JP2011099757A5 - - Google Patents
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- Publication number
- JP2011099757A5 JP2011099757A5 JP2009254621A JP2009254621A JP2011099757A5 JP 2011099757 A5 JP2011099757 A5 JP 2011099757A5 JP 2009254621 A JP2009254621 A JP 2009254621A JP 2009254621 A JP2009254621 A JP 2009254621A JP 2011099757 A5 JP2011099757 A5 JP 2011099757A5
- Authority
- JP
- Japan
- Prior art keywords
- heating resistor
- fluid flow
- thermal fluid
- flow sensor
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 42
- 239000012530 fluid Substances 0.000 claims 26
- 239000000758 substrate Substances 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 6
- 229910052751 metal Inorganic materials 0.000 claims 6
- 239000002184 metal Substances 0.000 claims 6
- 230000001681 protective effect Effects 0.000 claims 4
- -1 tungsten nitride Chemical class 0.000 claims 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 229910017052 cobalt Inorganic materials 0.000 claims 2
- 239000010941 cobalt Substances 0.000 claims 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 229910021332 silicide Inorganic materials 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000010937 tungsten Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 claims 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims 1
- 229910021334 nickel silicide Inorganic materials 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 239000011574 phosphorus Substances 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims 1
- 229910021342 tungsten silicide Inorganic materials 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009254621A JP5406674B2 (ja) | 2009-11-06 | 2009-11-06 | 熱式流体流量センサおよびその製造方法 |
| US12/901,101 US8468883B2 (en) | 2009-11-06 | 2010-10-08 | Thermal type flow sensor having a humidity detection portion and an air flow detecting portion |
| EP10013570.6A EP2320200B1 (en) | 2009-11-06 | 2010-10-12 | Thermal type fluid flow sensor and fabricating method |
| CN2010105098968A CN102052942A (zh) | 2009-11-06 | 2010-10-13 | 热式流体流量传感器及其制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009254621A JP5406674B2 (ja) | 2009-11-06 | 2009-11-06 | 熱式流体流量センサおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011099757A JP2011099757A (ja) | 2011-05-19 |
| JP2011099757A5 true JP2011099757A5 (enExample) | 2012-09-20 |
| JP5406674B2 JP5406674B2 (ja) | 2014-02-05 |
Family
ID=43264709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009254621A Expired - Fee Related JP5406674B2 (ja) | 2009-11-06 | 2009-11-06 | 熱式流体流量センサおよびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8468883B2 (enExample) |
| EP (1) | EP2320200B1 (enExample) |
| JP (1) | JP5406674B2 (enExample) |
| CN (1) | CN102052942A (enExample) |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5276964B2 (ja) * | 2008-12-08 | 2013-08-28 | 日立オートモティブシステムズ株式会社 | 熱式流体流量センサおよびその製造方法 |
| JP5114463B2 (ja) * | 2009-09-25 | 2013-01-09 | 日立オートモティブシステムズ株式会社 | 発熱抵抗式空気流量測定装置 |
| US20110252882A1 (en) * | 2010-04-19 | 2011-10-20 | Honeywell International Inc. | Robust sensor with top cap |
| US8356514B2 (en) | 2011-01-13 | 2013-01-22 | Honeywell International Inc. | Sensor with improved thermal stability |
| JP5492834B2 (ja) * | 2011-07-26 | 2014-05-14 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
| DE102011088767A1 (de) * | 2011-12-15 | 2013-06-20 | Continental Automotive Gmbh | Verfahren zur Auswertung von Messsignalen eines Luftmassenmessers |
| DE102011089480A1 (de) | 2011-12-21 | 2013-06-27 | Robert Bosch Gmbh | Sensorvorrichtung zur Erfassung mindestens einer Eigenschaft eines strömenden fluiden Mediums |
| JP2013160706A (ja) * | 2012-02-08 | 2013-08-19 | Mitsubishi Electric Corp | 流量検出装置、並びに、流量検出装置の製造方法 |
| JP5675705B2 (ja) * | 2012-06-15 | 2015-02-25 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
| JP5675716B2 (ja) | 2012-06-29 | 2015-02-25 | 日立オートモティブシステムズ株式会社 | 熱式空気流量センサ |
| JP5883740B2 (ja) * | 2012-08-01 | 2016-03-15 | 日立オートモティブシステムズ株式会社 | 熱式空気流量センサ |
| DE102012219305B3 (de) * | 2012-10-23 | 2014-02-13 | Continental Automotive Gmbh | Luftmassenmesser mit einem Sensorelement |
| DE102012219304A1 (de) * | 2012-10-23 | 2014-04-24 | Continental Automotive Gmbh | Luftmassenmesser |
| DE102013101403B8 (de) * | 2012-12-21 | 2024-07-11 | Innovative Sensor Technology Ist Ag | Sensor zur Ermittlung einer Prozessgröße eines Mediums und Verfahren zur Herstellung des Sensors |
| JP5904959B2 (ja) * | 2013-03-08 | 2016-04-20 | 日立オートモティブシステムズ株式会社 | 熱式空気流量計 |
| US9170233B2 (en) | 2013-04-23 | 2015-10-27 | Ricoh Company, Ltd. | Magnetic permeability detector, developing device, image forming apparatus, and oscillation signal frequency calculation method therefor |
| CN104344857A (zh) * | 2013-08-05 | 2015-02-11 | 温州大学瓯江学院 | 利用单片机实现温湿度补偿的热式汽车空气流量计 |
| JP6021761B2 (ja) * | 2013-08-27 | 2016-11-09 | 日立オートモティブシステムズ株式会社 | ガスセンサ装置 |
| JP6035582B2 (ja) | 2013-10-30 | 2016-11-30 | 株式会社デンソー | 空気流量測定装置及びその製造方法 |
| WO2015151535A1 (ja) * | 2014-03-31 | 2015-10-08 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
| JP6243516B2 (ja) * | 2014-04-04 | 2017-12-06 | 日立オートモティブシステムズ株式会社 | 湿度検出装置 |
| JP6362913B2 (ja) * | 2014-04-28 | 2018-07-25 | 日立オートモティブシステムズ株式会社 | 熱式空気流量センサ |
| JP6201901B2 (ja) * | 2014-06-04 | 2017-09-27 | 株式会社デンソー | 空気流量測定装置 |
| JP6274021B2 (ja) * | 2014-06-10 | 2018-02-07 | 株式会社デンソー | 湿度測定装置 |
| US9513242B2 (en) * | 2014-09-12 | 2016-12-06 | Honeywell International Inc. | Humidity sensor |
| JP6686276B2 (ja) * | 2014-12-09 | 2020-04-22 | 株式会社デンソー | エアフロメータ |
| US10900921B2 (en) | 2015-01-20 | 2021-01-26 | Masco Corporation | Multi-functional water quality sensor |
| EP3252437A4 (en) * | 2015-01-30 | 2018-09-19 | Hitachi Automotive Systems, Ltd. | Physical quantity detection device and electronic device |
| WO2016134079A1 (en) | 2015-02-17 | 2016-08-25 | Honeywell International Inc. | Humidity sensor and method for manufacturing the sensor |
| US11004762B2 (en) * | 2015-09-04 | 2021-05-11 | Hitachi Automotive Systems, Ltd. | Semiconductor device, vehicle-mounted semiconductor device, and vehicle-mounted control device |
| JP6520636B2 (ja) * | 2015-10-16 | 2019-05-29 | 株式会社デンソー | 物理量センササブアセンブリおよび物理量測定装置 |
| DE102016206549A1 (de) * | 2016-04-19 | 2017-10-19 | Robert Bosch Gmbh | Sensorelement für thermische Anemometrie |
| DE102016108625A1 (de) * | 2016-05-10 | 2017-11-16 | Innovative Sensor Technology Ist Ag | Thermischer Durchflusssensor |
| EP3244201B1 (en) | 2016-05-13 | 2021-10-27 | Honeywell International Inc. | Fet based humidity sensor with barrier layer protecting gate dielectric |
| JP6747124B2 (ja) * | 2016-07-14 | 2020-08-26 | 株式会社デンソー | 流量センサ |
| CN107655534A (zh) * | 2016-07-26 | 2018-02-02 | 上海微联传感科技有限公司 | 空气流量传感器及其制造方法 |
| CN107764349A (zh) * | 2016-08-22 | 2018-03-06 | 上海微联传感科技有限公司 | 空气流量传感器及其制备方法 |
| DE112017002858T5 (de) * | 2016-08-26 | 2019-02-28 | Hitachi Automotive Systems, Ltd. | Thermisches Feuchtigkeitsmessgerät |
| GB2558896B (en) * | 2017-01-17 | 2019-10-09 | Cambridge Entpr Ltd | A single membane flow-pressure sensing device |
| JP6544365B2 (ja) * | 2017-02-08 | 2019-07-17 | 株式会社デンソー | 絶対湿度センサ |
| JP6798336B2 (ja) * | 2017-02-08 | 2020-12-09 | 株式会社デンソー | 絶対湿度センサ |
| US12163944B2 (en) | 2017-07-20 | 2024-12-10 | The Regents Of The University Of Michigan | Multi-functional water quality sensor |
| JP6993893B2 (ja) * | 2018-02-16 | 2022-02-10 | 日立Astemo株式会社 | 半導体素子及びそれを用いた流量測定装置 |
| JP6661678B2 (ja) * | 2018-02-23 | 2020-03-11 | 三菱電機株式会社 | 熱式検出センサ |
| KR20240001734A (ko) * | 2022-06-24 | 2024-01-04 | 삼성디스플레이 주식회사 | 표시장치 및 이의 제조 방법 |
| CN115824464A (zh) * | 2022-09-20 | 2023-03-21 | 河南中原光电测控技术有限公司 | 一种热通量传感器标定方法及装置 |
| CN116499517B (zh) * | 2023-02-13 | 2025-10-31 | 北京理工大学 | 一种cmos mems集成流量、气体/湿度传感器 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4966037A (en) * | 1983-09-12 | 1990-10-30 | Honeywell Inc. | Cantilever semiconductor device |
| JPS60142268A (ja) * | 1983-12-27 | 1985-07-27 | 株式会社山武 | 流速センサ |
| JPH0795076B2 (ja) * | 1989-05-23 | 1995-10-11 | 山武ハネウエル株式会社 | 流速センサ |
| JP2889909B2 (ja) * | 1993-08-10 | 1999-05-10 | リコーエレメックス株式会社 | 雰囲気計 |
| US5551283A (en) * | 1993-08-10 | 1996-09-03 | Ricoh Seiki Company, Ltd. | Atmosphere measuring device and flow sensor |
| JP3310430B2 (ja) * | 1993-11-26 | 2002-08-05 | 株式会社半導体エネルギー研究所 | 計測装置および計測方法 |
| JPH07229776A (ja) * | 1994-02-21 | 1995-08-29 | Hitachi Ltd | 空気流量測定装置 |
| JPH0972763A (ja) * | 1995-09-07 | 1997-03-18 | Ricoh Co Ltd | マイクロセンサ |
| JP3335860B2 (ja) * | 1997-01-16 | 2002-10-21 | 株式会社日立製作所 | 熱式空気流量計用測定素子及び熱式空気流量計 |
| JP3953156B2 (ja) * | 1997-10-27 | 2007-08-08 | 北陸電気工業株式会社 | 発熱型薄膜素子を備えたセンサ |
| DE19750496A1 (de) * | 1997-11-14 | 1999-05-20 | Bosch Gmbh Robert | Verfahren zur Bestimmung der von einer Brennkraftmaschine angesaugten Luft und Sensor für eine Brennkraftmaschine |
| JP4024368B2 (ja) * | 1997-12-19 | 2007-12-19 | 北陸電気工業株式会社 | 発熱型薄膜素子を備えたセンサ |
| US7360416B2 (en) * | 2005-07-07 | 2008-04-22 | Ricoh Company, Ltd. | Non-contact condensation detecting apparatus |
| JP4966526B2 (ja) * | 2005-09-07 | 2012-07-04 | 日立オートモティブシステムズ株式会社 | 流量センサ |
| JP4882732B2 (ja) * | 2006-12-22 | 2012-02-22 | 株式会社デンソー | 半導体装置 |
| JP2008170382A (ja) * | 2007-01-15 | 2008-07-24 | Hitachi Ltd | 熱式流体流量センサ及びその製造方法 |
| US7780343B2 (en) * | 2007-07-09 | 2010-08-24 | Siargo Ltd. | Micromachined gas and liquid concentration sensor and method of making the same |
| JP5276964B2 (ja) | 2008-12-08 | 2013-08-28 | 日立オートモティブシステムズ株式会社 | 熱式流体流量センサおよびその製造方法 |
-
2009
- 2009-11-06 JP JP2009254621A patent/JP5406674B2/ja not_active Expired - Fee Related
-
2010
- 2010-10-08 US US12/901,101 patent/US8468883B2/en not_active Expired - Fee Related
- 2010-10-12 EP EP10013570.6A patent/EP2320200B1/en not_active Not-in-force
- 2010-10-13 CN CN2010105098968A patent/CN102052942A/zh active Pending
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