JP2008527694A5 - - Google Patents
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- Publication number
- JP2008527694A5 JP2008527694A5 JP2007549558A JP2007549558A JP2008527694A5 JP 2008527694 A5 JP2008527694 A5 JP 2008527694A5 JP 2007549558 A JP2007549558 A JP 2007549558A JP 2007549558 A JP2007549558 A JP 2007549558A JP 2008527694 A5 JP2008527694 A5 JP 2008527694A5
- Authority
- JP
- Japan
- Prior art keywords
- plate
- meters
- pedestal
- solid plastic
- adhesive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 15
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 12
- 239000004033 plastic Substances 0.000 claims 12
- 239000007787 solid Substances 0.000 claims 11
- 239000012790 adhesive layer Substances 0.000 claims 9
- 239000010410 layer Substances 0.000 claims 5
- 239000000853 adhesive Substances 0.000 claims 4
- 230000001070 adhesive effect Effects 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 230000003746 surface roughness Effects 0.000 claims 4
- 239000003989 dielectric material Substances 0.000 claims 3
- 238000003754 machining Methods 0.000 claims 3
- 238000009413 insulation Methods 0.000 claims 2
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/027,481 US8038796B2 (en) | 2004-12-30 | 2004-12-30 | Apparatus for spatial and temporal control of temperature on a substrate |
| US11/027,481 | 2004-12-30 | ||
| PCT/US2005/047109 WO2006073947A2 (en) | 2004-12-30 | 2005-12-13 | Apparatus for spatial and temporal control of temperature on a substrate |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008527694A JP2008527694A (ja) | 2008-07-24 |
| JP2008527694A5 true JP2008527694A5 (enExample) | 2011-11-04 |
| JP4881319B2 JP4881319B2 (ja) | 2012-02-22 |
Family
ID=36129887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007549558A Expired - Lifetime JP4881319B2 (ja) | 2004-12-30 | 2005-12-13 | 基板を空間的かつ時間的に温度制御するための装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (6) | US8038796B2 (enExample) |
| JP (1) | JP4881319B2 (enExample) |
| KR (3) | KR20070121637A (enExample) |
| CN (1) | CN101095212B (enExample) |
| SG (1) | SG158164A1 (enExample) |
| TW (1) | TWI403617B (enExample) |
| WO (1) | WO2006073947A2 (enExample) |
Families Citing this family (83)
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2004
- 2004-12-30 US US11/027,481 patent/US8038796B2/en active Active
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2005
- 2005-12-13 CN CN200580045528XA patent/CN101095212B/zh not_active Expired - Lifetime
- 2005-12-13 SG SG200908533-3A patent/SG158164A1/en unknown
- 2005-12-13 KR KR1020077017391A patent/KR20070121637A/ko not_active Ceased
- 2005-12-13 KR KR1020097013821A patent/KR101094122B1/ko not_active Expired - Lifetime
- 2005-12-13 JP JP2007549558A patent/JP4881319B2/ja not_active Expired - Lifetime
- 2005-12-13 KR KR1020107005037A patent/KR20100034770A/ko not_active Ceased
- 2005-12-13 WO PCT/US2005/047109 patent/WO2006073947A2/en not_active Ceased
- 2005-12-23 TW TW094146395A patent/TWI403617B/zh active
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2008
- 2008-09-22 US US12/232,673 patent/US8051556B2/en not_active Expired - Lifetime
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2011
- 2011-09-19 US US13/235,961 patent/US8821639B2/en not_active Expired - Lifetime
-
2012
- 2012-10-22 US US13/657,031 patent/US8735298B2/en active Active
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2014
- 2014-07-24 US US14/340,083 patent/US10636689B2/en active Active
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2020
- 2020-04-13 US US16/846,582 patent/US11302556B2/en not_active Expired - Lifetime
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