JP2009521113A5 - - Google Patents

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Publication number
JP2009521113A5
JP2009521113A5 JP2008546349A JP2008546349A JP2009521113A5 JP 2009521113 A5 JP2009521113 A5 JP 2009521113A5 JP 2008546349 A JP2008546349 A JP 2008546349A JP 2008546349 A JP2008546349 A JP 2008546349A JP 2009521113 A5 JP2009521113 A5 JP 2009521113A5
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JP
Japan
Prior art keywords
silicon
region
substrate
source
forming
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JP2008546349A
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English (en)
Japanese (ja)
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JP2009521113A (ja
JP4550146B2 (ja
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Priority claimed from US11/316,244 external-priority patent/US7531423B2/en
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Publication of JP2009521113A5 publication Critical patent/JP2009521113A5/ja
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JP2008546349A 2005-12-22 2006-12-05 抵抗が低減されたｆｉｎＦＥＴ及びその製造方法 Active JP4550146B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/316,244 US7531423B2 (en) 2005-12-22 2005-12-22 Reduced-resistance finFETs by sidewall silicidation and methods of manufacturing the same
PCT/EP2006/069339 WO2007071555A1 (en) 2005-12-22 2006-12-05 Reduced-resistance finfets and methods of manufacturing the same

Publications (3)

Publication Number Publication Date
JP2009521113A JP2009521113A (ja) 2009-05-28
JP2009521113A5 true JP2009521113A5 (enExample) 2010-04-08
JP4550146B2 JP4550146B2 (ja) 2010-09-22

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ID=37771049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008546349A Active JP4550146B2 (ja) 2005-12-22 2006-12-05 抵抗が低減されたｆｉｎＦＥＴ及びその製造方法

Country Status (8)

Country Link
US (2) US7531423B2 (enExample)
EP (1) EP1964179B1 (enExample)
JP (1) JP4550146B2 (enExample)
KR (1) KR100992037B1 (enExample)
CN (1) CN101317273B (enExample)
AT (1) ATE441938T1 (enExample)
DE (1) DE602006008984D1 (enExample)
WO (1) WO2007071555A1 (enExample)

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US7479437B2 (en) * 2006-04-28 2009-01-20 International Business Machines Corporation Method to reduce contact resistance on thin silicon-on-insulator device
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US20090001426A1 (en) * 2007-06-29 2009-01-01 Kangguo Cheng Integrated Fin-Local Interconnect Structure
US8063437B2 (en) * 2007-07-27 2011-11-22 Panasonic Corporation Semiconductor device and method for producing the same
US8004045B2 (en) 2007-07-27 2011-08-23 Panasonic Corporation Semiconductor device and method for producing the same
US8021939B2 (en) * 2007-12-12 2011-09-20 International Business Machines Corporation High-k dielectric and metal gate stack with minimal overlap with isolation region and related methods
EP2311072B1 (en) 2008-07-06 2013-09-04 Imec Method for doping semiconductor structures
US20110001169A1 (en) * 2009-07-01 2011-01-06 International Business Machines Corporation Forming uniform silicide on 3d structures
US8653608B2 (en) * 2009-10-27 2014-02-18 Taiwan Semiconductor Manufacturing Company, Ltd. FinFET design with reduced current crowding
US8278179B2 (en) 2010-03-09 2012-10-02 Taiwan Semiconductor Manufacturing Co., Ltd. LDD epitaxy for FinFETs
US8431995B2 (en) * 2010-05-13 2013-04-30 International Business Machines Corporation Methodology for fabricating isotropically recessed drain regions of CMOS transistors
US8716798B2 (en) 2010-05-13 2014-05-06 International Business Machines Corporation Methodology for fabricating isotropically recessed source and drain regions of CMOS transistors
JP5837307B2 (ja) * 2011-02-07 2015-12-24 公益財団法人神奈川科学技術アカデミー 多孔性微粒子の製造方法
US8614134B2 (en) * 2011-03-21 2013-12-24 Globalfoundries Inc. Shallow source and drain architecture in an active region of a semiconductor device having a pronounced surface topography by tilted implantation
US10629900B2 (en) 2011-05-04 2020-04-21 Corning Incorporated Porous silicon compositions and devices and methods thereof
CN103137478A (zh) * 2011-11-21 2013-06-05 中芯国际集成电路制造(上海)有限公司 FinFET器件的制造方法及结构
US8637931B2 (en) 2011-12-27 2014-01-28 International Business Machines Corporation finFET with merged fins and vertical silicide
KR101894221B1 (ko) * 2012-03-21 2018-10-04 삼성전자주식회사 전계 효과 트랜지스터 및 이를 포함하는 반도체 장치
US8664072B2 (en) 2012-05-30 2014-03-04 Globalfoundries Inc. Source and drain architecture in an active region of a P-channel transistor by tilted implantation
WO2014009991A1 (ja) * 2012-07-09 2014-01-16 国立大学法人東北大学 ３次元構造のｍｏｓｆｅｔ及びその製造方法
US8975125B2 (en) * 2013-03-14 2015-03-10 International Business Machines Corporation Formation of bulk SiGe fin with dielectric isolation by anodization
US8859379B2 (en) 2013-03-15 2014-10-14 International Business Machines Corporation Stress enhanced finFET devices
US8940602B2 (en) 2013-04-11 2015-01-27 International Business Machines Corporation Self-aligned structure for bulk FinFET
KR102083493B1 (ko) 2013-08-02 2020-03-02 삼성전자 주식회사 반도체 소자의 제조방법
US9583590B2 (en) 2013-09-27 2017-02-28 Samsung Electronics Co., Ltd. Integrated circuit devices including FinFETs and methods of forming the same
US9711645B2 (en) * 2013-12-26 2017-07-18 International Business Machines Corporation Method and structure for multigate FinFET device epi-extension junction control by hydrogen treatment
US9391173B2 (en) * 2014-04-22 2016-07-12 International Business Machines Corporation FinFET device with vertical silicide on recessed source/drain epitaxy regions
CN105702729B (zh) * 2014-11-27 2019-01-15 中国科学院微电子研究所 半导体器件及其制造方法
CN105702725B (zh) * 2014-11-27 2018-12-11 中国科学院微电子研究所 半导体器件及其制造方法
US9666716B2 (en) 2014-12-15 2017-05-30 Sang U. Kim FinFET transistor
US9741811B2 (en) 2014-12-15 2017-08-22 Samsung Electronics Co., Ltd. Integrated circuit devices including source/drain extension regions and methods of forming the same
CN105789301B (zh) * 2014-12-25 2018-09-11 中国科学院微电子研究所 鳍式场效应晶体管、鳍结构及其制造方法
US9837277B2 (en) 2015-08-12 2017-12-05 International Business Machines Corporation Forming a contact for a tall fin transistor
US9397197B1 (en) 2015-09-23 2016-07-19 International Business Machines Corporation Forming wrap-around silicide contact on finFET
US9484251B1 (en) * 2015-10-30 2016-11-01 Lam Research Corporation Contact integration for reduced interface and series contact resistance
EP3380436B1 (en) 2015-11-25 2023-07-26 Corning Incorporated Porous silicon alloy compositions, methods for making them and devices thereof
CN107452792A (zh) * 2016-06-01 2017-12-08 中芯国际集成电路制造(上海)有限公司 半导体装置及其制造方法
US9853127B1 (en) * 2016-06-22 2017-12-26 International Business Machines Corporation Silicidation of bottom source/drain sheet using pinch-off sacrificial spacer process
CN108155236B (zh) * 2016-12-05 2020-08-07 上海新昇半导体科技有限公司 具有黑磷沟道层的低接触电阻率FinFET及其制备方法
US10707331B2 (en) * 2017-04-28 2020-07-07 Taiwan Semiconductor Manufacturing Company, Ltd. FinFET device with a reduced width

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US6297135B1 (en) 1997-01-29 2001-10-02 Ultratech Stepper, Inc. Method for forming silicide regions on an integrated device
JP3209164B2 (ja) * 1997-10-07 2001-09-17 日本電気株式会社 半導体装置の製造方法
US6133124A (en) * 1999-02-05 2000-10-17 Advanced Micro Devices, Inc. Device improvement by source to drain resistance lowering through undersilicidation
US6255214B1 (en) 1999-02-24 2001-07-03 Advanced Micro Devices, Inc. Method of forming junction-leakage free metal silicide in a semiconductor wafer by amorphization of source and drain regions
EP1417434A4 (en) * 2001-07-25 2008-11-19 Philmac Pty Ltd TRANSITION FITTING OR FITTING FOR ASSEMBLING METAL OR PLASTIC PIPES
US7358121B2 (en) 2002-08-23 2008-04-15 Intel Corporation Tri-gate devices and methods of fabrication
US6864519B2 (en) 2002-11-26 2005-03-08 Taiwan Semiconductor Manufacturing Co., Ltd. CMOS SRAM cell configured using multiple-gate transistors
US7105894B2 (en) * 2003-02-27 2006-09-12 Taiwan Semiconductor Manufacturing Co., Ltd. Contacts to semiconductor fin devices
KR100559572B1 (ko) * 2003-09-01 2006-03-10 동부아남반도체 주식회사 살리사이드를 갖는 반도체 소자 제조 방법
US20050090067A1 (en) 2003-10-27 2005-04-28 Dharmesh Jawarani Silicide formation for a semiconductor device
KR100526889B1 (ko) * 2004-02-10 2005-11-09 삼성전자주식회사 핀 트랜지스터 구조
KR20050108916A (ko) 2004-05-14 2005-11-17 삼성전자주식회사 다마신 공정을 이용한 핀 전계 효과 트랜지스터의 형성 방법
JP3964885B2 (ja) 2004-05-19 2007-08-22 株式会社東芝 半導体装置及びその製造方法
US7015126B2 (en) 2004-06-03 2006-03-21 Taiwan Semiconductor Manufacturing Co., Ltd. Method of forming silicided gate structure
JP2006012898A (ja) * 2004-06-22 2006-01-12 Toshiba Corp 半導体装置及びその製造方法

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