JP2010504422A - 廃棄流を搬送するための装置 - Google Patents
廃棄流を搬送するための装置 Download PDFInfo
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- 239000007789 gas Substances 0.000 claims description 50
- 238000010926 purge Methods 0.000 claims description 13
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
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- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
- Y10T137/86083—Vacuum pump
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
- Y10T137/86131—Plural
- Y10T137/86163—Parallel
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- Chemical Vapour Deposition (AREA)
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- Refuse Collection And Transfer (AREA)
Abstract
【選択図】 図3
Description
・水素、これは極めて少量であってもスパッタリングされた膜の脆性を生じさせる可能性がある;
・ヘリウム、これが存在すると、雰囲気の熱伝達特性に影響を与え、膜のバルク特性に影響を及ぼす;
・水、これはプロセスチャンバ内で前駆体材料と反応することができるので、極めて有害となる可能性がある;
汚染物質が軽ガス、すなわち水素などの比較的小さな分子量を有するガスである場合、汚染が特に顕著になる。この軽ガスは、チャンバ12から発生し、ターボ分子真空ポンプ14を介して排気導管18内に搬送されることがある。排気導管8、18間の接続に起因して、この軽ガスは、排気導管8からターボ分子真空ポンプ4を経由してチャンバ2内に逆方向に移動する可能性がある。
第1のチャンバから排気された廃棄流を受け入れる入口と、出口とを含む第1の導管手段と、
第2のチャンバから排気された廃棄流を受け入れる入口と、第1の導管手段の出口と連通した出口とを含む第2の導管手段と、
を備え、
第1の導管手段は、該第1の導管手段の一部の断面積を局所的に減少させる手段を含み、第2のチャンバから排気された廃棄流の成分が第1チャンバに向かう移動を阻止する程度にまで、第1の導管手段の出口に向かって搬送されるガスの局所密度を増大させるようにすることを特徴とする。
ポンプ装置を図3に示す。ポンプ装置は、例えば、チャンバ22の出口に接続された入口を有するターボ分子真空ポンプ20である2次ポンプと、例えば、チャンバ32の出口に接続された入口を有するターボ分子真空ポンプ30である2次ポンプとを備える。
Claims (18)
- 第1及び第2のチャンバから排気された廃棄流を搬送する装置であって、
前記第1のチャンバから排気された廃棄流を受け入れる入口と、出口とを含む第1の導管手段と、
前記第2のチャンバから排気された廃棄流を受け入れる入口と、出口とを含む第2の導管手段と、を備え、
前記第1の導管手段及び前記第2の導管手段は、連通状態にあり、
前記第1の導管手段は、前記第1の導管手段の一部の断面積を局所的に減少させる手段を含み、前記第1の導管手段の出口に向かって搬送されるガスの局所密度を、前記第2のチャンバから排気された前記廃棄流の成分が前記第1チャンバに向かって移動するのを阻止する程度にまで増大させる、
ことを特徴とする装置。 - 前記第1の導管手段の一部の断面積を局所的に減少させる手段が流れ絞り部を含む、
請求項1に記載の装置。 - 前記流れ絞り部は、開口プレートである、
請求項2に記載の装置。 - 前記第1の導管手段は、前記流れ絞り部の上流側に配置されたガスポートと、前記ガスポートにパージガスを供給する手段とを含む、
請求項2或いは請求項3に記載の装置。 - 前記パージガスが窒素である、
請求項4に記載の装置。 - 前記パージガスがアルゴンである、
請求項4に記載の装置。 - 前記廃棄流の前記成分がガス状成分である、
請求項1から請求項6の何れか1項に記載の装置。 - 前記ガス状成分が軽ガスである、
請求項7に記載の装置。 - 前記ガス状成分が水素である、
請求項8に記載の装置。 - 前記ガス状成分がヘリウムである、
請求項8に記載の装置。 - 前記廃棄流の成分が蒸気成分である、
請求項1から請求項6の何れか1項に記載の装置。 - 前記廃棄流の成分が固体成分である、
請求項1から請求項6の何れか1項に記載の装置。 - 前記第1の導管手段及び第2の導管手段からの前記廃棄流を受け入れるための共通の排気導管を備える、
請求項1から請求項12の何れか1項に記載の装置。 - 請求項1から請求項13の何れか1項に記載の装置と、
第1のチャンバを真空排気し且つ前記第1の導管手段の入口に接続された出口を有する第1の真空ポンプと、
第2のチャンバを真空排気し且つ前記第2の導管手段の入口に接続された出口を有する第2の真空ポンプと、
を備えるポンプ装置。 - 前記第1の真空ポンプと前記第2の真空ポンプとは、各々2次真空ポンプである、
請求項14に記載のポンプ装置。 - 前記2次真空ポンプは、ターボ分子真空ポンプである、
請求項15に記載のポンプ装置。 - 前記第1の導管手段及び第2の導管手段の各々の出口に接続された1次ポンプを備える、
請求項14から請求項16の何れかに記載のポンプ装置。 - 前記第1の真空ポンプと前記第2の真空ポンプとは、各々1次ポンプである、
請求項14に記載のポンプ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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GB0615722.6 | 2006-08-08 | ||
GB0615722A GB0615722D0 (en) | 2006-08-08 | 2006-08-08 | Apparatus for conveying a waste stream |
PCT/GB2007/050414 WO2008017880A1 (en) | 2006-08-08 | 2007-07-19 | Apparatus for conveying a waste stream |
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JP2010504422A true JP2010504422A (ja) | 2010-02-12 |
JP5542440B2 JP5542440B2 (ja) | 2014-07-09 |
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JP2009523351A Active JP5542440B2 (ja) | 2006-08-08 | 2007-07-19 | 廃棄流を搬送するための装置 |
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US (1) | US8684031B2 (ja) |
EP (1) | EP2049702B1 (ja) |
JP (1) | JP5542440B2 (ja) |
KR (1) | KR101374040B1 (ja) |
GB (1) | GB0615722D0 (ja) |
SG (1) | SG176454A1 (ja) |
TW (1) | TWI403660B (ja) |
WO (1) | WO2008017880A1 (ja) |
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JP2022009504A (ja) * | 2017-12-05 | 2022-01-14 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP2023033356A (ja) * | 2021-10-26 | 2023-03-10 | 東京エレクトロン株式会社 | プラズマ処理装置 |
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US20100126605A1 (en) | 2010-05-27 |
TW200819668A (en) | 2008-05-01 |
KR20090046823A (ko) | 2009-05-11 |
JP5542440B2 (ja) | 2014-07-09 |
US8684031B2 (en) | 2014-04-01 |
WO2008017880A9 (en) | 2009-03-05 |
KR101374040B1 (ko) | 2014-03-12 |
EP2049702B1 (en) | 2013-07-03 |
WO2008017880A1 (en) | 2008-02-14 |
TWI403660B (zh) | 2013-08-01 |
SG176454A1 (en) | 2011-12-29 |
GB0615722D0 (en) | 2006-09-20 |
EP2049702A1 (en) | 2009-04-22 |
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