JP2010519754A - 半導体素子およびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
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- 230000015556 catabolic process Effects 0.000 description 3
- 230000005533 two-dimensional electron gas Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Abstract
Description
10 HEMT素子
18 活性面
19 2DEG
20 基板
22 核形成層(Nukleationsschicht)
24 バッファ層
26 バリヤ層
28 ドレイン電極とドレインパッド
30 ソース電極とソースパッド
32 ゲート
33 ゲート電極とゲートパッド
34 ゲートフィールドプレート
36 パッシベーション層
38 保護膜
50 フィールドプレート
52 フィールドプレート
54 フィールドプレート
56 フィールドプレート
58 フィールドプレート
60 フィールドプレート
Lp フィールドプレート:周期的配置の長さ
Ls 2つの隣接するフィールドプレートの間の距離
LI フィールドプレートの長さ
Lgf ゲートフィールドプレートの長さ
Lg ゲート長
tp1 パッシベーション層の厚さ
tp2 保護膜の厚さ
Claims (20)
- 以下のステップで半導体素子を製造する方法であって、
−基板(20)を準備するステップであって、この上に半導体物質からなる少なくとも1つの層(24、26)を含む活性層構造を設け、ここで、この活性層構造(26)はソースコンタクト(30)とドレインコンタクト(28)とに接続されており、そして前記ソースコンタクト(30)と前記ドレインコンタクト(28)とは互いに離されているステップと、
−ゲートコンタクト(32)を前記活性層構造(26)の上に堆積するステップであって、
ここで、前記ゲートコンタクト(32)の少なくとも一部がソースコンタクト(30)とドレインコンタクト(28)の間に配置されているステップと、
−前記ゲートコンタクト(32)の上にゲートフィールドプレート(34)を堆積するステップであって、ここで、前記ゲートフィールドプレート(34)は前記ゲートコンタクト(32)と電気的に接続されているステップを含み、
追加的に少なくとも2つの分離したフィールドプレート(50、52、54、56、58、60)が活性層構造(24、26)の上に同時に形成されることを特徴とする半導体素子を製造する方法。 - 請求項1に記載の方法において、
前記フィールドプレート(32、50、52、54、56、58、60)は光リソグラフィーの方法を用いて形成されることを特徴とする方法。 - 請求項1または2に記載の方法において、
前記追加のフィールドプレート(50、52、54、56、58、60)は、前記ゲートコンタクト(32)の形成のためのプロセスと同時に、および/または前記ゲートフィールドプレート(34)の形成のためのプロセスと同時に、形成されることを特徴とする方法。 - 請求項1から3のいずれか1項に記載の方法において、
前記追加のフィールドプレート(50、52、54、56、58、60)の堆積の前に、前記活性層構造(24、26)の上にパッシベーション層(36)を堆積し、そして前記追加のフィールドプレート(50、52、54、56、58、60)が前記パッシベーション層(36)の上に堆積されることを特徴とする方法。 - 請求項1から4のいずれか1項に記載の方法において、
前記の少なくとも2つのフィールドプレート(50、52、54、56、58)がストライプ状かつ互いに平行に形成されることを特徴とする方法。 - 請求項1から5のいずれか1項に記載の方法において、
前記活性層構造は第1の半導体物質からなる第1の層(24)と、第2の半導体物質からなる第2の層(26)とを備え、そして前記第1の半導体層のバンドギャップは前記第2の半導体物質のバンドギャップと異なり、および/または前記第1の半導体物質の自発分極または前記第1の半導体物質のピエゾ電気分極は、前記第2の半導体物質の自発分極または前記第2の半導体物質のピエゾ電気分極と異なり、そして前記第1の半導体物質と前記第2の半導体物質は、前記第1の層(24)と前記第2の層(26)の間の境界層で2次元電子ガス(19)が形成されるように選択されていることを特徴とする方法。 - 請求項1から6のいずれか1項に記載の方法において、
少なくとも2つのフィールドプレート(50、52、54、60)が異なる電位(28、30、32)に接続されていることを特徴とする方法。 - 請求項7に記載の方法において、
少なくとも1つのフィールドプレート(60)が前記ドレインコンタクト(28)と接続され、および/または少なくとも1つのフィールドプレート(50)が前記ゲートコンタクト(32)と接続され、および/または少なくとも1つのフィールドプレート(52、54)が前記ソースコンタクト(30)と接続されていることを特徴とする方法。 - 請求項1から8のいずれか1項に記載の方法において、
少なくとも1つのフィールドプレート(60)がグラウンドフリーに設定されていることを特徴とする方法。 - 請求項1から9のいずれか1項に記載の方法において、
前記ゲートフィールドプレート(34)および前記少なくとも2つのフィールドプレート(50、52、54、56、58、60)が保護フィルム(38)で被覆されていることを特徴とする方法。 - 半導体物質からなる少なくとも1つの層(24、26)を含む活性層構造が設けられる基板(20)であって、この活性層構造(24、26)の上にソースコンタクト(30)とドレインコンタクト(28)とが配置されており、そして前記ソースコンタクト(30)と前記ドレインコンタクト(28)とは互いに離されている基板(20)と、
少なくとも一部がソースコンタクト(30)とドレインコンタクト(28)の間の前記活性層構造(24、26)の上に配置されているゲートコンタクト(32)と、
前記ゲートコンタクト(32)と電気的に接続されているゲートフィールドプレート(34)とを備え、
追加的に少なくとも2つの分離したフィールドプレート(50、52、54、56、58、60)が前記活性層構造(24、26)の上に配置されることを特徴とする半導体素子。 - 請求項11に記載の半導体素子において、
前記少なくとも2つのフィールドプレート(50、52、54、56、58)がストライプ状かつ互いに平行に形成されることを特徴とする半導体素子。 - 請求項11または12に記載の半導体素子において、
少なくとも2つの追加のフィールドプレート(56、58)は互いに隣接し、直接前記活性層(26)の上に配置されることを特徴とする半導体素子。 - 請求項11から13のいずれか1項に記載の半導体素子において、
前記活性層構造(24、26)と前記追加の複数のフィールドプレート(50、52、54)との間に、パッシベーション層が配置されていることを特徴とする半導体素子。 - 請求項14に記載の半導体素子において、
少なくとも2つの追加のフィールドプレート(50、52、54)は互いに隣接し、直接前記パッシベーション層の上に配置されていることを特徴とする半導体素子。 - 請求項11または15に記載の半導体素子において、
前記活性層構造は第1の半導体物質からなる第1の層(24)と、第2の半導体物質からなる第2の層(26)とを備え、そして前記第1の半導体層のバンドギャップは前記第2の半導体物質のバンドギャップと異なり、および/または前記第1の半導体物質の自発分極または前記第1の半導体物質のピエゾ電気分極は、前記第2の半導体物質の自発分極または前記第2の半導体物質のピエゾ電気分極と異なり、そして前記第1の半導体物質と前記第2の半導体物質は、前記第1の層(24)と前記第2の層(26)の間の境界層で2次元電子ガス(19)が形成されるように選択されていることを特徴とする方法。 - 請求項11から16のいずれか1項に記載の半導体素子において、
少なくとも2つのフィールドプレート(50、52、54、60)が異なる電位(28、30、32)に接続されていることを特徴とする半導体素子。 - 請求項11から17のいずれか1項に記載の半導体素子において、
少なくとも1つのフィールドプレート(60)が前記ドレインコンタクト(28)と接続され、および/または少なくとも1つのフィールドプレート(50)が前記ゲートコンタクト(32)と接続され、および/または少なくとも1つのフィールドプレート(52、54)が前記ソースコンタクト(30)と接続されていることを特徴とする半導体素子。 - 請求項11から18のいずれか1項に記載の半導体素子において、
少なくとも1つのフィールドプレート(60)がグラウンドフリーに設定されていることを特徴とする半導体素子。 - 請求項11から19のいずれか1項に記載の半導体素子において、
前記ゲートフィールドプレート(34)と前記少なくとも2つのフィールドプレート(50、52、54、56、58、60)が保護フィルム(38)で被覆されていることを特徴とする半導体素子。
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