JP2008047573A - 樹脂封止型半導体装置の製造装置、樹脂封止型半導体装置の製造方法、および樹脂封止型半導体装置 - Google Patents
樹脂封止型半導体装置の製造装置、樹脂封止型半導体装置の製造方法、および樹脂封止型半導体装置 Download PDFInfo
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Abstract
【解決手段】複数の半導体素子3が搭載された基板2が内部に載置されるとともに、封止樹脂注入空間であるキャビティを有した樹脂封止用の金型20を備え、この金型20に、キャビティに封止樹脂を注入する樹脂注入口29aと、樹脂注入時にキャビティからの空気を逃がす空気逃げ口30aとを設け、前記樹脂注入口29aを、キャビティの天面部に、各半導体素子3に対応してそれぞれ設け、前記空気逃げ口30aを、基板2および封止樹脂7の厚み方向に平面視して、樹脂注入口29aの周りに存在するように、各半導体素子3に対応してそれぞれ設けた。
【選択図】図2
Description
本発明は上記課題を解決するもので、複数の半導体素子を1枚の基板上に搭載し、ゲートから半導体素子の表面に向かって樹脂を射出させて、一括で封止を行って多数の樹脂封止型半導体装置を一度に製造することができながら、樹脂封止部に内部ボイドが発生することを最小限に抑えることができる樹脂封止型半導体装置の製造装置、製造方法、およびこれらの製造装置や製造方法で製造される樹脂封止型半導体装置を提供することを目的とするものである。
また、本発明は、金型に、空気逃げ口に繋がる空気排出路が設けられ、前記空気排出路の先端部が、金型におけるキャビティ天面部に開口するように設けられ、金型の前記キャビティ天面部から、前記基板の表面部に向けて延びる姿勢となるように、前記金型に、前記空気排出路につながる空気逃げ用通路および空気逃げ口を有する補助中間金型としての筒状のピンが配設されていることを特徴とする。
また、ピンの外周面に、先端側ほど外周面内の断面積が小さくなるように傾斜して、樹脂封止工程後においてピンを抜け易くする抜け勾配を形成することが好ましく、これにより離型時にピンを良好に抜くことができる。
また、樹脂注入口を、封止樹脂の厚み方向に沿って平面視して、基板および封止樹脂部を分割する分割ラインに重なるように設けることによっても、樹脂注入口に形成された樹脂注入口痕の一部が分割時に削除され、樹脂封止型半導体装置を製品として作成した際に、樹脂封止型半導体装置の外観状その窪みを目立たなくすることが可能である。
基板の電極と半導体素子の電極とが接続体により電気的に接続され、前記半導体素子と、前記基板の表面部におけるチップ搭載領域および電極と、前記接続体とが封止樹脂部で覆われた樹脂封止型半導体装置であって、封止樹脂部における、基板の表面部に接する底面部に対して反対側となる天面部に、封止樹脂を注入した凹凸形状の樹脂注入口痕が存在し、封止樹脂部における天面部、または天面部から窪んだ凹部に、樹脂注入時に空気を逃がす凹凸形状の空気逃げ口痕が存在することを特徴とする。また、この場合に、天面部から窪んだ凹部が、封止樹脂部の側面に露出して設けられたり、天面部から窪んだ凹部が、平面視して、ほぼ円を4等分した形状であることを特徴とする。また、封止樹脂部の側面部と基板の側面部とが略同一面であることを特徴とする。
次に、図3(a)〜(e)、図4(a)、(b)、図5(a)〜(c)、および図2(a)、(b)を参照しながら、この樹脂封止型半導体装置1の製造方法について説明する。
図15(a)はこの樹脂封止型半導体装置の製造装置で製造した、樹脂封止型半導体装置1の集合体を示す平面図、図15(b)は同樹脂封止型半導体装置1の集合体を製造している状態を概略的に示す断面図である。図2(b)に示すような樹脂封止型半導体装置の製造装置では、各空気逃げ口30aから上方に延びる空気排出通路30が、横方向に延びる共通の空気排出通路30に接続されている場合を示したが、これに代えて、この図15(a)、(b)に示すように、樹脂封止型半導体装置の製造装置として、各空気逃げ口30aを、単独で上下に延びる空気排出通路30に個別に接続して空気排出通路30の上部から外に逃がす構造(中間金型23と上金型22とに、上下方向に貫通して連通する空気排出通路30を設けた構成)としている。この構成により、排気時において樹脂カスが空気排出通路30に詰まった場合でも、個別にクリーニングできる利点がある。すなわち、空気の逃げ道(エアベンド)は樹脂カスが詰まりやすいが、この実施の形態では、空気排出通路30を個別にクリーニングできるので、扱い易い。
2 基板
2a 表面部
2b チップ搭載領域
2c 裏面部
3 半導体素子
4 外部端子
6 ワイヤ(接続体)
7 封止樹脂部
7a 底面部
7b 天面部
7c 凹部
8 電極
9 樹脂注入口痕
10 空気逃げ口痕
17 切断具
18 切断ライン
20 金型
21 キャビティ
21a 天面部
22 上金型
23 中間金型
24 下金型
25 封止樹脂
26 貯留部(ポット)
27 プランジャ
28 ランナ
29 ゲート
29a 樹脂注入口
30 空気排出通路
30a 空気逃げ口
35 ピン(補助中間金型)
35a 抜け勾配傾斜面
36 空気逃げ用通路
36a 空気逃げ口
37 空気逃げ口
38 貫通孔
40 空気逃げ口
41 樹脂注入口
Claims (16)
- 表面部に複数のチップ搭載領域が設けられ、各チップ搭載領域にそれぞれ半導体素子が搭載され、表面部における前記チップ搭載領域よりも外周に設けられた電極と前記半導体素子に設けられた電極とが電気的に接続され、裏面部に外部端子が設けられた基板に対して、前記複数の半導体素子と、この半導体素子の電極と前記基板の電極とを接続した領域とを樹脂封止で一括して覆う樹脂封止型半導体装置の製造装置であって、
複数の半導体素子が搭載された前記基板が内部に載置されるとともに、封止樹脂注入空間であるキャビティを有した樹脂封止用の金型を備え、
前記金型に、キャビティに封止樹脂を注入する樹脂注入口と、樹脂注入時にキャビティの空気を逃がす空気逃げ口とが設けられ、
前記樹脂注入口が、金型におけるキャビティの天面部に、各半導体素子または複数の半導体素子に対応してそれぞれ設けられ、
前記空気逃げ口が、基板および封止樹脂の厚み方向に平面視して、前記樹脂注入口の周りに存在するように、各半導体素子または複数の半導体素子に対応してそれぞれ設けられている
ことを特徴とする樹脂封止型半導体装置の製造装置。 - 空気逃げ口が、封止樹脂の厚み方向に平面視して、樹脂注入口の周りに点在するように設けられていることを特徴とする請求項1記載の樹脂封止型半導体装置の製造装置。
- 空気逃げ口が、封止樹脂の厚み方向に平面視して、樹脂注入口の周りにおいて線状に存在するように設けられている
ことを特徴とする請求項1記載の樹脂封止型半導体装置の製造装置。 - 空気逃げ口が、金型におけるキャビティの天面部に、各半導体素子または複数の半導体素子に対応してそれぞれ設けられている
ことを特徴とする請求項1〜3の何れか1項に記載の樹脂封止型半導体装置の製造装置。 - 空気逃げ口が、金型における基板の裏面部に対向する箇所に、各半導体素子または複数の半導体素子に対応してそれぞれ設けられている
ことを特徴とする請求項1〜3の何れか1項に記載の樹脂封止型半導体装置の製造装置。 - 金型に、空気逃げ口に繋がる空気排出路が設けられ、
前記空気排出路の先端部が、金型におけるキャビティ天面部に開口するように設けられ、
金型の前記キャビティ天面部から、前記基板の表面部に向けて延びる姿勢となるように、前記金型に、前記空気排出路につながる空気逃げ用通路および空気逃げ口を有する補助中間金型としての筒状のピンが配設されている
ことを特徴とする請求項2に記載の樹脂封止型半導体装置の製造装置。 - ピンの外周面に、先端側ほど外周面内の断面積が小さくなるように傾斜して、樹脂封止工程後においてピンを抜け易くする抜け勾配を形成した
ことを特徴とする請求項6記載の樹脂封止型半導体装置の製造装置。 - ピンは、軸心方向に沿って延びる空気逃げ用通路が形成されているとともに、ピンの外周面に空気逃げ口として開口するとともに内側部分で前記空気逃げ用通路に繋がる貫通孔が形成されている
請求項6または7に記載の樹脂封止型半導体装置の製造装置。 - 基板の表面部に複数のチップ搭載領域が設けられ、基板の各チップ搭載領域にそれぞれ半導体素子が搭載され、基板の表面部における前記チップ搭載領域よりも外周に設けられた電極と前記半導体素子に設けられた電極とが接続体により電気的に接続され、基板の裏面部に外部端子が設けられ、前記複数の半導体素子と、前記基板の表面部における複数のチップ搭載領域および電極と前記接続体とが一括して樹脂封止され、樹脂封止された基板および封止樹脂部を分割ラインに沿って分割することで樹脂封止型半導体装置を得る樹脂封止型半導体装置の製造装置であって、
複数の半導体素子が搭載された前記基板が内部に配置されるとともに、封止樹脂注入空間であるキャビティを有した樹脂封止用の金型を備え、
前記金型に、キャビティに封止樹脂を注入する樹脂注入口と、樹脂注入時にキャビティの空気を逃がす空気逃げ口とが設けられ、
前記樹脂注入口が、金型におけるキャビティの天面部に、各半導体素子または複数の半導体素子に対応してそれぞれ設けられ、
前記空気逃げ口が、基板および封止樹脂の厚み方向に平面視して、前記樹脂注入口の周りに存在し、かつ、前記分割ラインに重なるように設けられている
ことを特徴とする樹脂封止型半導体装置の製造装置。 - 空気逃げ口が、分割ラインの幅内に収まる大きさであることを特徴とする請求項7記載の樹脂封止型半導体装置の製造装置。
- 樹脂注入口が、封止樹脂の厚み方向に沿って平面視して、基板および封止樹脂部を分割する分割ラインに重なるように設けられていることを特徴とする請求項9または10に記載の樹脂封止型半導体装置の製造装置。
- 半導体素子を搭載するチップ搭載領域が複数設けられた基板の表面部における各チップ搭載領域よりも外周の位置に電極を形成し、チップ搭載領域に対応して基板の裏面部に外部端子を形成する工程と、
基板の各チップ搭載領域に、電極を有する半導体素子を搭載する工程と、
基板の電極と半導体素子の電極とを接続体により電気的に接続する工程と、
前記複数の半導体素子と、前記基板の表面部における複数のチップ搭載領域および電極と、前記接続体とを封止樹脂で覆う封止樹脂工程と、
樹脂封止された基板を分割する工程とを有し、
前記封止樹脂工程は、封止樹脂注入空間であるキャビティが形成された金型の内部に、複数の半導体素子が搭載された前記基板を配設し、封止樹脂の厚み方向に平面視して、金型において前記基板の表面部に対向するキャビティ天面部に各半導体素子または複数の半導体素子に対応して開口させた樹脂注入口の周りに存在するように各半導体素子または複数の半導体素子に対応して設けた空気逃げ口から空気を逃がしながら、前記樹脂注入口から封止樹脂をキャビティ内に注入して、前記複数の半導体素子と、前記基板の表面部における複数のチップ搭載領域および電極と、前記接続体とを封止樹脂で一括して成形する
ことを特徴とする樹脂封止型半導体装置の製造方法。 - 基板の表面部に、半導体素子を搭載するチップ搭載領域と、チップ搭載領域よりも外周に配設された電極とが設けられ、基板の裏面部に外部端子が設けられ、
基板のチップ搭載領域に、電極を有する半導体素子が搭載され、
基板の電極と半導体素子の電極とが接続体により電気的に接続され、
前記半導体素子と、前記基板の表面部におけるチップ搭載領域および電極と、前記接続体とが封止樹脂部で覆われた樹脂封止型半導体装置であって、
封止樹脂部における、基板の表面部に接する底面部に対して反対側となる天面部に、封止樹脂を注入した凹凸形状の樹脂注入口痕が存在し、
封止樹脂部における天面部、または天面部から窪んだ凹部に、樹脂注入時に空気を逃がす凹凸形状の空気逃げ口痕が存在する
ことを特徴とする樹脂封止型半導体装置。 - 天面部から窪んだ凹部が、封止樹脂部の側面に露出して設けられた
ことを特徴とする請求項13に記載の樹脂封止型半導体装置。 - 天面部から窪んだ凹部が、平面視して、ほぼ円を4等分した形状である
ことを特徴とする請求項14に記載の樹脂封止型半導体装置。 - 封止樹脂部の側面部と基板の側面部とが略同一面である
ことを特徴とする請求項13に記載の樹脂封止型半導体装置。
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Also Published As
Publication number | Publication date |
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US7482701B2 (en) | 2009-01-27 |
US20080036069A1 (en) | 2008-02-14 |
CN101123195A (zh) | 2008-02-13 |
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