JP2007150142A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 159
- 239000012535 impurity Substances 0.000 claims description 41
- 239000010410 layer Substances 0.000 description 28
- 230000015556 catabolic process Effects 0.000 description 21
- 238000000034 method Methods 0.000 description 13
- 230000005684 electric field Effects 0.000 description 12
- 230000008569 process Effects 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000005468 ion implantation Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000007480 spreading Effects 0.000 description 4
- 238000003892 spreading Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000779 depleting effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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Abstract
【解決手段】制御電極8が絶縁膜7上で第1及び第2の方向に周期的に設けられた開口部を有し、制御電極8の開口部の下に、第1の半導体領域(p型ベース領域)5が設けられ、第2の半導体ピラー領域(p型ピラー領域)4が、第1の半導体ピラー領域(n型ピラー領域)3に周囲を囲まれた柱状に設けられ、かつ第1の半導体領域(p型ベース領域)5よりも密に配置されている。
【選択図】図1
Description
第1導電型の半導体層と、
前記半導体層の主面上に周期的に設けられた複数の柱状の第1導電型の第1の半導体ピラー領域と、
前記第1の半導体ピラー領域に隣接して前記半導体層の前記主面上に設けられた複数の柱状の第2導電型の第2の半導体ピラー領域と、
前記第2の半導体ピラー領域の上部に接して設けられた第2導電型の第1の半導体領域と、
前記第1の半導体領域の表面に選択的に設けられた第1導電型の第2の半導体領域と、
前記第1の半導体領域及び前記第2の半導体領域の上に設けられた第1の主電極と、
前記第1の半導体ピラー領域、前記第1の半導体領域及び前記第2の半導体領域の上に設けられた絶縁膜と、
前記絶縁膜の上に設けられた制御電極と、
前記半導体層の前記主面の反対側に設けられた第2の主電極と、
を備え、
前記制御電極は、前記絶縁膜に対して略平行な第1及び第2の方向に周期的に設けられた開口部を有し、
前記制御電極の前記開口部の下に、前記第1の半導体領域が設けられ、
前記複数の柱状の第2の半導体ピラー領域の配列の周期は、前記開口部の第1及び第2の方向の周期よりも小さいことを特徴とする半導体装置が提供される。
図18は、その比較例の半導体装置の要部の断面及び平面構造を例示する模式斜視図である。なお、これと同様な構成が、特許文献1(FIG.3)に開示されている。
図1は、本発明の第1の具体例に係る半導体装置の要部の断面及び平面構造を例示する模式斜視図である。
図2は、同半導体装置におけるベース領域5とp型ピラー領域4との配置関係を例示する模式平面図である。
図3は、本発明の第2の具体例に係る半導体装置の要部の断面及び平面構造を例示する模式斜視図である。
図4は、同第2の具体例に係る半導体装置における制御電極のパターンを例示する模式平面図である。
図5は、本発明の第3の具体例に係る半導体装置におけるソース領域6aのパターンを例示する模式平面図である。
図6は、本発明の第4の具体例に係る半導体装置におけるベース領域5とp型ピラー領域24との配置関係を例示する模式平面図である。
図7は、本発明の第5の具体例に係る半導体装置要部の断面及び平面構造を例示する模式斜視図である。
図8は、同第5の具体例に係る半導体装置におけるp型ベース領域とp型ピラー領域との配置関係を例示する模式平面図である。
図9は、本発明の第6の具体例に係る半導体装置の要部の断面及び平面構造を例示する模式斜視図である。
図10は、本発明の第7の具体例に係る半導体装置におけるソース領域56aのパターンを例示する模式平面図である。
図11は、本発明の第8の具体例に係る半導体装置におけるベース領域55とp型ピラー領域34との配置関係を例示する模式平面図である。
図12は、本発明の第9の具体例に係る半導体装置要部の断面及び平面構造を例示する模式斜視図である。
図13は、本発明の第10の具体例に係る半導体装置要部の断面及び平面構造を例示する模式斜視図である。
図14は、本発明の第11の具体例に係る半導体装置要部の断面及び平面構造を例示する模式斜視図である。
図15は、本発明の第12の具体例に係る半導体装置要部の断面構造を例示する模式断面図である。
図16は、本発明の第13の具体例に係る半導体装置要部の断面及び平面構造を例示する模式斜視図である。
図17は、本発明の第14の具体例に係る半導体装置要部の断面及び平面構造を例示する模式斜視図である。
Claims (5)
- 第1導電型の半導体層と、
前記半導体層の主面上に周期的に設けられた複数の柱状の第1導電型の第1の半導体ピラー領域と、
前記第1の半導体ピラー領域に隣接して前記半導体層の前記主面上に設けられた複数の柱状の第2導電型の第2の半導体ピラー領域と、
前記第2の半導体ピラー領域の上部に接して設けられた第2導電型の第1の半導体領域と、
前記第1の半導体領域の表面に選択的に設けられた第1導電型の第2の半導体領域と、
前記第1の半導体領域及び前記第2の半導体領域の上に設けられた第1の主電極と、
前記第1の半導体ピラー領域、前記第1の半導体領域及び前記第2の半導体領域の上に設けられた絶縁膜と、
前記絶縁膜の上に設けられた制御電極と、
前記半導体層の前記主面の反対側に設けられた第2の主電極と、
を備え、
前記制御電極は、前記絶縁膜に対して略平行な第1及び第2の方向に周期的に設けられた開口部を有し、
前記制御電極の前記開口部の下に、前記第1の半導体領域が設けられ、
前記複数の柱状の第2の半導体ピラー領域の配列の周期は、前記開口部の第1及び第2の方向の周期よりも小さいことを特徴とする半導体装置。 - 前記第1の半導体領域に複数の前記第2の半導体ピラー領域が接しており、
前記第1の半導体領域の真下に少なくとも一つの前記第2の半導体ピラー領域が設けられていることを特徴とする請求項1記載の半導体装置。 - 前記第2の半導体ピラー領域は、前記第1の半導体領域の真下に加えて、前記第1の半導体領域の角部にも設けられていることを特徴とする請求項2記載の半導体装置。
- 前記第1の半導体領域の角部に設けられた前記第2の半導体ピラー領域の表面に、前記第2の半導体ピラー領域よりも不純物濃度が大なる高濃度領域を設けたことを特徴とする請求項3記載の半導体装置。
- 前記第1の半導体領域が四角形状もしくは六角形状に形成されていることを特徴とする請求項3記載の半導体装置。
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JP2005345169A JP4996848B2 (ja) | 2005-11-30 | 2005-11-30 | 半導体装置 |
US11/563,483 US7372100B2 (en) | 2005-11-30 | 2006-11-27 | Semiconductor device |
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JP2005345169A JP4996848B2 (ja) | 2005-11-30 | 2005-11-30 | 半導体装置 |
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JP2007150142A true JP2007150142A (ja) | 2007-06-14 |
JP4996848B2 JP4996848B2 (ja) | 2012-08-08 |
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