JP2010103195A5 - - Google Patents
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- JP2010103195A5 JP2010103195A5 JP2008271360A JP2008271360A JP2010103195A5 JP 2010103195 A5 JP2010103195 A5 JP 2010103195A5 JP 2008271360 A JP2008271360 A JP 2008271360A JP 2008271360 A JP2008271360 A JP 2008271360A JP 2010103195 A5 JP2010103195 A5 JP 2010103195A5
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- Prior art keywords
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- semiconductor device
- stacked
- metal pattern
- stacked semiconductor
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008271360A JP5298762B2 (ja) | 2008-10-21 | 2008-10-21 | 積層型半導体装置、積層型半導体装置の製造方法及び半導体基板 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008271360A JP5298762B2 (ja) | 2008-10-21 | 2008-10-21 | 積層型半導体装置、積層型半導体装置の製造方法及び半導体基板 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013129644A Division JP2013179373A (ja) | 2013-06-20 | 2013-06-20 | 積層型半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010103195A JP2010103195A (ja) | 2010-05-06 |
JP2010103195A5 true JP2010103195A5 (zh) | 2012-06-28 |
JP5298762B2 JP5298762B2 (ja) | 2013-09-25 |
Family
ID=42293615
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008271360A Active JP5298762B2 (ja) | 2008-10-21 | 2008-10-21 | 積層型半導体装置、積層型半導体装置の製造方法及び半導体基板 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5298762B2 (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102299133B (zh) * | 2010-06-22 | 2014-02-19 | 中国科学院微电子研究所 | 半导体结构及其制造方法 |
KR101690487B1 (ko) * | 2010-11-08 | 2016-12-28 | 삼성전자주식회사 | 반도체 장치 및 제조 방법 |
JP5813495B2 (ja) | 2011-04-15 | 2015-11-17 | 東京エレクトロン株式会社 | 液処理方法、液処理装置および記憶媒体 |
JP5600642B2 (ja) * | 2011-06-16 | 2014-10-01 | 株式会社日立製作所 | 半導体装置の製造方法 |
US8552567B2 (en) | 2011-07-27 | 2013-10-08 | Micron Technology, Inc. | Semiconductor die assemblies, semiconductor devices including same, and methods of fabrication |
US8937309B2 (en) | 2011-08-08 | 2015-01-20 | Micron Technology, Inc. | Semiconductor die assemblies, semiconductor devices including same, and methods of fabrication |
JP5678840B2 (ja) * | 2011-08-18 | 2015-03-04 | 富士通セミコンダクター株式会社 | 半導体装置 |
US9153520B2 (en) | 2011-11-14 | 2015-10-06 | Micron Technology, Inc. | Stacked semiconductor die assemblies with multiple thermal paths and associated systems and methods |
JP2013110151A (ja) * | 2011-11-17 | 2013-06-06 | Elpida Memory Inc | 半導体チップ及び半導体装置 |
KR102032907B1 (ko) * | 2013-04-22 | 2019-10-16 | 삼성전자주식회사 | 반도체 소자, 반도체 패키지 및 전자 시스템 |
JP6380946B2 (ja) * | 2013-11-18 | 2018-08-29 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
US10355039B2 (en) | 2015-05-18 | 2019-07-16 | Sony Corporation | Semiconductor device and imaging device |
WO2024101204A1 (ja) * | 2022-11-10 | 2024-05-16 | ソニーセミコンダクタソリューションズ株式会社 | 光検出装置及び積層基板 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4011695B2 (ja) * | 1996-12-02 | 2007-11-21 | 株式会社東芝 | マルチチップ半導体装置用チップおよびその形成方法 |
JP4205613B2 (ja) * | 2004-03-01 | 2009-01-07 | エルピーダメモリ株式会社 | 半導体装置 |
JP4688526B2 (ja) * | 2005-03-03 | 2011-05-25 | Okiセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
JPWO2008108334A1 (ja) * | 2007-03-06 | 2010-06-17 | 株式会社ニコン | 半導体装置及び該半導体装置の製造方法 |
JP4700642B2 (ja) * | 2007-03-16 | 2011-06-15 | Okiセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
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2008
- 2008-10-21 JP JP2008271360A patent/JP5298762B2/ja active Active
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