JP2007027786A5 - - Google Patents
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- Publication number
- JP2007027786A5 JP2007027786A5 JP2006261571A JP2006261571A JP2007027786A5 JP 2007027786 A5 JP2007027786 A5 JP 2007027786A5 JP 2006261571 A JP2006261571 A JP 2006261571A JP 2006261571 A JP2006261571 A JP 2006261571A JP 2007027786 A5 JP2007027786 A5 JP 2007027786A5
- Authority
- JP
- Japan
- Prior art keywords
- resist
- applying
- film
- metal layer
- entire surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 claims 15
- 239000002184 metal Substances 0.000 claims 9
- 229910052751 metal Inorganic materials 0.000 claims 9
- 239000000758 substrate Substances 0.000 claims 4
- 238000003384 imaging method Methods 0.000 claims 3
- 239000003929 acidic solution Substances 0.000 claims 2
- 239000003637 basic solution Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/183,674 US6824959B2 (en) | 2002-06-27 | 2002-06-27 | Process for creating holes in polymeric substrates |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004518069A Division JP4411410B2 (ja) | 2002-06-27 | 2003-06-27 | ポリマー基板にホールをつくるためのプロセス |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010043307A Division JP2010118708A (ja) | 2002-06-27 | 2010-02-26 | ポリマー基板にホールをつくるためのプロセス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007027786A JP2007027786A (ja) | 2007-02-01 |
| JP2007027786A5 true JP2007027786A5 (enExample) | 2007-03-29 |
Family
ID=29779180
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004518069A Expired - Fee Related JP4411410B2 (ja) | 2002-06-27 | 2003-06-27 | ポリマー基板にホールをつくるためのプロセス |
| JP2006261571A Withdrawn JP2007027786A (ja) | 2002-06-27 | 2006-09-26 | ポリマー基板にホールをつくるためのプロセス |
| JP2010043307A Pending JP2010118708A (ja) | 2002-06-27 | 2010-02-26 | ポリマー基板にホールをつくるためのプロセス |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004518069A Expired - Fee Related JP4411410B2 (ja) | 2002-06-27 | 2003-06-27 | ポリマー基板にホールをつくるためのプロセス |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010043307A Pending JP2010118708A (ja) | 2002-06-27 | 2010-02-26 | ポリマー基板にホールをつくるためのプロセス |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US6824959B2 (enExample) |
| EP (1) | EP1523868B1 (enExample) |
| JP (3) | JP4411410B2 (enExample) |
| KR (1) | KR100659808B1 (enExample) |
| CN (1) | CN1672472A (enExample) |
| AU (1) | AU2003245746A1 (enExample) |
| DE (1) | DE60317902T2 (enExample) |
| ES (1) | ES2297175T3 (enExample) |
| MY (1) | MY134327A (enExample) |
| TW (1) | TWI228953B (enExample) |
| WO (1) | WO2004004430A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050153107A1 (en) * | 2004-01-12 | 2005-07-14 | Tdk Corporation | Substrate having functional layer pattern formed thereon and method of forming functional layer pattern |
| US7271697B2 (en) * | 2004-12-07 | 2007-09-18 | Multi-Fineline Electronix | Miniature circuitry and inductive components and methods for manufacturing same |
| KR100738055B1 (ko) * | 2005-05-18 | 2007-07-12 | 삼성에스디아이 주식회사 | 전자소자의 적층 형성 방법 및 이를 이용한 fed의제조방법 |
| US8008188B2 (en) | 2007-06-11 | 2011-08-30 | Ppg Industries Ohio, Inc. | Method of forming solid blind vias through the dielectric coating on high density interconnect substrate materials |
| US8637778B2 (en) | 2010-04-08 | 2014-01-28 | Intel Corporation | Debond interconnect structures |
Family Cites Families (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3451793A (en) | 1966-02-12 | 1969-06-24 | Toko Inc | Magnetic thin film wire with multiple laminated film coating |
| US3469982A (en) | 1968-09-11 | 1969-09-30 | Jack Richard Celeste | Process for making photoresists |
| FR2041471A5 (en) | 1969-04-25 | 1971-01-29 | Cii | Multi-layer circuits with thermosetting - dielectric |
| US3984299A (en) | 1970-06-19 | 1976-10-05 | Ppg Industries, Inc. | Process for electrodepositing cationic compositions |
| US3738835A (en) | 1971-10-21 | 1973-06-12 | Ibm | Electrophoretic photoresist composition and a method of forming etch resistant masks |
| US3947338A (en) | 1971-10-28 | 1976-03-30 | Ppg Industries, Inc. | Method of electrodepositing self-crosslinking cationic compositions |
| US3793278A (en) | 1972-03-10 | 1974-02-19 | Ppg Industries Inc | Method of preparing sulfonium group containing compositions |
| US3833436A (en) | 1972-09-05 | 1974-09-03 | Buckbee Mears Co | Etching of polyimide films |
| DE2707405C3 (de) | 1976-07-19 | 1987-12-03 | Vianova Kunstharz Ag, Werndorf | Verfahren zur Herstellung von Bindemitteln für die Elektrotauchlackierung |
| US4343885A (en) | 1978-05-09 | 1982-08-10 | Dynachem Corporation | Phototropic photosensitive compositions containing fluoran colorformer |
| JPS5527647A (en) | 1978-08-17 | 1980-02-27 | Nippon Telegraph & Telephone | Paint for forming insulating film of conductive printed circuit board and method of forming insulating film |
| ATE1293T1 (de) | 1978-12-11 | 1982-07-15 | Shell Internationale Research Maatschappij B.V. | Zusammensetzungen auf der basis hitzehaertbarer harzartiger bindemittel, deren herstellung und deren verwendung als ueberzugsmittel. |
| JPS56136416A (en) * | 1980-03-27 | 1981-10-24 | Matsushita Electric Works Ltd | Limit switch |
| US4378264A (en) | 1980-05-27 | 1983-03-29 | E. I. Du Pont De Nemours And Company | Integrated laminating process |
| JPS58108229A (ja) | 1981-12-21 | 1983-06-28 | Hitachi Ltd | ポリイミド系樹脂膜の選択エツチング方法 |
| JPS59133232A (ja) | 1983-01-21 | 1984-07-31 | Hitachi Ltd | ポリイミドのエツチング方法 |
| GB8327756D0 (en) | 1983-10-17 | 1983-11-16 | Ici Plc | Extraction process |
| US4508749A (en) | 1983-12-27 | 1985-04-02 | International Business Machines Corporation | Patterning of polyimide films with ultraviolet light |
| US4592816A (en) | 1984-09-26 | 1986-06-03 | Rohm And Haas Company | Electrophoretic deposition process |
| EP0272500B1 (en) | 1986-11-28 | 1993-05-05 | Nippon Paint Co., Ltd. | Cationic micro gel praticle dispersion and a coating composition therefrom |
| JPH0287590A (ja) | 1988-09-22 | 1990-03-28 | Shindo Denshi Kogyo Kk | フイルム回路基板の貫通穴形成方法 |
| US5242713A (en) | 1988-12-23 | 1993-09-07 | International Business Machines Corporation | Method for conditioning an organic polymeric material |
| EP0433720A3 (en) | 1989-12-22 | 1992-08-26 | Siemens Aktiengesellschaft | Method of applying a solder stop coating on printed circuit boards |
| US5096556A (en) | 1990-06-25 | 1992-03-17 | Ppg Industries, Inc. | Cationic microgels and their use in electrodeposition |
| JPH04355990A (ja) | 1990-09-18 | 1992-12-09 | Fujitsu Ltd | 回路基板およびその製造方法 |
| US5229550A (en) | 1990-10-30 | 1993-07-20 | International Business Machines Corporation | Encapsulated circuitized power core alignment and lamination |
| US5298685A (en) | 1990-10-30 | 1994-03-29 | International Business Machines Corporation | Interconnection method and structure for organic circuit boards |
| US5153986A (en) | 1991-07-17 | 1992-10-13 | International Business Machines | Method for fabricating metal core layers for a multi-layer circuit board |
| US5242780A (en) | 1991-10-18 | 1993-09-07 | Industrial Technology Research Institute | Electrophoretic positive working photosensitive composition comprising as the photosensitive ingredient an aliphatic polyester having o-quinone diazide on the side chain and end groups |
| US5227008A (en) | 1992-01-23 | 1993-07-13 | Minnesota Mining And Manufacturing Company | Method for making flexible circuits |
| GB2265021B (en) | 1992-03-10 | 1996-02-14 | Nippon Steel Chemical Co | Photosensitive materials and their use in forming protective layers for printed circuit and process for preparation of printed circuit |
| JPH05320313A (ja) | 1992-05-27 | 1993-12-03 | Murata Mfg Co Ltd | 電子部品封止用樹脂組成物 |
| JPH05343837A (ja) | 1992-06-05 | 1993-12-24 | Taiyo Ink Mfg Ltd | ソルダーレジストインキ組成物及びソルダーレジストパターン形成方法 |
| JPH06268378A (ja) | 1993-03-12 | 1994-09-22 | Oki Electric Ind Co Ltd | 多層配線基板のビアホールの形成方法 |
| US5600035A (en) | 1994-07-13 | 1997-02-04 | Ppg Industries, Inc. | Positive photoactive compounds based on 2,6-dinitro benzyl groups and 2,5-dinitro benzyl groups |
| US5590460A (en) | 1994-07-19 | 1997-01-07 | Tessera, Inc. | Method of making multilayer circuit |
| WO1996022597A1 (en) | 1995-01-17 | 1996-07-25 | Nippon Steel Chemical Co., Ltd. | Laminate |
| JPH09148748A (ja) * | 1995-11-20 | 1997-06-06 | Taiyo Ink Mfg Ltd | 多層プリント配線板及びその製造方法並びにそれに用いる樹脂絶縁層形成用組成物 |
| US6117931A (en) * | 1996-07-01 | 2000-09-12 | Basf Corporation | Curable coating compositions having improved effect pigment orientation and a method of using the same |
| US6080526A (en) * | 1997-03-24 | 2000-06-27 | Alliedsignal Inc. | Integration of low-k polymers into interlevel dielectrics using controlled electron-beam radiation |
| JPH1121359A (ja) | 1997-06-30 | 1999-01-26 | Process Lab Micron:Kk | ポリエステル系フィルムの化学エッチング方法 |
| JPH1171501A (ja) | 1997-08-29 | 1999-03-16 | Hitachi Chem Co Ltd | エポキシ樹脂組成物及びそれを用いた硬化物 |
| JP3339387B2 (ja) | 1997-11-07 | 2002-10-28 | 日立電線株式会社 | Tab用テープの製造方法 |
| JP3067021B2 (ja) | 1998-09-18 | 2000-07-17 | インターナショナル・ビジネス・マシーンズ・コーポレ−ション | 両面配線基板の製造方法 |
| JP4257877B2 (ja) * | 1998-10-08 | 2009-04-22 | 関西ペイント株式会社 | 塗料組成物 |
| JP2000227665A (ja) * | 1998-11-02 | 2000-08-15 | Kansai Paint Co Ltd | パターン形成方法 |
| US6177357B1 (en) | 1999-04-30 | 2001-01-23 | 3M Innovative Properties Company | Method for making flexible circuits |
| US6379865B1 (en) | 2000-04-11 | 2002-04-30 | 3M Innovative Properties Company | Photoimageable, aqueous acid soluble polyimide polymers |
| JP2001305750A (ja) | 2000-04-18 | 2001-11-02 | Toray Eng Co Ltd | ポリイミドフィルムのエッチング方法 |
| JP4685236B2 (ja) * | 2000-12-13 | 2011-05-18 | 三菱レイヨン株式会社 | 熱硬化性被覆組成物 |
-
2002
- 2002-06-27 US US10/183,674 patent/US6824959B2/en not_active Expired - Fee Related
-
2003
- 2003-06-19 TW TW092116664A patent/TWI228953B/zh not_active IP Right Cessation
- 2003-06-26 MY MYPI20032397A patent/MY134327A/en unknown
- 2003-06-27 WO PCT/US2003/020477 patent/WO2004004430A1/en not_active Ceased
- 2003-06-27 EP EP03739352A patent/EP1523868B1/en not_active Expired - Lifetime
- 2003-06-27 DE DE60317902T patent/DE60317902T2/de not_active Expired - Lifetime
- 2003-06-27 CN CNA038178761A patent/CN1672472A/zh active Pending
- 2003-06-27 JP JP2004518069A patent/JP4411410B2/ja not_active Expired - Fee Related
- 2003-06-27 KR KR1020047021341A patent/KR100659808B1/ko not_active Expired - Fee Related
- 2003-06-27 AU AU2003245746A patent/AU2003245746A1/en not_active Abandoned
- 2003-06-27 ES ES03739352T patent/ES2297175T3/es not_active Expired - Lifetime
-
2006
- 2006-09-26 JP JP2006261571A patent/JP2007027786A/ja not_active Withdrawn
-
2010
- 2010-02-26 JP JP2010043307A patent/JP2010118708A/ja active Pending
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