JP2008188755A - 三次元微細構造体およびその形成方法 - Google Patents
三次元微細構造体およびその形成方法 Download PDFInfo
- Publication number
- JP2008188755A JP2008188755A JP2007339396A JP2007339396A JP2008188755A JP 2008188755 A JP2008188755 A JP 2008188755A JP 2007339396 A JP2007339396 A JP 2007339396A JP 2007339396 A JP2007339396 A JP 2007339396A JP 2008188755 A JP2008188755 A JP 2008188755A
- Authority
- JP
- Japan
- Prior art keywords
- microstructure
- opening
- layer
- dimensional
- transmission line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
- H01P3/06—Coaxial lines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0059—Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
- H01P11/001—Manufacturing waveguides or transmission lines of the waveguide type
- H01P11/005—Manufacturing coaxial lines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0307—Anchors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49123—Co-axial cable
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12361—All metal or with adjacent metals having aperture or cut
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12389—All metal or with adjacent metals having variation in thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
- Y10T428/24322—Composite web or sheet
- Y10T428/24331—Composite web or sheet including nonapertured component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24521—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness with component conforming to contour of nonplanar surface
- Y10T428/24545—Containing metal or metal compound
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Waveguides (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Communication Cables (AREA)
- Manufacturing Of Electric Cables (AREA)
- Structure Of Printed Boards (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
【解決手段】微細構造体は逐次的構築プロセスにより形成され、互いに固着された微細構造体要素を含む。微細構造体は例えば、電磁エネルギーのための同軸伝送路に使用される。
【選択図】図2
Description
本発明は、国防高等研究計画局(DARPA)より受けた契約第W911QX−04−C−0097号に基づきアメリカ合衆国政府の支援でなされたものである。当該政府は本発明について一定の権利を有する。
図1は、既知の同軸伝送路微細構造体の側断面図を示す。
図2は、本発明に従った典型的な三次元微細構造体の側断面図を示す。
図3〜15は、本発明に従った形成の様々な段階での図2の三次元微細構造体の側断面図および上面図を示す。
図16A〜Dは、本発明に従った、典型的な、三次元微細構造体誘電要素および開口部の側断面図を示す。
図17は、本発明のさらなる実施態様に従った、典型的な、三次元微細構造体の側断面図を示す。
図18は、本発明のさらなる実施態様に従った、典型的な、三次元微細構造体の側断面図および上面図を示す。
図19A〜Hは、本発明に従った、典型的な、三次元微細構造体誘電要素および開口部の部分上面図を示す。
図20A〜Bは、本発明に従った、典型的な、三次元微細構造体の側断面図を示す。
204 基体
206 外部導体
208 中心導体
210’誘電支持部材
212 導電性ベース層
214 導電性層
216 導電性層
218 導電性層
220 導電性層
222 中心導体と外部導体の間を占める容積
224 開口部
226a 第一犠牲的層
226b 第二犠牲的層
226c 犠牲的感光性材料
226d 第四犠牲的材料層
226e 第五犠牲的材料層
227 パターン
228 パターン
230 パターン
232 パターン
234 第一シード層
236 第二シード層
238 パターン
240 パターン
242 支柱
244 外部導体と伝送路コアの開口
246 「T」字型
Claims (10)
- 逐次的構築プロセスによって形成される三次元微細構造体であって、
誘電材料を含み、かつ少なくとも部分的にそれを通って伸びる開口部を有する第一微細構造要素;
金属材料を含む第二微細構造要素;
第一微細構造要素を第二微細構造要素に固着させる、開口部内の金属材料;および
第一微細構造要素および/または第二微細構造要素が露出される非固体容積:
を含む三次元微細構造体。 - 基体をさらに含み、第一および第二微細構造要素が基体上に配置される、請求項1記載の三次元微細構造体。
- 微細構造体が同軸伝送路を含み、当該同軸伝送路が中心導体、外部導体、および当該中心導体を支持するための誘電支持部材を含み、誘電支持部材が第一微細構造要素であり、並びに内部導体および/または外部導体が第二微細構造要素である、請求項1記載の三次元微細構造体。
- 非固体容積が真空または気体状態下にあり、および中心導体と外部導体との間に配置される、請求項3記載の三次元微細構造体。
- 同軸伝送路が概して矩形の同軸形状を有する、請求項3記載の三次元微細構造体。
- 開口部が、第一微細構造要素の第一表面から第二表面まで、第一微細構造要素を完全に通って伸びる、請求項1記載の三次元微細構造体。
- 開口部がリエントラント形状である、請求項1記載の三次元微細構造体。
- 第二微細構造要素の金属材料と開口部内の金属材料が同じ材料である、請求項9記載の三次元微細構造体。
- 基体上に複数の層を配置すること、ここで当該層は、誘電材料の層、金属材料の層および犠牲的材料の層を含む;
誘電材料を含み、かつ少なくとも部分的にそれを通って伸びる開口部を有する第一微細構造要素を形成すること;
金属材料を含む第二微細構造要素を形成すること;
開口部内に金属材料を堆積させ、第一微細構造要素を第二微細構造要素に固着させること;並びに
犠牲的材料を除去して、第一微細構造要素および/または第二微細構造要素が露出される非固体容積を形成すること:
を含む、逐次的構築プロセスにより三次元微細構造体を形成する方法。 - 微細構造体が同軸伝送路を含み、当該同軸伝送路が中心導体、外部導体、および当該中心導体を支持するための誘電支持部材を含み、誘電支持部材が第一微細構造要素であり、並びに内部導体および/または外部導体が第二微細構造要素である、請求項9記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87827806P | 2006-12-30 | 2006-12-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2008188755A true JP2008188755A (ja) | 2008-08-21 |
Family
ID=39188944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007339396A Pending JP2008188755A (ja) | 2006-12-30 | 2007-12-28 | 三次元微細構造体およびその形成方法 |
Country Status (6)
Country | Link |
---|---|
US (4) | US7656256B2 (ja) |
EP (1) | EP1939137B1 (ja) |
JP (1) | JP2008188755A (ja) |
KR (1) | KR101476438B1 (ja) |
CN (1) | CN101274734A (ja) |
TW (1) | TWI364399B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160087820A (ko) * | 2013-11-19 | 2016-07-22 | 테라다인 인코퍼레이티드 | 장치와 테스터 사이에서 신호를 전송하는 인터커넥트 |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9614266B2 (en) | 2001-12-03 | 2017-04-04 | Microfabrica Inc. | Miniature RF and microwave components and methods for fabricating such components |
US9919472B1 (en) * | 2002-05-07 | 2018-03-20 | Microfabrica Inc. | Stacking and bonding methods for forming multi-layer, three-dimensional, millimeter scale and microscale structures |
CN1784807B (zh) | 2003-03-04 | 2013-03-20 | 诺福特罗尼有限公司 | 同轴波导微结构及其形成方法 |
US7606592B2 (en) * | 2005-09-19 | 2009-10-20 | Becker Charles D | Waveguide-based wireless distribution system and method of operation |
US7656256B2 (en) | 2006-12-30 | 2010-02-02 | Nuvotronics, PLLC | Three-dimensional microstructures having an embedded support member with an aperture therein and method of formation thereof |
JP2008188756A (ja) * | 2006-12-30 | 2008-08-21 | Rohm & Haas Electronic Materials Llc | 三次元微細構造体およびその形成方法 |
KR101593686B1 (ko) * | 2007-03-20 | 2016-02-12 | 누보트로닉스, 엘.엘.씨 | 일체화된 전자 요소들 및 이들의 형성 방법 |
US7898356B2 (en) | 2007-03-20 | 2011-03-01 | Nuvotronics, Llc | Coaxial transmission line microstructures and methods of formation thereof |
US8659371B2 (en) * | 2009-03-03 | 2014-02-25 | Bae Systems Information And Electronic Systems Integration Inc. | Three-dimensional matrix structure for defining a coaxial transmission line channel |
WO2011039602A1 (ja) * | 2009-09-30 | 2011-04-07 | パナソニック電工株式会社 | 高周波用給電線、高周波用給電線の製造方法及び給電線保持構造 |
US20110123783A1 (en) | 2009-11-23 | 2011-05-26 | David Sherrer | Multilayer build processses and devices thereof |
JP5639194B2 (ja) | 2010-01-22 | 2014-12-10 | ヌボトロニクス,エルエルシー | 熱制御 |
US8917150B2 (en) | 2010-01-22 | 2014-12-23 | Nuvotronics, Llc | Waveguide balun having waveguide structures disposed over a ground plane and having probes located in channels |
KR101902558B1 (ko) | 2010-07-02 | 2018-10-01 | 누보트로닉스, 인크. | 3차원 마이크로구조체 |
US8866300B1 (en) | 2011-06-05 | 2014-10-21 | Nuvotronics, Llc | Devices and methods for solder flow control in three-dimensional microstructures |
US8814601B1 (en) | 2011-06-06 | 2014-08-26 | Nuvotronics, Llc | Batch fabricated microconnectors |
US9993982B2 (en) | 2011-07-13 | 2018-06-12 | Nuvotronics, Inc. | Methods of fabricating electronic and mechanical structures |
US8904632B2 (en) | 2011-09-23 | 2014-12-09 | Harris Corporation | Method to make a multilayer circuit board with intermetallic compound and related circuit boards |
US9142497B2 (en) | 2011-10-05 | 2015-09-22 | Harris Corporation | Method for making electrical structure with air dielectric and related electrical structures |
US9065163B1 (en) | 2011-12-23 | 2015-06-23 | Nuvotronics, Llc | High frequency power combiner/divider |
US8952752B1 (en) | 2012-12-12 | 2015-02-10 | Nuvotronics, Llc | Smart power combiner |
US9325044B2 (en) | 2013-01-26 | 2016-04-26 | Nuvotronics, Inc. | Multi-layer digital elliptic filter and method |
US9306254B1 (en) | 2013-03-15 | 2016-04-05 | Nuvotronics, Inc. | Substrate-free mechanical interconnection of electronic sub-systems using a spring configuration |
US9306255B1 (en) | 2013-03-15 | 2016-04-05 | Nuvotronics, Inc. | Microstructure including microstructural waveguide elements and/or IC chips that are mechanically interconnected to each other |
US9439295B2 (en) | 2013-04-25 | 2016-09-06 | The United States Of America As Represented By The Secretary Of The Army | Electrically insulating elements and electrically conductive elements formed from elements having different oxidation behaviors |
CA2910062A1 (en) * | 2013-05-06 | 2014-11-13 | Vrije Universiteit Brussel | Effective structural health monitoring |
WO2015109208A2 (en) | 2014-01-17 | 2015-07-23 | Nuvotronics, Llc | Wafer scale test interface unit: low loss and high isolation devices and methods for high speed and high density mixed signal interconnects and contactors |
WO2015108773A1 (en) * | 2014-01-20 | 2015-07-23 | 3M Innovative Properties Company | Lamination transfer films for forming reentrant structures |
US10847469B2 (en) | 2016-04-26 | 2020-11-24 | Cubic Corporation | CTE compensation for wafer-level and chip-scale packages and assemblies |
EP3224899A4 (en) | 2014-12-03 | 2018-08-22 | Nuvotronics, Inc. | Systems and methods for manufacturing stacked circuits and transmission lines |
US9478494B1 (en) | 2015-05-12 | 2016-10-25 | Harris Corporation | Digital data device interconnects |
US9437911B1 (en) | 2015-05-21 | 2016-09-06 | Harris Corporation | Compliant high speed interconnects |
US9589236B1 (en) * | 2015-09-28 | 2017-03-07 | International Business Machines Corporation | High fidelity and high efficiency qubit readout scheme |
US10044085B2 (en) | 2016-04-14 | 2018-08-07 | Wisconsin Alumni Research Foundation | Stretchable transmission lines and circuits for microwave and millimeter wave frequency wearable electronics |
JP6839969B2 (ja) * | 2016-11-28 | 2021-03-10 | ヒロセ電機株式会社 | 同軸電気コネクタ及びその製造方法 |
US10319654B1 (en) | 2017-12-01 | 2019-06-11 | Cubic Corporation | Integrated chip scale packages |
EP4287397A3 (en) * | 2018-07-13 | 2024-03-06 | Knowles Cazenovia, Inc. | Millimeter wave filter array |
CN110449332A (zh) * | 2019-08-13 | 2019-11-15 | 上海金铎禹辰水环境工程有限公司 | 一种复合结构金刚石薄膜及其制备方法 |
US11367948B2 (en) | 2019-09-09 | 2022-06-21 | Cubic Corporation | Multi-element antenna conformed to a conical surface |
CN111224203B (zh) * | 2020-01-13 | 2021-12-07 | 上海迈铸半导体科技有限公司 | 一种微同轴结构的制备方法及微同轴结构 |
US20210265716A1 (en) * | 2020-02-20 | 2021-08-26 | Averatek Corporation | Methods of Plating onto Sacrificial Material and Components Made Therefrom |
CN112062085B (zh) * | 2020-09-10 | 2024-02-23 | 浙江集迈科微电子有限公司 | 一种硅基光刻胶介质横向传输线结构的制作工艺 |
CN113506967B (zh) * | 2021-09-10 | 2021-11-16 | 四川大学 | 一种超材料内导体及方同轴 |
DE102022211150A1 (de) | 2022-10-20 | 2024-04-25 | Vega Grieshaber Kg | Herstellungsverfahren für einen Hochfrequenzhohlleiter |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041710A (ja) * | 1996-04-12 | 1998-02-13 | Harris Corp | 空気誘電体ストリップ線路 |
US6535088B1 (en) * | 2000-04-13 | 2003-03-18 | Raytheon Company | Suspended transmission line and method |
US20040007470A1 (en) * | 2002-05-07 | 2004-01-15 | Memgen Corporation | Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids |
US20040263290A1 (en) * | 2003-03-04 | 2004-12-30 | Rohm And Haas Electronic Materials, L.L.C. | Coaxial waveguide microstructures and methods of formation thereof |
JP2005532015A (ja) * | 2002-06-27 | 2005-10-20 | マイクロファブリカ インク | 小型のrfおよびマイクロ波の構成要素とそのような構成要素を製造するための方法 |
Family Cites Families (198)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB693969A (en) | 1950-04-18 | 1953-07-08 | Standard Telephones Cables Ltd | Improvements in or relating to joints for coaxial cable |
US2812501A (en) | 1954-03-04 | 1957-11-05 | Sanders Associates Inc | Transmission line |
US2914766A (en) | 1955-06-06 | 1959-11-24 | Sanders Associates Inc | Three conductor planar antenna |
US2997519A (en) * | 1959-10-08 | 1961-08-22 | Bell Telephone Labor Inc | Multicoaxial line cables |
US3157847A (en) | 1961-07-11 | 1964-11-17 | Robert M Williams | Multilayered waveguide circuitry formed by stacking plates having surface grooves |
US3335489A (en) | 1962-09-24 | 1967-08-15 | North American Aviation Inc | Interconnecting circuits with a gallium and indium eutectic |
US3311966A (en) | 1962-09-24 | 1967-04-04 | North American Aviation Inc | Method of fabricating multilayer printed-wiring boards |
US3352730A (en) | 1964-08-24 | 1967-11-14 | Sanders Associates Inc | Method of making multilayer circuit boards |
US3309632A (en) | 1965-04-13 | 1967-03-14 | Kollmorgen Corp | Microwave contactless coaxial connector |
US3464855A (en) | 1966-09-06 | 1969-09-02 | North American Rockwell | Process for forming interconnections in a multilayer circuit board |
FR1573432A (ja) * | 1967-07-06 | 1969-07-04 | ||
US3598107A (en) | 1968-07-25 | 1971-08-10 | Hamamatsu T V Co Ltd | Pupillary motion observing apparatus |
US3537043A (en) | 1968-08-06 | 1970-10-27 | Us Air Force | Lightweight microwave components and wave guides |
US3577105A (en) | 1969-05-29 | 1971-05-04 | Us Army | Method and apparatus for joining plated dielectric-form waveguide components |
DE2020173C3 (de) | 1970-04-24 | 1981-01-08 | Spinner-Gmbh Elektrotechnische Fabrik, 8000 Muenchen | Isolierstützenanordnung in Koaxialleitungen |
US3775844A (en) | 1970-06-25 | 1973-12-04 | Bunker Ramo | Method of fabricating a multiwafer electrical circuit structure |
US3791858A (en) | 1971-12-13 | 1974-02-12 | Ibm | Method of forming multi-layer circuit panels |
DE7221114U (de) * | 1972-06-06 | 1972-10-19 | Felten & Guilleaume Kabelwerk | Luftraumisoliertes koaxiales H.F.Kabel mit gewellten Leitern und einzelnen auf dem Innenleiter angeordneten Abstandhaltern aus Kunststoff |
US3884549A (en) | 1973-04-30 | 1975-05-20 | Univ California | Two demensional distributed feedback devices and lasers |
US3925883A (en) | 1974-03-22 | 1975-12-16 | Varian Associates | Method for making waveguide components |
US3963999A (en) | 1975-05-29 | 1976-06-15 | The Furukawa Electric Co., Ltd. | Ultra-high-frequency leaky coaxial cable |
US4033656A (en) | 1975-09-02 | 1977-07-05 | Zero Manufacturing Company | Low profile integrated circuit socket |
US4021789A (en) | 1975-09-29 | 1977-05-03 | International Business Machines Corporation | Self-aligned integrated circuits |
SE404863B (sv) | 1975-12-17 | 1978-10-30 | Perstorp Ab | Forfarande vid framstellning av ett flerlagerkort |
US4275944A (en) | 1979-07-09 | 1981-06-30 | Sochor Jerzy R | Miniature connector receptacles employing contacts with bowed tines and parallel mounting arms |
JPS5772721U (ja) * | 1980-10-20 | 1982-05-04 | ||
FR2496996A1 (fr) * | 1980-12-18 | 1982-06-25 | Thomson Csf | Ligne de transmission hyperfrequence, du type triplaque a air et ses utilisations |
US4417393A (en) | 1981-04-01 | 1983-11-29 | General Electric Company | Method of fabricating high density electronic circuits having very narrow conductors |
US4365222A (en) * | 1981-04-06 | 1982-12-21 | Bell Telephone Laboratories, Incorporated | Stripline support assembly |
US4348253A (en) | 1981-11-12 | 1982-09-07 | Rca Corporation | Method for fabricating via holes in a semiconductor wafer |
US4591411A (en) | 1982-05-05 | 1986-05-27 | Hughes Aircraft Company | Method for forming a high density printed wiring board |
US4663497A (en) | 1982-05-05 | 1987-05-05 | Hughes Aircraft Company | High density printed wiring board |
US4521755A (en) * | 1982-06-14 | 1985-06-04 | At&T Bell Laboratories | Symmetrical low-loss suspended substrate stripline |
US4641140A (en) | 1983-09-26 | 1987-02-03 | Harris Corporation | Miniaturized microwave transmission link |
US4581301A (en) | 1984-04-10 | 1986-04-08 | Michaelson Henry W | Additive adhesive based process for the manufacture of printed circuit boards |
US4876322A (en) | 1984-08-10 | 1989-10-24 | Siemens Aktiengesselschaft | Irradiation cross-linkable thermostable polymer system, for microelectronic applications |
US4729510A (en) | 1984-11-14 | 1988-03-08 | Itt Corporation | Coaxial shielded helical delay line and process |
US4673904A (en) * | 1984-11-14 | 1987-06-16 | Itt Corporation | Micro-coaxial substrate |
US4700159A (en) * | 1985-03-29 | 1987-10-13 | Weinschel Engineering Co., Inc. | Support structure for coaxial transmission line using spaced dielectric balls |
DE3623093A1 (de) | 1986-07-09 | 1988-01-21 | Standard Elektrik Lorenz Ag | Verfahren zur herstellung von durchverbindungen in leiterplatten oder multilayern mit anorganischen oder organisch-anorganischen isolierschichten |
US5069749A (en) | 1986-07-29 | 1991-12-03 | Digital Equipment Corporation | Method of fabricating interconnect layers on an integrated circuit chip using seed-grown conductors |
US4717064A (en) | 1986-08-15 | 1988-01-05 | Unisys Corporation | Wave solder finger shield apparatus |
CA1278080C (en) | 1986-08-20 | 1990-12-18 | Yasuo Yamagishi | Projection-type multi-color liquid crystal display device |
US4771294A (en) | 1986-09-10 | 1988-09-13 | Harris Corporation | Modular interface for monolithic millimeter wave antenna array |
US4857418A (en) | 1986-12-08 | 1989-08-15 | Honeywell Inc. | Resistive overlayer for magnetic films |
FR2619253B1 (fr) | 1987-08-03 | 1990-01-19 | Aerospatiale | Dispositif pour le raccord de deux structures pour hyperfrequences, coaxiales et de diametres differents |
US4880684A (en) | 1988-03-11 | 1989-11-14 | International Business Machines Corporation | Sealing and stress relief layers and use thereof |
US4808273A (en) | 1988-05-10 | 1989-02-28 | Avantek, Inc. | Method of forming completely metallized via holes in semiconductors |
US4856184A (en) | 1988-06-06 | 1989-08-15 | Tektronix, Inc. | Method of fabricating a circuit board |
JPH027587A (ja) | 1988-06-27 | 1990-01-11 | Yokogawa Electric Corp | 可変周波数光源 |
FR2640083B1 (fr) * | 1988-12-06 | 1991-05-03 | Thomson Csf | Support pour ligne de transmission hyperfrequence, notamment du type triplaque |
US4969979A (en) | 1989-05-08 | 1990-11-13 | International Business Machines Corporation | Direct electroplating of through holes |
US5100501A (en) | 1989-06-30 | 1992-03-31 | Texas Instruments Incorporated | Process for selectively depositing a metal in vias and contacts by using a sacrificial layer |
US4975142A (en) | 1989-11-07 | 1990-12-04 | General Electric Company | Fabrication method for printed circuit board |
JP3027587B2 (ja) | 1989-11-07 | 2000-04-04 | 株式会社リコー | ファクシミリ装置 |
JPH041710A (ja) | 1990-04-19 | 1992-01-07 | Matsushita Electric Ind Co Ltd | レンズ調整装置 |
DE4027994A1 (de) | 1990-09-04 | 1992-03-05 | Gw Elektronik Gmbh | Hf-magnetspulenanordnung und verfahren zu ihrer herstellung |
GB2249862B (en) | 1990-10-01 | 1994-08-17 | Asahi Optical Co Ltd | Device and method for retrieving audio signals |
EP0485831A1 (de) | 1990-11-13 | 1992-05-20 | F. Hoffmann-La Roche Ag | Automatisches Analysengerät |
DE69122748T2 (de) * | 1990-12-26 | 1997-05-07 | Tdk Corp | Hochfrequenzvorrichtung |
JPH04256203A (ja) | 1991-02-07 | 1992-09-10 | Mitsubishi Electric Corp | マイクロ波帯ic用パッケージ |
JP3177746B2 (ja) | 1991-03-20 | 2001-06-18 | 株式会社日立製作所 | デ−タ処理システム及び方法 |
US5274484A (en) | 1991-04-12 | 1993-12-28 | Fujitsu Limited | Gradation methods for driving phase transition liquid crystal using a holding signal |
US5119049A (en) | 1991-04-12 | 1992-06-02 | Ail Systems, Inc. | Ultraminiature low loss coaxial delay line |
US5381157A (en) * | 1991-05-02 | 1995-01-10 | Sumitomo Electric Industries, Ltd. | Monolithic microwave integrated circuit receiving device having a space between antenna element and substrate |
US5227013A (en) | 1991-07-25 | 1993-07-13 | Microelectronics And Computer Technology Corporation | Forming via holes in a multilevel substrate in a single step |
DE4309917A1 (de) * | 1992-03-30 | 1993-10-07 | Awa Microelectronics | Verfahren zur Herstellung von Siliziummikrostrukturen sowie Siliziummikrostruktur |
US5334956A (en) | 1992-03-30 | 1994-08-02 | Motorola, Inc. | Coaxial cable having an impedance matched terminating end |
JP3158621B2 (ja) | 1992-03-31 | 2001-04-23 | 横河電機株式会社 | マルチチップモジュール |
US5430257A (en) | 1992-08-12 | 1995-07-04 | Trw Inc. | Low stress waveguide window/feedthrough assembly |
EP0682852B1 (en) | 1993-02-02 | 1998-10-28 | AST RESEARCH, Inc. | A circuit board arrangement including shielding grids, and constructing thereof |
JPH06302964A (ja) | 1993-04-16 | 1994-10-28 | Oki Electric Ind Co Ltd | 高速信号伝送用回路基板 |
US5454161A (en) | 1993-04-29 | 1995-10-03 | Fujitsu Limited | Through hole interconnect substrate fabrication process |
NL9400165A (nl) | 1994-02-03 | 1995-09-01 | Hollandse Signaalapparaten Bv | Transmissielijnnetwerk. |
JPH07235803A (ja) | 1994-02-25 | 1995-09-05 | Nec Corp | 同軸形高電力用低域フィルタ |
US5466972A (en) | 1994-05-09 | 1995-11-14 | At&T Corp. | Metallization for polymer-dielectric multichip modules including a Ti/Pd alloy layer |
JP3587884B2 (ja) | 1994-07-21 | 2004-11-10 | 富士通株式会社 | 多層回路基板の製造方法 |
US5814889A (en) | 1995-06-05 | 1998-09-29 | Harris Corporation | Intergrated circuit with coaxial isolation and method |
US5682062A (en) | 1995-06-05 | 1997-10-28 | Harris Corporation | System for interconnecting stacked integrated circuits |
US5633615A (en) | 1995-12-26 | 1997-05-27 | Hughes Electronics | Vertical right angle solderless interconnects from suspended stripline to three-wire lines on MIC substrates |
KR100216839B1 (ko) | 1996-04-01 | 1999-09-01 | 김규현 | Bga 반도체 패키지의 솔더 볼 랜드 메탈 구조 |
US5793272A (en) * | 1996-08-23 | 1998-08-11 | International Business Machines Corporation | Integrated circuit toroidal inductor |
TW380772U (en) | 1996-09-26 | 2000-01-21 | Hon Hai Prec Ind Co Ltd | Miniature connector |
JP3218996B2 (ja) | 1996-11-28 | 2001-10-15 | 松下電器産業株式会社 | ミリ波導波路 |
US5860812A (en) | 1997-01-23 | 1999-01-19 | Litton Systems, Inc. | One piece molded RF/microwave coaxial connector |
US7148722B1 (en) | 1997-02-20 | 2006-12-12 | Altera Corporation | PCI-compatible programmable logic devices |
DE69842001D1 (de) | 1997-04-04 | 2010-12-30 | Univ Southern California | Galvanisches verfahren zur herstellung einer mehrlagenstruktur |
US5940674A (en) | 1997-04-09 | 1999-08-17 | Massachusetts Institute Of Technology | Three-dimensional product manufacture using masks |
JP3346263B2 (ja) | 1997-04-11 | 2002-11-18 | イビデン株式会社 | プリント配線板及びその製造方法 |
US5925206A (en) | 1997-04-21 | 1999-07-20 | International Business Machines Corporation | Practical method to make blind vias in circuit boards and other substrates |
US6180261B1 (en) | 1997-10-21 | 2001-01-30 | Nitto Denko Corporation | Low thermal expansion circuit board and multilayer wiring circuit board |
FI106585B (fi) | 1997-10-22 | 2001-02-28 | Nokia Mobile Phones Ltd | Koaksiaalijohto, menetelmä koaksiaalijohdon valmistamiseksi ja langaton viestin |
US6324754B1 (en) | 1998-03-25 | 2001-12-04 | Tessera, Inc. | Method for fabricating microelectronic assemblies |
US6329605B1 (en) | 1998-03-26 | 2001-12-11 | Tessera, Inc. | Components with conductive solder mask layers |
US6008102A (en) * | 1998-04-09 | 1999-12-28 | Motorola, Inc. | Method of forming a three-dimensional integrated inductor |
US5977842A (en) | 1998-07-01 | 1999-11-02 | Raytheon Company | High power broadband coaxial balun |
KR20000011585A (ko) * | 1998-07-28 | 2000-02-25 | 윤덕용 | 반도체소자및그제조방법 |
US6514845B1 (en) | 1998-10-15 | 2003-02-04 | Texas Instruments Incorporated | Solder ball contact and method |
US6441315B1 (en) | 1998-11-10 | 2002-08-27 | Formfactor, Inc. | Contact structures with blades having a wiping motion |
US6045973A (en) | 1998-12-11 | 2000-04-04 | Morton International, Inc. | Photoimageable compositions having improved chemical resistance and stripping ability |
KR100308871B1 (ko) * | 1998-12-28 | 2001-11-03 | 윤덕용 | 동축 구조의 신호선 및 그의 제조 방법 |
US6388198B1 (en) | 1999-03-09 | 2002-05-14 | International Business Machines Corporation | Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality |
US6294965B1 (en) | 1999-03-11 | 2001-09-25 | Anaren Microwave, Inc. | Stripline balun |
JP2000286549A (ja) | 1999-03-24 | 2000-10-13 | Fujitsu Ltd | バイアコネクションを備えた基板の製造方法 |
US6207901B1 (en) | 1999-04-01 | 2001-03-27 | Trw Inc. | Low loss thermal block RF cable and method for forming RF cable |
US6799976B1 (en) | 1999-07-28 | 2004-10-05 | Nanonexus, Inc. | Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies |
US6232669B1 (en) | 1999-10-12 | 2001-05-15 | Advantest Corp. | Contact structure having silicon finger contactors and total stack-up structure using same |
US6210221B1 (en) | 1999-10-13 | 2001-04-03 | Maury Microwave, Inc. | Microwave quick connect/disconnect coaxial connectors |
EP1139413B1 (en) | 2000-03-24 | 2005-03-16 | Texas Instruments Incorporated | Wire bonding process |
US6677225B1 (en) | 2000-07-14 | 2004-01-13 | Zyvex Corporation | System and method for constraining totally released microcomponents |
JP4023076B2 (ja) | 2000-07-27 | 2007-12-19 | 富士通株式会社 | 表裏導通基板及びその製造方法 |
US6350633B1 (en) | 2000-08-22 | 2002-02-26 | Charles W. C. Lin | Semiconductor chip assembly with simultaneously electroplated contact terminal and connection joint |
US6589594B1 (en) | 2000-08-31 | 2003-07-08 | Micron Technology, Inc. | Method for filling a wafer through-via with a conductive material |
US6600395B1 (en) | 2000-12-28 | 2003-07-29 | Nortel Networks Limited | Embedded shielded stripline (ESS) structure using air channels within the ESS structure |
US6603376B1 (en) | 2000-12-28 | 2003-08-05 | Nortel Networks Limited | Suspended stripline structures to reduce skin effect and dielectric loss to provide low loss transmission of signals with high data rates or high frequencies |
EP1359133A4 (en) | 2001-02-08 | 2007-03-07 | Sumitomo Electric Industries | POROUS CERAMIC, PREPARATION METHOD, AND MICROBAND SUBSTRATE |
KR100368930B1 (ko) | 2001-03-29 | 2003-01-24 | 한국과학기술원 | 반도체 기판 위에 높이 떠 있는 3차원 금속 소자, 그 회로모델, 및 그 제조방법 |
US6722197B2 (en) | 2001-06-19 | 2004-04-20 | Honeywell International Inc. | Coupled micromachined structure |
US6749737B2 (en) | 2001-08-10 | 2004-06-15 | Unimicron Taiwan Corp. | Method of fabricating inter-layer solid conductive rods |
US6457979B1 (en) | 2001-10-29 | 2002-10-01 | Agilent Technologies, Inc. | Shielded attachment of coaxial RF connector to thick film integrally shielded transmission line on a substrate |
WO2003098019A2 (en) | 2001-11-07 | 2003-11-27 | Mag Ultra Phase, Llc. | Fuel vaporization systems for vaporizing liquid fuel |
US6914513B1 (en) | 2001-11-08 | 2005-07-05 | Electro-Science Laboratories, Inc. | Materials system for low cost, non wire-wound, miniature, multilayer magnetic circuit components |
EP1721866B1 (en) * | 2001-11-09 | 2008-12-10 | WiSpry, Inc. | MEMS device having a trilayered beam and related methods |
WO2003049514A2 (en) * | 2001-12-03 | 2003-06-12 | Memgen Corporation | Miniature rf and microwave components and methods for fabricating such components |
US7239219B2 (en) | 2001-12-03 | 2007-07-03 | Microfabrica Inc. | Miniature RF and microwave components and methods for fabricating such components |
US20050032375A1 (en) | 2003-05-07 | 2005-02-10 | Microfabrica Inc. | Methods for electrochemically fabricating structures using adhered masks, incorporating dielectric sheets, and/or seed layers that are partially removed via planarization |
US6710680B2 (en) * | 2001-12-20 | 2004-03-23 | Motorola, Inc. | Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges |
US6648653B2 (en) | 2002-01-04 | 2003-11-18 | Insert Enterprise Co., Ltd. | Super mini coaxial microwave connector |
JP3969523B2 (ja) | 2002-02-25 | 2007-09-05 | 独立行政法人産業技術総合研究所 | プリント配線基板の製造方法 |
US20030221968A1 (en) | 2002-03-13 | 2003-12-04 | Memgen Corporation | Electrochemical fabrication method and apparatus for producing three-dimensional structures having improved surface finish |
WO2003095709A2 (en) | 2002-05-07 | 2003-11-20 | Memgen Corporation | Multistep release method for electrochemically fabricated structures |
US20030236480A1 (en) | 2002-06-24 | 2003-12-25 | Landis Robert M. | Preformed nasal septum skin barrier device |
US6987307B2 (en) | 2002-06-26 | 2006-01-17 | Georgia Tech Research Corporation | Stand-alone organic-based passive devices |
US6696666B2 (en) | 2002-07-03 | 2004-02-24 | Scimed Life Systems, Inc. | Tubular cutting process and system |
US6735009B2 (en) | 2002-07-16 | 2004-05-11 | Motorola, Inc. | Electroptic device |
WO2004013870A1 (ja) | 2002-08-06 | 2004-02-12 | Ube-Nitto Kasei Co., Ltd. | 細径同軸ケーブルおよびその製造方法 |
US6827608B2 (en) | 2002-08-22 | 2004-12-07 | Corning Gilbert Inc. | High frequency, blind mate, coaxial interconnect |
US6992544B2 (en) | 2002-10-10 | 2006-01-31 | Agilent Technologies, Inc. | Shielded surface mount coaxial connector |
US20050250253A1 (en) * | 2002-10-23 | 2005-11-10 | Cheung Kin P | Processes for hermetically packaging wafer level microscopic structures |
JP2004200227A (ja) | 2002-12-16 | 2004-07-15 | Alps Electric Co Ltd | プリントインダクタ |
US6888427B2 (en) | 2003-01-13 | 2005-05-03 | Xandex, Inc. | Flex-circuit-based high speed transmission line |
US6975267B2 (en) | 2003-02-05 | 2005-12-13 | Northrop Grumman Corporation | Low profile active electronically scanned antenna (AESA) for Ka-band radar systems |
US7288723B2 (en) | 2003-04-02 | 2007-10-30 | Sun Microsystems, Inc. | Circuit board including isolated signal transmission channels |
TWI244799B (en) | 2003-06-06 | 2005-12-01 | Microfabrica Inc | Miniature RF and microwave components and methods for fabricating such components |
US7145414B2 (en) | 2003-06-30 | 2006-12-05 | Endwave Corporation | Transmission line orientation transition |
TWI234258B (en) | 2003-08-01 | 2005-06-11 | Advanced Semiconductor Eng | Substrate with reinforced structure of contact pad |
EP2937897A3 (en) | 2003-09-15 | 2016-03-23 | Nuvotronics LLC | Device package and methods for the fabrication and testing thereof |
KR100538470B1 (ko) | 2003-09-15 | 2005-12-23 | 한국과학기술원 | 유전체 박막을 이용한 동축선 구조의 전송선 시스템, 그제조 방법 및 그를 이용한 패키지 방법 |
KR100555680B1 (ko) | 2003-12-17 | 2006-03-03 | 삼성전자주식회사 | 높이 단차를 가지는 금속 구조물의 제조방법 |
US20050156693A1 (en) | 2004-01-20 | 2005-07-21 | Dove Lewis R. | Quasi-coax transmission lines |
US7645940B2 (en) | 2004-02-06 | 2010-01-12 | Solectron Corporation | Substrate with via and pad structures |
US7030712B2 (en) | 2004-03-01 | 2006-04-18 | Belair Networks Inc. | Radio frequency (RF) circuit board topology |
US7128604B2 (en) | 2004-06-14 | 2006-10-31 | Corning Gilbert Inc. | High power coaxial interconnect |
US6971913B1 (en) | 2004-07-01 | 2005-12-06 | Speed Tech Corp. | Micro coaxial connector |
TWI237886B (en) | 2004-07-06 | 2005-08-11 | Himax Tech Inc | Bonding pad and chip structure |
US7084722B2 (en) | 2004-07-22 | 2006-08-01 | Northrop Grumman Corp. | Switched filterbank and method of making the same |
US7077697B2 (en) | 2004-09-09 | 2006-07-18 | Corning Gilbert Inc. | Snap-in float-mount electrical connector |
US7165974B2 (en) | 2004-10-14 | 2007-01-23 | Corning Gilbert Inc. | Multiple-position push-on electrical connector |
TWI287634B (en) | 2004-12-31 | 2007-10-01 | Wen-Chang Dung | Micro-electromechanical probe circuit film, method for making the same and applications thereof |
US7217156B2 (en) | 2005-01-19 | 2007-05-15 | Insert Enterprise Co., Ltd. | RF microwave connector for telecommunication |
US7555309B2 (en) | 2005-04-15 | 2009-06-30 | Evertz Microsystems Ltd. | Radio frequency router |
US7615476B2 (en) | 2005-06-30 | 2009-11-10 | Intel Corporation | Electromigration-resistant and compliant wire interconnects, nano-sized solder compositions, systems made thereof, and methods of assembling soldered packages |
USD530674S1 (en) | 2005-08-11 | 2006-10-24 | Hon Hai Precision Ind. Co., Ltd. | Micro coaxial connector |
JP2007115771A (ja) | 2005-10-18 | 2007-05-10 | Nec System Technologies Ltd | Lsiピン |
JP4527646B2 (ja) | 2005-10-19 | 2010-08-18 | 日本電気株式会社 | 電子装置 |
US7658831B2 (en) | 2005-12-21 | 2010-02-09 | Formfactor, Inc | Three dimensional microstructures and methods for making three dimensional microstructures |
JP4509186B2 (ja) | 2006-01-31 | 2010-07-21 | 日立金属株式会社 | 積層部品及びこれを用いたモジュール |
US7656256B2 (en) * | 2006-12-30 | 2010-02-02 | Nuvotronics, PLLC | Three-dimensional microstructures having an embedded support member with an aperture therein and method of formation thereof |
TWI445242B (zh) * | 2006-12-30 | 2014-07-11 | Nuvotronics Llc | 三維微結構及其形成方法 |
JP2008188756A (ja) | 2006-12-30 | 2008-08-21 | Rohm & Haas Electronic Materials Llc | 三次元微細構造体およびその形成方法 |
JP2008211159A (ja) | 2007-01-30 | 2008-09-11 | Kyocera Corp | 配線基板およびそれを用いた電子装置 |
US7532163B2 (en) | 2007-02-13 | 2009-05-12 | Raytheon Company | Conformal electronically scanned phased array antenna and communication system for helmets and other platforms |
KR101593686B1 (ko) | 2007-03-20 | 2016-02-12 | 누보트로닉스, 엘.엘.씨 | 일체화된 전자 요소들 및 이들의 형성 방법 |
US7898356B2 (en) | 2007-03-20 | 2011-03-01 | Nuvotronics, Llc | Coaxial transmission line microstructures and methods of formation thereof |
US7683842B1 (en) | 2007-05-30 | 2010-03-23 | Advanced Testing Technologies, Inc. | Distributed built-in test and performance monitoring system for electronic surveillance |
US8264297B2 (en) | 2007-08-29 | 2012-09-11 | Skyworks Solutions, Inc. | Balun signal splitter |
US7920042B2 (en) | 2007-09-10 | 2011-04-05 | Enpirion, Inc. | Micromagnetic device and method of forming the same |
US7584533B2 (en) | 2007-10-10 | 2009-09-08 | National Semiconductor Corporation | Method of fabricating an inductor structure on an integrated circuit structure |
TWI358799B (en) | 2007-11-26 | 2012-02-21 | Unimicron Technology Corp | Semiconductor package substrate and method of form |
US8188932B2 (en) | 2007-12-12 | 2012-05-29 | The Boeing Company | Phased array antenna with lattice transformation |
JP4506824B2 (ja) | 2007-12-13 | 2010-07-21 | 富士ゼロックス株式会社 | 回収現像剤搬送装置および画像形成装置 |
US8242593B2 (en) | 2008-01-27 | 2012-08-14 | International Business Machines Corporation | Clustered stacked vias for reliable electronic substrates |
US7619441B1 (en) | 2008-03-03 | 2009-11-17 | Xilinx, Inc. | Apparatus for interconnecting stacked dice on a programmable integrated circuit |
US7575474B1 (en) | 2008-06-10 | 2009-08-18 | Harris Corporation | Surface mount right angle connector including strain relief and associated methods |
US8319344B2 (en) | 2008-07-14 | 2012-11-27 | Infineon Technologies Ag | Electrical device with protruding contact elements and overhang regions over a cavity |
EP2319134A1 (en) | 2008-07-15 | 2011-05-11 | Corning Gilbert Inc. | Low-profile mounted push-on connector |
US8996155B2 (en) | 2008-07-25 | 2015-03-31 | Cornell University | Apparatus and methods for digital manufacturing |
TWI393490B (zh) | 2008-12-31 | 2013-04-11 | Ind Tech Res Inst | 多組同軸導線於基材之單一通孔中之結構與其製作方法 |
US9190201B2 (en) | 2009-03-04 | 2015-11-17 | Qualcomm Incorporated | Magnetic film enhanced inductor |
US8207261B2 (en) | 2009-03-25 | 2012-06-26 | E.I. Du Pont De Nemours And Company | Plastic articles, optionally with partial metal coating |
US20110123783A1 (en) | 2009-11-23 | 2011-05-26 | David Sherrer | Multilayer build processses and devices thereof |
US8917150B2 (en) | 2010-01-22 | 2014-12-23 | Nuvotronics, Llc | Waveguide balun having waveguide structures disposed over a ground plane and having probes located in channels |
JP5639194B2 (ja) | 2010-01-22 | 2014-12-10 | ヌボトロニクス,エルエルシー | 熱制御 |
TWM389380U (en) | 2010-05-19 | 2010-09-21 | Advanced Connectek Inc | Miniature high frequency plug connector |
FR2965063B1 (fr) | 2010-09-21 | 2012-10-12 | Thales Sa | Procede pour allonger le temps d'eclairement de cibles par un radar secondaire |
US8814601B1 (en) | 2011-06-06 | 2014-08-26 | Nuvotronics, Llc | Batch fabricated microconnectors |
US8786515B2 (en) | 2011-08-30 | 2014-07-22 | Harris Corporation | Phased array antenna module and method of making same |
US9325044B2 (en) | 2013-01-26 | 2016-04-26 | Nuvotronics, Inc. | Multi-layer digital elliptic filter and method |
-
2007
- 2007-12-28 US US12/005,936 patent/US7656256B2/en active Active
- 2007-12-28 CN CNA2007100932805A patent/CN101274734A/zh active Pending
- 2007-12-28 EP EP07150463.3A patent/EP1939137B1/en not_active Not-in-force
- 2007-12-28 TW TW096150717A patent/TWI364399B/zh not_active IP Right Cessation
- 2007-12-28 JP JP2007339396A patent/JP2008188755A/ja active Pending
- 2007-12-28 KR KR1020070141058A patent/KR101476438B1/ko active IP Right Grant
-
2009
- 2009-10-29 US US12/608,870 patent/US8031037B2/en active Active
-
2011
- 2011-08-29 US US13/219,736 patent/US8933769B2/en not_active Expired - Fee Related
-
2014
- 2014-12-08 US US14/563,018 patent/US9515364B1/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041710A (ja) * | 1996-04-12 | 1998-02-13 | Harris Corp | 空気誘電体ストリップ線路 |
US6535088B1 (en) * | 2000-04-13 | 2003-03-18 | Raytheon Company | Suspended transmission line and method |
US20040007470A1 (en) * | 2002-05-07 | 2004-01-15 | Memgen Corporation | Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids |
JP2005532015A (ja) * | 2002-06-27 | 2005-10-20 | マイクロファブリカ インク | 小型のrfおよびマイクロ波の構成要素とそのような構成要素を製造するための方法 |
US20040263290A1 (en) * | 2003-03-04 | 2004-12-30 | Rohm And Haas Electronic Materials, L.L.C. | Coaxial waveguide microstructures and methods of formation thereof |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160087820A (ko) * | 2013-11-19 | 2016-07-22 | 테라다인 인코퍼레이티드 | 장치와 테스터 사이에서 신호를 전송하는 인터커넥트 |
JP2016538718A (ja) * | 2013-11-19 | 2016-12-08 | テラダイン、 インコーポレイテッド | デバイスとテスターとの間で信号を送信するための相互配線 |
KR102249099B1 (ko) | 2013-11-19 | 2021-05-10 | 테라다인 인코퍼레이티드 | 장치와 테스터 사이에서 신호를 전송하는 인터커넥트 |
Also Published As
Publication number | Publication date |
---|---|
US20100109819A1 (en) | 2010-05-06 |
KR101476438B1 (ko) | 2014-12-24 |
US8933769B2 (en) | 2015-01-13 |
US20160336635A1 (en) | 2016-11-17 |
KR20080063216A (ko) | 2008-07-03 |
US9515364B1 (en) | 2016-12-06 |
EP1939137A3 (en) | 2012-05-23 |
TW200842102A (en) | 2008-11-01 |
EP1939137A2 (en) | 2008-07-02 |
US8031037B2 (en) | 2011-10-04 |
US20120189863A1 (en) | 2012-07-26 |
US7656256B2 (en) | 2010-02-02 |
US20080197946A1 (en) | 2008-08-21 |
CN101274734A (zh) | 2008-10-01 |
TWI364399B (en) | 2012-05-21 |
EP1939137B1 (en) | 2016-08-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2008188755A (ja) | 三次元微細構造体およびその形成方法 | |
JP2008188756A (ja) | 三次元微細構造体およびその形成方法 | |
TWI445242B (zh) | 三維微結構及其形成方法 | |
US20190013561A1 (en) | Coaxial Waveguide Microstructures Having an Active Device and Methods of Formation Thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20101220 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20101220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121203 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130215 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130220 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130531 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130919 |