CN102052942A - 热式流体流量传感器及其制造方法 - Google Patents

热式流体流量传感器及其制造方法 Download PDF

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Publication number
CN102052942A
CN102052942A CN2010105098968A CN201010509896A CN102052942A CN 102052942 A CN102052942 A CN 102052942A CN 2010105098968 A CN2010105098968 A CN 2010105098968A CN 201010509896 A CN201010509896 A CN 201010509896A CN 102052942 A CN102052942 A CN 102052942A
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CN
China
Prior art keywords
heating resistor
film
resistor
metal film
flow sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010105098968A
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English (en)
Chinese (zh)
Inventor
佐久间宪之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
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Hitachi Automotive Systems Ltd
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Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Publication of CN102052942A publication Critical patent/CN102052942A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN2010105098968A 2009-11-06 2010-10-13 热式流体流量传感器及其制造方法 Pending CN102052942A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-254621 2009-11-06
JP2009254621A JP5406674B2 (ja) 2009-11-06 2009-11-06 熱式流体流量センサおよびその製造方法

Publications (1)

Publication Number Publication Date
CN102052942A true CN102052942A (zh) 2011-05-11

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CN2010105098968A Pending CN102052942A (zh) 2009-11-06 2010-10-13 热式流体流量传感器及其制造方法

Country Status (4)

Country Link
US (1) US8468883B2 (enExample)
EP (1) EP2320200B1 (enExample)
JP (1) JP5406674B2 (enExample)
CN (1) CN102052942A (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104126105A (zh) * 2011-12-21 2014-10-29 罗伯特·博世有限公司 用于检测流动流体介质的至少湿度的传感器装置
CN104344857A (zh) * 2013-08-05 2015-02-11 温州大学瓯江学院 利用单片机实现温湿度补偿的热式汽车空气流量计
CN106164657A (zh) * 2014-04-04 2016-11-23 日立汽车系统株式会社 湿度检测装置
CN107655534A (zh) * 2016-07-26 2018-02-02 上海微联传感科技有限公司 空气流量传感器及其制造方法
CN107764349A (zh) * 2016-08-22 2018-03-06 上海微联传感科技有限公司 空气流量传感器及其制备方法
CN108028226A (zh) * 2015-09-04 2018-05-11 日立汽车系统株式会社 半导体装置、车载用半导体装置以及车载控制装置
CN108458762A (zh) * 2013-03-08 2018-08-28 日立汽车系统株式会社 热式空气流量计
CN111684240A (zh) * 2018-02-16 2020-09-18 日立汽车系统株式会社 半导体元件及使用该半导体元件的流量测定装置
CN115824464A (zh) * 2022-09-20 2023-03-21 河南中原光电测控技术有限公司 一种热通量传感器标定方法及装置
CN116499517A (zh) * 2023-02-13 2023-07-28 北京理工大学 一种cmos mems集成流量、气体/湿度传感器

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JP5276964B2 (ja) * 2008-12-08 2013-08-28 日立オートモティブシステムズ株式会社 熱式流体流量センサおよびその製造方法
JP5114463B2 (ja) * 2009-09-25 2013-01-09 日立オートモティブシステムズ株式会社 発熱抵抗式空気流量測定装置
US20110252882A1 (en) * 2010-04-19 2011-10-20 Honeywell International Inc. Robust sensor with top cap
US8356514B2 (en) 2011-01-13 2013-01-22 Honeywell International Inc. Sensor with improved thermal stability
JP5492834B2 (ja) * 2011-07-26 2014-05-14 日立オートモティブシステムズ株式会社 熱式流量計
DE102011088767A1 (de) * 2011-12-15 2013-06-20 Continental Automotive Gmbh Verfahren zur Auswertung von Messsignalen eines Luftmassenmessers
JP2013160706A (ja) * 2012-02-08 2013-08-19 Mitsubishi Electric Corp 流量検出装置、並びに、流量検出装置の製造方法
JP5675705B2 (ja) * 2012-06-15 2015-02-25 日立オートモティブシステムズ株式会社 熱式流量計
JP5675716B2 (ja) 2012-06-29 2015-02-25 日立オートモティブシステムズ株式会社 熱式空気流量センサ
JP5883740B2 (ja) * 2012-08-01 2016-03-15 日立オートモティブシステムズ株式会社 熱式空気流量センサ
DE102012219304A1 (de) * 2012-10-23 2014-04-24 Continental Automotive Gmbh Luftmassenmesser
DE102012219305B3 (de) * 2012-10-23 2014-02-13 Continental Automotive Gmbh Luftmassenmesser mit einem Sensorelement
DE102013101403B8 (de) * 2012-12-21 2024-07-11 Innovative Sensor Technology Ist Ag Sensor zur Ermittlung einer Prozessgröße eines Mediums und Verfahren zur Herstellung des Sensors
US9170233B2 (en) 2013-04-23 2015-10-27 Ricoh Company, Ltd. Magnetic permeability detector, developing device, image forming apparatus, and oscillation signal frequency calculation method therefor
JP6021761B2 (ja) * 2013-08-27 2016-11-09 日立オートモティブシステムズ株式会社 ガスセンサ装置
JP6035582B2 (ja) * 2013-10-30 2016-11-30 株式会社デンソー 空気流量測定装置及びその製造方法
CN106164624B (zh) * 2014-03-31 2017-11-21 日立汽车系统株式会社 物理量检测装置
JP6362913B2 (ja) * 2014-04-28 2018-07-25 日立オートモティブシステムズ株式会社 熱式空気流量センサ
JP6201901B2 (ja) * 2014-06-04 2017-09-27 株式会社デンソー 空気流量測定装置
JP6274021B2 (ja) 2014-06-10 2018-02-07 株式会社デンソー 湿度測定装置
US9513242B2 (en) * 2014-09-12 2016-12-06 Honeywell International Inc. Humidity sensor
JP6686276B2 (ja) * 2014-12-09 2020-04-22 株式会社デンソー エアフロメータ
US10900921B2 (en) * 2015-01-20 2021-01-26 Masco Corporation Multi-functional water quality sensor
US11079262B2 (en) 2015-01-30 2021-08-03 Hitachi Automotive Systems, Ltd. Physical quantity detection apparatus and electronic apparatus
EP3259581B1 (en) 2015-02-17 2020-01-29 Honeywell International Inc. Humidity sensor and method for manufacturing the sensor
JP6520636B2 (ja) * 2015-10-16 2019-05-29 株式会社デンソー 物理量センササブアセンブリおよび物理量測定装置
DE102016206549A1 (de) * 2016-04-19 2017-10-19 Robert Bosch Gmbh Sensorelement für thermische Anemometrie
DE102016108625A1 (de) * 2016-05-10 2017-11-16 Innovative Sensor Technology Ist Ag Thermischer Durchflusssensor
EP3244201B1 (en) 2016-05-13 2021-10-27 Honeywell International Inc. Fet based humidity sensor with barrier layer protecting gate dielectric
JP6747124B2 (ja) * 2016-07-14 2020-08-26 株式会社デンソー 流量センサ
US11092559B2 (en) 2016-08-26 2021-08-17 Hitachi Automotive Systems, Ltd. Thermal humidity measuring device
GB2558896B (en) * 2017-01-17 2019-10-09 Cambridge Entpr Ltd A single membane flow-pressure sensing device
JP6798336B2 (ja) * 2017-02-08 2020-12-09 株式会社デンソー 絶対湿度センサ
JP6544365B2 (ja) * 2017-02-08 2019-07-17 株式会社デンソー 絶対湿度センサ
US12163944B2 (en) 2017-07-20 2024-12-10 The Regents Of The University Of Michigan Multi-functional water quality sensor
JP6661678B2 (ja) * 2018-02-23 2020-03-11 三菱電機株式会社 熱式検出センサ
KR20240001734A (ko) * 2022-06-24 2024-01-04 삼성디스플레이 주식회사 표시장치 및 이의 제조 방법

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JPH10197305A (ja) * 1997-01-16 1998-07-31 Hitachi Ltd 熱式空気流量計及び熱式空気流量計用の測定素子
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US20090016403A1 (en) * 2007-07-09 2009-01-15 Chih-Chang Chen Micromachined gas and liquid concentration sensor and method of making the same

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104126105A (zh) * 2011-12-21 2014-10-29 罗伯特·博世有限公司 用于检测流动流体介质的至少湿度的传感器装置
CN108458762A (zh) * 2013-03-08 2018-08-28 日立汽车系统株式会社 热式空气流量计
CN108458762B (zh) * 2013-03-08 2020-05-15 日立汽车系统株式会社 热式空气流量计
CN104344857A (zh) * 2013-08-05 2015-02-11 温州大学瓯江学院 利用单片机实现温湿度补偿的热式汽车空气流量计
CN106164657B (zh) * 2014-04-04 2020-12-08 日立汽车系统株式会社 湿度检测装置
CN106164657A (zh) * 2014-04-04 2016-11-23 日立汽车系统株式会社 湿度检测装置
CN108028226A (zh) * 2015-09-04 2018-05-11 日立汽车系统株式会社 半导体装置、车载用半导体装置以及车载控制装置
CN107655534A (zh) * 2016-07-26 2018-02-02 上海微联传感科技有限公司 空气流量传感器及其制造方法
CN107764349A (zh) * 2016-08-22 2018-03-06 上海微联传感科技有限公司 空气流量传感器及其制备方法
CN111684240A (zh) * 2018-02-16 2020-09-18 日立汽车系统株式会社 半导体元件及使用该半导体元件的流量测定装置
CN111684240B (zh) * 2018-02-16 2022-03-08 日立安斯泰莫株式会社 半导体元件及使用该半导体元件的流量测定装置
CN115824464A (zh) * 2022-09-20 2023-03-21 河南中原光电测控技术有限公司 一种热通量传感器标定方法及装置
CN116499517A (zh) * 2023-02-13 2023-07-28 北京理工大学 一种cmos mems集成流量、气体/湿度传感器

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Publication number Publication date
JP5406674B2 (ja) 2014-02-05
US20110107832A1 (en) 2011-05-12
JP2011099757A (ja) 2011-05-19
EP2320200A1 (en) 2011-05-11
EP2320200B1 (en) 2017-09-20
US8468883B2 (en) 2013-06-25

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Application publication date: 20110511