JP2008034851A - 超格子を有する半導体層構造 - Google Patents
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Abstract
【解決手段】超格子内の異なるタイプの隣接する層は、少なくとも1つの元素の組成において異なっており、超格子内で、同じタイプの少なくとも2つの層は少なくとも1つの元素の異なる含有量を有しており、該少なくとも1つの元素の含有量は超格子の層内で勾配状であり、超格子の層は所定の濃度でドーピング材料を含んでおり、当該超格子は、異なるドーピング材料でドープされた層を有している半導体層構造、およびこのような半導体層構造を有するオプトエレクトロニクスデバイス。
【選択図】図1
Description
この超格子9は、交互に積み重ねられた、第1のタイプaの層9aと第2のタイプbの層9bとを有する。
この構造をある程度、2つの層タイプのみを有するGaN/AlGaN超格子としてみることもできる。ここではAlGaN層は階段関数によって勾配状にされている。前述したように、1つの層内の勾配状のAl含有量は超格子の導電性を高める効果を支持している。
Claims (15)
- 半導体層構造であって、
該半導体層構造は超格子(9)を有しており、該超格子は、第1のタイプ(a)と少なくとも1つの第2のタイプ(b)の積み重ねられた層(9a,9b)から成り、
・前記第1のタイプ(a)と少なくとも1つの第2のタイプ(b)の層(9a,9b)はIII−V族化合物半導体であり、
・超格子(9)内の異なるタイプの隣接する層は、少なくとも1つの元素の組成において異なっており、
・超格子(9)内で、同じタイプの少なくとも2つの層は、少なくとも1つの元素の異なる含有量(CAl,CIn)を有しており、
・該少なくとも1つの元素の含有量(CAl,CIn)は、超格子(9)の層(9a,9b)内で勾配状であり、
・超格子(9)の層(9a、9b)は所定の濃度でドーピング材料を含んでおり、当該超格子(9)は、異なるドーピング材料でドープされた層(9a,9b)を有している、
ことを特徴とする半導体層構造。 - 前記超格子(9)は、交互に積み重ねられたInxAlyGa1-x-yN層及びInwAlzGa1-w-zN層を有しており、式中0≦x、y、w、z≦1及びx+y≦1およびw+z≦1である、請求項1記載の半導体層構造。
- 前記超格子(9)は、交互に積み重ねられたInxAlyGa1-x-yP層及びInwAlzGa1-w-zP層を有しており、式中0≦x、y、w、z≦1であるか、または交互に積層されたInxAlyGa1-x-yAs層及びInwAlzGa1-w-zAs層を有しており、式中0≦x、y、w、z≦1及びx+y≦1及びw+z≦1である、請求項1記載の半導体層構造。
- 前記超格子(9)の個々の層に半導体層構造内の垂直位置(z)が割り当てられており、層内の前記少なくとも1つの元素の含有量(CAl,CIn)は、所定のように、半導体層構造内の自身の垂直位置(z)に依存している、請求項1から3までのいずれか1項記載の半導体層構造。
- 前記垂直位置(z)に対する少なくとも1つの元素の含有量(CAl,CIn)の依存性は、超格子(9)の全ての層(9a,9b)に対して、共通の関数によって設定されている、請求項4記載の半導体層構造。
- 前記垂直位置(z)に対する少なくとも1つの元素の含有量(CAl,CIn)の依存性は、第1のタイプ(a)の層(9a)に対しては第1の関数によって設定されており、少なくとも1つの第2のタイプ(b)の層(9b)に対しては少なくとも1つの第2の関数によって定められている、請求項4記載の半導体層構造。
- 前記第1の関数および/または少なくとも1つの第2の関数および/または共通の関数は、階段関数または単調増加関数/減少関数または一次関数または多項式関数または指数関数または対数関数または周期関数またはこれらの関数を重ね合わせたものであるか、またはこれらの関数の一部を有している、請求項5または6記載の半導体層構造。
- 前記少なくとも1つの元素の含有量(CAl,CIn)は、超格子(9)の1つの層(9a、9b)内で一定である、請求項1から7までのいずれか1項記載の半導体層構造。
- 全ての層(9a、9b)は同じ厚さを有している、請求項1から8までのいずれか1項記載の半導体層構造。
- 異なるタイプ(a、b)の層(9a、9b)は異なる厚さを有している、請求項1から8までのいずれか1項記載の半導体層構造。
- 請求項1から10までのいずれか1項に記載された半導体層構造を有している、
ことを特徴とするオプトエレクトロニクスデバイス。 - 光学活性層(6)を有しており、同じタイプの少なくとも2つの層において含有量(CAl)が異なっている少なくとも1つの元素はAlであり、半導体層構造の超格子(9)内のAl含有量(CAl)は、当該光学活性層(6)からの距離が増すとともに上昇する、請求項11記載のオプトエレクトロニクスデバイス。
- 光学活性層(6)を有しており、同じタイプの少なくとも2つの層において含有量(CAl)が異なっている少なくとも1つの元素はAlであり、半導体層構造の超格子(9)内のAl含有量(CAl)は、当該光学活性層(6)からの距離が増すとともに低下する、請求項11記載のオプトエレクトロニクスデバイス。
- 発光ダイオードである、請求項11から13までのいずれか1項記載のオプトエレクトロニクスデバイス。
- レーザーダイオードである、請求項11から13までのいずれか1項記載のオプトエレクトロニクスデバイス。
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DE102006046237A DE102006046237A1 (de) | 2006-07-27 | 2006-09-29 | Halbleiter-Schichtstruktur mit Übergitter |
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US8022392B2 (en) | 2006-07-27 | 2011-09-20 | Osram Opto Semiconductors Gmbh | Semiconductor layer structure with superlattice |
KR20120045049A (ko) * | 2009-08-13 | 2012-05-08 | 오스람 옵토 세미컨덕터스 게엠베하 | 전기적으로 펌핑된 광전자 반도체 칩 |
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Also Published As
Publication number | Publication date |
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US8471240B2 (en) | 2013-06-25 |
US20110168977A1 (en) | 2011-07-14 |
US7893424B2 (en) | 2011-02-22 |
US20080054247A1 (en) | 2008-03-06 |
EP1883141B1 (de) | 2017-05-24 |
EP1883141A1 (de) | 2008-01-30 |
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