JP2010251693A5 - - Google Patents
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- Publication number
- JP2010251693A5 JP2010251693A5 JP2009220369A JP2009220369A JP2010251693A5 JP 2010251693 A5 JP2010251693 A5 JP 2010251693A5 JP 2009220369 A JP2009220369 A JP 2009220369A JP 2009220369 A JP2009220369 A JP 2009220369A JP 2010251693 A5 JP2010251693 A5 JP 2010251693A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive metal
- layer
- metal electrode
- doped layer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 77
- 239000002184 metal Substances 0.000 claims description 77
- 239000004065 semiconductor Substances 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 6
- 230000017525 heat dissipation Effects 0.000 claims 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 229910018572 CuAlO2 Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- -1 LaCuOS Inorganic materials 0.000 description 1
- 229910007486 ZnGa2O4 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/422,027 US7952106B2 (en) | 2009-04-10 | 2009-04-10 | Light emitting diode device having uniform current distribution and method for forming the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010251693A JP2010251693A (ja) | 2010-11-04 |
| JP2010251693A5 true JP2010251693A5 (enExample) | 2014-01-23 |
Family
ID=42582605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009220369A Pending JP2010251693A (ja) | 2009-04-10 | 2009-09-25 | 発光ダイオードデバイスおよびその製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US7952106B2 (enExample) |
| EP (1) | EP2239791A3 (enExample) |
| JP (1) | JP2010251693A (enExample) |
| KR (1) | KR20100113008A (enExample) |
| CN (1) | CN101859849B (enExample) |
| TW (1) | TWI387136B (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201448263A (zh) | 2006-12-11 | 2014-12-16 | 美國加利福尼亞大學董事會 | 透明發光二極體 |
| US7952106B2 (en) * | 2009-04-10 | 2011-05-31 | Everlight Electronics Co., Ltd. | Light emitting diode device having uniform current distribution and method for forming the same |
| US20100327300A1 (en) * | 2009-06-25 | 2010-12-30 | Koninklijke Philips Electronics N.V. | Contact for a semiconductor light emitting device |
| KR101093120B1 (ko) * | 2009-11-16 | 2011-12-13 | 서울옵토디바이스주식회사 | 전류분산을 위한 전극 연장부들을 갖는 발광 다이오드 |
| KR101625125B1 (ko) * | 2009-12-29 | 2016-05-27 | 서울바이오시스 주식회사 | 전극 연장부들을 갖는 발광 다이오드 |
| US8502192B2 (en) * | 2010-01-12 | 2013-08-06 | Varian Semiconductor Equipment Associates, Inc. | LED with uniform current spreading and method of fabrication |
| JP2012216712A (ja) * | 2011-03-28 | 2012-11-08 | Nitto Denko Corp | 発光ダイオード装置の製造方法および発光ダイオード素子 |
| TWI453968B (zh) * | 2011-05-20 | 2014-09-21 | Huga Optotech Inc | 半導體發光結構 |
| CN102800778B (zh) * | 2011-05-27 | 2015-03-18 | 东莞市福地电子材料有限公司 | 一种芯片倒装的发光二极管及其制造方法 |
| TWI606618B (zh) * | 2012-01-03 | 2017-11-21 | Lg伊諾特股份有限公司 | 發光裝置 |
| US20130285010A1 (en) * | 2012-04-27 | 2013-10-31 | Phostek, Inc. | Stacked led device with posts in adhesive layer |
| KR101978968B1 (ko) * | 2012-08-14 | 2019-05-16 | 삼성전자주식회사 | 반도체 발광소자 및 발광장치 |
| JP2014127565A (ja) * | 2012-12-26 | 2014-07-07 | Toyoda Gosei Co Ltd | 半導体発光素子 |
| KR101958419B1 (ko) * | 2013-01-29 | 2019-03-14 | 삼성전자 주식회사 | 반도체 발광 소자 |
| CN103579478B (zh) * | 2013-11-08 | 2016-05-18 | 中国科学院半导体研究所 | 制作倒装集成led芯片级光源模组的方法 |
| CN103824848B (zh) * | 2014-01-16 | 2017-03-15 | 大连德豪光电科技有限公司 | Led显示屏及其制作方法 |
| US10700665B2 (en) | 2015-12-04 | 2020-06-30 | Intel Corporation | Film bulk acoustic resonator (FBAR) devices for high frequency RF filters |
| JP6942589B2 (ja) * | 2017-09-27 | 2021-09-29 | 旭化成株式会社 | 半導体発光装置および紫外線発光モジュール |
| CN108257987B (zh) * | 2017-11-30 | 2020-08-11 | 武汉高芯科技有限公司 | 焦平面阵列探测器及其制备方法 |
| FR3078442B1 (fr) * | 2018-02-26 | 2023-02-10 | Valeo Vision | Source lumineuse electroluminescente destinee a etre alimentee par une source de tension |
| CN108258089A (zh) * | 2018-03-23 | 2018-07-06 | 广东省半导体产业技术研究院 | 发光二极管结构制作方法及发光二极管结构 |
| JP6912731B2 (ja) * | 2018-07-31 | 2021-08-04 | 日亜化学工業株式会社 | 半導体発光素子 |
| CN109244209B (zh) * | 2018-08-06 | 2024-02-13 | 厦门乾照光电股份有限公司 | 发光二极管的倒装芯片及其制造方法和蚀刻方法 |
| CN110957341B (zh) * | 2018-09-27 | 2022-07-19 | 成都辰显光电有限公司 | 驱动背板及其制备方法、Micro-LED芯片及其制备方法和显示装置 |
| CN111129275B (zh) * | 2019-12-31 | 2024-06-14 | 广东晶科电子股份有限公司 | 维修用倒装微发光二极管及其用于模组修复的方法 |
| US11592166B2 (en) | 2020-05-12 | 2023-02-28 | Feit Electric Company, Inc. | Light emitting device having improved illumination and manufacturing flexibility |
| US11876042B2 (en) | 2020-08-03 | 2024-01-16 | Feit Electric Company, Inc. | Omnidirectional flexible light emitting device |
| CN113270526B (zh) * | 2021-01-05 | 2022-06-17 | 朗明纳斯光电(厦门)有限公司 | 发光二极管、发光装置及其投影仪 |
| CN112420888B (zh) * | 2021-01-21 | 2021-04-23 | 华灿光电(浙江)有限公司 | 紫外发光二极管外延片及其制备方法 |
Family Cites Families (71)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58176938A (ja) | 1982-04-12 | 1983-10-17 | Nippon Telegr & Teleph Corp <Ntt> | 微細パタ−ン形成法 |
| JPH0812350B2 (ja) * | 1986-12-19 | 1996-02-07 | 旭硝子株式会社 | 液晶表示装置 |
| US5101099A (en) * | 1990-06-15 | 1992-03-31 | Fuji Xerox Co., Ltd. | Image reading device with different reflectivity coefficients in a transparent layer and a substrate |
| JPH05145049A (ja) * | 1991-11-19 | 1993-06-11 | Yamatake Honeywell Co Ltd | 光電変換装置 |
| US5418395A (en) * | 1992-04-07 | 1995-05-23 | Nippon Sheet Glass Co., Ltd. | Semiconductor light emitting device |
| GB9322246D0 (en) * | 1993-10-28 | 1993-12-15 | Hitachi Europ Ltd | Improved metal-semiconductor-metal photodetector |
| US5461246A (en) * | 1994-05-12 | 1995-10-24 | Regents Of The University Of Minnesota | Photodetector with first and second contacts |
| US5804918A (en) * | 1994-12-08 | 1998-09-08 | Nippondenso Co., Ltd. | Electroluminescent device having a light reflecting film only at locations corresponding to light emitting regions |
| JP3704774B2 (ja) * | 1994-12-08 | 2005-10-12 | 株式会社デンソー | El素子 |
| US5631490A (en) * | 1995-01-11 | 1997-05-20 | Lucent Technologies Inc. | Metal semiconductor metal photodetectors |
| JPH10209506A (ja) * | 1997-01-24 | 1998-08-07 | Rohm Co Ltd | 半導体発光素子の製法 |
| DE69941200D1 (de) * | 1998-01-09 | 2009-09-17 | Sony Corp | Elektrolumineszente Vorrichtung und Herstellungsverfahren |
| US6486499B1 (en) | 1999-12-22 | 2002-11-26 | Lumileds Lighting U.S., Llc | III-nitride light-emitting device with increased light generating capability |
| US20040113220A1 (en) * | 2000-12-21 | 2004-06-17 | Peter Rieve | Optoelectronic component for conversion electromagnetic radiation into an intensity-dependent photocurrent |
| JP3824497B2 (ja) * | 2001-04-18 | 2006-09-20 | 株式会社沖データ | 発光素子アレイ |
| JP2002319705A (ja) * | 2001-04-23 | 2002-10-31 | Matsushita Electric Works Ltd | Led装置 |
| US7193245B2 (en) * | 2003-09-04 | 2007-03-20 | Lumei Optoelectronics Corporation | High power, high luminous flux light emitting diode and method of making same |
| US6828596B2 (en) * | 2002-06-13 | 2004-12-07 | Lumileds Lighting U.S., Llc | Contacting scheme for large and small area semiconductor light emitting flip chip devices |
| JP2004047387A (ja) * | 2002-07-15 | 2004-02-12 | Fuji Electric Holdings Co Ltd | 有機多色発光表示素子およびその製造方法 |
| JP3641260B2 (ja) * | 2002-09-26 | 2005-04-20 | 株式会社東芝 | 固体撮像装置 |
| US6958498B2 (en) * | 2002-09-27 | 2005-10-25 | Emcore Corporation | Optimized contact design for flip-chip LED |
| TWI327781B (en) * | 2003-02-19 | 2010-07-21 | Nichia Corp | Nitride semiconductor device |
| US6818328B2 (en) * | 2003-02-20 | 2004-11-16 | Fuji Electric Co., Ltd. | Color conversion filter substrate, color conversion type multicolor organic EL display having the color conversion filter substrate, and methods of manufacturing these |
| US6956323B2 (en) * | 2003-02-20 | 2005-10-18 | Fuji Electric Co., Ltd. | Color conversion filter substrate and organic multicolor light emitting device |
| TWI312582B (en) * | 2003-07-24 | 2009-07-21 | Epistar Corporatio | Led device, flip-chip led package and light reflecting structure |
| TWI220578B (en) * | 2003-09-16 | 2004-08-21 | Opto Tech Corp | Light-emitting device capable of increasing light-emitting active region |
| US7012279B2 (en) * | 2003-10-21 | 2006-03-14 | Lumileds Lighting U.S., Llc | Photonic crystal light emitting device |
| KR100799857B1 (ko) * | 2003-10-27 | 2008-01-31 | 삼성전기주식회사 | 전극 구조체 및 이를 구비하는 반도체 발광 소자 |
| TWI223457B (en) | 2004-01-20 | 2004-11-01 | Opto Tech Corp | Light-emitting device to increase the area of active region |
| WO2005069388A1 (ja) * | 2004-01-20 | 2005-07-28 | Nichia Corporation | 半導体発光素子 |
| US7345297B2 (en) * | 2004-02-09 | 2008-03-18 | Nichia Corporation | Nitride semiconductor device |
| TWI227063B (en) * | 2004-03-19 | 2005-01-21 | Ind Tech Res Inst | Light emitting diode and fabrication method thereof |
| JP4632690B2 (ja) * | 2004-05-11 | 2011-02-16 | スタンレー電気株式会社 | 半導体発光装置とその製造方法 |
| US7217947B2 (en) * | 2004-08-06 | 2007-05-15 | Northrop Grumman Corporation | Semiconductor light source and method of making |
| US7566908B2 (en) * | 2004-11-29 | 2009-07-28 | Yongsheng Zhao | Gan-based and ZnO-based LED |
| WO2006098545A2 (en) * | 2004-12-14 | 2006-09-21 | Seoul Opto Device Co., Ltd. | Light emitting device having a plurality of light emitting cells and package mounting the same |
| KR100631967B1 (ko) | 2005-02-25 | 2006-10-11 | 삼성전기주식회사 | 플립칩용 질화물 반도체 발광소자 |
| KR100631969B1 (ko) * | 2005-02-28 | 2006-10-11 | 삼성전기주식회사 | 질화물 반도체 발광소자 |
| WO2006120908A1 (ja) * | 2005-05-02 | 2006-11-16 | Nichia Corporation | 窒化物系半導体素子及びその製造方法 |
| US7736945B2 (en) | 2005-06-09 | 2010-06-15 | Philips Lumileds Lighting Company, Llc | LED assembly having maximum metal support for laser lift-off of growth substrate |
| KR100565894B1 (ko) * | 2005-07-06 | 2006-03-31 | (주)룩셀런트 | 3족 질화물 반도체 발광소자의 활성층을 제어하는 방법 |
| WO2007029842A1 (en) * | 2005-09-06 | 2007-03-15 | Showa Denko K.K. | Gallium nitride-based compound semiconductor light-emitting device and production method thereof |
| KR100661614B1 (ko) * | 2005-10-07 | 2006-12-26 | 삼성전기주식회사 | 질화물계 반도체 발광소자 및 그 제조방법 |
| US7683374B2 (en) * | 2005-11-29 | 2010-03-23 | Industrial Technology Research Institute | Silicon based photodetector |
| JP5056082B2 (ja) * | 2006-04-17 | 2012-10-24 | 日亜化学工業株式会社 | 半導体発光素子 |
| WO2007126093A1 (ja) * | 2006-05-01 | 2007-11-08 | Mitsubishi Chemical Corporation | 集積型半導体発光装置およびその製造方法 |
| CN101512783B (zh) * | 2006-05-02 | 2011-07-27 | 三菱化学株式会社 | 半导体发光元件 |
| US7737455B2 (en) * | 2006-05-19 | 2010-06-15 | Bridgelux, Inc. | Electrode structures for LEDs with increased active area |
| US20080008964A1 (en) * | 2006-07-05 | 2008-01-10 | Chia-Hua Chan | Light emitting diode and method of fabricating a nano/micro structure |
| US7897980B2 (en) * | 2006-11-09 | 2011-03-01 | Cree, Inc. | Expandable LED array interconnect |
| TW200830593A (en) * | 2006-11-15 | 2008-07-16 | Univ California | Transparent mirrorless light emitting diode |
| US7834373B2 (en) * | 2006-12-12 | 2010-11-16 | Hong Kong Applied Science and Technology Research Institute Company Limited | Semiconductor device having current spreading layer |
| JP4908381B2 (ja) * | 2006-12-22 | 2012-04-04 | 昭和電工株式会社 | Iii族窒化物半導体層の製造方法、及びiii族窒化物半導体発光素子、並びにランプ |
| DE102007003282B4 (de) | 2007-01-23 | 2023-12-21 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Leuchtdiodenchip |
| TWI349371B (en) * | 2007-02-13 | 2011-09-21 | Epistar Corp | An optoelectronical semiconductor device having a bonding structure |
| JP2008244425A (ja) * | 2007-02-21 | 2008-10-09 | Mitsubishi Chemicals Corp | GaN系LED素子および発光装置 |
| US20100102341A1 (en) * | 2007-06-15 | 2010-04-29 | Rohm Co., Ltd. | Semiconductor light emitting device and method for manufacturing the same |
| EP2164115A4 (en) * | 2007-06-15 | 2012-10-03 | Rohm Co Ltd | NITRIDE SEMICONDUCTOR ELECTROLUMINESCENT ELEMENT AND METHOD OF MANUFACTURING A NITRIDE SEMICONDUCTOR |
| US7939836B2 (en) * | 2007-07-18 | 2011-05-10 | Nichia Corporation | Semiconductor light emitting element |
| TWI353657B (en) * | 2007-09-28 | 2011-12-01 | Ind Tech Res Inst | An island submount |
| US7723206B2 (en) * | 2007-12-05 | 2010-05-25 | Fujifilm Corporation | Photodiode |
| KR101428053B1 (ko) | 2007-12-13 | 2014-08-08 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
| US7906786B2 (en) * | 2008-01-11 | 2011-03-15 | Industrial Technology Research Institute | Light emitting device |
| US8536614B2 (en) * | 2008-01-11 | 2013-09-17 | Industrial Technology Research Institute | Nitride semiconductor light emitting device with magnetic film |
| US7935979B2 (en) * | 2008-05-01 | 2011-05-03 | Bridgelux, Inc. | Wire bonding to connect electrodes |
| TWI368988B (en) * | 2008-08-12 | 2012-07-21 | Chunghwa Picture Tubes Ltd | Photo sensor and portable electronic apparatus |
| US9142714B2 (en) * | 2008-10-09 | 2015-09-22 | Nitek, Inc. | High power ultraviolet light emitting diode with superlattice |
| US8136960B2 (en) * | 2008-11-12 | 2012-03-20 | American Opto Plus Led Corporation | Light emitting diode display |
| US8124993B2 (en) * | 2008-12-17 | 2012-02-28 | Palo Alto Research Center Incorporated | Selective decomposition of nitride semiconductors to enhance LED light extraction |
| US7749782B1 (en) * | 2008-12-17 | 2010-07-06 | Palo Alto Research Center Incorporated | Laser roughening to improve LED emissions |
| US7952106B2 (en) * | 2009-04-10 | 2011-05-31 | Everlight Electronics Co., Ltd. | Light emitting diode device having uniform current distribution and method for forming the same |
-
2009
- 2009-04-10 US US12/422,027 patent/US7952106B2/en not_active Expired - Fee Related
- 2009-07-14 EP EP09165401A patent/EP2239791A3/en not_active Withdrawn
- 2009-08-14 TW TW098127497A patent/TWI387136B/zh not_active IP Right Cessation
- 2009-08-31 CN CN200910166816.0A patent/CN101859849B/zh not_active Expired - Fee Related
- 2009-09-10 KR KR1020090085282A patent/KR20100113008A/ko not_active Withdrawn
- 2009-09-25 JP JP2009220369A patent/JP2010251693A/ja active Pending
-
2011
- 2011-04-20 US US13/090,881 patent/US8258519B2/en not_active Expired - Fee Related
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