JP2009019243A - 蒸着方法および蒸着装置 - Google Patents
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- 230000008020 evaporation Effects 0.000 abstract description 17
- 238000001771 vacuum deposition Methods 0.000 abstract description 5
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
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Abstract
【解決手段】真空チャンバ1内に蒸着源ユニット100を固定し、蒸着源の蒸気3を横切るように基板4を移動させる間に、該基板4の所定個所に蒸着源の蒸気3を蒸着する。基板4の蒸着源ユニット100側に蒸着マスク5を設置し、真空チャンバ1内には複数のローラ13によるマスクフレーム7の移動手段を有し、マスクフレーム7の蒸着源ユニット100側の面に対して非接触かつ近接して設けた冷却手段を持つ冷却板11を該マスクフレーム7が移動する軌道上に設ける。冷却板11には蒸着源ユニット100の近傍に部分的に開口部60を設け、蒸着源ユニット100の冷却プレート14の開口部70を通して蒸着源2で発生した蒸気3を蒸着マスク5及び基板4に吹き付ける。
【選択図】図1
Description
方法1:真空雰囲気を保持した容器内に設置した蒸着源ユニット内に蒸着源となる材料を固定し、該蒸着源ユニットの蒸気噴出口から噴出する蒸気を横切って蒸着対象の基板を移動させている間に該基板の所定個所に前記材料を蒸着する。この際、前記基板に対して、前記材料を蒸着する個所に対応した孔が開いたシートと該シートを平面に保持するマスクフレームを備えた蒸着マスクを密着させて設置し、
前記真空雰囲気を保持する容器に設けた複数のローラを有する移動手段で前記マスクフレームを移動し、
前記マスクフレームが移動する軌道上で、前記マスクフレームの前記蒸着源側の面に対して非接触かつ近接して設けた冷却手段を持ち、前記蒸着源の近傍に部分的に開口部を有する冷却プレートの該開口部を通じて前記蒸着源ユニットの上記蒸気噴出口から噴出した前記材料の蒸気を前記蒸着マスク及び前記基板に吹き付けることを特徴とする。
前記真空雰囲気を保持する容器に設けた複数のローラと開口部を有して前記蒸着マスクを密着させて搬送するキャリアで前記マスクフレームを移動し、
前記マスクフレームが移動する軌道上で、前記マスクフレームの前記蒸着源側の面に対して非接触かつ近接して設けた冷却手段を持ち、前記蒸着源の近傍に部分的に開口部を有する冷却プレートの該開口部を通じて前記蒸着源ユニットの上記蒸気噴出口から噴出した前記材料の蒸気を前記蒸着マスク及び前記基板に吹き付けることを特徴とする。
前記基板の前記蒸着源側に設置して該基板と該蒸着マスクを密着させる蒸着マスク密着手段と、
前記真空雰囲気を保持する容器に設けた複数のローラによるマスクフレームの移動手段と、
前記マスクフレームの前記蒸着源側の面に対して非接触かつ近接するように設けた冷却手段を持つと共に該蒸着源の近傍に部分的な開口部を有して前記マスクフレームが移動する軌道上に設けた冷却プレートとを有し、
前記冷却プレートの前記開口部を通じて前記蒸着源で発生した前記材料の蒸気を前記蒸着マスク及び前記基板に吹き付けることを特徴とする。
前記基板の前記蒸着源側に設置して該基板と該蒸着マスクを密着させる蒸着マスク密着手段と、
前記基板の前記蒸着源側に前記蒸着マスクを密着し、開口部を有して搬送するキャリアと、
前記真空雰囲気を保持する容器には複数のローラによる前記キャリアの移動手段と、
前記マスクフレームが移動する軌道上に設けて前記キャリアの前記蒸着源側の面に対して非接触かつ近接して設けた冷却手段を持つと共にがい蒸着源の近傍に部分的に開口部を有する冷却プレートとを有し、
前記冷却プレートの前記開口部を通じて蒸着源ユニットの前記噴出口から噴出した前記材料の蒸気を前記蒸着マスク及び前記基板に吹き付けることを特徴とする。
Claims (12)
- 真空雰囲気を保持した容器内に設置した蒸着源ユニット内に蒸着源となる材料を固定し、該蒸着源ユニットの蒸気噴出口から噴出する蒸気を横切って蒸着対象の基板を移動させている間に該基板の所定個所に前記材料を蒸着する方法であって、
前記基板に対して、前記材料を蒸着する個所に対応した孔が開いたシートと該シートを平面に保持するマスクフレームを備えた蒸着マスクを密着させて設置し、
前記真空雰囲気を保持する容器に設けた複数のローラを有する移動手段で前記マスクフレームを移動し、
前記マスクフレームが移動する軌道上で、前記マスクフレームの前記蒸着源側の面に対して非接触かつ近接して設けた冷却手段を持ち、前記蒸着源の近傍に部分的に開口部を有する冷却プレートの該開口部を通じて前記蒸着源ユニットの上記蒸気噴出口から噴出した前記材料の蒸気を前記蒸着マスク及び前記基板に吹き付けることを特徴とする蒸着方法。 - 真空雰囲気を保持した容器内に設置した蒸着源ユニット内に蒸着源となる材料を固定し、該蒸着源ユニットの蒸気噴出口から噴出する蒸気を横切って蒸着対象の基板の移動させることにより、該基板の所定個所に前記材料を蒸着する方法であって、
前記基板に対して、前記材料を蒸着する個所に対応した孔が開いたシートと該シートを平面に保持するマスクフレームを備えた蒸着マスクを密着させて設置し、
前記真空雰囲気を保持する容器に設けた複数のローラと開口部を有して前記蒸着マスクを密着させて搬送するキャリアで前記マスクフレームを移動し、
前記マスクフレームが移動する軌道上で、前記マスクフレームの前記蒸着源側の面に対して非接触かつ近接して設けた冷却手段を持ち、前記蒸着源の近傍に部分的に開口部を有する冷却プレートの該開口部を通じて前記蒸着源ユニットの上記蒸気噴出口から噴出した前記材料の蒸気を前記蒸着マスク及び前記基板に吹き付けることを特徴とする蒸着方法。 - 請求項1又は2において、
前記蒸着源の近傍に設ける前記冷却プレートの開口部の前記基板の進行方向の幅が、前記蒸着源のユニットの前記蒸気噴出口の前記基板の進行方向の幅より大きく、前記基板の進行方向の長さよりも小さいことを特徴とする蒸着方法。 - 請求項1又は2において、
前記真空雰囲気を形成する容器の外側から前記搬送用のローラ内部に冷却液を循環させて冷却することを特徴とする蒸着方法。 - 請求項1又は2において、
前記蒸着源となる材料が有機エレクトロルミネッセンス表示素子の発光層を構成する有機材料であることを特徴とする蒸着方法。 - 真空雰囲気を保持した容器内に設置した蒸着源ユニット内に蒸着源となる材料を固定し、該蒸着源ユニットの蒸気噴出口から噴出する前記材料の蒸気を横切って蒸着対象の基板を移動させている間に該基板の所定個所に前記材料を蒸着する装置であって、
前記基板へ前記材料を蒸着する個所に対応した孔が開いたシートと該シートを平面に保持するマスクフレームを備えた蒸着マスクと、
前記基板の前記蒸着源側に設置して該基板と該蒸着マスクを密着させる蒸着マスク密着手段と、
前記真空雰囲気を保持する容器に設けた複数のローラによるマスクフレームの移動手段と、
前記マスクフレームの前記蒸着源側の面に対して非接触かつ近接するように設けた冷却手段を持つと共に該蒸着源の近傍に部分的な開口部を有して前記マスクフレームが移動する軌道上に設けた冷却プレートとを有し、
前記冷却プレートの前記開口部を通じて前記蒸着源で発生した前記材料の蒸気を前記蒸着マスク及び前記基板に吹き付けることを特徴とする蒸着装置。 - 真空雰囲気を保持した容器内に設置した蒸着源ユニット内に蒸着源となる材料を固定し、該蒸着源の蒸気を横切るように蒸着対象の基板の移動させることにより、該基板の所定個所に前記材料を蒸着する装置であって、
前記基板へ前記材料を蒸着する個所に対応した孔が開いたシートと該シートを平面に保持するマスクフレームを備えた蒸着マスクと、
前記基板の前記蒸着源側に設置して該基板と該蒸着マスクを密着させる蒸着マスク密着手段と、
前記基板の前記蒸着源側に前記蒸着マスクを密着し、開口部を有して搬送するキャリアと、
前記真空雰囲気を保持する容器には複数のローラによる前記キャリアの移動手段と、
前記マスクフレームが移動する軌道上に設けて前記キャリアの前記蒸着源側の面に対して非接触かつ近接して設けた冷却手段を持つと共にがい蒸着源の近傍に部分的に開口部を有する冷却プレートとを有し、
前記冷却プレートの前記開口部を通じて蒸着源ユニットの前記噴出口から噴出した前記材料の蒸気を前記蒸着マスク及び前記基板に吹き付けることを特徴とする蒸着装置。 - 請求項6又は7において、
前記蒸着源の近傍に設ける前記冷却プレートの前記開口部の前記基板の進行方向の幅が、前記蒸着源ユニットの前記噴出口の幅より大きく、前記基板の進行方向の長さよりも小さいことを特徴とする蒸着装置。 - 請求項6又は7において、
前記真空雰囲気を形成する容器の外側から搬送用のローラ内部に冷却液を循環させて冷却する機能を持つことを特徴とする蒸着装置。 - 請求項6において、
前記マスクフレームと前記冷却プレートの該マスクフレーム側に黒色の皮膜を有することを特徴とする蒸着装置。 - 請求項7において、
前記マスクフレームと前記キャリアの該マスクフレームに対向する面および前記冷却プレートの前記キャリア側に黒色の皮膜を有することを特徴とした蒸着装置。 - 請求項6又は7において、
前記蒸着源となる材料が有機エレクトロルミネッセンス表示素子の発光層を構成する有機材料であることを特徴とする蒸着装置。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010131878A2 (ko) * | 2009-05-11 | 2010-11-18 | 에스엔유 프리시젼 주식회사 | 기판 처리 시스템 |
US8137466B2 (en) | 2009-08-24 | 2012-03-20 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
KR20120029164A (ko) * | 2010-09-16 | 2012-03-26 | 삼성모바일디스플레이주식회사 | 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
WO2012039524A1 (ko) * | 2010-09-20 | 2012-03-29 | 에스엔유 프리시젼 주식회사 | 모노머 증착장치 |
KR101193187B1 (ko) | 2009-06-08 | 2012-10-19 | 삼성디스플레이 주식회사 | 박막 증착 장치 |
US8486737B2 (en) | 2009-08-25 | 2013-07-16 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8536057B2 (en) | 2009-06-25 | 2013-09-17 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light emitting device by using the same |
KR20140011884A (ko) * | 2012-07-20 | 2014-01-29 | 삼성디스플레이 주식회사 | 플라즈마 코팅 장치 및 그것을 이용한 플라즈마 코팅 방법 |
JP2014051733A (ja) * | 2012-09-04 | 2014-03-20 | Samsung Display Co Ltd | 蒸着環境検査用マスク組立体、当該蒸着環境検査用マスク組立体を含む蒸着設備、及び、当該蒸着設備を利用する蒸着環境検査方法 |
JP5455099B1 (ja) * | 2013-09-13 | 2014-03-26 | 大日本印刷株式会社 | 金属板、金属板の製造方法、および金属板を用いてマスクを製造する方法 |
US8709161B2 (en) | 2009-08-05 | 2014-04-29 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8707889B2 (en) | 2011-05-25 | 2014-04-29 | Samsung Display Co., Ltd. | Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus |
KR101399729B1 (ko) * | 2011-01-20 | 2014-05-28 | 샤프 가부시키가이샤 | 피성막 기판, 유기 el 표시 장치 |
JP2014098205A (ja) * | 2012-10-18 | 2014-05-29 | Ulvac Japan Ltd | 成膜装置 |
KR101404987B1 (ko) | 2012-10-29 | 2014-06-10 | 주식회사 선익시스템 | 인라인 증착장비의 글라스 홀더용 냉각 챔버 |
US8802200B2 (en) | 2009-06-09 | 2014-08-12 | Samsung Display Co., Ltd. | Method and apparatus for cleaning organic deposition materials |
US8833294B2 (en) | 2010-07-30 | 2014-09-16 | Samsung Display Co., Ltd. | Thin film deposition apparatus including patterning slit sheet and method of manufacturing organic light-emitting display device with the same |
US8846547B2 (en) | 2010-09-16 | 2014-09-30 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the thin film deposition apparatus, and organic light-emitting display device manufactured by using the method |
US8852687B2 (en) | 2010-12-13 | 2014-10-07 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8859043B2 (en) | 2011-05-25 | 2014-10-14 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8859325B2 (en) | 2010-01-14 | 2014-10-14 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8865252B2 (en) | 2010-04-06 | 2014-10-21 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8871542B2 (en) | 2010-10-22 | 2014-10-28 | Samsung Display Co., Ltd. | Method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus manufactured by using the method |
KR101456246B1 (ko) * | 2013-03-21 | 2014-11-03 | 주식회사 선익시스템 | 기판 이송체 교환장치 |
US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8882921B2 (en) | 2009-06-08 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8882920B2 (en) | 2009-06-05 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8882556B2 (en) | 2010-02-01 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8882922B2 (en) | 2010-11-01 | 2014-11-11 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8894458B2 (en) | 2010-04-28 | 2014-11-25 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8907326B2 (en) | 2009-06-24 | 2014-12-09 | Samsung Display Co., Ltd. | Organic light-emitting display device and thin film deposition apparatus for manufacturing the same |
US8906731B2 (en) | 2011-05-27 | 2014-12-09 | Samsung Display Co., Ltd. | Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus |
US8916237B2 (en) | 2009-05-22 | 2014-12-23 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of depositing thin film |
US8921831B2 (en) | 2009-08-24 | 2014-12-30 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8945974B2 (en) | 2012-09-20 | 2015-02-03 | Samsung Display Co., Ltd. | Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus |
US8945979B2 (en) | 2012-11-09 | 2015-02-03 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method |
US8951349B2 (en) | 2009-11-20 | 2015-02-10 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8951610B2 (en) | 2011-07-04 | 2015-02-10 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8956697B2 (en) | 2012-07-10 | 2015-02-17 | Samsung Display Co., Ltd. | Method of manufacturing organic light-emitting display apparatus and organic light-emitting display apparatus manufactured by using the method |
US8962360B2 (en) | 2013-06-17 | 2015-02-24 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the organic layer deposition apparatus |
US8968829B2 (en) | 2009-08-25 | 2015-03-03 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8973525B2 (en) | 2010-03-11 | 2015-03-10 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8993360B2 (en) | 2013-03-29 | 2015-03-31 | Samsung Display Co., Ltd. | Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus |
US9012258B2 (en) | 2012-09-24 | 2015-04-21 | Samsung Display Co., Ltd. | Method of manufacturing an organic light-emitting display apparatus using at least two deposition units |
US9040330B2 (en) | 2013-04-18 | 2015-05-26 | Samsung Display Co., Ltd. | Method of manufacturing organic light-emitting display apparatus |
TWI486470B (zh) * | 2011-03-22 | 2015-06-01 | Au Optronics Corp | 蒸鍍設備 |
US9051636B2 (en) | 2011-12-16 | 2015-06-09 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus |
KR101530027B1 (ko) * | 2013-11-26 | 2015-06-19 | 주식회사 에스에프에이 | Oled 제조용 인라인 증착장치 |
US9121095B2 (en) | 2009-05-22 | 2015-09-01 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US9136476B2 (en) | 2013-03-20 | 2015-09-15 | Samsung Display Co., Ltd. | Method of manufacturing organic light-emitting display apparatus, and organic light-emitting display apparatus manufactured by the method |
US9150952B2 (en) | 2011-07-19 | 2015-10-06 | Samsung Display Co., Ltd. | Deposition source and deposition apparatus including the same |
US9174250B2 (en) | 2009-06-09 | 2015-11-03 | Samsung Display Co., Ltd. | Method and apparatus for cleaning organic deposition materials |
JP2015218388A (ja) * | 2014-05-21 | 2015-12-07 | 株式会社システム技研 | 成膜用マスクホルダユニット |
US9206501B2 (en) | 2011-08-02 | 2015-12-08 | Samsung Display Co., Ltd. | Method of manufacturing organic light-emitting display apparatus by using an organic layer deposition apparatus having stacked deposition sources |
US9234270B2 (en) | 2011-05-11 | 2016-01-12 | Samsung Display Co., Ltd. | Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus |
US9249493B2 (en) | 2011-05-25 | 2016-02-02 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same |
US9257649B2 (en) | 2012-07-10 | 2016-02-09 | Samsung Display Co., Ltd. | Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module |
US9260778B2 (en) | 2012-06-22 | 2016-02-16 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method |
US9279177B2 (en) | 2010-07-07 | 2016-03-08 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US9306191B2 (en) | 2012-10-22 | 2016-04-05 | Samsung Display Co., Ltd. | Organic light-emitting display apparatus and method of manufacturing the same |
US9347886B2 (en) | 2013-06-24 | 2016-05-24 | Samsung Display Co., Ltd. | Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same |
KR101627964B1 (ko) * | 2015-03-04 | 2016-06-07 | 주식회사 야스 | 회전 도중 냉각판과 유리기판의 미끄러짐 방지를 위한 부쉬와 부쉬 하우징 |
US9388488B2 (en) | 2010-10-22 | 2016-07-12 | Samsung Display Co., Ltd. | Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9450140B2 (en) | 2009-08-27 | 2016-09-20 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
US9461277B2 (en) | 2012-07-10 | 2016-10-04 | Samsung Display Co., Ltd. | Organic light emitting display apparatus |
US9466647B2 (en) | 2012-07-16 | 2016-10-11 | Samsung Display Co., Ltd. | Flat panel display device and method of manufacturing the same |
US9496524B2 (en) | 2012-07-10 | 2016-11-15 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method |
US9496317B2 (en) | 2013-12-23 | 2016-11-15 | Samsung Display Co., Ltd. | Method of manufacturing organic light emitting display apparatus |
US9512515B2 (en) | 2011-07-04 | 2016-12-06 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9534288B2 (en) | 2013-04-18 | 2017-01-03 | Samsung Display Co., Ltd. | Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus |
US9593408B2 (en) | 2009-08-10 | 2017-03-14 | Samsung Display Co., Ltd. | Thin film deposition apparatus including deposition blade |
US9624580B2 (en) | 2009-09-01 | 2017-04-18 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
KR20170086679A (ko) * | 2014-11-07 | 2017-07-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 증발된 재료를 증착하기 위한 장치, 분배 파이프, 진공 증착 챔버, 및 증발된 재료를 증착하기 위한 방법 |
US9748483B2 (en) | 2011-01-12 | 2017-08-29 | Samsung Display Co., Ltd. | Deposition source and organic layer deposition apparatus including the same |
KR101841980B1 (ko) * | 2012-10-18 | 2018-03-26 | 가부시키가이샤 알박 | 성막 장치 |
JP2018058374A (ja) * | 2012-04-12 | 2018-04-12 | カーベーアー−ノタシ ソシエテ アノニム | 凹版印刷版コーティング装置 |
KR101876309B1 (ko) * | 2012-07-27 | 2018-07-09 | 주식회사 원익아이피에스 | 증착 챔버 및 이를 포함하는 인라인 처리 시스템 |
US10246769B2 (en) | 2010-01-11 | 2019-04-02 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US10570498B2 (en) | 2015-02-10 | 2020-02-25 | Dai Nippon Printing Co., Ltd. | Manufacturing method for deposition mask, metal plate used for producing deposition mask, and manufacturing method for said metal sheet |
US10600963B2 (en) | 2014-05-13 | 2020-03-24 | Dai Nippon Printing Co., Ltd. | Metal plate, method of manufacturing metal plate, and method of manufacturing mask by using metal plate |
JP2022092405A (ja) * | 2020-12-10 | 2022-06-22 | キヤノントッキ株式会社 | 成膜装置 |
JP2022121185A (ja) * | 2021-02-08 | 2022-08-19 | キヤノントッキ株式会社 | 計測装置、インライン型蒸着装置および調整方法 |
US11486031B2 (en) | 2013-10-15 | 2022-11-01 | Dai Nippon Printing Co., Ltd. | Metal plate |
CN115478256A (zh) * | 2021-06-15 | 2022-12-16 | 佳能特机株式会社 | 输送装置以及成膜装置 |
KR20230063162A (ko) * | 2021-11-01 | 2023-05-09 | 주식회사 야스 | 인라인 이송시스템 |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101074792B1 (ko) * | 2009-06-12 | 2011-10-19 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 |
KR101117719B1 (ko) * | 2009-06-24 | 2012-03-08 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 |
US20110033621A1 (en) * | 2009-08-10 | 2011-02-10 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus including deposition blade |
JP5611718B2 (ja) * | 2009-08-27 | 2014-10-22 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法 |
US20110052795A1 (en) * | 2009-09-01 | 2011-03-03 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
KR101097738B1 (ko) * | 2009-10-09 | 2011-12-22 | 에스엔유 프리시젼 주식회사 | 기판 처리 장치 및 방법 |
KR101094299B1 (ko) | 2009-12-17 | 2011-12-19 | 삼성모바일디스플레이주식회사 | 선형 증발원 및 이를 포함하는 증착 장치 |
KR101182265B1 (ko) * | 2009-12-22 | 2012-09-12 | 삼성디스플레이 주식회사 | 증발원 및 이를 포함하는 증착 장치 |
JP5296263B2 (ja) * | 2010-09-29 | 2013-09-25 | シャープ株式会社 | 蒸着装置 |
CN102110787B (zh) * | 2010-11-05 | 2012-07-25 | 四川虹视显示技术有限公司 | Oled掩膜板对位方法 |
US8658545B2 (en) * | 2010-12-27 | 2014-02-25 | Sharp Kabushiki Kaisha | Vapor deposition device, vapor deposition method and organic EL display device |
JP5312697B2 (ja) * | 2011-01-18 | 2013-10-09 | シャープ株式会社 | 蒸着装置及び蒸着方法 |
JP5367195B2 (ja) * | 2011-03-15 | 2013-12-11 | シャープ株式会社 | 蒸着装置、蒸着方法、及び有機el表示装置の製造方法 |
KR101114832B1 (ko) * | 2011-05-31 | 2012-03-06 | 에스엔유 프리시젼 주식회사 | 진공증착장치 |
SG10201608512QA (en) * | 2012-04-19 | 2016-12-29 | Intevac Inc | Dual-mask arrangement for solar cell fabrication |
US10679883B2 (en) * | 2012-04-19 | 2020-06-09 | Intevac, Inc. | Wafer plate and mask arrangement for substrate fabrication |
JP6231078B2 (ja) | 2012-04-26 | 2017-11-15 | インテヴァック インコーポレイテッド | 真空プロセスのためのシステム構成 |
US10062600B2 (en) | 2012-04-26 | 2018-08-28 | Intevac, Inc. | System and method for bi-facial processing of substrates |
KR101951029B1 (ko) * | 2012-06-13 | 2019-04-26 | 삼성디스플레이 주식회사 | 증착용 마스크 및 이를 이용한 유기 발광 표시장치의 제조방법 |
WO2014174803A1 (ja) * | 2013-04-22 | 2014-10-30 | パナソニック株式会社 | El表示装置の製造方法 |
KR102114154B1 (ko) * | 2013-07-02 | 2020-05-25 | 삼성디스플레이 주식회사 | 표시 장치 |
JP6087267B2 (ja) * | 2013-12-06 | 2017-03-01 | シャープ株式会社 | 蒸着装置、蒸着方法、及び、有機エレクトロルミネッセンス素子の製造方法 |
CN103996801B (zh) * | 2014-06-12 | 2017-05-31 | 深圳市华星光电技术有限公司 | 基板前处理方法及装置 |
WO2016022728A1 (en) | 2014-08-05 | 2016-02-11 | Intevac, Inc. | Implant masking and alignment |
CN104404466A (zh) * | 2014-12-26 | 2015-03-11 | 合肥京东方光电科技有限公司 | 磁控溅射镀膜方法及系统 |
US10298543B2 (en) * | 2016-12-12 | 2019-05-21 | Verisign, Inc. | Real-time association of a policy-based firewall with a dynamic DNS hostname |
US20200083452A1 (en) * | 2017-02-24 | 2020-03-12 | Applied Materials, Inc. | Apparatus for vacuum processing of a substrate, system for vacuum processing of a substrate, and method for transportation of a substrate carrier and a mask carrier in a vacuum chamber |
CN108203812B (zh) * | 2018-01-25 | 2020-02-07 | 京东方科技集团股份有限公司 | 一种基板固定载具、蒸镀设备及蒸镀方法 |
KR20200040537A (ko) * | 2018-10-10 | 2020-04-20 | 엘지디스플레이 주식회사 | 측향식 진공증착용 소스, 소스 어셈블리 및 이를 이용한 측향식 진공증착 장치 |
CN109652773B (zh) * | 2019-02-25 | 2021-01-22 | 京东方科技集团股份有限公司 | 一种防着组件以及蒸镀设备 |
JP7292948B2 (ja) * | 2019-04-24 | 2023-06-19 | キヤノン株式会社 | 基板処理装置および基板処理方法 |
CN110098239B (zh) * | 2019-05-17 | 2021-11-02 | 京东方科技集团股份有限公司 | 像素结构、显示基板、掩模板及蒸镀方法 |
CN115971003A (zh) * | 2022-12-29 | 2023-04-18 | 王道胜 | 一种光伏薄膜组件涂覆工艺 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11335820A (ja) * | 1998-05-20 | 1999-12-07 | Fujitsu Ltd | 蒸着方法及び蒸着装置 |
JP2004214185A (ja) * | 2002-12-19 | 2004-07-29 | Sony Corp | 蒸着装置および有機エレクトロルミネッセンス素子の製造方法 |
JP2004269968A (ja) * | 2003-03-10 | 2004-09-30 | Sony Corp | 蒸着用マスク |
JP2005054244A (ja) * | 2003-08-05 | 2005-03-03 | Anelva Corp | 成膜装置の基板トレイ |
JP2005169935A (ja) * | 2003-12-12 | 2005-06-30 | Sanko Plastics Kk | 積層フィルム、薄膜状のポリフッ化ビニリデンフィルム、並びに電子部品及びその製造方法 |
JP2006104497A (ja) * | 2004-10-01 | 2006-04-20 | Hitachi Zosen Corp | 蒸着装置 |
JP2006330684A (ja) * | 2005-04-26 | 2006-12-07 | Kyocera Corp | マスク洗浄装置、マスク洗浄方法、蒸着膜の形成方法、elディスプレイの製造装置、及びelディスプレイの製造方法 |
JP2007046100A (ja) * | 2005-08-09 | 2007-02-22 | Sony Corp | 蒸着装置、および表示装置の製造システム |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6202591B1 (en) * | 1998-11-12 | 2001-03-20 | Flex Products, Inc. | Linear aperture deposition apparatus and coating process |
JP4364423B2 (ja) | 2000-12-20 | 2009-11-18 | 新明和工業株式会社 | 成膜装置 |
JP4704605B2 (ja) * | 2001-05-23 | 2011-06-15 | 淳二 城戸 | 連続蒸着装置、蒸着装置及び蒸着方法 |
EP1548147A1 (en) * | 2003-12-26 | 2005-06-29 | Seiko Epson Corporation | Thin film formation method |
JP4582450B2 (ja) | 2005-02-23 | 2010-11-17 | 株式会社アルバック | 真空成膜装置の搬送機構 |
JP4780983B2 (ja) | 2005-03-17 | 2011-09-28 | 株式会社アルバック | 有機el素子製造方法 |
US20070178225A1 (en) * | 2005-12-14 | 2007-08-02 | Keiji Takanosu | Vapor deposition crucible, thin-film forming apparatus comprising the same, and method of producing display device |
-
2007
- 2007-07-12 JP JP2007183242A patent/JP5081516B2/ja active Active
-
2008
- 2008-06-27 US US12/216,060 patent/US8313806B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11335820A (ja) * | 1998-05-20 | 1999-12-07 | Fujitsu Ltd | 蒸着方法及び蒸着装置 |
JP2004214185A (ja) * | 2002-12-19 | 2004-07-29 | Sony Corp | 蒸着装置および有機エレクトロルミネッセンス素子の製造方法 |
JP2004269968A (ja) * | 2003-03-10 | 2004-09-30 | Sony Corp | 蒸着用マスク |
JP2005054244A (ja) * | 2003-08-05 | 2005-03-03 | Anelva Corp | 成膜装置の基板トレイ |
JP2005169935A (ja) * | 2003-12-12 | 2005-06-30 | Sanko Plastics Kk | 積層フィルム、薄膜状のポリフッ化ビニリデンフィルム、並びに電子部品及びその製造方法 |
JP2006104497A (ja) * | 2004-10-01 | 2006-04-20 | Hitachi Zosen Corp | 蒸着装置 |
JP2006330684A (ja) * | 2005-04-26 | 2006-12-07 | Kyocera Corp | マスク洗浄装置、マスク洗浄方法、蒸着膜の形成方法、elディスプレイの製造装置、及びelディスプレイの製造方法 |
JP2007046100A (ja) * | 2005-08-09 | 2007-02-22 | Sony Corp | 蒸着装置、および表示装置の製造システム |
Cited By (123)
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WO2010131878A2 (ko) * | 2009-05-11 | 2010-11-18 | 에스엔유 프리시젼 주식회사 | 기판 처리 시스템 |
WO2010131878A3 (ko) * | 2009-05-11 | 2011-02-24 | 에스엔유 프리시젼 주식회사 | 기판 처리 시스템 |
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TWI427838B (zh) * | 2009-05-11 | 2014-02-21 | Snu Precision Co Ltd | 基板處理系統 |
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US10689746B2 (en) | 2009-05-22 | 2020-06-23 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US9873937B2 (en) | 2009-05-22 | 2018-01-23 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
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KR101193187B1 (ko) | 2009-06-08 | 2012-10-19 | 삼성디스플레이 주식회사 | 박막 증착 장치 |
US8882921B2 (en) | 2009-06-08 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US9174250B2 (en) | 2009-06-09 | 2015-11-03 | Samsung Display Co., Ltd. | Method and apparatus for cleaning organic deposition materials |
US8802200B2 (en) | 2009-06-09 | 2014-08-12 | Samsung Display Co., Ltd. | Method and apparatus for cleaning organic deposition materials |
US8907326B2 (en) | 2009-06-24 | 2014-12-09 | Samsung Display Co., Ltd. | Organic light-emitting display device and thin film deposition apparatus for manufacturing the same |
US8536057B2 (en) | 2009-06-25 | 2013-09-17 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light emitting device by using the same |
US8709161B2 (en) | 2009-08-05 | 2014-04-29 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9593408B2 (en) | 2009-08-10 | 2017-03-14 | Samsung Display Co., Ltd. | Thin film deposition apparatus including deposition blade |
US8137466B2 (en) | 2009-08-24 | 2012-03-20 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8193011B2 (en) | 2009-08-24 | 2012-06-05 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8921831B2 (en) | 2009-08-24 | 2014-12-30 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8486737B2 (en) | 2009-08-25 | 2013-07-16 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8968829B2 (en) | 2009-08-25 | 2015-03-03 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9450140B2 (en) | 2009-08-27 | 2016-09-20 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
US9624580B2 (en) | 2009-09-01 | 2017-04-18 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US9224591B2 (en) | 2009-10-19 | 2015-12-29 | Samsung Display Co., Ltd. | Method of depositing a thin film |
US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8951349B2 (en) | 2009-11-20 | 2015-02-10 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
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US10287671B2 (en) | 2010-01-11 | 2019-05-14 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
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US8833294B2 (en) | 2010-07-30 | 2014-09-16 | Samsung Display Co., Ltd. | Thin film deposition apparatus including patterning slit sheet and method of manufacturing organic light-emitting display device with the same |
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US8846547B2 (en) | 2010-09-16 | 2014-09-30 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the thin film deposition apparatus, and organic light-emitting display device manufactured by using the method |
KR101678056B1 (ko) * | 2010-09-16 | 2016-11-22 | 삼성디스플레이 주식회사 | 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
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CN103119745A (zh) * | 2010-09-20 | 2013-05-22 | Snu精密股份有限公司 | 单体沉积设备 |
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US8882922B2 (en) | 2010-11-01 | 2014-11-11 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8852687B2 (en) | 2010-12-13 | 2014-10-07 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US9748483B2 (en) | 2011-01-12 | 2017-08-29 | Samsung Display Co., Ltd. | Deposition source and organic layer deposition apparatus including the same |
US8828856B2 (en) | 2011-01-20 | 2014-09-09 | Sharp Kabushiki Kaisha | Substrate on which film is formed, and organic EL display device |
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KR101876309B1 (ko) * | 2012-07-27 | 2018-07-09 | 주식회사 원익아이피에스 | 증착 챔버 및 이를 포함하는 인라인 처리 시스템 |
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JP2014051733A (ja) * | 2012-09-04 | 2014-03-20 | Samsung Display Co Ltd | 蒸着環境検査用マスク組立体、当該蒸着環境検査用マスク組立体を含む蒸着設備、及び、当該蒸着設備を利用する蒸着環境検査方法 |
US10151022B2 (en) | 2012-09-04 | 2018-12-11 | Samsung Display Co., Ltd. | Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly |
CN103668046A (zh) * | 2012-09-04 | 2014-03-26 | 三星显示有限公司 | 用于测试沉积过程的掩膜组件、沉积装置和测试方法 |
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US9012258B2 (en) | 2012-09-24 | 2015-04-21 | Samsung Display Co., Ltd. | Method of manufacturing an organic light-emitting display apparatus using at least two deposition units |
JP2014098205A (ja) * | 2012-10-18 | 2014-05-29 | Ulvac Japan Ltd | 成膜装置 |
KR101841980B1 (ko) * | 2012-10-18 | 2018-03-26 | 가부시키가이샤 알박 | 성막 장치 |
JP2017082342A (ja) * | 2012-10-18 | 2017-05-18 | 株式会社アルバック | 成膜装置 |
US9306191B2 (en) | 2012-10-22 | 2016-04-05 | Samsung Display Co., Ltd. | Organic light-emitting display apparatus and method of manufacturing the same |
KR101404987B1 (ko) | 2012-10-29 | 2014-06-10 | 주식회사 선익시스템 | 인라인 증착장비의 글라스 홀더용 냉각 챔버 |
US8945979B2 (en) | 2012-11-09 | 2015-02-03 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method |
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KR101456246B1 (ko) * | 2013-03-21 | 2014-11-03 | 주식회사 선익시스템 | 기판 이송체 교환장치 |
US8993360B2 (en) | 2013-03-29 | 2015-03-31 | Samsung Display Co., Ltd. | Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus |
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US9534288B2 (en) | 2013-04-18 | 2017-01-03 | Samsung Display Co., Ltd. | Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus |
US8962360B2 (en) | 2013-06-17 | 2015-02-24 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the organic layer deposition apparatus |
US9347886B2 (en) | 2013-06-24 | 2016-05-24 | Samsung Display Co., Ltd. | Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same |
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US8313806B2 (en) | 2012-11-20 |
JP5081516B2 (ja) | 2012-11-28 |
US20090017192A1 (en) | 2009-01-15 |
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