JP2007500869A5 - - Google Patents
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- Publication number
- JP2007500869A5 JP2007500869A5 JP2006522245A JP2006522245A JP2007500869A5 JP 2007500869 A5 JP2007500869 A5 JP 2007500869A5 JP 2006522245 A JP2006522245 A JP 2006522245A JP 2006522245 A JP2006522245 A JP 2006522245A JP 2007500869 A5 JP2007500869 A5 JP 2007500869A5
- Authority
- JP
- Japan
- Prior art keywords
- thin plate
- optical imaging
- imaging device
- elastically
- variable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012634 optical imaging Methods 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 15
- 230000005489 elastic deformation Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 238000001459 lithography Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000000691 measurement method Methods 0.000 claims 1
- 230000035807 sensation Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 5
- 238000005096 rolling process Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10335215 | 2003-08-01 | ||
| DE10335215.5 | 2003-08-01 | ||
| PCT/EP2004/007186 WO2005019878A1 (de) | 2003-08-01 | 2004-07-02 | Optische abbildungsvorrichtung mit wenigstens einer systemblende |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011173442A Division JP5639971B2 (ja) | 2003-08-01 | 2011-08-08 | 少なくとも１つのシステム絞りを備えた光学結像装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007500869A JP2007500869A (ja) | 2007-01-18 |
| JP2007500869A5 true JP2007500869A5 (enExample) | 2013-07-25 |
| JP5620039B2 JP5620039B2 (ja) | 2014-11-05 |
Family
ID=34201407
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006522245A Expired - Fee Related JP5620039B2 (ja) | 2003-08-01 | 2004-07-02 | 少なくとも１つのシステム絞りを備えた光学結像装置 |
| JP2011173442A Expired - Fee Related JP5639971B2 (ja) | 2003-08-01 | 2011-08-08 | 少なくとも１つのシステム絞りを備えた光学結像装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011173442A Expired - Fee Related JP5639971B2 (ja) | 2003-08-01 | 2011-08-08 | 少なくとも１つのシステム絞りを備えた光学結像装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8009343B2 (enExample) |
| JP (2) | JP5620039B2 (enExample) |
| WO (1) | WO2005019878A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1690139B1 (en) | 2003-12-02 | 2009-01-14 | Carl Zeiss SMT AG | Projection optical system |
| WO2010032753A1 (ja) * | 2008-09-18 | 2010-03-25 | 株式会社ニコン | 開口絞り、光学系、露光装置及び電子デバイスの製造方法 |
| DE102011003145A1 (de) * | 2010-02-09 | 2011-08-11 | Carl Zeiss SMT GmbH, 73447 | Optisches System mit Blendeneinrichtung |
| JP5938405B2 (ja) * | 2011-07-07 | 2016-06-22 | キヤノン電子株式会社 | 光量調節装置および光学機器 |
| JP6270475B2 (ja) | 2011-07-07 | 2018-01-31 | キヤノン電子株式会社 | 光量調節装置および光学機器 |
| JP5506769B2 (ja) * | 2011-12-12 | 2014-05-28 | キヤノン株式会社 | 光学機器および光学機器を具備した撮像装置 |
| JP2013235183A (ja) * | 2012-05-10 | 2013-11-21 | Canon Inc | 光学系及びそれを有する撮像装置 |
| US20150086190A1 (en) * | 2012-06-06 | 2015-03-26 | Canon Denshi Kabushiki Kaisha | Light-quantity control apparatus and optical apparatus |
| JP6051044B2 (ja) * | 2012-06-06 | 2016-12-21 | キヤノン電子株式会社 | 光量調節羽根、それを用いた光量調節装置及び光学機器。 |
| WO2013183299A1 (ja) * | 2012-06-06 | 2013-12-12 | キヤノン電子株式会社 | 光量調節装置及びそれを用いた光学機器 |
| JP6051045B2 (ja) * | 2012-12-27 | 2016-12-21 | キヤノン電子株式会社 | 光量調節装置および光学機器 |
| JP6051033B2 (ja) * | 2012-12-17 | 2016-12-21 | キヤノン電子株式会社 | 光量調節装置および光学機器 |
| JP6099924B2 (ja) * | 2012-10-04 | 2017-03-22 | キヤノン株式会社 | 光学機器およびそれを備えた撮像装置 |
| JP2015072419A (ja) * | 2013-10-04 | 2015-04-16 | キヤノン株式会社 | 光量調整装置およびそれを備えた光学機器、撮像装置 |
| CN115857282A (zh) * | 2022-12-16 | 2023-03-28 | 南京云创大数据科技股份有限公司 | 一种光刻机改变光束直径的膜片移动机构 |
| DE102023211977A1 (de) * | 2023-11-30 | 2024-12-24 | Carl Zeiss Smt Gmbh | Optisches system und projektionsbelichtungsanlage |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2276667A1 (fr) * | 1974-06-28 | 1976-01-23 | Kernforschungsanlage Juelich | Diaphragme a ouverture reglable de facon continue |
| US4296352A (en) * | 1979-12-19 | 1981-10-20 | General Electric Company | Incandescent lamp |
| JPH02153334A (ja) * | 1988-12-06 | 1990-06-13 | Canon Inc | 球面シヤツタ |
| US5323301A (en) * | 1992-12-08 | 1994-06-21 | Robert Kaufman | Dimmable studio lighting device |
| US5552925A (en) * | 1993-09-07 | 1996-09-03 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
| JPH1165094A (ja) * | 1997-08-22 | 1999-03-05 | Nikon Corp | 収納ケース、露光装置及びデバイス製造装置 |
| JP2000089294A (ja) * | 1998-09-11 | 2000-03-31 | Seiko Precision Inc | カメラの羽根開閉装置 |
| JP2001110710A (ja) * | 1999-10-08 | 2001-04-20 | Nikon Corp | 露光装置、露光方法、および半導体デバイスの製造方法 |
| DE19955984A1 (de) * | 1999-11-20 | 2001-05-23 | Zeiss Carl | Optische Abbildungsvorrichtung, insbesondere Objektiv mit wenigstens einer Systemblende |
| JP4296701B2 (ja) | 2000-10-11 | 2009-07-15 | 株式会社ニコン | 投影光学系，該投影光学系を備えた露光装置，及び該露光装置を用いたデバイスの製造方法 |
| JP2002318403A (ja) | 2001-04-20 | 2002-10-31 | Canon Inc | 絞り装置及びそれを用いた光学機器 |
| JP2003115127A (ja) * | 2001-10-01 | 2003-04-18 | Sony Corp | 光学ピックアップ装置 |
-
2004
- 2004-07-02 US US10/566,196 patent/US8009343B2/en not_active Expired - Fee Related
- 2004-07-02 WO PCT/EP2004/007186 patent/WO2005019878A1/de not_active Ceased
- 2004-07-02 JP JP2006522245A patent/JP5620039B2/ja not_active Expired - Fee Related
-
2011
- 2011-08-08 JP JP2011173442A patent/JP5639971B2/ja not_active Expired - Fee Related
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