JP2009146966A - 半導体装置の製造方法 - Google Patents
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Abstract
【解決手段】基板上に被加工絶縁性膜を形成し、前記基板に設けられる素子を接続する第1の配線が配置される第1のエリアに前記第1の配線を形成するためにパターニングされた第1の犠牲膜を形成し、ダミー配線が配置される第2のエリアに前記ダミー配線を形成するためにパターニングされた第2の犠牲膜を形成し、前記第1の犠牲膜の側壁に形成される第3の犠牲膜と前記第2の犠牲膜の側壁に形成される第4の犠牲膜とを、分離した膜として形成し、前記第3の犠牲膜と前記第4の犠牲膜とをマスクとして前記被加工絶縁性膜をエッチングして凹部を形成し、導電性材料を前記凹部に埋め込むことを特徴とする半導体装置の製造方法を提供する。
【選択図】図10
Description
図1は、本発明の一実施形態に係る半導体装置の基板の部分の平面図を模式的に示す。図1(A)に例示されるように、本発明の一実施形態に係る半導体装置は、その基板上に、機能エリア101とダミーエリア102と呼ばれる領域を有する。「機能エリア」とは、半導体装置の機能の発揮に必要な複数の素子(以下、「機能素子」という)と、機能素子を接続する配線(以下、「機能配線」という)が配置されている基板上の領域である。帰納的に定義するならば、まず、外部との信号の入出力を行う入出力端子は機能素子である。そして機能素子に接続される配線は機能配線である。そして、機能配線に接続される素子は機能素子となる。なお、機能素子がトランジスタなどのスイッチング素子であり常にOFF状態となる場合には、その機能素子を介して接続される配線は機能配線とはならないと、さらに定義してもよい。
本発明の一実施形態の半導体装置として、NANDフラッシュメモリを用いた不揮発性半導体記憶装置を用いる実施形態について説明する。
1002 第2の犠牲膜
1003 埋め込まれた導電性材料
Claims (5)
- 基板上に被加工絶縁性膜を形成し、
前記基板に設けられる素子を接続する第1の配線が配置される第1のエリアに前記第1の配線を形成するためにパターニングされた第1の犠牲膜を形成し、
ダミー配線が配置される第2のエリアに前記ダミー配線を形成するためにパターニングされた第2の犠牲膜を形成し、
前記第1の犠牲膜の側壁に形成される第3の犠牲膜と前記第2の犠牲膜の側壁に形成される第4の犠牲膜とを、分離した膜として形成し、
前記第3の犠牲膜と前記第4の犠牲膜とをマスクとして前記被加工絶縁性膜をエッチングして凹部を形成し、
導電性材料を前記凹部に埋め込む
ことを特徴とする半導体装置の製造方法。 - 前記ダミー配線は、前記素子と前記第1の配線を用いて形成される回路の動作に寄与しないことを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記第2の犠牲膜の形状は複数の連結成分から成り、
前記第4の犠牲膜の形状はトーラス形状であることを特徴とする請求項1に記載の半導体装置の製造方法。 - 基板上に被加工導電性膜を形成し、
前記基板に設けられる素子を接続する第1の配線が配置される第1のエリアに前記第1の配線を形成するためにパターニングされた第1の犠牲膜を形成し、
ダミー配線が形成される第2のエリアに前記ダミー配線を形成するためにパターニングされた第2の犠牲膜を形成し、
前記第1の犠牲膜の側壁に第3の犠牲膜を形成するとともに前記第2の犠牲膜の側壁に形成される第4の犠牲膜を複数の連結成分から成るようにし、
前記第3の犠牲膜と前記第4の犠牲膜とをマスクとして前記被加工導電性膜をエッチングして凹部を形成し、
絶縁性材料を前記凹部に埋め込む
ことを特徴とする半導体装置の製造方法。 - 前記ダミー配線は、前記素子と前記第1の配線を用いて形成される回路の動作に寄与しないことを特徴とする請求項4に記載の半導体装置の製造方法。
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Application Number | Priority Date | Filing Date | Title |
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JP2007320444A JP5193582B2 (ja) | 2007-12-12 | 2007-12-12 | 半導体装置の製造方法 |
US12/332,788 US8298928B2 (en) | 2007-12-12 | 2008-12-11 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US13/665,803 US8865583B2 (en) | 2007-12-12 | 2012-10-31 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US14/492,940 US9209070B2 (en) | 2007-12-12 | 2014-09-22 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US14/829,250 US9583437B2 (en) | 2007-12-12 | 2015-08-18 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US15/408,562 US9806021B2 (en) | 2007-12-12 | 2017-01-18 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US15/719,135 US10163790B2 (en) | 2007-12-12 | 2017-09-28 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US16/193,584 US10490499B2 (en) | 2007-12-12 | 2018-11-16 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US16/601,066 US10854546B2 (en) | 2007-12-12 | 2019-10-14 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US17/079,952 US11417600B2 (en) | 2007-12-12 | 2020-10-26 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
US17/860,345 US20220344256A1 (en) | 2007-12-12 | 2022-07-08 | Manufacturing method of a semiconductor device and method for creating a layout thereof |
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JP2007320444A JP5193582B2 (ja) | 2007-12-12 | 2007-12-12 | 半導体装置の製造方法 |
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US11417600B2 (en) | 2022-08-16 |
US9806021B2 (en) | 2017-10-31 |
US10490499B2 (en) | 2019-11-26 |
US10854546B2 (en) | 2020-12-01 |
US10163790B2 (en) | 2018-12-25 |
US20200043845A1 (en) | 2020-02-06 |
US9583437B2 (en) | 2017-02-28 |
US8865583B2 (en) | 2014-10-21 |
US20150041986A1 (en) | 2015-02-12 |
US9209070B2 (en) | 2015-12-08 |
US20150357281A1 (en) | 2015-12-10 |
US20220344256A1 (en) | 2022-10-27 |
JP5193582B2 (ja) | 2013-05-08 |
US20180082943A1 (en) | 2018-03-22 |
US8298928B2 (en) | 2012-10-30 |
US20190088590A1 (en) | 2019-03-21 |
US20090155990A1 (en) | 2009-06-18 |
US20170125339A1 (en) | 2017-05-04 |
US20210043558A1 (en) | 2021-02-11 |
US20130164934A1 (en) | 2013-06-27 |
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