KR101093188B1 - 유기 은 착체 화합물, 이의 제조방법 및 이를 이용한박막형성방법 - Google Patents
유기 은 착체 화합물, 이의 제조방법 및 이를 이용한박막형성방법 Download PDFInfo
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- KR101093188B1 KR101093188B1 KR1020070043501A KR20070043501A KR101093188B1 KR 101093188 B1 KR101093188 B1 KR 101093188B1 KR 1020070043501 A KR1020070043501 A KR 1020070043501A KR 20070043501 A KR20070043501 A KR 20070043501A KR 101093188 B1 KR101093188 B1 KR 101093188B1
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- Prior art keywords
- silver
- yield
- grams
- solution
- compound
- Prior art date
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- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000002360 preparation method Methods 0.000 title description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 207
- 229910052709 silver Inorganic materials 0.000 claims abstract description 163
- 239000004332 silver Substances 0.000 claims abstract description 163
- 150000001875 compounds Chemical class 0.000 claims abstract description 75
- -1 ammonium carbamate compound Chemical class 0.000 claims abstract description 42
- 239000001099 ammonium carbonate Substances 0.000 claims abstract description 29
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 claims abstract description 23
- 235000012501 ammonium carbonate Nutrition 0.000 claims abstract description 21
- KXDHJXZQYSOELW-UHFFFAOYSA-N carbonic acid monoamide Natural products NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 claims abstract description 21
- BVCZEBOGSOYJJT-UHFFFAOYSA-N ammonium carbamate Chemical compound [NH4+].NC([O-])=O BVCZEBOGSOYJJT-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229940100890 silver compound Drugs 0.000 claims abstract description 16
- 150000003379 silver compounds Chemical class 0.000 claims abstract description 16
- 239000000126 substance Substances 0.000 claims abstract description 3
- 239000010409 thin film Substances 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical group [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 claims description 4
- 125000001931 aliphatic group Chemical group 0.000 claims description 4
- 125000003118 aryl group Chemical group 0.000 claims description 4
- 125000000524 functional group Chemical group 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 238000007646 gravure printing Methods 0.000 claims description 3
- 238000007641 inkjet printing Methods 0.000 claims description 3
- 150000002576 ketones Chemical class 0.000 claims description 3
- 238000007645 offset printing Methods 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 125000001424 substituent group Chemical group 0.000 claims description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical group [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 2
- 229910002651 NO3 Inorganic materials 0.000 claims description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical group [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 2
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical group [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 claims description 2
- 229910019142 PO4 Inorganic materials 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical group [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- ZMZDMBWJUHKJPS-UHFFFAOYSA-M Thiocyanate anion Chemical group [S-]C#N ZMZDMBWJUHKJPS-UHFFFAOYSA-M 0.000 claims description 2
- 125000002723 alicyclic group Chemical group 0.000 claims description 2
- 125000002947 alkylene group Chemical group 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 150000007942 carboxylates Chemical group 0.000 claims description 2
- IBAHLNWTOIHLKE-UHFFFAOYSA-N cyano cyanate Chemical group N#COC#N IBAHLNWTOIHLKE-UHFFFAOYSA-N 0.000 claims description 2
- 238000003618 dip coating Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical group 0.000 claims description 2
- 125000005842 heteroatom Chemical group 0.000 claims description 2
- ZMZDMBWJUHKJPS-UHFFFAOYSA-N hydrogen thiocyanate Chemical group SC#N ZMZDMBWJUHKJPS-UHFFFAOYSA-N 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 claims description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical group OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical group [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 2
- 239000010452 phosphate Chemical group 0.000 claims description 2
- 238000004528 spin coating Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims description 2
- 239000011593 sulfur Chemical group 0.000 claims description 2
- 125000000923 (C1-C30) alkyl group Chemical group 0.000 claims 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims 1
- 125000005595 acetylacetonate group Chemical group 0.000 claims 1
- 239000003570 air Substances 0.000 claims 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims 1
- 150000008282 halocarbons Chemical class 0.000 claims 1
- 150000002391 heterocyclic compounds Chemical class 0.000 claims 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229920000728 polyester Polymers 0.000 claims 1
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 abstract description 8
- 235000012538 ammonium bicarbonate Nutrition 0.000 abstract description 8
- 125000000217 alkyl group Chemical group 0.000 abstract description 6
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 abstract description 3
- 125000005210 alkyl ammonium group Chemical group 0.000 abstract description 3
- KXDHJXZQYSOELW-UHFFFAOYSA-M Carbamate Chemical compound NC([O-])=O KXDHJXZQYSOELW-UHFFFAOYSA-M 0.000 abstract description 2
- 238000006243 chemical reaction Methods 0.000 description 141
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 140
- 239000000243 solution Substances 0.000 description 134
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 123
- 229910001923 silver oxide Inorganic materials 0.000 description 70
- 239000002904 solvent Substances 0.000 description 57
- 239000007787 solid Substances 0.000 description 53
- 238000000354 decomposition reaction Methods 0.000 description 47
- 239000012528 membrane Substances 0.000 description 46
- 238000002076 thermal analysis method Methods 0.000 description 46
- 238000001035 drying Methods 0.000 description 45
- 239000002002 slurry Substances 0.000 description 44
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 36
- 239000000725 suspension Substances 0.000 description 36
- 230000008859 change Effects 0.000 description 31
- 239000007788 liquid Substances 0.000 description 28
- WRJRTLNJQQNHLC-UHFFFAOYSA-N 2-ethylhexylazanium;2-ethylhexyl carbonate Chemical compound CCCCC(CC)C[NH3+].CCCCC(CC)COC([O-])=O WRJRTLNJQQNHLC-UHFFFAOYSA-N 0.000 description 22
- JMPXSWBXXUOKFP-UHFFFAOYSA-N 2-ethylhexylazanium;n-(2-ethylhexyl)carbamate Chemical compound CCCCC(CC)C[NH3+].CCCCC(CC)CNC([O-])=O JMPXSWBXXUOKFP-UHFFFAOYSA-N 0.000 description 22
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 20
- 238000003756 stirring Methods 0.000 description 16
- ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 description 15
- LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 description 15
- 229910001958 silver carbonate Inorganic materials 0.000 description 15
- 230000008018 melting Effects 0.000 description 13
- 238000002844 melting Methods 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 229940093499 ethyl acetate Drugs 0.000 description 12
- 235000019439 ethyl acetate Nutrition 0.000 description 12
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 12
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 12
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 8
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- 229910001961 silver nitrate Inorganic materials 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- RGEULEMUWRTZMP-UHFFFAOYSA-N hydrogen carbonate;2-methoxyethylazanium Chemical compound OC([O-])=O.COCC[NH3+] RGEULEMUWRTZMP-UHFFFAOYSA-N 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- TZRORHHMAGATLL-UHFFFAOYSA-N propan-2-ylazanium;propan-2-yl carbonate Chemical compound CC(C)[NH3+].CC(C)OC([O-])=O TZRORHHMAGATLL-UHFFFAOYSA-N 0.000 description 5
- VODPPFXNYTVFDD-UHFFFAOYSA-N 2-aminoethylazanium 2-aminoethyl carbonate Chemical compound NCC[NH3+].NCCOC([O-])=O VODPPFXNYTVFDD-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 4
- BCGFXMHODHUENB-UHFFFAOYSA-N NCCN.NCCOC(N)=O Chemical compound NCCN.NCCOC(N)=O BCGFXMHODHUENB-UHFFFAOYSA-N 0.000 description 4
- 238000001460 carbon-13 nuclear magnetic resonance spectrum Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000001938 differential scanning calorimetry curve Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 238000002329 infrared spectrum Methods 0.000 description 4
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 4
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 description 4
- 229940098221 silver cyanide Drugs 0.000 description 4
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 4
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 4
- 238000001757 thermogravimetry curve Methods 0.000 description 4
- LFTWYPLGYKQPMV-UHFFFAOYSA-N 2-ethylhexylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CCCCC(CC)C[NH3+] LFTWYPLGYKQPMV-UHFFFAOYSA-N 0.000 description 3
- FEPKTMACMPNCGN-UHFFFAOYSA-N 2-methoxyethylazanium;n-(2-methoxyethyl)carbamate Chemical compound COCC[NH3+].COCCNC([O-])=O FEPKTMACMPNCGN-UHFFFAOYSA-N 0.000 description 3
- KDSNLYIMUZNERS-UHFFFAOYSA-O 2-methylpropanaminium Chemical compound CC(C)C[NH3+] KDSNLYIMUZNERS-UHFFFAOYSA-O 0.000 description 3
- BRUZQRBVNRKLJG-UHFFFAOYSA-N 2-methylpropyl carbamate Chemical compound CC(C)COC(N)=O BRUZQRBVNRKLJG-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- DDWQBJYWGXHLCN-UHFFFAOYSA-N butan-1-amine;butylcarbamic acid Chemical compound CCCC[NH3+].CCCCNC([O-])=O DDWQBJYWGXHLCN-UHFFFAOYSA-N 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- YCADFRFBAHDVOS-UHFFFAOYSA-N hydrogen carbonate;propan-2-ylazanium Chemical compound CC(C)[NH3+].OC([O-])=O YCADFRFBAHDVOS-UHFFFAOYSA-N 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XBXCNNQPRYLIDE-UHFFFAOYSA-N tert-butylcarbamic acid Chemical compound CC(C)(C)NC(O)=O XBXCNNQPRYLIDE-UHFFFAOYSA-N 0.000 description 3
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 2
- XNSYDUPSPONZCL-UHFFFAOYSA-N 2-hydroxyethylazanium;n-(2-hydroxyethyl)carbamate Chemical compound [NH3+]CCO.OCCNC([O-])=O XNSYDUPSPONZCL-UHFFFAOYSA-N 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 150000001242 acetic acid derivatives Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- HTRXGEPDTFSKLI-UHFFFAOYSA-N butanoic acid;ethyl acetate Chemical compound CCCC(O)=O.CCOC(C)=O HTRXGEPDTFSKLI-UHFFFAOYSA-N 0.000 description 2
- MTBCJQLXXMMYTI-UHFFFAOYSA-N butylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CCCC[NH3+] MTBCJQLXXMMYTI-UHFFFAOYSA-N 0.000 description 2
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- 150000002334 glycols Chemical class 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- JPGYIYNQDIYOGB-UHFFFAOYSA-N hydrogen carbonate;2-methylpropylazanium Chemical compound OC([O-])=O.CC(C)C[NH3+] JPGYIYNQDIYOGB-UHFFFAOYSA-N 0.000 description 2
- OMAGDPKGJHRKED-UHFFFAOYSA-N hydrogen carbonate;octylazanium Chemical compound OC([O-])=O.CCCCCCCC[NH3+] OMAGDPKGJHRKED-UHFFFAOYSA-N 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- JJWLVOIRVHMVIS-UHFFFAOYSA-O isopropylaminium Chemical compound CC(C)[NH3+] JJWLVOIRVHMVIS-UHFFFAOYSA-O 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- BEVIPXZYSPERIE-UHFFFAOYSA-N morpholine;morpholin-4-ium;carbamate Chemical compound NC([O-])=O.C1COCCN1.C1COCC[NH2+]1 BEVIPXZYSPERIE-UHFFFAOYSA-N 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000006072 paste Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920003055 poly(ester-imide) Polymers 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- OVPLZYJGTGDFNB-UHFFFAOYSA-N propan-2-yl carbamate Chemical compound CC(C)OC(N)=O OVPLZYJGTGDFNB-UHFFFAOYSA-N 0.000 description 2
- HOIKXNCMIFKASU-UHFFFAOYSA-N propylazanium;n-propylcarbamate Chemical compound CCC[NH3+].CCCNC([O-])=O HOIKXNCMIFKASU-UHFFFAOYSA-N 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 150000003335 secondary amines Chemical class 0.000 description 2
- YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 description 2
- 229910000367 silver sulfate Inorganic materials 0.000 description 2
- XDNDXYZWMMAEPS-UHFFFAOYSA-N silver sulfuric acid Chemical compound [Ag].OS(O)(=O)=O XDNDXYZWMMAEPS-UHFFFAOYSA-N 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
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- 125000004802 cyanophenyl group Chemical group 0.000 description 1
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- LXSFGVACVWCFRS-UHFFFAOYSA-N dibutylazanium;n,n-dibutylcarbamate Chemical compound CCCC[NH2+]CCCC.CCCCN(C([O-])=O)CCCC LXSFGVACVWCFRS-UHFFFAOYSA-N 0.000 description 1
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- WVDBSYPGKQYWSS-UHFFFAOYSA-N dioctadecylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CCCCCCCCCCCCCCCCCC[NH2+]CCCCCCCCCCCCCCCCCC WVDBSYPGKQYWSS-UHFFFAOYSA-N 0.000 description 1
- AYGOKHJRGBNMGQ-UHFFFAOYSA-N dioctadecylazanium;n,n-dioctadecylcarbamate Chemical compound CCCCCCCCCCCCCCCCCC[NH2+]CCCCCCCCCCCCCCCCCC.CCCCCCCCCCCCCCCCCCN(C([O-])=O)CCCCCCCCCCCCCCCCCC AYGOKHJRGBNMGQ-UHFFFAOYSA-N 0.000 description 1
- MJIVAZUPHYQSTQ-UHFFFAOYSA-L disilver nitrous acid sulfate Chemical compound S(=O)(=O)([O-])[O-].[Ag+].N(=O)O.[Ag+] MJIVAZUPHYQSTQ-UHFFFAOYSA-L 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
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- COIHLIVFSZCCQI-UHFFFAOYSA-N ethanamine;ethyl carbamate Chemical compound CCN.CCOC(N)=O COIHLIVFSZCCQI-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
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- 239000010408 film Substances 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- QNVRIHYSUZMSGM-UHFFFAOYSA-N hexan-2-ol Chemical compound CCCCC(C)O QNVRIHYSUZMSGM-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- NZYYSSZGIPELSX-UHFFFAOYSA-N hydrogen carbonate;pyridin-1-ium Chemical class OC(O)=O.C1=CC=NC=C1 NZYYSSZGIPELSX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
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- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
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- YNAVUWVOSKDBBP-UHFFFAOYSA-O morpholinium Chemical compound [H+].C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-O 0.000 description 1
- IKVDMBQGHZVMRN-UHFFFAOYSA-N n-methyldecan-1-amine Chemical compound CCCCCCCCCCNC IKVDMBQGHZVMRN-UHFFFAOYSA-N 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- BTDGNUHTDOIMKX-UHFFFAOYSA-N octadecan-1-amine octadecyl carbamate Chemical compound CCCCCCCCCCCCCCCCCCN.CCCCCCCCCCCCCCCCCCOC(N)=O BTDGNUHTDOIMKX-UHFFFAOYSA-N 0.000 description 1
- XKFXSYSPQZRVOY-UHFFFAOYSA-N octadecylazanium;octadecyl carbonate Chemical compound CCCCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCCCCOC([O-])=O XKFXSYSPQZRVOY-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
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- 239000010970 precious metal Substances 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
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- WSQPMYJWTYRPQR-UHFFFAOYSA-N propan-2-amine;propan-2-yl carbamate Chemical compound CC(C)N.CC(C)OC(N)=O WSQPMYJWTYRPQR-UHFFFAOYSA-N 0.000 description 1
- AHIHJODVQGBOND-UHFFFAOYSA-N propan-2-yl hydrogen carbonate Chemical class CC(C)OC(O)=O AHIHJODVQGBOND-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- AOHJOMMDDJHIJH-UHFFFAOYSA-N propylenediamine Chemical compound CC(N)CN AOHJOMMDDJHIJH-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- CQLFBEKRDQMJLZ-UHFFFAOYSA-M silver acetate Chemical compound [Ag+].CC([O-])=O CQLFBEKRDQMJLZ-UHFFFAOYSA-M 0.000 description 1
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- XNGYKPINNDWGGF-UHFFFAOYSA-L silver oxalate Chemical compound [Ag+].[Ag+].[O-]C(=O)C([O-])=O XNGYKPINNDWGGF-UHFFFAOYSA-L 0.000 description 1
- FJOLTQXXWSRAIX-UHFFFAOYSA-K silver phosphate Chemical compound [Ag+].[Ag+].[Ag+].[O-]P([O-])([O-])=O FJOLTQXXWSRAIX-UHFFFAOYSA-K 0.000 description 1
- 229940019931 silver phosphate Drugs 0.000 description 1
- 229910000161 silver phosphate Inorganic materials 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- 229910001494 silver tetrafluoroborate Inorganic materials 0.000 description 1
- LMEWRZSPCQHBOB-UHFFFAOYSA-M silver;2-hydroxypropanoate Chemical compound [Ag+].CC(O)C([O-])=O LMEWRZSPCQHBOB-UHFFFAOYSA-M 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- XKXIQBVKMABYQJ-UHFFFAOYSA-M tert-butyl carbonate Chemical compound CC(C)(C)OC([O-])=O XKXIQBVKMABYQJ-UHFFFAOYSA-M 0.000 description 1
- YSEKXGQQTHQQMK-UHFFFAOYSA-N tert-butylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CC(C)(C)[NH3+] YSEKXGQQTHQQMK-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- C07C271/00—Derivatives of carbamic acids, i.e. compounds containing any of the groups, the nitrogen atom not being part of nitro or nitroso groups
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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Abstract
Description
Claims (15)
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- 삭제
- 삭제
- 하기의 화학식 2로부터 선택되는 하나 이상의 은 화합물 및 하기 화학식 3 내지 화학식 5로부터 선택되는 하나 이상의 암모늄 카바메이트계 화합물 또는 암모늄 카보네이트계 화합물을 반응시켜 제조된 은과 암모늄 카바메이트계 화합물 또는 암모늄 카보네이트계 화합물로 이루어진 하기 화학식 1의 은 착체화합물을 알코올, 글리콜, 아세테이트, 에테르, 케톤, 지방족탄화수소, 방향족탄화수소 및 할로겐화 탄화수소로부터 선택되는 용매에 용해하여 제조한 은 착체 화합물 용액을 이용하여 박막을 형성한 후, 열 처리를 하여 은 박막을 형성하는 방법.[화학식 1]Ag[A]m[A는 화학식 3 내지 화학식 5 화합물이며, m은 0.7 내지 2.5이다.][화학식 2]AgnX[n은 1~4의 정수이고, X는 산소, 황, 할로겐, 시아노, 시아네이트, 카보네이트, 니트레이트, 나이트라이트, 설페이트, 포스페이트, 티오시아네이트, 클로레이트, 퍼클로레이트, 테트라플로로보레이트, 아세틸아세토네이트, 카복실레이트 및 그 유도체로 구성된 군에서 선택되는 치환기이다.][화학식 3][화학식 4][화학식 5][상기 R1, R2 , R3, R4, R5 및 R6는 서로 독립적으로 각각 수소, 지방족 또는 지환족 (C1-C30)알킬기, 아릴기, 아랄킬(aralkyl)기, 관능기가 치환된 (C1-C30)알킬기, 관능기가 치환된 아릴기, 고분자화합물기, 헤테로고리화합물 및 그들의 유도체에서 선택되는 치환기이거나, 서로 독립적으로 R1과 R2, R4와 R5는 서로 헤테로 원자가 포함되거나 포함되지 않은 알킬렌으로 연결되어 고리를 형성할 수 있다.]
- 제 10항에 있어서,상기 박막은 기판 상에 상기 은 착체 화합물 용액을 도포하여 형성하는 것을 특징으로 하는 은 박막을 형성하는 방법.
- 제 11항에 있어서,상기 기판은 유리, 실리콘, 폴리에스테르, 폴리이미드 또는 종이에서 선택되는 것을 특징으로 하는 은 박막을 형성하는 방법.
- 제 10항에 있어서,상기 열처리는 공기, 질소, 아르곤, 수소, 또는 이들의 혼합 가스 조건에서 진행시 키는 것을 특징으로 하는 은 박막을 형성하는 방법.
- 제 11항에 있어서,상기 도포는 스핀 코팅, 롤 코팅, 스프레이 코팅, 딥 코팅, 플로우 코팅으로부터 선택되는 도포방법인 것을 특징으로 하는 은 박막을 형성하는 방법.
- 제 11항에 있어서,상기 도포는 잉크젯 프린팅, 옵셋 프린팅, 스크린프린팅, 그라비아 프린팅, 플렉소 프린팅에서 선택되는 프린팅 방법에 의해 이루어지는 것을 특징으로 하는 은 박막을 형성하는 방법.
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US4405360A (en) | 1979-06-22 | 1983-09-20 | Environmental Chemicals, Inc. | Controlled release of herbicide compounds utilizing a thermoplastic matrix |
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