JP2007527551A - 光線を走査する方法および装置 - Google Patents

光線を走査する方法および装置 Download PDF

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Publication number
JP2007527551A
JP2007527551A JP2006552357A JP2006552357A JP2007527551A JP 2007527551 A JP2007527551 A JP 2007527551A JP 2006552357 A JP2006552357 A JP 2006552357A JP 2006552357 A JP2006552357 A JP 2006552357A JP 2007527551 A JP2007527551 A JP 2007527551A
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Prior art keywords
mems scanner
signal
scanner
mems
phase
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Japanese (ja)
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JP2007527551A5 (https=
Inventor
ギブソン，グレゴリー，ティー．
デイビス，ワイアット，オー．
ブラウン，ディーン，アール．
スピローグ，ランダル，ビー．
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マイクロビジョン，インク．
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Pressure Sensors (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Facsimile Heads (AREA)
  • Laser Beam Printer (AREA)
JP2006552357A 2004-02-09 2005-02-09 光線を走査する方法および装置 Withdrawn JP2007527551A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US57113304P 2004-05-14 2004-05-14
PCT/US2005/004067 WO2005078508A2 (en) 2004-02-09 2005-02-09 Method and apparatus for scanning a beam of light

Publications (2)

Publication Number Publication Date
JP2007527551A true JP2007527551A (ja) 2007-09-27
JP2007527551A5 JP2007527551A5 (https=) 2008-04-03

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ID=34864506

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2006552357A Withdrawn JP2007527551A (ja) 2004-02-09 2005-02-09 光線を走査する方法および装置
JP2006553201A Withdrawn JP2007522528A (ja) 2004-02-09 2005-02-09 高性能ｍｅｍスキャナ
JP2006553203A Pending JP2007522529A (ja) 2004-02-09 2005-02-09 性能を改良したｍｅｍｓ走査システム
JP2006552358A Withdrawn JP2007525025A (ja) 2004-02-09 2005-02-09 Ｍｅｍｓスキャナの製造方法および装置

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2006553201A Withdrawn JP2007522528A (ja) 2004-02-09 2005-02-09 高性能ｍｅｍスキャナ
JP2006553203A Pending JP2007522529A (ja) 2004-02-09 2005-02-09 性能を改良したｍｅｍｓ走査システム
JP2006552358A Withdrawn JP2007525025A (ja) 2004-02-09 2005-02-09 Ｍｅｍｓスキャナの製造方法および装置

Country Status (6)

Country Link
US (3) US7485485B2 (https=)
EP (4) EP1719154A2 (https=)
JP (4) JP2007527551A (https=)
KR (4) KR20070012650A (https=)
AT (1) ATE551293T1 (https=)
WO (4) WO2005078772A2 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
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JP2009093107A (ja) * 2007-10-12 2009-04-30 Seiko Epson Corp アクチュエータ、光スキャナおよび画像形成装置
JP2010002782A (ja) * 2008-06-20 2010-01-07 Canon Electronics Inc 光走査装置及び該光走査装置を用いた画像形成装置
KR101109286B1 (ko) 2008-02-20 2012-01-31 캐논 가부시끼가이샤 요동 구조체, 그것을 사용한 요동체 장치, 광편향 장치 및 화상 형성 장치
US10571568B2 (en) 2016-10-14 2020-02-25 Fujitsu Limited Distance measuring device, distance measuring method, and non-transitory computer-readable storage medium

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