JP2007511096A - トレンチエッチングのためのラインエッジ粗さ低減 - Google Patents
トレンチエッチングのためのラインエッジ粗さ低減 Download PDFInfo
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- 238000005530 etching Methods 0.000 title claims abstract description 43
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 97
- 238000000034 method Methods 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 230000008569 process Effects 0.000 claims description 27
- 229920000642 polymer Polymers 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 54
- 239000000463 material Substances 0.000 description 15
- 229910052814 silicon oxide Inorganic materials 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 229910052731 fluorine Inorganic materials 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 238000005755 formation reaction Methods 0.000 description 5
- 238000004380 ashing Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010494 dissociation reaction Methods 0.000 description 4
- 230000005593 dissociations Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
【解決手段】ARCが前記誘電体レイヤ上に設けられる。厚さを有するフォトレジストマスクが前記ARC上に形成される。前記ARCがエッチングされる。1:1および2:1の間であるフォトレジストに対する誘電体のエッチング選択性で、トレンチが前記誘電体レイヤ中へエッチングされる。
【選択図】図2
Description
例1
本発明のある例において、2500Åのシリコン酸化物レイヤが、基板上に形成された300Åのシリコン窒化物エッチストップ上に形成される。2つの異なるシリコンオキシナイトライド(SION)レイヤがシリコン酸化物レイヤ上に形成され、ARCレイヤを形成する。この例では、一方のSiONレイヤは285Åであり、他方のSiONレイヤは300Åであった。210nmのフォトレジストの3200Åのパターン付けされたフォトレジストマスクがARCレイヤ上に形成された。このARCレイヤは、従来のARCエッチングを用いて開口が設けられた。
第2例において、同じシリコン酸化物レイヤ、同じARCレイヤ、および同じパターン付けされたフォトレジストレイヤを持つ同じ基板が用いられる。ARCレイヤに開口を形成するために同じ開口プロセスが用いられる。
Claims (19)
- 基板上の誘電体レイヤにおいてトレンチ深さまでトレンチをエッチングする方法であって、
ARCを前記誘電体レイヤ上に設けること、
厚さを有するフォトレジストマスクを前記ARC上に形成すること、
前記ARCを通してエッチングすること、および
1:1および2:1の間であるフォトレジストに対する誘電体のエッチング選択性で、トレンチを前記誘電体レイヤ中へエッチングすること
を含む方法。 - 請求項1に記載の方法であって、前記フォトレジストマスクを前記形成することは、約2000Åおよび4000Åの間の厚さまでの前記フォトレジストマスクを形成する方法。
- 請求項1〜2のいずれかに記載の方法であって、前記フォトレジストマスクを前記形成することは、193nmまたはそれより新しい世代のフォトレジストの前記フォトレジストマスクを形成する方法。
- 請求項1〜3のいずれかに記載の方法であって、前記フォトレジストマスクは、ラインエッジ粗さの制御についてアグレッシブなエッチング化学物質に敏感である方法。
- 請求項1〜4のいずれかに記載の方法であって、
対向電極を前記基板に対向して置いて、前記基板をエッチングチャンバ中に置くこと、および
前記対向電極を加熱し、それにより前記トレンチを前記誘電体レイヤへとエッチングするあいだに、前記対向電極が少なくとも140℃の温度に達するようにすること
をさらに含む方法。 - 請求項1〜5のいずれかに記載の方法であって、前記トレンチを前記エッチングするあいだ、前記チャンバ圧力は、約60mTorrおよび400mTorrの間に維持される方法。
- 請求項1〜6のいずれかに記載の方法であって、前記トレンチを前記エッチングするあいだ、高周波数電力源は、500Wおよび2000Wの間の電力を供給する方法。
- 請求項1〜7のいずれかに記載の方法であって、前記トレンチを前記エッチングするあいだ、バイアス電力源は、0Wおよび1000Wの間の電力を供給する方法。
- 請求項1〜8のいずれかに記載の方法であって、前記トレンチを前記エッチングすることは、CF4、C2F6、NF3、およびSF6のグループから選択されるエッチャントガスを供給することを含む方法。
- 請求項1〜9のいずれかに記載の方法であって、前記エッチャントガスは、5%より少ない、重いポリマーを形成するエッチャントガスを有する方法。
- 請求項1〜10のいずれかに記載の方法によって形成された半導体デバイス。
- 基板上の誘電体レイヤにおいてトレンチ深さまでトレンチをエッチングする方法であって、
ARCを前記誘電体レイヤ上に設けること、
約2000Åおよび4000Åの間の厚さを有する感光フォトレジストマスクを前記ARC上に形成すること、
前記ARCを通してエッチングすること、および
クリーンエッチングでトレンチを前記誘電体レイヤ中へエッチングすること
を含む方法。 - 請求項12に記載の方法であって、前記フォトレジストに対する誘電体のエッチング選択性は1:1および2:1の間である方法。
- 誘電体レイヤ中にフィーチャをエッチングする装置であって、
プラズマプロセスチャンバであって、
プラズマプロセスチャンバエンクロージャを形成するチャンバ壁、
基板を前記プラズマプロセスチャンバエンクロージャ内で支持する基板支持部、
前記プラズマプロセスチャンバエンクロージャ中の圧力を制御する圧力レギュレータ、
前記基板支持部に対向し、前記基板支持部から距離が置かれた電極、
前記電極を加熱する前記電極に接続されたヒーター、
前記プラズマプロセスチャンバエンクロージャ内にガスを供給するガス吸気口、および
前記プラズマプロセスチャンバエンクロージャからガスを排気するガス排気口
を備えるプラズマプロセスチャンバ、
前記ガス吸気口と流体連通したガス源、
前記ガス源、前記電極、前記ヒーター、前記圧力レギュレータ、前記ガス吸気口、および前記ガス排気口のうちの少なくとも1つに制御可能に接続されたコントローラ
を備える装置。 - 請求項14に記載の装置であって、前記コントローラは、
少なくとも1つのプロセッサ、および
コンピュータで読み取り可能な媒体であって、
誘電体レイヤ中にフィーチャをエッチングするエッチングプラズマを供給するコンピュータで読み取り可能なコード、および
エッチング中に前記電極を加熱することによって、前記電極が少なくとも70℃の温度に到達するようにするコンピュータで読み取り可能なコード
を備えるコンピュータで読み取り可能な媒体
を備える装置。 - 請求項14〜15のいずれかに記載の装置であって、前記コンピュータで読み取り可能な媒体は、前記圧力を60mTorrおよび400mTorrの間に維持するコンピュータで読み取り可能なコードをさらに備える装置。
- 請求項14〜16のいずれかに記載の装置であって、誘電体レイヤ中にフィーチャをエッチングするエッチングプラズマを供給するコンピュータで読み取り可能なコードは、500Wおよび2000Wの間の高周波数電力を供給するコンピュータで読み取り可能なコードを備える装置。
- 請求項14〜17のいずれかに記載の装置であって、エッチング中に前記電極を加熱するコンピュータで読み取り可能なコードは、前記電極を加熱することによって、前記電極が少なくとも90℃の温度に到達するようにする装置。
- 請求項14〜17のいずれかに記載の装置であって、エッチング中に前記電極を加熱するコンピュータで読み取り可能なコードは、前記電極を加熱することによって、前記電極が少なくとも140℃の温度に到達するようにする装置。
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US10/712,410 | 2003-11-12 | ||
US10/712,410 US6949460B2 (en) | 2003-11-12 | 2003-11-12 | Line edge roughness reduction for trench etch |
PCT/US2004/036746 WO2005050700A2 (en) | 2003-11-12 | 2004-11-03 | Line edge roughness reduction for trench etch |
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JP2007511096A true JP2007511096A (ja) | 2007-04-26 |
JP2007511096A5 JP2007511096A5 (ja) | 2008-04-24 |
JP4865564B2 JP4865564B2 (ja) | 2012-02-01 |
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US (2) | US6949460B2 (ja) |
EP (1) | EP1683194A4 (ja) |
JP (1) | JP4865564B2 (ja) |
KR (1) | KR101134327B1 (ja) |
CN (1) | CN100477135C (ja) |
IL (1) | IL175527A0 (ja) |
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WO2011068039A1 (ja) * | 2009-12-01 | 2011-06-09 | セントラル硝子株式会社 | エッチングガス |
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US7358146B2 (en) * | 2003-06-24 | 2008-04-15 | Micron Technology, Inc. | Method of forming a capacitor |
US7153778B2 (en) * | 2004-02-20 | 2006-12-26 | Micron Technology, Inc. | Methods of forming openings, and methods of forming container capacitors |
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Also Published As
Publication number | Publication date |
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WO2005050700A3 (en) | 2005-12-01 |
KR20060123312A (ko) | 2006-12-01 |
CN1902745A (zh) | 2007-01-24 |
EP1683194A4 (en) | 2008-06-25 |
US20050277289A1 (en) | 2005-12-15 |
CN100477135C (zh) | 2009-04-08 |
KR101134327B1 (ko) | 2012-04-09 |
TWI351054B (en) | 2011-10-21 |
EP1683194A2 (en) | 2006-07-26 |
JP4865564B2 (ja) | 2012-02-01 |
US6949460B2 (en) | 2005-09-27 |
WO2005050700A2 (en) | 2005-06-02 |
US20050101126A1 (en) | 2005-05-12 |
IL175527A0 (en) | 2006-09-05 |
TW200524002A (en) | 2005-07-16 |
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