JP2007535140A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2007535140A5 JP2007535140A5 JP2007500749A JP2007500749A JP2007535140A5 JP 2007535140 A5 JP2007535140 A5 JP 2007535140A5 JP 2007500749 A JP2007500749 A JP 2007500749A JP 2007500749 A JP2007500749 A JP 2007500749A JP 2007535140 A5 JP2007535140 A5 JP 2007535140A5
- Authority
- JP
- Japan
- Prior art keywords
- active portion
- unit cell
- electrode
- thermal spacer
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 43
- 239000004065 semiconductor Substances 0.000 claims 16
- 230000005669 field effect Effects 0.000 claims 7
- 229910002601 GaN Inorganic materials 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
- 230000000694 effects Effects 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/786,962 US7135747B2 (en) | 2004-02-25 | 2004-02-25 | Semiconductor devices having thermal spacers |
| US10/786,962 | 2004-02-25 | ||
| PCT/US2004/038894 WO2005083788A2 (en) | 2004-02-25 | 2004-11-18 | Semiconductor devices having thermal spacers |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011232501A Division JP5797082B2 (ja) | 2004-02-25 | 2011-10-24 | 熱スペーサを有する半導体デバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007535140A JP2007535140A (ja) | 2007-11-29 |
| JP2007535140A5 true JP2007535140A5 (enExample) | 2011-12-08 |
| JP5095387B2 JP5095387B2 (ja) | 2012-12-12 |
Family
ID=34861881
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007500749A Expired - Lifetime JP5095387B2 (ja) | 2004-02-25 | 2004-11-18 | 熱スペーサを有する半導体デバイス |
| JP2011232501A Expired - Lifetime JP5797082B2 (ja) | 2004-02-25 | 2011-10-24 | 熱スペーサを有する半導体デバイス |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011232501A Expired - Lifetime JP5797082B2 (ja) | 2004-02-25 | 2011-10-24 | 熱スペーサを有する半導体デバイス |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7135747B2 (enExample) |
| EP (1) | EP1719186B1 (enExample) |
| JP (2) | JP5095387B2 (enExample) |
| KR (1) | KR101132898B1 (enExample) |
| CN (1) | CN1922738A (enExample) |
| CA (1) | CA2554944A1 (enExample) |
| TW (1) | TW200531135A (enExample) |
| WO (1) | WO2005083788A2 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7689946B2 (en) * | 2006-10-19 | 2010-03-30 | International Business Machines Corporation | High-performance FET device layout |
| US7791160B2 (en) | 2006-10-19 | 2010-09-07 | International Business Machines Corporation | High-performance FET device layout |
| US20080150022A1 (en) * | 2006-12-20 | 2008-06-26 | Freescale Semiconductor, Inc. | Power transistor featuring a variable topology layout |
| JP5106041B2 (ja) | 2007-10-26 | 2012-12-26 | 株式会社東芝 | 半導体装置 |
| JP2009111217A (ja) | 2007-10-31 | 2009-05-21 | Toshiba Corp | 半導体装置 |
| FR2954589B1 (fr) * | 2009-12-23 | 2012-12-28 | Thales Sa | Transistor a haute mobilite electronique. |
| CN102339336A (zh) * | 2010-07-22 | 2012-02-01 | 沈阳中科微电子有限公司 | 改善微波/射频功率放大器芯片热失效的设计方法 |
| US9136341B2 (en) | 2012-04-18 | 2015-09-15 | Rf Micro Devices, Inc. | High voltage field effect transistor finger terminations |
| US9917080B2 (en) | 2012-08-24 | 2018-03-13 | Qorvo US. Inc. | Semiconductor device with electrical overstress (EOS) protection |
| US9147632B2 (en) | 2012-08-24 | 2015-09-29 | Rf Micro Devices, Inc. | Semiconductor device having improved heat dissipation |
| KR20140141281A (ko) | 2013-05-31 | 2014-12-10 | 삼성전자주식회사 | 반도체 패키지 |
| US9779988B2 (en) * | 2013-12-20 | 2017-10-03 | Nxp Usa, Inc. | Semiconductor devices with inner via |
| CN103700696A (zh) * | 2013-12-24 | 2014-04-02 | 中国电子科技集团公司第五十五研究所 | 一种均匀散热的串管结构GaN管芯 |
| CN104201253B (zh) * | 2014-07-10 | 2017-08-25 | 中航(重庆)微电子有限公司 | 一种氮化镓器件及其制造方法 |
| US9536803B2 (en) | 2014-09-05 | 2017-01-03 | Qorvo Us, Inc. | Integrated power module with improved isolation and thermal conductivity |
| CN104617092B (zh) * | 2014-11-06 | 2018-06-22 | 苏州捷芯威半导体有限公司 | 一种半导体器件及其制作方法 |
| US10062684B2 (en) | 2015-02-04 | 2018-08-28 | Qorvo Us, Inc. | Transition frequency multiplier semiconductor device |
| US10615158B2 (en) | 2015-02-04 | 2020-04-07 | Qorvo Us, Inc. | Transition frequency multiplier semiconductor device |
| CN105321993B (zh) * | 2015-05-27 | 2019-03-29 | 苏州能讯高能半导体有限公司 | 一种半导体器件及其制备方法 |
| US9947616B2 (en) | 2016-03-17 | 2018-04-17 | Cree, Inc. | High power MMIC devices having bypassed gate transistors |
| US10128365B2 (en) | 2016-03-17 | 2018-11-13 | Cree, Inc. | Bypassed gate transistors having improved stability |
| US12464760B2 (en) | 2016-03-17 | 2025-11-04 | Macom Technology Solutions Holdings, Inc. | Bypassed gate transistors having improved stability |
| US9786660B1 (en) | 2016-03-17 | 2017-10-10 | Cree, Inc. | Transistor with bypassed gate structure field |
| US10418304B2 (en) * | 2017-08-28 | 2019-09-17 | National Technology & Engineering Solutions Of Sandia, Llc | Ion-implanted thermal barrier |
| DE102018113506B4 (de) | 2018-06-06 | 2021-12-30 | Semikron Elektronik Gmbh & Co. Kg | Volumentleitfähiges Leistungshalbleiterbauelement mit Homogenisierungsstruktur |
| US10763334B2 (en) | 2018-07-11 | 2020-09-01 | Cree, Inc. | Drain and/or gate interconnect and finger structure |
| US10483352B1 (en) * | 2018-07-11 | 2019-11-19 | Cree, Inc. | High power transistor with interior-fed gate fingers |
| US10600746B2 (en) | 2018-07-19 | 2020-03-24 | Cree, Inc. | Radio frequency transistor amplifiers and other multi-cell transistors having gaps and/or isolation structures between groups of unit cell transistors |
| US10770415B2 (en) | 2018-12-04 | 2020-09-08 | Cree, Inc. | Packaged transistor devices with input-output isolation and methods of forming packaged transistor devices with input-output isolation |
| EP3951848A4 (en) * | 2019-03-29 | 2023-01-11 | Kabushiki Kaisha Toshiba | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SEMICONDUCTOR DEVICE |
| US11417746B2 (en) | 2019-04-24 | 2022-08-16 | Wolfspeed, Inc. | High power transistor with interior-fed fingers |
| WO2022172625A1 (ja) * | 2021-02-15 | 2022-08-18 | パナソニックIpマネジメント株式会社 | 半導体装置 |
| US12224343B2 (en) | 2021-07-13 | 2025-02-11 | Analog Power Conversion LLC | Power device with partitioned active regions |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US93033A (en) * | 1869-07-27 | Improvement in broom-head | ||
| JPS5835963A (ja) * | 1981-08-28 | 1983-03-02 | Fujitsu Ltd | 集積回路装置 |
| JPS5943548A (ja) * | 1982-09-06 | 1984-03-10 | Hitachi Ltd | 半導体集積回路装置 |
| JPS59210668A (ja) * | 1983-05-16 | 1984-11-29 | Fujitsu Ltd | 半導体装置 |
| US4762806A (en) * | 1983-12-23 | 1988-08-09 | Sharp Kabushiki Kaisha | Process for producing a SiC semiconductor device |
| JPS60160176A (ja) * | 1984-01-30 | 1985-08-21 | Fujitsu Ltd | 電界効果半導体装置 |
| JP2615390B2 (ja) * | 1985-10-07 | 1997-05-28 | 工業技術院長 | 炭化シリコン電界効果トランジスタの製造方法 |
| JPH02177457A (ja) * | 1988-12-28 | 1990-07-10 | Hitachi Ltd | 半導体装置 |
| US5270554A (en) * | 1991-06-14 | 1993-12-14 | Cree Research, Inc. | High power high frequency metal-semiconductor field-effect transistor formed in silicon carbide |
| JPH06338520A (ja) * | 1992-11-12 | 1994-12-06 | Sanyo Electric Co Ltd | 電界効果型トランジスタ |
| US5925895A (en) * | 1993-10-18 | 1999-07-20 | Northrop Grumman Corporation | Silicon carbide power MESFET with surface effect supressive layer |
| US5552333A (en) * | 1994-09-16 | 1996-09-03 | Lsi Logic Corporation | Method for designing low profile variable width input/output cells |
| JPH08213409A (ja) | 1995-02-06 | 1996-08-20 | Nec Corp | 半導体装置 |
| US5760428A (en) * | 1996-01-25 | 1998-06-02 | Lsi Logic Corporation | Variable width low profile gate array input/output architecture |
| JPH09223703A (ja) * | 1996-02-15 | 1997-08-26 | Toshiba Corp | 電界効果トランジスタ |
| JP3129223B2 (ja) * | 1997-02-28 | 2001-01-29 | 日本電気株式会社 | 半導体装置 |
| US5977574A (en) * | 1997-03-28 | 1999-11-02 | Lsi Logic Corporation | High density gate array cell architecture with sharing of well taps between cells |
| US6071779A (en) * | 1998-01-13 | 2000-06-06 | Texas Instruments Incorporated | Source line fabrication process for flash memory |
| US6140184A (en) * | 1998-06-01 | 2000-10-31 | Motorola, Inc. | Method of changing the power dissipation across an array of transistors |
| JP3241022B2 (ja) * | 1999-05-25 | 2001-12-25 | 日本電気株式会社 | 電界効果トランジスタ |
| JP2001015526A (ja) * | 1999-06-28 | 2001-01-19 | Nec Kansai Ltd | 電界効果トランジスタ |
| JP2001028425A (ja) * | 1999-07-15 | 2001-01-30 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| US6376898B1 (en) * | 1999-08-02 | 2002-04-23 | Matsushita Electric Industrial Co., Ltd. | Bipolar transistor layout with minimized area and improved heat dissipation |
| JP2001257360A (ja) * | 2000-01-05 | 2001-09-21 | Mitsubishi Electric Corp | 半導体装置 |
| JP3409057B2 (ja) * | 2000-01-20 | 2003-05-19 | Necエレクトロニクス株式会社 | 電界効果トランジスタ |
| US6710405B2 (en) | 2001-01-17 | 2004-03-23 | Ixys Corporation | Non-uniform power semiconductor device |
| JP2002319593A (ja) * | 2001-04-19 | 2002-10-31 | Furukawa Electric Co Ltd:The | 半導体デバイスおよび電極形成方法 |
| US6534857B1 (en) * | 2001-11-02 | 2003-03-18 | Northrop Grumman Corporation | Thermally balanced power transistor |
| US6608349B1 (en) * | 2001-11-13 | 2003-08-19 | National Semiconductor Corporation | Narrow/short high performance MOSFET device design |
| US6521923B1 (en) * | 2002-05-25 | 2003-02-18 | Sirenza Microdevices, Inc. | Microwave field effect transistor structure on silicon carbide substrate |
-
2004
- 2004-02-25 US US10/786,962 patent/US7135747B2/en not_active Expired - Lifetime
- 2004-11-18 EP EP04817860.2A patent/EP1719186B1/en not_active Expired - Lifetime
- 2004-11-18 JP JP2007500749A patent/JP5095387B2/ja not_active Expired - Lifetime
- 2004-11-18 KR KR1020067016965A patent/KR101132898B1/ko not_active Expired - Lifetime
- 2004-11-18 CN CNA2004800420750A patent/CN1922738A/zh active Pending
- 2004-11-18 CA CA002554944A patent/CA2554944A1/en not_active Abandoned
- 2004-11-18 WO PCT/US2004/038894 patent/WO2005083788A2/en not_active Ceased
- 2004-12-16 TW TW093139184A patent/TW200531135A/zh unknown
-
2011
- 2011-10-24 JP JP2011232501A patent/JP5797082B2/ja not_active Expired - Lifetime
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2007535140A5 (enExample) | ||
| US10361271B2 (en) | Semiconductor device and method of manufacturing the same | |
| JP5095387B2 (ja) | 熱スペーサを有する半導体デバイス | |
| JP5106041B2 (ja) | 半導体装置 | |
| JP5457046B2 (ja) | 半導体装置 | |
| JP7368535B2 (ja) | 窒化ガリウムデバイス、スイッチングパワートランジスタ、駆動回路、及び窒化ガリウムデバイス製造方法 | |
| US20180005959A1 (en) | Trench mosfet device and the preparation method thereof | |
| JP2012069966A5 (enExample) | ||
| JP2009532902A5 (enExample) | ||
| KR102163725B1 (ko) | 반도체 소자 및 그 제조방법 | |
| JP6532596B2 (ja) | 2次元配列fetセルを有するfet | |
| CN106133913B (zh) | 绝缘栅型半导体器件 | |
| JP2013528930A (ja) | アイランドトポロジを用いる高密度窒化ガリウム装置 | |
| CN108155233A (zh) | 具有埋藏式互连件的高电子迁移率晶体管 | |
| TW469647B (en) | Power transistors for radio frequencies | |
| WO2017175460A1 (ja) | 半導体装置および電力変換装置 | |
| WO2018031076A1 (en) | High power transistors | |
| CN106098757B (zh) | 场效应晶体管 | |
| CN115332324A (zh) | 半导体器件及其制造方法 | |
| JP2008244295A (ja) | 半導体装置 | |
| CN103688346B (zh) | 用于制造半导体器件的方法 | |
| KR101377165B1 (ko) | 직렬 접속식 고전자 이동도 트랜지스터 디바이스 및 그 제조 방법 | |
| KR100797169B1 (ko) | 반도체 디바이스 및 그 형성 방법 | |
| JP2010245351A (ja) | 半導体装置 | |
| CN115985888B (zh) | 一种由电容耦合互联得到的集成垂直器件及其制备方法 |