JP2010171464A - へテロ接合およびインターフィンガ構造を有する半導体デバイス - Google Patents
へテロ接合およびインターフィンガ構造を有する半導体デバイス Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 268
- 238000001465 metallisation Methods 0.000 claims description 85
- 238000000151 deposition Methods 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 37
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 100
- 238000004519 manufacturing process Methods 0.000 description 29
- 238000002161 passivation Methods 0.000 description 25
- 238000005530 etching Methods 0.000 description 22
- 229910021417 amorphous silicon Inorganic materials 0.000 description 20
- 230000008021 deposition Effects 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- 229910021419 crystalline silicon Inorganic materials 0.000 description 11
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910000510 noble metal Inorganic materials 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000005215 recombination Methods 0.000 description 5
- 230000006798 recombination Effects 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 238000010292 electrical insulation Methods 0.000 description 4
- 238000004070 electrodeposition Methods 0.000 description 4
- 238000010329 laser etching Methods 0.000 description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- GNFTZDOKVXKIBK-UHFFFAOYSA-N 3-(2-methoxyethoxy)benzohydrazide Chemical compound COCCOC1=CC=CC(C(=O)NN)=C1 GNFTZDOKVXKIBK-UHFFFAOYSA-N 0.000 description 3
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- -1 for example Inorganic materials 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】半導体基板(1)は、同じ領域(3)に、第1の伝導型と反対の第2の導電型にドープされたアモルファス半導体の少なくとも1つの第2の領域(7a、7b)を備える。アモルファス半導体の第1の領域(6)は、半導体基板(1)と接触した少なくとも1つの誘電体領域(8a、8b、8c、8d)によってアモルファス半導体の第2の領域(7a、7b)から絶縁され、さらに、アモルファス半導体の第2の領域(7a、7b)は、インターフィンガ構造を形成している。
【選択図】図1A
Description
a)半導体基板の表面に第1の絶縁層を形成する段階と、
b)第1の絶縁層に少なくとも1つの第1の窓をエッチングして半導体基板の一部を露出させる段階と、
c)第1の絶縁層の上および第1の窓の中に、第1の導電型にドープされた第1のアモルファス半導体層を堆積させる段階と、
d)第1のアモルファス半導体層および第1の絶縁層に、第1の窓から片寄った少なくとも1つの第2の窓をエッチングして、半導体基板の一部を露出させる段階と、
e)第2の窓の中および第1のアモルファス半導体層の上に第2の絶縁層を形成する段階と、
f)少なくとも1つの第1の開口を第2の絶縁層に、第2の窓のレベルにエッチングして、半導体基板の一部を露出させる段階と、
g)第1の開口の中および第2の絶縁層の上に、第1の導電型と反対の第2の導電型にドープされた第2のアモルファス半導体層を堆積させる段階と、を含み、第1のアモルファス半導体層および第2のアモルファス半導体層は、第1の窓および第1の開口のエッチングによって画定された輪郭を有するインターディジタル構造を形成する。
a)半導体基板の表面に、第1の導電型にドープされた少なくとも1つの第1のアモルファス半導体層を堆積させる段階と、
b)少なくとも第1のアモルファス半導体層の上に、少なくとも1つの第1のメタライゼーション部分を堆積させる段階と、
c)第1のメタライゼーション部分で覆われていない第1のアモルファス半導体層の部分を除去する段階と、
d)少なくとも基板表面の上に、第1の導電型と反対の第2の導電型にドープされた少なくとも1つの第2のアモルファス半導体層を堆積させる段階と、
e)少なくとも第2のアモルファス半導体層の上に、少なくとも1つの第2のメタライゼーション部分を堆積させる段階と、
f)第2のメタライゼーション部分で覆われていない第2のアモルファス半導体層の部分を除去する段階と、を含み、第1のアモルファス半導体層および第2のアモルファス半導体層は、インターディジタル構造を形成している。
半導体基板のインターディジタル構造を有する表面の反対側の他の表面の上に、表面パッシベーション層を堆積させる段階と、
この表面パッシベーション層の上に反射防止層を堆積させる段階と、を含んでもよい。
2 表面3の反対側の他の表面
3 半導体基板の表面
4 表面パッシベーション層4
5 反射防止層5
6 第1のアモルファス半導体領域
7a、7b 第2のアモルファス半導体領域
8a、8b、8c、8d 誘電体領域
9 第1のメタライゼーション部分
10a、10b 第2のメタライゼーション部分
11 第1の絶縁層
12 第1の窓
13 第1のアモルファス半導体層
14a、14b 第2の窓
15 第2の絶縁層
16a、16b 第1の開口
17 第2のアモルファス半導体層
18 第2の開口
19 第1の導電性熱酸化物部分
20a、20b 導電性熱酸化物部分
21c 第1の真性半導体領域
21a、21b 第2の真性半導体領域
24 絶縁層
25a、25b、25c 開口
26 第1の真性半導体層
28 第2の真性半導体層
100 半導体デバイス
101〜109 半導体デバイス
200 太陽電池モジュール
Claims (9)
- 特定の導電型の結晶半導体層の少なくとも一つの表面上に、該結晶半導体層の導電型と反対の導電型にドープされたアモルファス半導体層を備えた半導体デバイスであって、前記アモルファス半導体層のドーピング部分の濃度が漸変的に変化していることを特徴とする半導体デバイス。
- 前記アモルファス半導体層のドーピング部分の濃度が、前記結晶半導体層から漸変的に増加している、請求項1に記載の半導体デバイス。
- 前記アモルファス半導体層が、シリコン製である、請求項1又は2に記載の半導体デバイス。
- 前記結晶半導体層が、単結晶シリコン又は多結晶シリコン製である、請求項3に記載の半導体デバイス。
- 前記アモルファス半導体層上に、メタライゼーション部分を更に備えた請求項1から4のいずれか一項に記載の半導体デバイス。
- 前記メタライゼーション部分と前記アモルファス半導体層との間に導電性の熱酸化物部分を更に備えた請求項5に記載の半導体デバイス。
- 前記熱酸化物部分が、酸化インジウム錫等の透明導電性酸化物製である、請求項6に記載の半導体デバイス。
- 請求項1から7のいずれか一項に記載の半導体デバイスから製造された太陽電池。
- 特定の導電型を有する結晶半導体製の第一の層を提供する段階と、
該結晶半導体の層の上にアモルファス半導体を堆積させて該結晶半導体の層の導電型と反対の導電型にドープされた第二の層を形成する段階と、を備えた半導体デバイスの製造方法であって、該アモルファス半導体の層のドーピング部分の濃度が漸変的に変化する、方法。
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EP1839341B1 (fr) | 2017-01-11 |
US8421074B2 (en) | 2013-04-16 |
US20080061293A1 (en) | 2008-03-13 |
EP2091086A2 (fr) | 2009-08-19 |
WO2006077343A1 (fr) | 2006-07-27 |
EP1839341A1 (fr) | 2007-10-03 |
US20110120541A1 (en) | 2011-05-26 |
JP5390102B2 (ja) | 2014-01-15 |
US7935966B2 (en) | 2011-05-03 |
FR2880989A1 (fr) | 2006-07-21 |
EP2091086A3 (fr) | 2017-04-19 |
FR2880989B1 (fr) | 2007-03-09 |
JP2008529265A (ja) | 2008-07-31 |
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