KR20070052258A - 유기 은 착체 화합물, 이의 제조방법 및 이를 이용한박막형성방법 - Google Patents
유기 은 착체 화합물, 이의 제조방법 및 이를 이용한박막형성방법 Download PDFInfo
- Publication number
- KR20070052258A KR20070052258A KR1020070043501A KR20070043501A KR20070052258A KR 20070052258 A KR20070052258 A KR 20070052258A KR 1020070043501 A KR1020070043501 A KR 1020070043501A KR 20070043501 A KR20070043501 A KR 20070043501A KR 20070052258 A KR20070052258 A KR 20070052258A
- Authority
- KR
- South Korea
- Prior art keywords
- silver
- ammonium
- carbonate
- carbamate
- solution
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000002360 preparation method Methods 0.000 title description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 219
- 229910052709 silver Inorganic materials 0.000 claims abstract description 176
- 239000004332 silver Substances 0.000 claims abstract description 176
- 150000001875 compounds Chemical class 0.000 claims abstract description 84
- -1 ammonium carbamate compound Chemical class 0.000 claims abstract description 54
- 239000001099 ammonium carbonate Substances 0.000 claims abstract description 32
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 claims abstract description 27
- KXDHJXZQYSOELW-UHFFFAOYSA-N carbonic acid monoamide Natural products NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 claims abstract description 24
- 235000012501 ammonium carbonate Nutrition 0.000 claims abstract description 23
- BVCZEBOGSOYJJT-UHFFFAOYSA-N ammonium carbamate Chemical compound [NH4+].NC([O-])=O BVCZEBOGSOYJJT-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229940100890 silver compound Drugs 0.000 claims abstract description 17
- 150000003379 silver compounds Chemical class 0.000 claims abstract description 17
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 claims abstract description 9
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 9
- 235000012538 ammonium bicarbonate Nutrition 0.000 claims abstract description 9
- KXDHJXZQYSOELW-UHFFFAOYSA-M Carbamate Chemical compound NC([O-])=O KXDHJXZQYSOELW-UHFFFAOYSA-M 0.000 claims abstract description 4
- 125000005210 alkyl ammonium group Chemical group 0.000 claims abstract description 4
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 claims description 144
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 126
- 229910001923 silver oxide Inorganic materials 0.000 claims description 72
- 239000002904 solvent Substances 0.000 claims description 59
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 39
- WRJRTLNJQQNHLC-UHFFFAOYSA-N 2-ethylhexylazanium;2-ethylhexyl carbonate Chemical compound CCCCC(CC)C[NH3+].CCCCC(CC)COC([O-])=O WRJRTLNJQQNHLC-UHFFFAOYSA-N 0.000 claims description 23
- JMPXSWBXXUOKFP-UHFFFAOYSA-N 2-ethylhexylazanium;n-(2-ethylhexyl)carbamate Chemical compound CCCCC(CC)C[NH3+].CCCCC(CC)CNC([O-])=O JMPXSWBXXUOKFP-UHFFFAOYSA-N 0.000 claims description 23
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims description 22
- ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 claims description 17
- LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 claims description 17
- 229910001958 silver carbonate Inorganic materials 0.000 claims description 17
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 14
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims description 13
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 11
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 10
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 9
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 9
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 9
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 229910001961 silver nitrate Inorganic materials 0.000 claims description 7
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 6
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 6
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 claims description 6
- 125000001931 aliphatic group Chemical group 0.000 claims description 6
- RGEULEMUWRTZMP-UHFFFAOYSA-N hydrogen carbonate;2-methoxyethylazanium Chemical compound OC([O-])=O.COCC[NH3+] RGEULEMUWRTZMP-UHFFFAOYSA-N 0.000 claims description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- TZRORHHMAGATLL-UHFFFAOYSA-N propan-2-ylazanium;propan-2-yl carbonate Chemical compound CC(C)[NH3+].CC(C)OC([O-])=O TZRORHHMAGATLL-UHFFFAOYSA-N 0.000 claims description 6
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 claims description 6
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 claims description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 5
- 150000002431 hydrogen Chemical class 0.000 claims description 5
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 claims description 5
- 229940098221 silver cyanide Drugs 0.000 claims description 5
- LFTWYPLGYKQPMV-UHFFFAOYSA-N 2-ethylhexylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CCCCC(CC)C[NH3+] LFTWYPLGYKQPMV-UHFFFAOYSA-N 0.000 claims description 4
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical group [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 claims description 4
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 claims description 4
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 claims description 4
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 claims description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 4
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 4
- 125000003118 aryl group Chemical group 0.000 claims description 4
- DDWQBJYWGXHLCN-UHFFFAOYSA-N butan-1-amine;butylcarbamic acid Chemical compound CCCC[NH3+].CCCCNC([O-])=O DDWQBJYWGXHLCN-UHFFFAOYSA-N 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 4
- 125000000524 functional group Chemical group 0.000 claims description 4
- YCADFRFBAHDVOS-UHFFFAOYSA-N hydrogen carbonate;propan-2-ylazanium Chemical compound CC(C)[NH3+].OC([O-])=O YCADFRFBAHDVOS-UHFFFAOYSA-N 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- XBXCNNQPRYLIDE-UHFFFAOYSA-N tert-butylcarbamic acid Chemical compound CC(C)(C)NC(O)=O XBXCNNQPRYLIDE-UHFFFAOYSA-N 0.000 claims description 4
- 238000011282 treatment Methods 0.000 claims description 4
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 claims description 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 3
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 235000011187 glycerol Nutrition 0.000 claims description 3
- 238000007646 gravure printing Methods 0.000 claims description 3
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 claims description 3
- 238000007641 inkjet printing Methods 0.000 claims description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 3
- 150000002576 ketones Chemical class 0.000 claims description 3
- 238000001459 lithography Methods 0.000 claims description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- BEVIPXZYSPERIE-UHFFFAOYSA-N morpholine;morpholin-4-ium;carbamate Chemical compound NC([O-])=O.C1COCCN1.C1COCC[NH2+]1 BEVIPXZYSPERIE-UHFFFAOYSA-N 0.000 claims description 3
- 238000007645 offset printing Methods 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- XDNDXYZWMMAEPS-UHFFFAOYSA-N silver sulfuric acid Chemical compound [Ag].OS(O)(=O)=O XDNDXYZWMMAEPS-UHFFFAOYSA-N 0.000 claims description 3
- 125000001424 substituent group Chemical group 0.000 claims description 3
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 claims description 2
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 claims description 2
- UDXBSNUCGGXUNH-UHFFFAOYSA-N 2-cyanoethylazanium;2-cyanoethyl carbonate Chemical compound [NH3+]CCC#N.[O-]C(=O)OCCC#N UDXBSNUCGGXUNH-UHFFFAOYSA-N 0.000 claims description 2
- XEXHIBLRARSXCL-UHFFFAOYSA-N 2-cyanoethylazanium;hydrogen carbonate Chemical compound OC([O-])=O.[NH3+]CCC#N XEXHIBLRARSXCL-UHFFFAOYSA-N 0.000 claims description 2
- HTBCQGGKQJBADY-UHFFFAOYSA-N 2-methoxyethylazanium;2-methoxyethyl carbonate Chemical compound COCC[NH3+].COCCOC([O-])=O HTBCQGGKQJBADY-UHFFFAOYSA-N 0.000 claims description 2
- SZVUQKOTOXVFTL-UHFFFAOYSA-N 2-methylpropylazanium;2-methylpropyl carbonate Chemical compound CC(C)C[NH3+].CC(C)COC([O-])=O SZVUQKOTOXVFTL-UHFFFAOYSA-N 0.000 claims description 2
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 claims description 2
- PMPXTVNEQKJCMX-UHFFFAOYSA-N 3-aminopropanenitrile 2-cyanoethyl carbamate Chemical compound NCCC#N.NC(=O)OCCC#N PMPXTVNEQKJCMX-UHFFFAOYSA-N 0.000 claims description 2
- SKRSRJOKBARNAS-UHFFFAOYSA-N 3-triethoxysilylpropylazanium;3-triethoxysilylpropyl carbonate Chemical compound CCO[Si](OCC)(OCC)CCC[NH3+].CCO[Si](OCC)(OCC)CCCOC([O-])=O SKRSRJOKBARNAS-UHFFFAOYSA-N 0.000 claims description 2
- RBWNDBNSJFCLBZ-UHFFFAOYSA-N 7-methyl-5,6,7,8-tetrahydro-3h-[1]benzothiolo[2,3-d]pyrimidine-4-thione Chemical compound N1=CNC(=S)C2=C1SC1=C2CCC(C)C1 RBWNDBNSJFCLBZ-UHFFFAOYSA-N 0.000 claims description 2
- CHKUCKZKCWZMLI-UHFFFAOYSA-N CCCCCC(CC)OC(=O)N.C1=CC=NC=C1 Chemical compound CCCCCC(CC)OC(=O)N.C1=CC=NC=C1 CHKUCKZKCWZMLI-UHFFFAOYSA-N 0.000 claims description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical group [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 claims description 2
- HWVVYUPLWARZKN-UHFFFAOYSA-N N-butylbutan-1-amine dibutyl carbonate Chemical compound CCCCNCCCC.CCCCOC(=O)OCCCC HWVVYUPLWARZKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910002651 NO3 Inorganic materials 0.000 claims description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical group [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 2
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical group [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 claims description 2
- 229910019142 PO4 Inorganic materials 0.000 claims description 2
- 229920002873 Polyethylenimine Polymers 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical group [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- ZMZDMBWJUHKJPS-UHFFFAOYSA-M Thiocyanate anion Chemical group [S-]C#N ZMZDMBWJUHKJPS-UHFFFAOYSA-M 0.000 claims description 2
- 125000002723 alicyclic group Chemical group 0.000 claims description 2
- 125000002947 alkylene group Chemical group 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- ZSIQJIWKELUFRJ-UHFFFAOYSA-N azepane Chemical compound C1CCCNCC1 ZSIQJIWKELUFRJ-UHFFFAOYSA-N 0.000 claims description 2
- KPFRBTZTDIDEQU-UHFFFAOYSA-N azepane;carbamic acid Chemical compound NC(O)=O.C1CCCNCC1 KPFRBTZTDIDEQU-UHFFFAOYSA-N 0.000 claims description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
- QJLWYBRKZCYIEK-UHFFFAOYSA-N benzylazanium;benzyl carbonate Chemical compound [NH3+]CC1=CC=CC=C1.[O-]C(=O)OCC1=CC=CC=C1 QJLWYBRKZCYIEK-UHFFFAOYSA-N 0.000 claims description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- SCJNFWUKTOYSRT-UHFFFAOYSA-N butylazanium;butyl carbonate Chemical compound CCCC[NH3+].CCCCOC([O-])=O SCJNFWUKTOYSRT-UHFFFAOYSA-N 0.000 claims description 2
- 150000007942 carboxylates Chemical group 0.000 claims description 2
- 125000002057 carboxymethyl group Chemical group [H]OC(=O)C([H])([H])[*] 0.000 claims description 2
- IBAHLNWTOIHLKE-UHFFFAOYSA-N cyano cyanate Chemical group N#COC#N IBAHLNWTOIHLKE-UHFFFAOYSA-N 0.000 claims description 2
- 125000004802 cyanophenyl group Chemical group 0.000 claims description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 2
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 2
- 125000001559 cyclopropyl group Chemical group [H]C1([H])C([H])([H])C1([H])* 0.000 claims description 2
- LXSFGVACVWCFRS-UHFFFAOYSA-N dibutylazanium;n,n-dibutylcarbamate Chemical compound CCCC[NH2+]CCCC.CCCCN(C([O-])=O)CCCC LXSFGVACVWCFRS-UHFFFAOYSA-N 0.000 claims description 2
- HSFZJWNDRZGOKZ-UHFFFAOYSA-N dioctadecyl carbonate N-octadecyloctadecan-1-amine Chemical compound CCCCCCCCCCCCCCCCCCNCCCCCCCCCCCCCCCCCC.CCCCCCCCCCCCCCCCCCOC(=O)OCCCCCCCCCCCCCCCCCC HSFZJWNDRZGOKZ-UHFFFAOYSA-N 0.000 claims description 2
- WVDBSYPGKQYWSS-UHFFFAOYSA-N dioctadecylazanium;hydrogen carbonate Chemical compound OC([O-])=O.CCCCCCCCCCCCCCCCCC[NH2+]CCCCCCCCCCCCCCCCCC WVDBSYPGKQYWSS-UHFFFAOYSA-N 0.000 claims description 2
- 238000003618 dip coating Methods 0.000 claims description 2
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 2
- COIHLIVFSZCCQI-UHFFFAOYSA-N ethanamine;ethyl carbamate Chemical compound CCN.CCOC(N)=O COIHLIVFSZCCQI-UHFFFAOYSA-N 0.000 claims description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 2
- WAAUVORLARCBAF-UHFFFAOYSA-N ethylazanium;ethyl carbonate Chemical compound CC[NH3+].CCOC([O-])=O WAAUVORLARCBAF-UHFFFAOYSA-N 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical group 0.000 claims description 2
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- 125000005842 heteroatom Chemical group 0.000 claims description 2
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 2
- NZYYSSZGIPELSX-UHFFFAOYSA-N hydrogen carbonate;pyridin-1-ium Chemical compound OC(O)=O.C1=CC=NC=C1 NZYYSSZGIPELSX-UHFFFAOYSA-N 0.000 claims description 2
- ZMZDMBWJUHKJPS-UHFFFAOYSA-N hydrogen thiocyanate Chemical group SC#N ZMZDMBWJUHKJPS-UHFFFAOYSA-N 0.000 claims description 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- YNAVUWVOSKDBBP-UHFFFAOYSA-O morpholinium Chemical compound [H+].C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-O 0.000 claims description 2
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 2
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- BTDGNUHTDOIMKX-UHFFFAOYSA-N octadecan-1-amine octadecyl carbamate Chemical compound CCCCCCCCCCCCCCCCCCN.CCCCCCCCCCCCCCCCCCOC(N)=O BTDGNUHTDOIMKX-UHFFFAOYSA-N 0.000 claims description 2
- XKFXSYSPQZRVOY-UHFFFAOYSA-N octadecylazanium;octadecyl carbonate Chemical compound CCCCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCCCCOC([O-])=O XKFXSYSPQZRVOY-UHFFFAOYSA-N 0.000 claims description 2
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 claims description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical group OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/10—Silver compounds
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C211/00—Compounds containing amino groups bound to a carbon skeleton
- C07C211/65—Metal complexes of amines
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C271/00—Derivatives of carbamic acids, i.e. compounds containing any of the groups, the nitrogen atom not being part of nitro or nitroso groups
- C07C271/02—Carbamic acids; Salts of carbamic acids
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/005—Compounds containing elements of Groups 1 or 11 of the Periodic Table without C-Metal linkages
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- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/24—Electrically-conducting paints
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/08—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of metallic material
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- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
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Abstract
Description
Claims (15)
- 하기의 화학식 2로부터 선택되는 하나 이상의 은 화합물 및 하기 화학식 3 내지 화학식 5로부터 선택되는 하나 이상의 암모늄 카바메이트계 화합물 또는 암모늄 카보네이트계 화합물을 반응시켜 제조된 은과 암모늄 카바메이트계 화합물 또는 암모늄 카보네이트계 화합물로 이루어진 하기 화학식 1의 은 착체화합물을 알코올, 글리콜, 아세테이트, 에테르, 케톤, 지방족탄화수소, 방향족탄화수소 및 할로겐화 탄화수소로부터 선택되는 용매에 용해하여 제조한 은 착체 화합물 용액.[화학식 1]Ag[A]m[A는 화학식 3 내지 화학식 5 화합물이며, m은 0.7 내지 2.5이다.][화학식 2]AgnX[n은 1~4의 정수이고, X는 산소, 황, 할로겐, 시아노, 시아네이트, 카보네이트, 니트레이트, 나이트라이트, 설페이트, 포스페이트, 티오시아네이트, 클로레이트, 퍼클로레이트, 테트라플로로보레이트, 아세틸아세토네이트, 카복실레이트 및 그 유도체로 구성된 군에서 선택되는 치환기이다.][화학식 3][화학식 4][화학식 5][상기 R1, R2 , R3, R4, R5 및 R6는 서로 독립적으로 각각 수소, 지방족 또는 지환족 (C1-C30)알킬기, 아릴기, 아랄킬(aralkyl)기, 관능기가 치환된 (C1-C30)알킬기, 관능기가 치환된 아릴기, 고분자화합물기, 헤테로고리화합물 및 그들의 유도체에서 선택되는 치환기이거나, 서로 독립적으로 R1과 R2, R4와 R5는 서로 헤테로 원자가 포함되거나 포함되지 않은 알킬렌으로 연결되어 고리를 형성할 수 있다.]
- 제 1 항에 있어서,상기 용매가 메탄올, 에탄올, 이소프로판올, 부탄올, 에틸렌글리콜, 글리세린, 에틸아세테이트, 부틸아세테이트, 카비톨아세테이트, 디에틸에테르, 테트라히드로퓨란, 디옥산, 메틸에틸케톤, 아세톤, 헥산, 헵탄, 벤젠, 톨루엔, 클로로포름, 메틸렌클로라이드, 카본테트라클로라이드에서 선택되는 어느 하나 이상인 것을 특징으로 하는 은 착체 화합물 용액.
- 제 1 항에 있어서,상기 화학식 2의 은 화합물은 산화 은, 티오시아네이트화 은, 시안화 은, 시아네이트화 은, 탄산 은, 질산 은, 아질산 은, 황산 은, 인산 은, 과염소산화 은, 사불소보레이트화 은, 아세틸아세토네이트화 은, 초산 은, 젖산 은, 옥살산 은 및 그 유도체에서 선택되는 어느 하나 이상의 것인 것을 특징으로 하는 은 착체 화합물 용액.
- 제 1항에 있어서,상기 R1 및 R2는 탄소 수 1 내지 14개의 지방족 알킬기이고, R3, R4, R5 및 R6는 서로 독립적으로 수소 또는 탄소 수 1 내지 14개의 지방족 알킬기인 것을 특징으로 하는 은 착체 화합물 용액.
- 제 1 항에 있어서,상기 R1, R2, R3, R4, R5 및 R6는 서로 독립적으로 수소, 메틸, 에틸, 프로필, 이소프로필, 부틸, 이소부틸, 아밀, 헥실, 에틸헥실, 헵틸, 옥틸, 이소옥틸, 노닐, 데실, 도데실, 헥사데실, 옥타데실, 도코데실, 시클로프로필, 시클로펜틸, 시클로헥실, 알릴, 메톡시에틸, 메톡시프로필, 시아노에틸, 메톡시에톡시에틸, 메톡시에톡시에톡시에틸, 헥사메틸렌이민, 모폴린, 피페리딘, 피페라진, 피롤, 이미다졸, 피리딘, 카르복시메틸, 트리메톡시실릴프로필, 트리에톡시실릴프로필, 페닐, 메톡시페닐, 시아노페닐, 톨릴, 벤질, 폴리알릴아민, 폴리에틸렌아민 및 그들의 유도체에서 선택되는 것을 특징으로 하는 은 착체 화합물 용액.
- 제 1 항에 있어서,암모늄 카바메이트계 화합물은 암모늄 카바메이트, 에틸암모늄 에틸카바메이트, 이소프로필암모늄 이소프로필카바메이트, n-부틸암모늄 n-부틸카바메이트, 이소부틸암모늄 이소부틸카바메이트, t-부틸암모늄 t-부틸카바메이트, 2-에틸헥실암모늄 2-에틸헥실카바메이트, 옥타데실암모늄 옥타데실카바메이트, 2-메톡시에틸암모늄 2-메톡시에틸카바메이트, 2-시아노에틸암모늄 2-시아노에틸카바메이트, 디부 틸암모늄 디부틸카바메이트, 디옥타데실암모늄 디옥타데실카바메이트, 메틸데실암모늄 메틸데실카바메이트, 헥사메틸렌이미늄 헥사메틸렌이민카바메이트, 모폴리늄 모폴린카바메이트, 피리디늄 에틸헥실카바메이트, 트리에틸렌디아미늄 이소프로필바이카바메이트, 벤질암모늄 벤질카바메이트, 트리에톡시실릴프로필암모늄 트리에톡시실릴프로필카바메이트 및 그 유도체에서 선택되는 것을 특징으로 하는 은 착체 화합물 용액.
- 제 1 항에 있어서,암모늄 카보네이트계 화합물은 암모늄 카보네이트(ammonium carbonate), 암모늄 바이카보네이트(ammonium bicarbonate), 에틸암모늄 에틸카보네이트, 이소프로필암모늄 이소프로필카보네이트, 이소프로필암모늄 바이카보네이트, n-부틸암모늄 n-부틸카보네이트, 이소부틸암모늄 이소부틸카보네이트, t-부틸암모늄 t-부틸카보네이트, t-부틸암모늄 바이카보네이트, 2-에틸헥실암모늄 2-에틸헥실카보네이트, 2-에틸헥실암모늄 바이카보네이트, 2-메톡시에틸암모늄 2-메톡시에틸카보네이트, 2-메톡시에틸암모늄 바이카보네이트, 2-시아노에틸암모늄 2-시아노에틸카보네이트, 2-시아노에틸암모늄 바이카보네이트, 옥타데실암모늄 옥타데실카보네이트, 디부틸암모늄 디부틸카보네이트, 디옥타데실암모늄 디옥타데실카보네이트, 디옥타데실암모늄 바이카보네이트, 메틸데실암모늄 메틸데실카보네이트, 헥사메틸렌이미늄 헥사메틸렌이민카보네이트, 모폴리늄 모폴린카보네이트, 벤질암모늄 벤질카보네 이트, 트리에톡시실릴프로필암모늄 트리에톡시실릴프로필카보네이트, 피리디늄 바이카보네이트, 트리에틸렌디아미늄 이소프로필카보네이트, 트리에틸렌디아미늄 바이카보네이트 및 그 유도체에서 선택되는 것을 특징으로 하는 은 착체 화합물 용액.
- 제 1 항에 있어서,화학식 2 화합물의 은 화합물은 산화 은, 탄산 은 또는 그 혼합물인 것을 특징으로 하는 은 착체 화합물 용액.
- 암모늄 카바메이트계 화합물이 1차 아민으로 구성된 알킬암모늄 알킬카바메이트인 것을 특징으로 하는 은 착체 화합물 용액.
- 제 1항 내지 제 9항에서 선택되는 어느 한 항에 따른 은과 암모늄 카바메이트계 화합물 또는 암모늄 카보네이트계 화합물로 이루어진 은 착체 화합물 용액을 이용하여 박막을 형성한 후, 산화처리, 환원처리, 열 처리, 화학증착, 플라즈마 증착, 스퍼터링, 전기도금, 리소그라피공정, 적외선, 전자 선 또는 레이저 처리를 하여 은 박막을 형성하는 방법.
- 제 10항에 있어서,상기 박막은 기판 상에 상기 은 착체 화합물 용액을 도포하여 형성하는 것을 특징으로 하는 은 박막을 형성하는 방법.
- 제 11항에 있어서,상기 기판은 유리, 실리콘, 폴리에스테르, 폴리이미드 또는 종이에서 선택되는 것을 특징으로 하는 은 박막을 형성하는 방법.
- 제 10항에 있어서,상기 열처리는 공기, 질소, 아르곤, 수소, 또는 이들의 혼합 가스 조건에서 진행시 키는 것을 특징으로 하는 은 박막을 형성하는 방법.
- 제 11항에 있어서,상기 도포는 스핀 코팅, 롤 코팅, 스프레이 코팅, 딥 코팅, 플로우 코팅으로부터 선택되는 도포방법인 것을 특징으로 하는 은 박막을 형성하는 방법.
- 제 11항에 있어서,상기 도포는 잉크젯 프린팅, 옵셋 프린팅, 스크린프린팅, 그라비아 프린팅, 플렉소 프린팅에서 선택되는 프린팅 방법에 의해 이루어지는 것을 특징으로 하는 은 박막을 형성하는 방법.
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