical class [NH4+].NC([O-])=O BVCZEBOGSOYJJT-UHFFFAOYSA-N 0.000 claims description 15
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 15
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 14
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims description 14
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 13
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 229910044991 metal oxide Inorganic materials 0.000 claims description 11
- 150000004706 metal oxides Chemical class 0.000 claims description 11
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 10
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 10
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 claims description 10
- 239000010408 film Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 10
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 9
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 8
- 150000002431 hydrogen Chemical class 0.000 claims description 8
- 229910001961 silver nitrate Inorganic materials 0.000 claims description 8
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 claims description 8
- 125000004432 carbon atom Chemical group C* 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 238000007639 printing Methods 0.000 claims description 7
- KXDHJXZQYSOELW-UHFFFAOYSA-M Carbamate Chemical compound NC([O-])=O KXDHJXZQYSOELW-UHFFFAOYSA-M 0.000 claims description 6
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 claims description 6
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 claims description 6
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 6
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 6
- 125000001931 aliphatic group Chemical group 0.000 claims description 6
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 6
- YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 claims description 6
- 229910000367 silver sulfate Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 claims description 6
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 claims description 5
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 claims description 5
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims description 5
- ZSIQJIWKELUFRJ-UHFFFAOYSA-N azepane Chemical compound C1CCCNCC1 ZSIQJIWKELUFRJ-UHFFFAOYSA-N 0.000 claims description 5
- 235000011187 glycerol Nutrition 0.000 claims description 5
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 claims description 5
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 5
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 claims description 5
- 229940098221 silver cyanide Drugs 0.000 claims description 5
- 238000011282 treatment Methods 0.000 claims description 5
- 125000002723 alicyclic group Chemical group 0.000 claims description 4
- DDWQBJYWGXHLCN-UHFFFAOYSA-N butan-1-amine;butylcarbamic acid Chemical compound CCCC[NH3+].CCCCNC([O-])=O DDWQBJYWGXHLCN-UHFFFAOYSA-N 0.000 claims description 4
- ININOGTZHQOEKR-UHFFFAOYSA-N carbamic acid;morpholine Chemical compound NC(O)=O.C1COCCN1 ININOGTZHQOEKR-UHFFFAOYSA-N 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 4
- 150000002391 heterocyclic compounds Chemical group 0.000 claims description 4
- 150000002576 ketones Chemical class 0.000 claims description 4
- WSQPMYJWTYRPQR-UHFFFAOYSA-N propan-2-amine;propan-2-yl carbamate Chemical compound CC(C)N.CC(C)OC(N)=O WSQPMYJWTYRPQR-UHFFFAOYSA-N 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 125000000547 substituted alkyl group Chemical group 0.000 claims description 4
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 claims description 4
- XBXCNNQPRYLIDE-UHFFFAOYSA-N tert-butylcarbamic acid Chemical compound CC(C)(C)NC(O)=O XBXCNNQPRYLIDE-UHFFFAOYSA-N 0.000 claims description 4
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 claims description 3
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 claims description 3
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- 125000004802 cyanophenyl group Chemical group 0.000 claims description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 3
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 3
- 125000001559 cyclopropyl group Chemical group [H]C1([H])C([H])([H])C1([H])* 0.000 claims description 3
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 238000007646 gravure printing Methods 0.000 claims description 3
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 3
- 238000007641 inkjet printing Methods 0.000 claims description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 3
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- 238000007645 offset printing Methods 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 150000003141 primary amines Chemical class 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- AOHJOMMDDJHIJH-UHFFFAOYSA-N propylenediamine Chemical compound CC(N)CN AOHJOMMDDJHIJH-UHFFFAOYSA-N 0.000 claims description 3
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- IUPKRHGZXTZBKD-UHFFFAOYSA-N 2-methylpropan-1-amine 2-methylpropyl carbamate Chemical compound CC(C)CN.CC(C)COC(N)=O IUPKRHGZXTZBKD-UHFFFAOYSA-N 0.000 claims description 2
- RBWNDBNSJFCLBZ-UHFFFAOYSA-N 7-methyl-5,6,7,8-tetrahydro-3h-[1]benzothiolo[2,3-d]pyrimidine-4-thione Chemical compound N1=CNC(=S)C2=C1SC1=C2CCC(C)C1 RBWNDBNSJFCLBZ-UHFFFAOYSA-N 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- QPFYXYFORQJZEC-FOCLMDBBSA-N Phenazopyridine Chemical compound NC1=NC(N)=CC=C1\N=N\C1=CC=CC=C1 QPFYXYFORQJZEC-FOCLMDBBSA-N 0.000 claims description 2
- 229920002873 Polyethylenimine Polymers 0.000 claims description 2
- KPFRBTZTDIDEQU-UHFFFAOYSA-N azepane;carbamic acid Chemical compound NC(O)=O.C1CCCNCC1 KPFRBTZTDIDEQU-UHFFFAOYSA-N 0.000 claims description 2
- CGABNMAUJREYGO-UHFFFAOYSA-N benzylcarbamic acid;phenylmethanamine Chemical compound NCC1=CC=CC=C1.OC(=O)NCC1=CC=CC=C1 CGABNMAUJREYGO-UHFFFAOYSA-N 0.000 claims description 2
- 125000002057 carboxymethyl group Chemical group [H]OC(=O)C([H])([H])[*] 0.000 claims description 2
- LXSFGVACVWCFRS-UHFFFAOYSA-N dibutylazanium;n,n-dibutylcarbamate Chemical compound CCCC[NH2+]CCCC.CCCCN(C([O-])=O)CCCC LXSFGVACVWCFRS-UHFFFAOYSA-N 0.000 claims description 2
- HKUFIYBZNQSHQS-UHFFFAOYSA-O dioctadecylazanium Chemical compound CCCCCCCCCCCCCCCCCC[NH2+]CCCCCCCCCCCCCCCCCC HKUFIYBZNQSHQS-UHFFFAOYSA-O 0.000 claims description 2
- 238000003618 dip coating Methods 0.000 claims description 2
- COIHLIVFSZCCQI-UHFFFAOYSA-N ethanamine;ethyl carbamate Chemical compound CCN.CCOC(N)=O COIHLIVFSZCCQI-UHFFFAOYSA-N 0.000 claims description 2
- CTEPBUFYCZLELZ-UHFFFAOYSA-N ethyl n-hexylcarbamate Chemical compound CCCCCCNC(=O)OCC CTEPBUFYCZLELZ-UHFFFAOYSA-N 0.000 claims description 2
- 238000001459 lithography Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- BTDGNUHTDOIMKX-UHFFFAOYSA-N octadecan-1-amine octadecyl carbamate Chemical compound CCCCCCCCCCCCCCCCCCN.CCCCCCCCCCCCCCCCCCOC(N)=O BTDGNUHTDOIMKX-UHFFFAOYSA-N 0.000 claims description 2
- 229920000083 poly(allylamine) Polymers 0.000 claims description 2
- 229940070891 pyridium Drugs 0.000 claims description 2
- CQLFBEKRDQMJLZ-UHFFFAOYSA-M silver acetate Chemical compound [Ag+].CC([O-])=O CQLFBEKRDQMJLZ-UHFFFAOYSA-M 0.000 claims description 2
- 229940071536 silver acetate Drugs 0.000 claims description 2
- KKKDGYXNGYJJRX-UHFFFAOYSA-M silver nitrite Chemical compound [Ag+].[O-]N=O KKKDGYXNGYJJRX-UHFFFAOYSA-M 0.000 claims description 2
- XNGYKPINNDWGGF-UHFFFAOYSA-L silver oxalate Chemical compound [Ag+].[Ag+].[O-]C(=O)C([O-])=O XNGYKPINNDWGGF-UHFFFAOYSA-L 0.000 claims description 2
- FJOLTQXXWSRAIX-UHFFFAOYSA-K silver phosphate Chemical compound [Ag+].[Ag+].[Ag+].[O-]P([O-])([O-])=O FJOLTQXXWSRAIX-UHFFFAOYSA-K 0.000 claims description 2
- 229940019931 silver phosphate Drugs 0.000 claims description 2
- 229910000161 silver phosphate Inorganic materials 0.000 claims description 2
- LMEWRZSPCQHBOB-UHFFFAOYSA-M silver;2-hydroxypropanoate Chemical compound [Ag+].CC(O)C([O-])=O LMEWRZSPCQHBOB-UHFFFAOYSA-M 0.000 claims description 2
- DOQQTKLDEQSKIE-UHFFFAOYSA-N silver;isocyanate Chemical compound [Ag+].[N-]=C=O DOQQTKLDEQSKIE-UHFFFAOYSA-N 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical group CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 claims 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical group [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims 2
- 210000001217 buttock Anatomy 0.000 claims 2
- 150000008282 halocarbons Chemical class 0.000 claims 2
- 125000001424 substituent group Chemical group 0.000 claims 2
- IGDXYWDETCLQJX-UHFFFAOYSA-N 3-triethoxysilylpropan-1-amine 3-triethoxysilylpropyl carbamate Chemical compound CCO[Si](OCC)(OCC)CCCN.CCO[Si](OCC)(OCC)CCCOC(N)=O IGDXYWDETCLQJX-UHFFFAOYSA-N 0.000 claims 1
- 239000003570 air Substances 0.000 claims 1
- 125000005210 alkyl ammonium group Chemical group 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 238000013532 laser treatment Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229920000728 polyester Polymers 0.000 claims 1
- 229910001494 silver tetrafluoroborate Inorganic materials 0.000 claims 1
- RHUVFRWZKMEWNS-UHFFFAOYSA-M silver thiocyanate Chemical compound [Ag+].[S-]C#N RHUVFRWZKMEWNS-UHFFFAOYSA-M 0.000 claims 1
- 239000013638 trimer Substances 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 126
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical group [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 abstract description 4
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical group C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 136
- 239000007787 solid Substances 0.000 description 55
- 238000000354 decomposition reaction Methods 0.000 description 48
- 239000012528 membrane Substances 0.000 description 46
- 238000002076 thermal analysis method Methods 0.000 description 46
- 239000000725 suspension Substances 0.000 description 45
- 239000002002 slurry Substances 0.000 description 44
- 239000007788 liquid Substances 0.000 description 28
- 230000008859 change Effects 0.000 description 23
- WZSPUSBNORHMAV-UHFFFAOYSA-N 2-ethylhexylazanium carbonate Chemical compound C([O-])([O-])=O.C(C)C(C[NH3+])CCCC.C(C)C(C[NH3+])CCCC WZSPUSBNORHMAV-UHFFFAOYSA-N 0.000 description 22
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 17
- 239000001099 ammonium carbonate Substances 0.000 description 17
- 229940093499 ethyl acetate Drugs 0.000 description 14
- 235000019439 ethyl acetate Nutrition 0.000 description 14
- 238000002844 melting Methods 0.000 description 14
- 230000008018 melting Effects 0.000 description 14
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 13
- 235000012501 ammonium carbonate Nutrition 0.000 description 12
- 238000005979 thermal decomposition reaction Methods 0.000 description 9
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 8
- 239000001569 carbon dioxide Substances 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 238000001914 filtration Methods 0.000 description 6
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 6
- 238000000059 patterning Methods 0.000 description 6
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 description 5
- 235000012538 ammonium bicarbonate Nutrition 0.000 description 5
- 238000001460 carbon-13 nuclear magnetic resonance spectrum Methods 0.000 description 5
- 238000002329 infrared spectrum Methods 0.000 description 5
- LRNTWECMFPAAPZ-UHFFFAOYSA-N propan-2-ylazanium carbonate Chemical compound C([O-])([O-])=O.C(C)(C)[NH3+].C(C)(C)[NH3+] LRNTWECMFPAAPZ-UHFFFAOYSA-N 0.000 description 5
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 5
- YADYOAQEEXTAKP-UHFFFAOYSA-N 2-aminoethylazanium carbonate Chemical compound C([O-])([O-])=O.NCC[NH3+].NCC[NH3+] YADYOAQEEXTAKP-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- RGEULEMUWRTZMP-UHFFFAOYSA-N hydrogen carbonate;2-methoxyethylazanium Chemical compound OC([O-])=O.COCC[NH3+] RGEULEMUWRTZMP-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000001757 thermogravimetry curve Methods 0.000 description 4
- LFTWYPLGYKQPMV-UHFFFAOYSA-N 2-ethylhexylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CCCCC(CC)C[NH3+] LFTWYPLGYKQPMV-UHFFFAOYSA-N 0.000 description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 3
- YCADFRFBAHDVOS-UHFFFAOYSA-N hydrogen carbonate;propan-2-ylazanium Chemical compound CC(C)[NH3+].OC([O-])=O YCADFRFBAHDVOS-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- BHRGYSLLXICIEL-UHFFFAOYSA-N 2-cyanoethylazanium;n-(2-cyanoethyl)carbamate Chemical compound [NH3+]CCC#N.[O-]C(=O)NCCC#N BHRGYSLLXICIEL-UHFFFAOYSA-N 0.000 description 2
- XNSYDUPSPONZCL-UHFFFAOYSA-N 2-hydroxyethylazanium;n-(2-hydroxyethyl)carbamate Chemical compound [NH3+]CCO.OCCNC([O-])=O XNSYDUPSPONZCL-UHFFFAOYSA-N 0.000 description 2
- FEPKTMACMPNCGN-UHFFFAOYSA-N 2-methoxyethylazanium;n-(2-methoxyethyl)carbamate Chemical compound COCC[NH3+].COCCNC([O-])=O FEPKTMACMPNCGN-UHFFFAOYSA-N 0.000 description 2
- KXLKRDONYDSHID-UHFFFAOYSA-N 2-methylpropylazanium;n-(2-methylpropyl)carbamate Chemical compound CC(C)C[NH3+].CC(C)CNC([O-])=O KXLKRDONYDSHID-UHFFFAOYSA-N 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 150000001242 acetic acid derivatives Chemical class 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- MTBCJQLXXMMYTI-UHFFFAOYSA-N butylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CCCC[NH3+] MTBCJQLXXMMYTI-UHFFFAOYSA-N 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- JPGYIYNQDIYOGB-UHFFFAOYSA-N hydrogen carbonate;2-methylpropylazanium Chemical compound OC([O-])=O.CC(C)C[NH3+] JPGYIYNQDIYOGB-UHFFFAOYSA-N 0.000 description 2
- OMAGDPKGJHRKED-UHFFFAOYSA-N hydrogen carbonate;octylazanium Chemical compound OC([O-])=O.CCCCCCCC[NH3+] OMAGDPKGJHRKED-UHFFFAOYSA-N 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000006072 paste Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920003055 poly(ester-imide) Polymers 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- HOIKXNCMIFKASU-UHFFFAOYSA-N propylazanium;n-propylcarbamate Chemical compound CCC[NH3+].CCCNC([O-])=O HOIKXNCMIFKASU-UHFFFAOYSA-N 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 150000003335 secondary amines Chemical class 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- KPZGRMZPZLOPBS-UHFFFAOYSA-N 1,3-dichloro-2,2-bis(chloromethyl)propane Chemical compound ClCC(CCl)(CCl)CCl KPZGRMZPZLOPBS-UHFFFAOYSA-N 0.000 description 1
- YJHMHCWNQNZUNR-UHFFFAOYSA-N 2-aminoethylazanium;n-(2-aminoethyl)carbamate Chemical compound NCC[NH3+].NCCNC([O-])=O YJHMHCWNQNZUNR-UHFFFAOYSA-N 0.000 description 1
- XEXHIBLRARSXCL-UHFFFAOYSA-N 2-cyanoethylazanium;hydrogen carbonate Chemical compound OC([O-])=O.[NH3+]CCC#N XEXHIBLRARSXCL-UHFFFAOYSA-N 0.000 description 1
- IEOMPGKKSXHZSG-UHFFFAOYSA-N 2-methoxyethylazanium carbonate Chemical compound C([O-])([O-])=O.COCC[NH3+].COCC[NH3+] IEOMPGKKSXHZSG-UHFFFAOYSA-N 0.000 description 1
- VTJQCXPPQBUSOT-UHFFFAOYSA-N 2-methylpropylazanium carbonate Chemical compound C([O-])([O-])=O.C(C(C)C)[NH3+].C(C(C)C)[NH3+] VTJQCXPPQBUSOT-UHFFFAOYSA-N 0.000 description 1
- LBCUWWWNSMIBHS-UHFFFAOYSA-N 3-triethoxysilylpropylazanium carbonate Chemical compound C([O-])([O-])=O.C(C)O[Si](OCC)(OCC)CCC[NH3+].C(C)O[Si](OCC)(OCC)CCC[NH3+] LBCUWWWNSMIBHS-UHFFFAOYSA-N 0.000 description 1
- IENDUPQOSWAYMW-UHFFFAOYSA-N 3-triethoxysilylpropylazanium;n-(3-triethoxysilylpropyl)carbamate Chemical compound CCO[Si](OCC)(OCC)CCC[NH3+].CCO[Si](OCC)(OCC)CCCNC([O-])=O IENDUPQOSWAYMW-UHFFFAOYSA-N 0.000 description 1
- ZBOMHQPJMOIFIB-UHFFFAOYSA-J B(O)(O)O.[Ag](F)(F)(F)F Chemical compound B(O)(O)O.[Ag](F)(F)(F)F ZBOMHQPJMOIFIB-UHFFFAOYSA-J 0.000 description 1
- DGWOACPGWRKJFI-UHFFFAOYSA-N C([O-])(O)=O.C(#N)CC[NH3+].C([O-])(O)=O.COCC[NH3+] Chemical compound C([O-])(O)=O.C(#N)CC[NH3+].C([O-])(O)=O.COCC[NH3+] DGWOACPGWRKJFI-UHFFFAOYSA-N 0.000 description 1
- PSBVETSCWOEPTJ-UHFFFAOYSA-N C([O-])(O)=O.[NH4+].N1CCOCC1 Chemical compound C([O-])(O)=O.[NH4+].N1CCOCC1 PSBVETSCWOEPTJ-UHFFFAOYSA-N 0.000 description 1
- TWRGFSUKYYAPRR-UHFFFAOYSA-N C([O-])([O-])=O.C(CCCCCCCCCCCCCCCCC)[NH3+].C(CCCCCCCCCCCCCCCCC)[NH3+] Chemical compound C([O-])([O-])=O.C(CCCCCCCCCCCCCCCCC)[NH3+].C(CCCCCCCCCCCCCCCCC)[NH3+] TWRGFSUKYYAPRR-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Natural products P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 229910052946 acanthite Inorganic materials 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- WGQKYBSKWIADBV-UHFFFAOYSA-O benzylaminium Chemical compound [NH3+]CC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-O 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- CJJXKJDICHWEIU-UHFFFAOYSA-N butylazanium;carbonate Chemical compound [O-]C([O-])=O.CCCC[NH3+].CCCC[NH3+] CJJXKJDICHWEIU-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- AWHCNHKZYDIZRE-UHFFFAOYSA-N decyl(methyl)azanium carbonate Chemical compound C([O-])([O-])=O.C[NH2+]CCCCCCCCCC.C[NH2+]CCCCCCCCCC AWHCNHKZYDIZRE-UHFFFAOYSA-N 0.000 description 1
- ADXDZEVKKZYPJR-UHFFFAOYSA-N dibutylazanium carbonate Chemical compound C([O-])([O-])=O.C(CCC)[NH2+]CCCC.C(CCC)[NH2+]CCCC ADXDZEVKKZYPJR-UHFFFAOYSA-N 0.000 description 1
- KJNLOCPMQWTKDV-UHFFFAOYSA-N dioctadecylazanium carbonate Chemical compound C([O-])([O-])=O.C(CCCCCCCCCCCCCCCCC)[NH2+]CCCCCCCCCCCCCCCCCC.C(CCCCCCCCCCCCCCCCC)[NH2+]CCCCCCCCCCCCCCCCCC KJNLOCPMQWTKDV-UHFFFAOYSA-N 0.000 description 1
- WVDBSYPGKQYWSS-UHFFFAOYSA-N dioctadecylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CCCCCCCCCCCCCCCCCC[NH2+]CCCCCCCCCCCCCCCCCC WVDBSYPGKQYWSS-UHFFFAOYSA-N 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- DBUFGTBLIAQSPT-UHFFFAOYSA-N ethanamine;ethylazanium;hydrogen carbonate Chemical compound CCN.CC[NH3+].OC([O-])=O DBUFGTBLIAQSPT-UHFFFAOYSA-N 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- QNVRIHYSUZMSGM-UHFFFAOYSA-N hexan-2-ol Chemical compound CCCCC(C)O QNVRIHYSUZMSGM-UHFFFAOYSA-N 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-O pyridinium Chemical compound C1=CC=[NH+]C=C1 JUJWROOIHBZHMG-UHFFFAOYSA-O 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- CHACQUSVOVNARW-LNKPDPKZSA-M silver;(z)-4-oxopent-2-en-2-olate Chemical compound [Ag+].C\C([O-])=C\C(C)=O CHACQUSVOVNARW-LNKPDPKZSA-M 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- NOQPTGHPUCGDNZ-UHFFFAOYSA-N tert-butylazanium;carbonate Chemical compound [O-]C([O-])=O.CC(C)(C)[NH3+].CC(C)(C)[NH3+] NOQPTGHPUCGDNZ-UHFFFAOYSA-N 0.000 description 1
- YSEKXGQQTHQQMK-UHFFFAOYSA-N tert-butylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CC(C)(C)[NH3+] YSEKXGQQTHQQMK-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/10—Silver compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C211/00—Compounds containing amino groups bound to a carbon skeleton
- C07C211/65—Metal complexes of amines
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C271/00—Derivatives of carbamic acids, i.e. compounds containing any of the groups, the nitrogen atom not being part of nitro or nitroso groups
- C07C271/02—Carbamic acids; Salts of carbamic acids
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/005—Compounds containing elements of Groups 1 or 11 of the Periodic Table without C-Metal linkages
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/30—Inkjet printing inks
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/52—Electrically conductive inks
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/24—Electrically-conducting paints
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/08—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of metallic material
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/46—Electroplating: Baths therefor from solutions of silver
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
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Abstract
【解決手段】下式で表される銀化合物と、アンモニウムカルバメート系化合物(例えば;2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメート、2−メトキシエチルアンモニウム2−メトキシエチルカルバメート、2−シアノエチルアンモニウム2−シアノエチルカルバメートなど)とを反応させて銀錯体化合物を製造する。
(式で、nは1〜4の整数であり、Xは酸素、硫黄、ハロゲン、シアノ、シアネート、カーボネート、ニトレート、ニトライト、サルフェート、ホスフェート、チオシアネート、クロレート、パークロレート、テトラフルオロボレート、アセチルアセトネート、及びカルボキシレートで構成された群から選択される置換基である)
【選択図】なし
Description
また、銀化合物は、有機物及び高分子合成に触媒として使用することができて、特に、最近は、電気電子部品回路で鉛使用の規制及び低抵抗金属配線、印刷回路基板(PCB)、軟性回路基板(FPC)、無線認識タグ(RFID)用アンテナ、そしてプラズマディスプレイ(PDP)、液晶ディスプレイ(TFT−LCD)、有機発光ダイオード(OLED)、フレキシブルディスプレイ、及び有機薄膜トランジスタ(OTFT)などのような新しい分野で、金属パターンを必要とするか、電極として使用するなど、銀に対する関心が高まっている。銀を使用する場合、大部分粉末やバインダと溶剤が含まれたペースト状として直接使用するか、硝酸銀のような銀化合物を水溶液または有機溶媒上で他の化合物と反応して、ナノ粒子を含む多様な形態の銀及び有機銀化合物を製造して使用している。このような有機銀化合物は、化学蒸着(CVD)、プラズマ蒸着、スパッタリング、電気メッキ、露光(photolithography)、電子線(electron beam)、レーザーなど、多様な方法により金属パターンを形成させるに使用されている。
酸化銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとの反応
酸化銀とn−プロピルアンモニウムn−プロピルカルバメートとの反応
酸化銀とイソプロピルアンモニウムイソプロピルカルバメートとの反応
酸化銀とn−ブチルアンモニウムn−ブチルカルバメートとの反応
酸化銀とイソブチルアンモニウムイソブチルカルバメートとの反応
酸化銀とt−ブチルアンモニウムt−ブチルカルバメートとの反応
炭酸銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとの反応
酸化銀と2−メトキシエチルアンモニウム2−メトキシエチルカルバメートとの反応
酸化銀と2−ヒドロキシエチルアンモニウム2−ヒドロキシエチルカルバメートとの反応
酸化銀と2−シアノエチルアンモニウム2−シアノエチルカルバメートとの反応
酸化銀とモルホリウムモルホリンカルバメートとの反応
酸化銀とヘキサメチレンイミニウムヘキサメチレンイミンカルバメートとの反応
酸化銀とアンモニウムカルバメートとの反応
炭酸銀とアンモニウムカルバメートとの反応
酸化銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとの反応
酸化銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとの反応
酸化銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとの反応
酸化銀とアミノエチルアンモニウムアミノエチルカルバメートとの反応
酸化銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとアミノエチルアンモニウムアミノエチルカルバメートとの反応
硫酸銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとの反応
硝酸銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとの反応
シアン化銀と2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメートとの反応
酸化銀と2−エチルヘキシルアンモニウムカーボネートとの反応
酸化銀と2−エチルヘキシルアンモニウムバイカーボネートとの反応
酸化銀とイソプロピルアンモニウムカーボネートとの反応
炭酸銀とイソプロピルアンモニウムカーボネートとの反応
炭酸銀と2−エチルヘキシルアンモニウムカーボネートとの反応
酸化銀とイソプロピルアンモニウムバイカーボネートとの反応
酸化銀とアンモニウムカーボネートとの反応
炭酸銀とアンモニウムカーボネートとの反応
酸化銀とアンモニウムバイカーボネートとの反応
炭酸銀とアンモニウムバイカーボネートとの反応
酸化銀と2−メトキシエチルアンモニウムバイカーボネートとの反応
炭酸銀と2−メトキシエチルアンモニウムバイカーボネートとの反応
酸化銀とオクチルアンモニウムバイカーボネートとの反応
酸化銀とイソブチルアンモニウムバイカーボネートとの反応
酸化銀とn−ブチルアンモニウムバイカーボネートとの反応
酸化銀とモルホリンアンモニウムウムバイカーボネートとの反応
酸化銀と2−エチルヘキシルアンモニウムカーボネートとの反応
酸化銀と2−エチルヘキシルアンモニウムカーボネートとの反応
酸化銀と2−エチルヘキシルアンモニウムカーボネートとの反応
酸化銀とアミノエチルアンモニウムカーボネートとの反応
酸化銀と2−エチルヘキシルアンモニウムカーボネートとアミノエチルアンモニウムカーボネートとの反応
硫酸銀と2−エチルヘキシルアンモニウムカーボネートとの反応
硝酸銀と2−エチルヘキシルアンモニウムカーボネートとの反応
シアン化銀と2−エチルヘキシルアンモニウムカーボネートとの反応
実施例1で合成した銀錯体化合物4gをブチルアルコール5gに溶かした後、500cpsとなるように粘度を調整して、320メッシュ(mesh)のステンレス(SUS)網上にパターニングされたシルクスクリーンで、コーティング処理された紙(インクテック社製、製品名:ITP20HPGまたはITP20SPH)上にパターニングした後、100℃で5分間、そして130℃で10分間熱処理し、伝導度が400〜500mΩ/□の金属パターンを得た。
実施例1で合成した銀錯体化合物4gをイソプロピルアルコール10gに溶かした後、13cpsとなるように粘度を調整し、インクジェットプリンターを利用して、PETフィルム上にパターニングを1回した。パターニングした後、80℃で5分間、そして130℃で10分間熱処理し、伝導度が200〜300mΩ/□の金属パターンを得た。
参考例23で合成した銀錯体化合物4gを2−ヘキシルアルコール5gに溶かした後、500cpsとなるように粘度を調整して、320メッシュ(mesh)のパターニングされたシルクスクリーンで、コーティング処理された紙(インクテック社製、製品名:ITP20HPGまたはITP20SPH)上にパターニングした後、100℃で5分間、そして130℃で10分間熱処理し、伝導度が400〜500mΩ/□の金属パターンを得た。
参考例24で合成した銀錯体化合物4gをブチルアルコール10gに溶かした後、13cpsとなるように粘度を調整し、インクジェットプリンターを利用して、PETフィルム上にパターニングを1回した。パターニングした後、80℃で5分間、そして130℃で10分間熱処理し、伝導度が200〜300mΩ/□の金属パターンを得た。
Claims (21)
- 下記化学式2から選択される1つ以上の銀化合物及び下記化学式3から選択される1つ以上のアンモニウムカルバメート系化合物とを反応させて得られる銀錯体化合物。
(上記式で、nは1〜4の整数であり、Xは酸素、硫黄、ハロゲン、シアノ、シアネート、カーボネート、ニトレート、ニトライト、サルフェート、ホスフェート、チオシアネート、クロレート、パークロレート、テトラフルオロボレート、アセチルアセトネート、及びカルボキシレートで構成された群から選択される置換基である)
(上記式で、R1、R2、R3、R4、及びR5は、互い独立的に、それぞれ水素、炭素数1〜30個の脂肪族や脂環族のアルキル基、アリル基、若しくはアラルキル基、置換アルキル基若しくは置換アリル基、ヘテロ環化合物基、又は高分子化合物基である) - 銀錯体化合物は、下記化学式1であることを特徴とする請求項1に記載の銀錯体化合物。
- 上記化学式2の銀化合物は、酸化銀、チオシアネート化銀、シアン化銀、シアネート化銀、炭酸銀、硝酸銀、亜硝酸銀、硫酸銀、燐酸銀、過塩素酸銀、四フッ素ボレート化銀、アセチルアセトネート化銀、酢酸銀、乳酸銀、及びシュウ酸銀から選択される何れか1つ以上のものであることを特徴とする請求項1に記載の銀錯体化合物。
- 前記R1及びR4は炭素数1〜14個の脂肪族アルキル基であり、R3、R4、及びR5は互いに独立的に水素または炭素数1〜14個の脂肪族アルキル基であることを特徴とする請求項1または2に記載の銀錯体化合物。
- 前記R1、R2、R3、R4、及びR5は、互い独立的に、水素、メチル、エチル、プロピル、イソプロピル、ブチル、イソブチル、アミル、ヘキシル、エチルヘキシル、ヘプチル、オクチル、イソオクチル、ノニル、デシル、ドデシル、ヘキサデシル、オクタデシル、ドコデシル、シクロプロピル、シクロペンチル、シクロヘキシル、アリル、メトキシ、メトキシエチル、メトキシプロピル、シアノエチル、エトキシ、ブトキシ、ヘキシルオキシ、メトキシエトキシエチル、メトキシエトキシエトキシエチル、ヘキサメチレンイミン、モルホリン、ピペリジン、ピペラジン、エチレンジアミン、プロピレンジアミン、ヘキサメチレンジアミン、トリエチレンジアミン、ピロール、イミダゾール、ピリジン、カルボキシメチル、トリメトキシシリルプロピル、トリエトキシシリルプロピル、フェニル、メトキシフェニル、シアノフェニル、フェノキシ、トリル、ベンジル、ポリアリルアミン、及びポリエチレンアミンから選択されることを特徴とする請求項1に記載の銀錯体化合物。
- アンモニウムカルバメート系化合物は、アンモニウムカルバメート、エチルアンモニウムエチルカルバメート、イソプロピルアンモニウムイソプロピルカルバメート、n−ブチルアンモニウムn−ブチルカルバメート、イソブチルアンモニウムイソブチルカルバメート、t−ブチルアンモニウムt−ブチルカルバメート、2−エチルヘキシルアンモニウム2−エチルヘキシルカルバメート、オクタデシルアンモニウムオクタデシルカルバメート、2−メトキシエチルアンモニウム2−メトキシエチルカルバメート、2−シアノエチルアンモニウム2−シアノエチルカルバメート、ジブチルアンモニウムジブチルカルバメート、ジオクタデシルアンモニウムジオクタデシルカルバメート、メチルデシルアンモニウムメチルデシルカルバメート、ヘキサメチレンイミニウムヘキサメチレンイミンカルバメート、モルホリウムモルホリンカルバメート、ピリジウムエチルヘキシルカルバメート、トリエチレンジアミニウムイソプロピルバイカルバメート、ベンジルアンモニウムベンジルカルバメート、及びトリエトキシシリルプロピルアンモニウムトリエトキシシリルプロピルカルバメートから選択されることを特徴とする請求項1に記載の銀錯体化合物。
- 前記化学式2の化合物の銀化合物は、酸化銀、炭酸銀またはその混合物であることを特徴とする請求項1に記載の銀錯体化合物。
- アンモニウムカルバメート系化合物が、1次アミンで構成されたアルキルアンモニウムアルキルカルバメートであることを特徴とする請求項1に記載の銀錯体化合物。
- 請求項1乃至8から選択される何れか一項の銀錯体化合物を用いて薄膜を形成した後、酸化処理、還元処理、熱処理、化学蒸着、プラズマ蒸着、スパッタリング、電気メッキ、リソグラフィー工程、赤外線、電子線、またはレーザー処理を施して、金属または金属酸化物膜を形成する方法。
- 前記薄膜は、基板上に塗布して形成することを特徴とする請求項9に記載の金属または金属酸化物膜を形成する方法。
- 前記基板は、ガラス、シリコン、ポリエステル、ポリイミド、紙から選択されることを特徴とする請求項9に記載の金属または金属酸化物膜を形成する方法。
- 前記熱処理は、空気、窒素、アルゴン、水素、またはこれらの混合ガスで進行させることを特徴とする請求項9に記載の金属または金属酸化物膜を形成する方法。
- 前記塗布は、スピンコーティング、ロールコーティング、スプレーコーティング、ディップコーティング、フローコーティングから選択される塗布方法であることを特徴とする請求項10に記載の金属または金属酸化物膜を形成する方法。
- 前記塗布は、インクジェットプリンティング、オフセットプリンティング、スクリーンプリンティング、グラビアプリンティング、フレキソプリンティングから選択されるプリンティング方法によるものであることを特徴とする請求項10に記載の金属または金属酸化物膜を形成する方法。
- 前記銀錯体化合物を用いた塗布は、銀錯体化合物を、アルコール、グリコール、アセテート、エーテル、ケトン、脂肪族炭化水素、芳香族炭化水素、及びハロゲン化炭化水素から選択される溶媒に溶解して製造した銀錯体化合物溶液を利用することを特徴とする請求項10に記載の金属または金属酸化物膜を形成する方法。
- 前記溶媒がメタノール、エタノール、イソプロパノール、ブタノール、エチレングリコール、グリセリン、エチルアセテート、ブチルアセテート、カルビトールアセテート、ジエチルエーテル、テトラヒドロフラン、ジオキサン、メチルエチルケトン、アセトン、ヘキサン、ヘプタン、ベンゼン、トルエン、クロロホルム、メチレンクロライド、カーボンテトラクロライドから選択される何れか1つ以上であることを特徴とする請求項15に記載の金属または金属酸化物膜を形成する方法。
- 請求項1乃至8の何れか一項に記載の銀錯体化合物をアルコール、グリコール、アセテート、エーテル、ケトン、脂肪族炭化水素、芳香族炭化水素、及びハロゲン化炭化水素から選択される溶媒に溶解して製造した銀錯体化合物溶液。
- 前記溶媒がメタノール、エタノール、イソプロパノール、ブタノール、エチレングリコール、グリセリン、エチルアセテート、ブチルアセテート、カルビトールアセテート、ジエチルエーテル、テトラヒドロフラン、ジオキサン、メチルエチルケトン、アセトン、ヘキサン、ヘプタン、ベンゼン、トルエン、クロロホルム、メチレンクロライド、カーボンテトラクロライドから選択される何れか1つ以上であることを特徴とする請求項17に記載の銀錯体化合物溶液。
- 下記化学式2の1つ以上の銀化合物と、一つ以上の化学式3のアンモニウムカルバメート系化合物とを、溶媒の存在下で、常温で反応させて銀錯体化合物を製造する方法。
(上記式で、nは1〜4の整数であり、Xは酸素、硫黄、ハロゲン、シアノ、シアネート、カーボネート、ニトレート、ニトライト、サルフェート、ホスフェート、チオシアネート、クロレート、パークロレート、テトラフルオロボレート、アセチルアセトネート、及びカルボキシレートで構成された群から選択される置換基である)
(上記式で、R1、R2、R3、R4、及びR5は、互い独立的に、それぞれ水素、炭素数1〜30個の脂肪族や脂環族のアルキル基、アリル基、若しくはアラルキル基、置換アルキル基若しくは置換アリル基、ヘテロ環化合物基、又は高分子化合物基である) - 銀錯体化合物は、下記化学式1であることを特徴とする請求項19に記載の銀錯体化合物を製造する方法。
- 前記溶媒は、メタノール、エタノール、イソプロパノール、ブタノール、エチレングリコール、グリセリン、エチルアセテート、ブチルアセテート、カルビトールアセテート、ジエチルエーテル、テトラヒドロフラン、ジオキサン、メチルエチルケトン、アセトン、ヘキサン、ヘプタン、ベンゼン、トルエン、クロロホルム、メチレンクロライド、カーボンテトラクロライドから選択される何れか1つ以上であることを特徴とする請求項19に記載の銀錯体化合物の製造方法。
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