JP2009231275A - 成膜方法及び発光装置の作製方法 - Google Patents
成膜方法及び発光装置の作製方法 Download PDFInfo
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- JP2009231275A JP2009231275A JP2009037414A JP2009037414A JP2009231275A JP 2009231275 A JP2009231275 A JP 2009231275A JP 2009037414 A JP2009037414 A JP 2009037414A JP 2009037414 A JP2009037414 A JP 2009037414A JP 2009231275 A JP2009231275 A JP 2009231275A
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- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Abstract
【解決手段】反射層、光吸収層及び材料層が形成された成膜用基板を透過して、光吸収層にレーザ光を照射することによって材料層に含まれる材料を、対向して配置された被成膜基板へ成膜する。反射層を選択的に形成することによって、被成膜基板に成膜される膜は、反射層のパターンを反映した微細なパターンで選択的に成膜することができる。材料層の形成は、湿式法を用いて行う。
【選択図】図1
Description
本実施の形態では、本発明を用いて被成膜基板に微細なパターンで薄膜を形成することを目的とした成膜方法の一例について図1乃至図4を用いて説明する。
本実施の形態では、本発明に用いることのできる成膜用基板の他の例を図3及び図4を用いて説明する。
本実施の形態では、実施の形態1及び実施の形態2で説明した成膜用基板を複数用いて、発光素子のEL層を形成することにより、フルカラー表示が可能な発光装置の作製方法について説明する。
本実施の形態では、本発明を適用して、発光素子および発光装置を作製する方法について説明する。
本実施の形態では、本発明を用いて作製されたパッシブマトリクス型の発光装置について図5乃至図9を用いて説明する。
本実施の形態では、本発明を用いて作製されたアクティブマトリクス型の発光装置について図14を用いて説明する。
本発明を適用して、様々な表示機能を有する発光装置を作製することができる。即ち、それら表示機能を有する発光装置を表示部に組み込んだ様々な電子機器に本発明を適用できる。
Claims (12)
- 第1の基板上に開口部を有する反射層を形成し、
前記反射層上に光吸収層を形成し、
前記光吸収層上に膜材料を含む液状の組成物を用いる湿式法によって材料層を形成して成膜用基板を作製し、
前記成膜用基板の前記材料層形成面と、被成膜基板の被成膜面とが向き合うように、前記成膜用基板と前記被成膜基板とを配置し、
前記第1の基板及び前記反射層の開口部を通過させてレーザ光を前記光吸収層に照射し、前記レーザ光を照射された前記光吸収層上の前記材料層に含まれる材料を前記被成膜基板に成膜する成膜方法。 - 第1の基板上に開口部を有する反射層を形成し、
前記反射層上に光吸収層を形成し、
前記光吸収層上に膜材料を含む液状の組成物を用いる湿式法によって材料層を形成して成膜用基板を作製し、
前記成膜用基板の前記材料層形成面と、被成膜基板の被成膜面とが向き合うように、前記成膜用基板上方に前記被成膜基板を配置し、
前記第1の基板及び前記反射層の開口部を通過させてレーザ光を前記光吸収層に照射し、前記レーザ光を照射された前記光吸収層上の前記材料層に含まれる材料を前記被成膜基板に成膜する成膜方法。 - 第1の基板上に開口部を有する反射層を形成し、
前記反射層上に透光性の断熱層を形成し、
前記断熱層上に光吸収層を形成し、
前記光吸収層上に膜材料を含む液状の組成物を用いる湿式法によって材料層を形成して成膜用基板を作製し、
前記成膜用基板の前記材料層形成面と、被成膜基板の被成膜面とが向き合うように、前記成膜用基板と前記被成膜基板とを配置し、
前記第1の基板、前記反射層の開口部、及び前記断熱層を通過させてレーザ光を前記光吸収層に照射し、前記レーザ光を照射された前記光吸収層上の前記材料層に含まれる材料を前記被成膜基板に成膜する成膜方法。 - 第1の基板上に開口部を有する反射層を形成し、
前記反射層上に透光性の断熱層を形成し、
前記断熱層上に光吸収層を形成し、
前記光吸収層上に膜材料を含む液状の組成物を用いる湿式法によって材料層を形成して成膜用基板を作製し、
前記成膜用基板の前記材料層形成面と、被成膜基板の被成膜面とが向き合うように、前記成膜用基板上方に前記被成膜基板を配置し、
前記第1の基板、前記反射層の開口部、及び前記断熱層を通過させてレーザ光を前記光吸収層に照射し、前記レーザ光を照射された前記光吸収層上の前記材料層に含まれる材料を前記被成膜基板に成膜する成膜方法。 - 請求項1乃至4のいずれか一項において、前記湿式法によって形成された材料層に加熱処理を行うことを特徴とする成膜方法。
- 請求項1乃至5のいずれか一項において、前記光吸収層にレーザ光を照射する工程は減圧下で行うことを特徴とする成膜方法。
- 請求項1乃至6のいずれか一項において、前記湿式法は塗布法を用いることを特徴とする成膜方法。
- 請求項1乃至7のいずれか一項において、前記レーザ光として周波数10MHz以上、パルス幅100fs以上10ns以下のレーザ光を用いることを特徴とする成膜方法。
- 請求項1乃至8のいずれか一項において、前記断熱層を、前記レーザ光に対する透過率は60%以上とし、かつ熱伝導率が前記反射層及び前記光吸収層に用いる材料の熱伝導率よりも小さい材料を用いて形成することを特徴とする成膜方法。
- 請求項1乃至9のいずれか一項において、前記材料層を、有機化合物を含む液状の組成物を用いて形成することを特徴とする成膜方法。
- 請求項1乃至10のいずれか一項において、前記レーザ光を照射面で線状に成形することを特徴とする成膜方法。
- 請求項1乃至11のいずれか一項に記載の成膜方法を用い、前記材料層の一部を、前記被成膜基板の被成膜面上に形成されている第1の電極上に成膜することを特徴とする発光装置の作製方法。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160028578A (ko) * | 2014-09-03 | 2016-03-14 | 삼성디스플레이 주식회사 | 광학 마스크 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101563237B1 (ko) * | 2007-06-01 | 2015-10-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 제조장치 및 발광장치 제작방법 |
WO2009099002A1 (en) | 2008-02-04 | 2009-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing light-emitting device |
JP5238544B2 (ja) * | 2008-03-07 | 2013-07-17 | 株式会社半導体エネルギー研究所 | 成膜方法及び発光装置の作製方法 |
JP5079722B2 (ja) * | 2008-03-07 | 2012-11-21 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
US7932112B2 (en) * | 2008-04-14 | 2011-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting device |
JP5292263B2 (ja) * | 2008-12-05 | 2013-09-18 | 株式会社半導体エネルギー研究所 | 成膜方法及び発光素子の作製方法 |
US9134529B2 (en) | 2011-07-21 | 2015-09-15 | Pixronix, Inc. | Display device with tapered light reflecting layer and manufacturing method for same |
TWI551666B (zh) * | 2011-09-28 | 2016-10-01 | 首威公司 | 用於發光裝置之螺聯茀化合物 |
TWI466190B (zh) * | 2011-11-23 | 2014-12-21 | Preparation and Flexible Structure of Oxidized Insulating Layer for Low Temperature Polysilicon Thin Film Transistor | |
US8941128B2 (en) * | 2012-11-21 | 2015-01-27 | Intel Corporation | Passivation layer for flexible display |
KR20150056112A (ko) * | 2013-11-14 | 2015-05-26 | 삼성디스플레이 주식회사 | 막 형성용 마스크, 이를 이용한 막 형성 방법 및 유기 발광 표시 장치의 제조 방법 |
KR20160017366A (ko) * | 2014-08-05 | 2016-02-16 | 삼성디스플레이 주식회사 | 광학 패터닝 마스크 및 이를 이용한 표시 장치의 제조 방법 |
KR20160034529A (ko) * | 2014-09-19 | 2016-03-30 | 삼성디스플레이 주식회사 | 광학적 패턴 전사 마스크 및 그의 제조 방법 |
KR20160046169A (ko) * | 2014-10-20 | 2016-04-28 | 삼성디스플레이 주식회사 | 광학 마스크 |
CN104362170B (zh) * | 2014-11-28 | 2017-04-12 | 京东方科技集团股份有限公司 | 一种有机电致发光显示器件、其驱动方法及相关装置 |
CN107946318B (zh) * | 2017-11-27 | 2021-01-12 | 京东方科技集团股份有限公司 | 一种阵列基板及其制作方法、显示面板 |
EP3724369A4 (en) * | 2017-12-14 | 2021-12-22 | Boe Technology Group Co., Ltd. | DONOR SUBSTRATE FOR DEPOSITING A DEPOSITORY MATERIAL ON ACCEPTOR SUBSTRATE, METHOD FOR DEPOSITING A DEPOSITIVE MATERIAL AND METHOD FOR MANUFACTURING A DONOR SUBSTRATE |
CN108598132A (zh) * | 2018-05-23 | 2018-09-28 | 京东方科技集团股份有限公司 | 显示基板的制作方法、掩膜板的制作方法、显示装置 |
KR20200073549A (ko) * | 2018-12-14 | 2020-06-24 | 엘지디스플레이 주식회사 | 표시 장치 |
CN115207152B (zh) * | 2022-06-15 | 2023-06-06 | 清华大学 | 硅光原位探测与调制一体化器件及其制备方法和应用 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11237504A (ja) * | 1997-10-31 | 1999-08-31 | Eastman Kodak Co | カラー有機層の選択的転写方法 |
JP2002190386A (ja) * | 2000-12-20 | 2002-07-05 | Daicel Chem Ind Ltd | 有機エレクトロルミネッセンス素子用材料およびその製造方法 |
JP2002240437A (ja) * | 2001-02-19 | 2002-08-28 | Sharp Corp | 薄膜形成用ドナーシートの製造方法、薄膜形成用ドナーシート及び有機エレクトロルミネッセンス素子 |
JP2003197372A (ja) * | 2001-12-12 | 2003-07-11 | Eastman Kodak Co | 有機発光ダイオードデバイスの層を形成するためにドナーから有機材料を転写する装置 |
JP2004281189A (ja) * | 2003-03-14 | 2004-10-07 | Optrex Corp | 上面発光型有機エレクトロルミネセンス表示素子およびその製造方法 |
JP2008500699A (ja) * | 2004-05-27 | 2008-01-10 | イーストマン コダック カンパニー | Oledを製造するための線形レーザー・ビーム |
JP2008147016A (ja) * | 2006-12-11 | 2008-06-26 | Fuji Electric Holdings Co Ltd | 蒸着薄膜のパターン形成方法およびそれを用いた有機elパネルの製造方法 |
Family Cites Families (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2083740A5 (en) * | 1970-03-20 | 1971-12-17 | Thomson Csf | Laser applied surface film |
US4743463A (en) * | 1986-02-21 | 1988-05-10 | Eastman Kodak Company | Method for forming patterns on a substrate or support |
JPH0789235A (ja) * | 1993-09-28 | 1995-04-04 | Toppan Printing Co Ltd | 熱転写記録方法 |
JP3801730B2 (ja) | 1997-05-09 | 2006-07-26 | 株式会社半導体エネルギー研究所 | プラズマcvd装置及びそれを用いた薄膜形成方法 |
US5937272A (en) | 1997-06-06 | 1999-08-10 | Eastman Kodak Company | Patterned organic layers in a full-color organic electroluminescent display array on a thin film transistor array substrate |
KR100195176B1 (ko) * | 1997-06-23 | 1999-06-15 | 손욱 | 열전사 필름 |
US6165543A (en) | 1998-06-17 | 2000-12-26 | Nec Corporation | Method of making organic EL device and organic EL transfer base plate |
US6805918B2 (en) * | 1999-01-27 | 2004-10-19 | The United States Of America As Represented By The Secretary Of The Navy | Laser forward transfer of rheological systems |
JP3740557B2 (ja) | 1999-03-09 | 2006-02-01 | 独立行政法人産業技術総合研究所 | 有機薄膜作製方法および有機薄膜作製装置 |
JP2001052864A (ja) | 1999-06-04 | 2001-02-23 | Semiconductor Energy Lab Co Ltd | 電気光学装置の作製方法 |
US7288420B1 (en) | 1999-06-04 | 2007-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing an electro-optical device |
US8853696B1 (en) | 1999-06-04 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and electronic device |
TW527735B (en) | 1999-06-04 | 2003-04-11 | Semiconductor Energy Lab | Electro-optical device |
JP4425438B2 (ja) | 1999-07-23 | 2010-03-03 | 株式会社半導体エネルギー研究所 | El表示装置の作製方法 |
TW504941B (en) | 1999-07-23 | 2002-10-01 | Semiconductor Energy Lab | Method of fabricating an EL display device, and apparatus for forming a thin film |
JP4590663B2 (ja) | 1999-10-29 | 2010-12-01 | セイコーエプソン株式会社 | カラーフィルタの製造方法 |
TW490714B (en) | 1999-12-27 | 2002-06-11 | Semiconductor Energy Lab | Film formation apparatus and method for forming a film |
US20020011205A1 (en) | 2000-05-02 | 2002-01-31 | Shunpei Yamazaki | Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device |
TW501379B (en) | 2000-07-25 | 2002-09-01 | Eastman Kodak Co | Method of making organic electroluminescent device using laser transfer |
US6797920B2 (en) * | 2000-12-20 | 2004-09-28 | Daicel Chemical Industries, Ltd. | Material for organic electroluminescent device and its manufacturing method |
JP2002359075A (ja) | 2001-03-29 | 2002-12-13 | Sharp Corp | 有機エレクトロルミネッセンス表示パネルおよびその製造方法 |
JP3969698B2 (ja) | 2001-05-21 | 2007-09-05 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
US20020197393A1 (en) | 2001-06-08 | 2002-12-26 | Hideaki Kuwabara | Process of manufacturing luminescent device |
SG149680A1 (en) | 2001-12-12 | 2009-02-27 | Semiconductor Energy Lab | Film formation apparatus and film formation method and cleaning method |
US6555284B1 (en) | 2001-12-27 | 2003-04-29 | Eastman Kodak Company | In situ vacuum method for making OLED devices |
US6582875B1 (en) * | 2002-01-23 | 2003-06-24 | Eastman Kodak Company | Using a multichannel linear laser light beam in making OLED devices by thermal transfer |
US6610455B1 (en) | 2002-01-30 | 2003-08-26 | Eastman Kodak Company | Making electroluminscent display devices |
US6703179B2 (en) | 2002-03-13 | 2004-03-09 | Eastman Kodak Company | Transfer of organic material from a donor to form a layer in an OLED device |
US6566032B1 (en) | 2002-05-08 | 2003-05-20 | Eastman Kodak Company | In-situ method for making OLED devices that are moisture or oxygen-sensitive |
US6682863B2 (en) * | 2002-06-27 | 2004-01-27 | Eastman Kodak Company | Depositing an emissive layer for use in an organic light-emitting display device (OLED) |
JP2004071554A (ja) | 2002-07-25 | 2004-03-04 | Sanyo Electric Co Ltd | 有機elパネルおよびその製造方法 |
US6939660B2 (en) * | 2002-08-02 | 2005-09-06 | Eastman Kodak Company | Laser thermal transfer donor including a separate dopant layer |
US6811938B2 (en) | 2002-08-29 | 2004-11-02 | Eastman Kodak Company | Using fiducial marks on a substrate for laser transfer of organic material from a donor to a substrate |
JP2004103406A (ja) | 2002-09-10 | 2004-04-02 | Sony Corp | 薄膜パターン形成方法および装置並びに有機el表示装置の製造方法 |
KR100490539B1 (ko) * | 2002-09-19 | 2005-05-17 | 삼성에스디아이 주식회사 | 유기 전계 발광소자 및 그 제조방법 |
JP4627961B2 (ja) | 2002-09-20 | 2011-02-09 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US20040191564A1 (en) | 2002-12-17 | 2004-09-30 | Samsung Sdi Co., Ltd. | Donor film for low molecular weight full color organic electroluminescent device using laser induced thermal imaging method and method for fabricating low molecular weight full color organic electroluminescent device using the film |
US20040206307A1 (en) | 2003-04-16 | 2004-10-21 | Eastman Kodak Company | Method and system having at least one thermal transfer station for making OLED displays |
JP4493926B2 (ja) | 2003-04-25 | 2010-06-30 | 株式会社半導体エネルギー研究所 | 製造装置 |
KR100552964B1 (ko) * | 2003-08-28 | 2006-02-15 | 삼성에스디아이 주식회사 | 평판표시소자용 도너필름 및 그를 이용한유기전계발광소자의 제조방법 |
US6929048B2 (en) * | 2003-09-05 | 2005-08-16 | Eastman Kodak Company | Laser transfer of organic material from a donor to form a layer in an OLED device |
US20050145326A1 (en) | 2004-01-05 | 2005-07-07 | Eastman Kodak Company | Method of making an OLED device |
KR100708644B1 (ko) * | 2004-02-26 | 2007-04-17 | 삼성에스디아이 주식회사 | 박막 트랜지스터, 이를 구비한 평판 표시장치, 박막트랜지스터의 제조방법, 평판 표시장치의 제조방법, 및도너 시트의 제조방법 |
US7485337B2 (en) * | 2004-05-27 | 2009-02-03 | Eastman Kodak Company | Depositing an organic layer for use in OLEDs |
JP2006086069A (ja) | 2004-09-17 | 2006-03-30 | Three M Innovative Properties Co | 有機エレクトロルミネッセンス素子及びその製造方法 |
JP2006113568A (ja) | 2004-09-17 | 2006-04-27 | Semiconductor Energy Lab Co Ltd | 表示装置、及び表示装置の作製方法 |
KR100667069B1 (ko) * | 2004-10-19 | 2007-01-10 | 삼성에스디아이 주식회사 | 도너 기판 및 그를 사용한 유기전계발광표시장치의 제조방법 |
JP2006202510A (ja) | 2005-01-18 | 2006-08-03 | Seiko Epson Corp | 有機el装置の製造方法 |
JP2006228649A (ja) | 2005-02-21 | 2006-08-31 | Seiko Epson Corp | 有機el装置の製造方法、蒸着ボート |
JP2006244944A (ja) | 2005-03-07 | 2006-09-14 | Seiko Epson Corp | 有機el装置の製造方法、蒸着ボート |
TWI307612B (en) | 2005-04-27 | 2009-03-11 | Sony Corp | Transfer method and transfer apparatus |
JP2006309995A (ja) | 2005-04-27 | 2006-11-09 | Sony Corp | 転写用基板および表示装置の製造方法ならびに表示装置 |
EP1716964B1 (en) | 2005-04-28 | 2009-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and laser irradiation apparatus |
US20080305287A1 (en) | 2005-08-01 | 2008-12-11 | Pioneer Corporation | Producing Method of Transfer Body with Organic Film Thermal-Transferred Thereon and Transfer Body with Organic Film Thermal-Transferred Thereon |
JP4449890B2 (ja) | 2005-11-21 | 2010-04-14 | ソニー株式会社 | 転写用基板および転写方法ならびに表示装置の製造方法 |
TWI412079B (zh) | 2006-07-28 | 2013-10-11 | Semiconductor Energy Lab | 製造顯示裝置的方法 |
TWI427702B (zh) | 2006-07-28 | 2014-02-21 | Semiconductor Energy Lab | 顯示裝置的製造方法 |
KR101346246B1 (ko) | 2006-08-24 | 2013-12-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시장치 제작방법 |
US8563431B2 (en) | 2006-08-25 | 2013-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8148259B2 (en) * | 2006-08-30 | 2012-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2008066147A (ja) | 2006-09-07 | 2008-03-21 | Fuji Electric Holdings Co Ltd | 蒸着によるパターン形成方法、該方法を含む色変換フィルタ基板およびカラー有機el素子の製造方法 |
WO2008069259A1 (en) | 2006-12-05 | 2008-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Film formation apparatus, film formation method, manufacturing apparatus, and method for manufacturing light-emitting device |
KR101457653B1 (ko) | 2007-03-22 | 2014-11-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막장치, 제조장치, 성막방법, 및 발광장치의 제조방법 |
US8119204B2 (en) * | 2007-04-27 | 2012-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Film formation method and method for manufacturing light-emitting device |
US8431432B2 (en) * | 2007-04-27 | 2013-04-30 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of light-emitting device |
US8367152B2 (en) | 2007-04-27 | 2013-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of light-emitting device |
KR101563237B1 (ko) * | 2007-06-01 | 2015-10-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 제조장치 및 발광장치 제작방법 |
JP5325471B2 (ja) | 2007-07-06 | 2013-10-23 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
KR20090028413A (ko) * | 2007-09-13 | 2009-03-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광장치 제작방법 및 증착용 기판 |
KR20090041316A (ko) * | 2007-10-23 | 2009-04-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막 방법 및 발광 장치의 제작 방법 |
US8153201B2 (en) * | 2007-10-23 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing light-emitting device, and evaporation donor substrate |
KR20090041314A (ko) * | 2007-10-23 | 2009-04-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 증착용 기판 및 발광장치의 제조방법 |
US8425974B2 (en) * | 2007-11-29 | 2013-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Evaporation donor substrate and method for manufacturing light-emitting device |
KR101689519B1 (ko) * | 2007-12-26 | 2016-12-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 증착용 기판, 증착용 기판의 제조방법, 및 발광장치의 제조방법 |
US8080811B2 (en) * | 2007-12-28 | 2011-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing evaporation donor substrate and light-emitting device |
WO2009099002A1 (en) * | 2008-02-04 | 2009-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing light-emitting device |
WO2009107548A1 (en) * | 2008-02-29 | 2009-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
JP5079722B2 (ja) * | 2008-03-07 | 2012-11-21 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
US8182863B2 (en) * | 2008-03-17 | 2012-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
US7993945B2 (en) * | 2008-04-11 | 2011-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting device |
US7932112B2 (en) * | 2008-04-14 | 2011-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting device |
JP5538642B2 (ja) * | 2008-04-15 | 2014-07-02 | 株式会社半導体エネルギー研究所 | 成膜方法および発光素子の作製方法 |
JP5159689B2 (ja) * | 2008-04-25 | 2013-03-06 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
US8405909B2 (en) * | 2008-05-09 | 2013-03-26 | Semiconductor Energy Laboratories Co., Ltd. | Deposition donor substrate and deposition method using the same |
US7919340B2 (en) * | 2008-06-04 | 2011-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting device |
US8574709B2 (en) * | 2008-07-21 | 2013-11-05 | Semiconductor Energy Laboratory Co., Ltd. | Deposition donor substrate and method for manufacturing light-emitting device |
-
2009
- 2009-02-20 JP JP2009037414A patent/JP5416987B2/ja not_active Expired - Fee Related
- 2009-02-24 US US12/391,840 patent/US8734915B2/en not_active Expired - Fee Related
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11237504A (ja) * | 1997-10-31 | 1999-08-31 | Eastman Kodak Co | カラー有機層の選択的転写方法 |
JP2002190386A (ja) * | 2000-12-20 | 2002-07-05 | Daicel Chem Ind Ltd | 有機エレクトロルミネッセンス素子用材料およびその製造方法 |
JP2002240437A (ja) * | 2001-02-19 | 2002-08-28 | Sharp Corp | 薄膜形成用ドナーシートの製造方法、薄膜形成用ドナーシート及び有機エレクトロルミネッセンス素子 |
JP2003197372A (ja) * | 2001-12-12 | 2003-07-11 | Eastman Kodak Co | 有機発光ダイオードデバイスの層を形成するためにドナーから有機材料を転写する装置 |
JP2004281189A (ja) * | 2003-03-14 | 2004-10-07 | Optrex Corp | 上面発光型有機エレクトロルミネセンス表示素子およびその製造方法 |
JP2008500699A (ja) * | 2004-05-27 | 2008-01-10 | イーストマン コダック カンパニー | Oledを製造するための線形レーザー・ビーム |
JP2008147016A (ja) * | 2006-12-11 | 2008-06-26 | Fuji Electric Holdings Co Ltd | 蒸着薄膜のパターン形成方法およびそれを用いた有機elパネルの製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160028578A (ko) * | 2014-09-03 | 2016-03-14 | 삼성디스플레이 주식회사 | 광학 마스크 |
KR102144855B1 (ko) | 2014-09-03 | 2020-08-18 | 삼성디스플레이 주식회사 | 광학 마스크 |
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TWI481306B (zh) | 2015-04-11 |
US20090220706A1 (en) | 2009-09-03 |
US8734915B2 (en) | 2014-05-27 |
TW200952542A (en) | 2009-12-16 |
JP5416987B2 (ja) | 2014-02-12 |
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