JP2007311791A5 - - Google Patents
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- JP2007311791A5 JP2007311791A5 JP2007125944A JP2007125944A JP2007311791A5 JP 2007311791 A5 JP2007311791 A5 JP 2007311791A5 JP 2007125944 A JP2007125944 A JP 2007125944A JP 2007125944 A JP2007125944 A JP 2007125944A JP 2007311791 A5 JP2007311791 A5 JP 2007311791A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- phase change
- film
- interlayer insulating
- coordinates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000011229 interlayer Substances 0.000 claims 15
- 229910006107 GeBiTe Inorganic materials 0.000 claims 14
- 239000004065 semiconductor Substances 0.000 claims 13
- 239000012535 impurity Substances 0.000 claims 10
- 238000010586 diagram Methods 0.000 claims 9
- 229910052797 bismuth Inorganic materials 0.000 claims 7
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 7
- 229910052732 germanium Inorganic materials 0.000 claims 7
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 7
- 229910052714 tellurium Inorganic materials 0.000 claims 7
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims 7
- 239000012782 phase change material Substances 0.000 claims 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 239000010410 layer Substances 0.000 claims 4
- 239000011669 selenium Substances 0.000 claims 4
- 229910005900 GeTe Inorganic materials 0.000 claims 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 2
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 claims 2
- 229910052787 antimony Inorganic materials 0.000 claims 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 2
- 229910052785 arsenic Inorganic materials 0.000 claims 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 229910052733 gallium Inorganic materials 0.000 claims 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 2
- 239000011574 phosphorus Substances 0.000 claims 2
- 229910052711 selenium Inorganic materials 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229910052717 sulfur Inorganic materials 0.000 claims 2
- 239000011593 sulfur Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060045298A KR100782482B1 (ko) | 2006-05-19 | 2006-05-19 | GeBiTe막을 상변화 물질막으로 채택하는 상변화 기억 셀, 이를 구비하는 상변화 기억소자, 이를 구비하는 전자 장치 및 그 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007311791A JP2007311791A (ja) | 2007-11-29 |
| JP2007311791A5 true JP2007311791A5 (enExample) | 2010-06-24 |
Family
ID=38711253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007125944A Pending JP2007311791A (ja) | 2006-05-19 | 2007-05-10 | GeBiTe膜を相変化物質膜として採用する相変化記憶セル、それを有する相変化記憶素子、それを有する電子システム及びその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7817464B2 (enExample) |
| JP (1) | JP2007311791A (enExample) |
| KR (1) | KR100782482B1 (enExample) |
| CN (1) | CN101075632A (enExample) |
| TW (1) | TWI338391B (enExample) |
Families Citing this family (33)
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| US8134857B2 (en) * | 2008-06-27 | 2012-03-13 | Macronix International Co., Ltd. | Methods for high speed reading operation of phase change memory and device employing same |
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| JP5905858B2 (ja) | 2012-08-13 | 2016-04-20 | エア プロダクツ アンド ケミカルズ インコーポレイテッドAir Products And Chemicals Incorporated | Ald/cvdプロセスにおけるgst膜のための前駆体 |
| US9336879B2 (en) | 2014-01-24 | 2016-05-10 | Macronix International Co., Ltd. | Multiple phase change materials in an integrated circuit for system on a chip application |
| CN104485417A (zh) * | 2014-12-16 | 2015-04-01 | 曲阜师范大学 | 一种提高GeSbTe相变性能的技术及其薄膜制备方法 |
| CN108258114B (zh) * | 2015-04-27 | 2020-12-08 | 江苏理工学院 | 用于高速相变存储器的GeTe/Sb类超晶格相变薄膜材料的制备方法 |
| US9672906B2 (en) | 2015-06-19 | 2017-06-06 | Macronix International Co., Ltd. | Phase change memory with inter-granular switching |
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| US10050196B1 (en) * | 2017-05-04 | 2018-08-14 | Macronix International Co., Ltd. | Dielectric doped, Sb-rich GST phase change memory |
| KR102452296B1 (ko) * | 2018-07-10 | 2022-10-06 | 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼 | 적층 구조체 및 그 제조 방법 그리고 반도체 디바이스 |
| KR102118734B1 (ko) * | 2018-09-07 | 2020-06-09 | 한국과학기술연구원 | 4성분계 이상의 캘코제나이드 상변화 물질 및 이를 포함하는 메모리 소자 |
| CN114899311A (zh) * | 2022-04-07 | 2022-08-12 | 长江先进存储产业创新中心有限责任公司 | 相变存储器及其控制方法和制作方法 |
| CN119300443B (zh) * | 2024-12-06 | 2025-04-04 | 长春长光圆辰微电子技术有限公司 | 一种tmbs器件的制备工艺 |
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| JP4181490B2 (ja) | 2003-03-25 | 2008-11-12 | 松下電器産業株式会社 | 情報記録媒体とその製造方法 |
| JP4445398B2 (ja) * | 2003-04-03 | 2010-04-07 | 株式会社東芝 | 相変化メモリ装置 |
| JP4634014B2 (ja) | 2003-05-22 | 2011-02-16 | 株式会社日立製作所 | 半導体記憶装置 |
| US7067865B2 (en) | 2003-06-06 | 2006-06-27 | Macronix International Co., Ltd. | High density chalcogenide memory cells |
| US7893419B2 (en) | 2003-08-04 | 2011-02-22 | Intel Corporation | Processing phase change material to improve programming speed |
| US7381611B2 (en) | 2003-08-04 | 2008-06-03 | Intel Corporation | Multilayered phase change memory |
| JP4006410B2 (ja) | 2003-09-22 | 2007-11-14 | 日立マクセル株式会社 | 情報記録媒体 |
| WO2005031752A1 (ja) * | 2003-09-26 | 2005-04-07 | Kanazawa University Technology Licensing Organization Ltd. | 多値メモリおよびそのための相変化型記録媒体への記録方法 |
| JP4145773B2 (ja) | 2003-11-06 | 2008-09-03 | パイオニア株式会社 | 情報記録再生装置および記録媒体 |
| JP4124743B2 (ja) * | 2004-01-21 | 2008-07-23 | 株式会社ルネサステクノロジ | 相変化メモリ |
| TW200529414A (en) * | 2004-02-06 | 2005-09-01 | Renesas Tech Corp | Storage |
| JP4865248B2 (ja) * | 2004-04-02 | 2012-02-01 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| TW200601322A (en) * | 2004-04-07 | 2006-01-01 | Hitachi Maxell | Information recording medium |
| DE102005025209B4 (de) * | 2004-05-27 | 2011-01-13 | Samsung Electronics Co., Ltd., Suwon | Halbleiterspeicherbauelement, elektronisches System und Verfahren zur Herstellung eines Halbleiterspeicherbauelements |
| US7394088B2 (en) | 2005-11-15 | 2008-07-01 | Macronix International Co., Ltd. | Thermally contained/insulated phase change memory device and method (combined) |
| JP4478100B2 (ja) * | 2005-11-30 | 2010-06-09 | 株式会社東芝 | 半導体記録素子 |
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2006
- 2006-05-19 KR KR1020060045298A patent/KR100782482B1/ko active Active
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2007
- 2007-05-10 JP JP2007125944A patent/JP2007311791A/ja active Pending
- 2007-05-11 US US11/747,395 patent/US7817464B2/en active Active
- 2007-05-18 CN CNA2007101034537A patent/CN101075632A/zh active Pending
- 2007-05-18 TW TW096117854A patent/TWI338391B/zh active
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