JP2007119646A - 接着剤組成物および接着フィルム - Google Patents
接着剤組成物および接着フィルム Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C09J133/08—Homopolymers or copolymers of acrylic acid esters
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C09J133/10—Homopolymers or copolymers of methacrylic acid esters
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
- C09J7/381—Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
- C09J7/385—Acrylic polymers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2433/00—Presence of (meth)acrylic polymer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/2861—Adhesive compositions having readily strippable combined with readily readhearable properties [e.g., stick-ons, etc.]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/2878—Adhesive compositions including addition polymer from unsaturated monomer
- Y10T428/2891—Adhesive compositions including addition polymer from unsaturated monomer including addition polymer from alpha-beta unsaturated carboxylic acid [e.g., acrylic acid, methacrylic acid, etc.] Or derivative thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31855—Of addition polymer from unsaturated monomers
- Y10T428/31935—Ester, halide or nitrile of addition polymer
Abstract
【解決手段】(a)スチレン、(b)環式骨格含有(メタ)アクリル酸エステルモノマー、(c)(メタ)アクリル酸アルキルエステルモノマーとからなるアクリル系ポリマーを少なくとも主成分として接着剤組成物を調製する。また、この接着剤組成物から接着フィルムの接着剤組成物層を形成する。
【選択図】 なし
Description
(2)ウェハーがアルカリ性スラリーやアルカリ性現像液等のアルカリ性の液体に触れる工程を有する場合、アルカリ性の液体によって接着剤組成物接触面が剥離、溶解、分散等により劣化してしまう。
(3)200℃以上の加熱後の接着剤層には、剥離液に不溶な物質が形成されてしまい、剥離が困難になる。
撹拌装置、還流器、温度計、滴下槽の付いたフラスコを窒素置換した後、溶媒としてプロピレングリコールモノメチルエーテルアセテート(PGMEA)を100質量部仕込み、撹拌した。その後、溶剤の温度を80℃まで上昇させた。次に、この滴下槽に下記表1及び2の各種モノマーをそれぞれ表1及び2に示す配合比(質量部)で仕込み、全成分が溶解するまで撹拌した。その後、この溶液をフラスコ内に3時間均一滴下し、引き続き80℃で5時間重合を行った。その後、室温まで冷却し、本発明のアクリル系ポリマーを得た。
撹拌装置、還流器、温度計、滴下槽の付いたフラスコを窒素置換した後、溶媒としてプロピレングリコールモノメチルエーテルアセテート(PGMEA)を100質量部仕込み、撹拌した。その後、溶剤の温度を80℃まで上昇させた。次に、この滴下槽に下記表2の各種モノマーをそれぞれ表2に示す配合比(質量部)で仕込み、全成分が溶解するまで撹拌した。その後、この溶液をフラスコ内に3時間均一滴下し、引き続き80℃で5時間重合を行った。その後、室温まで冷却し、本発明のアクリル系ポリマーを得た。
前記各実施例1〜11と各比較例1〜2の各アクリル系ポリマー(接着剤組成物)を用いて、下記の特性について評価した。
6インチのシリコンウェハ上にスピンナーを用いて、前記接着剤組成物を1000rpmにて25秒間塗布した後、4種類の加熱条件にてホットプレート上で加熱した。この4種類の加熱条件は、加熱時間は同じ3分間で、加熱温度が110℃、150℃、200℃であった。膜厚は15μm。形成されたフィルム面を目視で観察し、塗布性を下記の評価基準で判定した。
○:得られた塗膜はムラがなく均一である。
×:得られた塗膜にピンホールやはじき等のムラがある。
前記乾燥塗膜のクラックの有無を目視により観察し、膜厚が15μm及び20μmでのクラックの有り無しで評価した。いずれも有りは×、膜厚15μmで無し20μmで有りは△、いずれも無しは○にて表示した。
前記実施例および比較例の各接着剤組成物をシリコンウェハ上に塗布し、それぞれの塗膜を50℃未満から250℃まで昇温し、膜からの脱ガス量を測定し、そのガス量により評価した。測定には、TDS法(Thermal Desorption Spectroscopy法、昇温脱離分析法)を用いた。TDS測定装置(放出ガス測定装置)は、電子科学株式会社製のEMD−WA1000を使用した。耐熱性の評価は、200℃部位の強度(Indensity)が10000以下であり、残渣が金属顕微鏡で観察されない場合は○、10000以上であるが、残渣が金属顕微鏡で観察されない場合は△、10000以上であり、残渣が金属顕微鏡で観察される場合は×とした。一方の吸湿性の評価は、100℃部位の強度(Indensity)が10000以下である場合は○、10000以上である場合は×とした。貫通電極の形成などの際、接着剤は高温環境におかれるが、吸湿性が強ければ水分が気化し、接着不良となる。
Width : 100
Center Mass Number : 50
Gain : 9
Scan Speed : 4
Emult Volt : 1.3KV
測定温度 : 40℃〜250℃
接着剤組成物に用いられたアクリル系ポリマーのSP値をトルートンの法則及びHildebrandの式を用いて推算した。なお、SP値とは、凝集エネルギー密度(cohesive energy density)、すなわち、1分子の単位体積当たりの蒸発エネルギーを1/2乗したもので、単位体積当たりの極性の大きさを示す数値である。
Claims (6)
- (a)スチレン、(b)環式骨格含有(メタ)アクリル酸エステルモノマー、(c)(メタ)アクリル酸アルキルエステルモノマーとからなるアクリル系ポリマーを主成分とする接着剤組成物。
- (b)環式骨格含有(メタ)アクリル酸エステルモノマーが少なくとも、環骨格上に置換基を有する環式骨格含有(メタ)アクリル酸エステルモノマー(b1)と環骨格上に置換基を有さない環式骨格含有(メタ)アクリル酸エステルモノマー(b2)とからなることを特徴とする請求項1記載の接着剤組成物。
- 前記アクリル系ポリマーのカルボキシル基濃度が1.0ミリモル/g以下であることを特徴とする請求項1または2に記載の接着剤組成物。
- 半導体ウェハーの精密加工用保護基板を半導体ウェハーに接着するために用いられる半導体ウェハー精密加工用保護基板接着用接着剤組成物であることを特徴とする請求項1〜3のいずれか1項に記載の接着剤組成物。
- 前記保護基板を半導体ウェハーから剥離するために用いられる剥離液が前記アクリル系ポリマーの溶解性パラメーター(SP値)と近似のSP値を有することを特徴とする請求項4に記載の接着剤組成物。
- 支持フィルム上に少なくとも請求項1〜5のいずれか1項に記載の接着剤組成物から形成された接着剤組成物層を有することを特徴とする接着フィルム。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005315282A JP5020496B2 (ja) | 2005-10-28 | 2005-10-28 | 接着剤組成物および接着フィルム |
US12/090,343 US8163836B2 (en) | 2005-10-28 | 2006-10-23 | Adhesive composition and adhesive film |
DE200611003042 DE112006003042T5 (de) | 2005-10-28 | 2006-10-23 | Klebstoffzusammensetzung und Klebstofffilm |
CN2006800395809A CN101297010B (zh) | 2005-10-28 | 2006-10-23 | 粘接剂组合物以及粘接薄膜 |
PCT/JP2006/321080 WO2007049566A1 (ja) | 2005-10-28 | 2006-10-23 | 接着剤組成物および接着フィルム |
KR1020087009505A KR20080049127A (ko) | 2005-10-28 | 2006-10-23 | 접착제 조성물 및 접착 필름 |
TW095139566A TW200730597A (en) | 2005-10-28 | 2006-10-26 | Adhesive composition and adhesive film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005315282A JP5020496B2 (ja) | 2005-10-28 | 2005-10-28 | 接着剤組成物および接着フィルム |
Publications (2)
Publication Number | Publication Date |
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JP2007119646A true JP2007119646A (ja) | 2007-05-17 |
JP5020496B2 JP5020496B2 (ja) | 2012-09-05 |
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ID=37967678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005315282A Active JP5020496B2 (ja) | 2005-10-28 | 2005-10-28 | 接着剤組成物および接着フィルム |
Country Status (7)
Country | Link |
---|---|
US (1) | US8163836B2 (ja) |
JP (1) | JP5020496B2 (ja) |
KR (1) | KR20080049127A (ja) |
CN (1) | CN101297010B (ja) |
DE (1) | DE112006003042T5 (ja) |
TW (1) | TW200730597A (ja) |
WO (1) | WO2007049566A1 (ja) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008018228A1 (fr) * | 2006-08-07 | 2008-02-14 | Tokyo Ohka Kogyo Co., Ltd. | Composition adhésive, pellicule adhésive et procédé de décollement |
JP2008063463A (ja) * | 2006-09-07 | 2008-03-21 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、接着フィルム及び当該接着剤組成物の製造方法 |
WO2008062603A1 (fr) * | 2006-11-22 | 2008-05-29 | Tokyo Ohka Kogyo Co., Ltd. | Composition adhésive et film adhésif |
WO2008065801A1 (fr) * | 2006-11-29 | 2008-06-05 | Tokyo Ohka Kogyo Co., Ltd. | Composition adhésive et film adhésif |
JP2009182067A (ja) * | 2008-01-30 | 2009-08-13 | Tokyo Ohka Kogyo Co Ltd | 基板を含む積層体および基板の処理方法 |
JP2009185197A (ja) * | 2008-02-07 | 2009-08-20 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物及びその利用、並びに接着剤組成物の製造方法 |
JP2009203450A (ja) * | 2008-01-30 | 2009-09-10 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、および接着フィルム |
JP2010018652A (ja) * | 2008-07-08 | 2010-01-28 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、接着フィルム及び当該接着剤組成物の製造方法 |
JP2011006595A (ja) * | 2009-06-26 | 2011-01-13 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、および接着フィルム |
JP2011181899A (ja) * | 2010-02-02 | 2011-09-15 | Lintec Corp | ダイシングシート |
JP2011233718A (ja) * | 2010-04-28 | 2011-11-17 | Maxell Sliontec Ltd | ダイシング用粘着フィルム、及び切断片の製造方法 |
JP2012031380A (ja) * | 2010-07-09 | 2012-02-16 | Hitachi Chem Co Ltd | アクリル系エラストマー及びこれを用いた組成物 |
US8124685B2 (en) | 2009-01-13 | 2012-02-28 | Tokyo Ohka Kogyo Co., Ltd. | Adhesive composition and film adhesive |
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JP2015072997A (ja) * | 2013-10-02 | 2015-04-16 | リンテック株式会社 | 電子部品加工用粘着シートおよび半導体装置の製造方法 |
KR101830973B1 (ko) | 2010-07-09 | 2018-02-21 | 히타치가세이가부시끼가이샤 | 아크릴계 엘라스토머 및 이것을 이용한 조성물 |
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JP2008063462A (ja) * | 2006-09-07 | 2008-03-21 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、接着フィルム及び当該接着剤組成物の製造方法 |
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JP2010163495A (ja) * | 2009-01-13 | 2010-07-29 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物および接着フィルム |
CN102147576B (zh) * | 2010-02-09 | 2013-02-20 | 京东方科技集团股份有限公司 | 光刻胶剥离液组合物 |
JP6588404B2 (ja) * | 2015-10-08 | 2019-10-09 | 信越化学工業株式会社 | 仮接着方法及び薄型ウエハの製造方法 |
JP7403463B2 (ja) * | 2018-09-27 | 2023-12-22 | 株式会社カネカ | 硬化性エポキシ樹脂組成物、及びそれを用いた積層体 |
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JP2008038039A (ja) * | 2006-08-07 | 2008-02-21 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、接着フィルムおよび剥離方法 |
WO2008018228A1 (fr) * | 2006-08-07 | 2008-02-14 | Tokyo Ohka Kogyo Co., Ltd. | Composition adhésive, pellicule adhésive et procédé de décollement |
JP2008063463A (ja) * | 2006-09-07 | 2008-03-21 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、接着フィルム及び当該接着剤組成物の製造方法 |
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WO2008062603A1 (fr) * | 2006-11-22 | 2008-05-29 | Tokyo Ohka Kogyo Co., Ltd. | Composition adhésive et film adhésif |
JP2008127506A (ja) * | 2006-11-22 | 2008-06-05 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、及び接着フィルム |
JP2008133405A (ja) * | 2006-11-29 | 2008-06-12 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、及び接着フィルム |
WO2008065801A1 (fr) * | 2006-11-29 | 2008-06-05 | Tokyo Ohka Kogyo Co., Ltd. | Composition adhésive et film adhésif |
US8426543B2 (en) | 2006-11-29 | 2013-04-23 | Tokyo Ohka Kogyo Co., Ltd. | Adhesive composition and adhesive film |
JP2009182067A (ja) * | 2008-01-30 | 2009-08-13 | Tokyo Ohka Kogyo Co Ltd | 基板を含む積層体および基板の処理方法 |
JP2009203450A (ja) * | 2008-01-30 | 2009-09-10 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、および接着フィルム |
JP2009185197A (ja) * | 2008-02-07 | 2009-08-20 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物及びその利用、並びに接着剤組成物の製造方法 |
US8901235B2 (en) | 2008-06-17 | 2014-12-02 | Tokyo Ohka Kogyo Co., Ltd. | Adhesive composition, film adhesive, and heat treatment method |
US8901234B2 (en) | 2008-06-17 | 2014-12-02 | Tokyo Ohka Kogyo Co., Ltd. | Adhesive composition |
JP2010018652A (ja) * | 2008-07-08 | 2010-01-28 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、接着フィルム及び当該接着剤組成物の製造方法 |
US8877884B2 (en) | 2008-07-08 | 2014-11-04 | Tokyo Ohka Kogyo Co., Ltd. | Adhesive composition, film adhesive, and method for producing the adhesive composition |
US8124685B2 (en) | 2009-01-13 | 2012-02-28 | Tokyo Ohka Kogyo Co., Ltd. | Adhesive composition and film adhesive |
JP2011006595A (ja) * | 2009-06-26 | 2011-01-13 | Tokyo Ohka Kogyo Co Ltd | 接着剤組成物、および接着フィルム |
JP2011181899A (ja) * | 2010-02-02 | 2011-09-15 | Lintec Corp | ダイシングシート |
JP2011233718A (ja) * | 2010-04-28 | 2011-11-17 | Maxell Sliontec Ltd | ダイシング用粘着フィルム、及び切断片の製造方法 |
JP2012031380A (ja) * | 2010-07-09 | 2012-02-16 | Hitachi Chem Co Ltd | アクリル系エラストマー及びこれを用いた組成物 |
KR101830973B1 (ko) | 2010-07-09 | 2018-02-21 | 히타치가세이가부시끼가이샤 | 아크릴계 엘라스토머 및 이것을 이용한 조성물 |
JP2015072997A (ja) * | 2013-10-02 | 2015-04-16 | リンテック株式会社 | 電子部品加工用粘着シートおよび半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
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TWI338027B (ja) | 2011-03-01 |
CN101297010B (zh) | 2010-12-08 |
JP5020496B2 (ja) | 2012-09-05 |
DE112006003042T5 (de) | 2008-09-25 |
WO2007049566A1 (ja) | 2007-05-03 |
TW200730597A (en) | 2007-08-16 |
KR20080049127A (ko) | 2008-06-03 |
US20090137760A1 (en) | 2009-05-28 |
US8163836B2 (en) | 2012-04-24 |
CN101297010A (zh) | 2008-10-29 |
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