JP2007533167A5 - - Google Patents

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Publication number
JP2007533167A5
JP2007533167A5 JP2007508638A JP2007508638A JP2007533167A5 JP 2007533167 A5 JP2007533167 A5 JP 2007533167A5 JP 2007508638 A JP2007508638 A JP 2007508638A JP 2007508638 A JP2007508638 A JP 2007508638A JP 2007533167 A5 JP2007533167 A5 JP 2007533167A5
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JP
Japan
Prior art keywords
workpiece
load lock
load
low pressure
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007508638A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007533167A (ja
Filing date
Publication date
Priority claimed from US10/826,419 external-priority patent/US7246985B2/en
Application filed filed Critical
Publication of JP2007533167A publication Critical patent/JP2007533167A/ja
Publication of JP2007533167A5 publication Critical patent/JP2007533167A5/ja
Pending legal-status Critical Current

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JP2007508638A 2004-04-16 2005-04-18 ワークピース処理システム Pending JP2007533167A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/826,419 US7246985B2 (en) 2004-04-16 2004-04-16 Work-piece processing system
PCT/US2005/013273 WO2006041530A2 (en) 2004-04-16 2005-04-18 Work-piece processing system

Publications (2)

Publication Number Publication Date
JP2007533167A JP2007533167A (ja) 2007-11-15
JP2007533167A5 true JP2007533167A5 (enExample) 2008-05-08

Family

ID=35096438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007508638A Pending JP2007533167A (ja) 2004-04-16 2005-04-18 ワークピース処理システム

Country Status (7)

Country Link
US (2) US7246985B2 (enExample)
EP (1) EP1735822A2 (enExample)
JP (1) JP2007533167A (enExample)
KR (1) KR101276014B1 (enExample)
CN (1) CN100437898C (enExample)
TW (1) TWI347295B (enExample)
WO (1) WO2006041530A2 (enExample)

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US9139402B2 (en) * 2012-02-21 2015-09-22 Altec Industries, Inc. Retractable load guide
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US9776807B2 (en) * 2014-10-29 2017-10-03 Alain Cerf Changing orientation of an article on a moving conveyor
CN107111251B (zh) * 2014-11-14 2020-10-20 Asml荷兰有限公司 用于在光刻系统中转移基材的加载锁定系统和方法
US9607803B2 (en) 2015-08-04 2017-03-28 Axcelis Technologies, Inc. High throughput cooled ion implantation system and method
US10559483B2 (en) * 2016-08-10 2020-02-11 Lam Research Corporation Platform architecture to improve system productivity
JP6493339B2 (ja) * 2016-08-26 2019-04-03 村田機械株式会社 搬送容器、及び収容物の移載方法
CN118538644A (zh) * 2017-03-15 2024-08-23 朗姆研究公司 采用线性真空传送模块减少占用面积平台架构
CN108695217B (zh) * 2017-04-07 2021-06-29 台湾积体电路制造股份有限公司 衬底传送装置及其端缘作用器
JP7210960B2 (ja) * 2018-09-21 2023-01-24 東京エレクトロン株式会社 真空処理装置及び基板搬送方法
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