JP2006513557A - カーボンナノチューブ被覆物をパターン化する方法およびカーボンナノチューブ配線 - Google Patents
カーボンナノチューブ被覆物をパターン化する方法およびカーボンナノチューブ配線 Download PDFInfo
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Abstract
Description
(関連出願の参照)
本発明は、NT混合物という題の米国特許仮出願第60/381809号およびNTベースの被覆物のパターニングという題の米国仮出願第60/381810号(両方とも2002年5月21日に出願された)に基づく優先権を伴う。
Claims (41)
- 基板と、
前記基板上に配置され、カーボンナノチューブを含む、パターン化された配線ラインまたは電極と、
を含む、カーボンナノチューブ配線。 - 前記配線ラインまたは電極は、さらにバインダーまたはフォトレジストを含む、請求項1に記載のカーボンナノチューブ配線。
- 前記カーボンナノチューブの外径は、3.5nm以下である、請求項1に記載のカーボンナノチューブ配線。
- 前記配線ラインまたは電極は、さらに金属充填剤を含む、請求項1に記載のカーボンナノチューブ配線。
- 前記金属充填剤は、銀、金、銅またはそれらの化合物を含む、請求項4に記載のカーボンナノチューブ配線。
- 前記配線ラインまたは電極の表面抵抗は、102〜104Ω/□である、請求項1に記載のカーボンナノチューブ配線。
- 前記配線ラインまたは電極の体積抵抗は、10−2〜100Ω・cmである、請求項1に記載のカーボンナノチューブ配線。
- 前記配線ラインまたは電極の光透過率は、80%以上である、請求項1に記載のカーボンナノチューブ配線。
- 前記配線ラインまたは電極のカーボンナノチューブ濃度は、5〜50体積%である、請求項1に記載のカーボンナノチューブ配線。
- 前記配線ラインまたは電極上に配置された絶縁層をさらに含む、請求項1に記載のカーボンナノチューブ配線。
- 前記基板は、ガラス基板、ポリマー基板、シリコンウェハー、プレプレッグまたはそれらの組み合わせである、請求項1に記載のカーボンナノチューブ配線。
- カーボンナノチューブの溶液を準備すること、
前記溶液を基板に塗布し、前記基板上に、固定されたカーボンナノチューブの被膜を形成すること、
前記カーボンナノチューブ被膜にバインダーを選択的に含浸させること、
前記基板から、前記バインダーを含浸させないカーボンナノチューブ被膜の少なくとも一部を取り除くこと、
を含む、カーボンナノチューブ被覆物をパターン化する方法。 - 前記カーボンナノチューブの溶液を準備することは、カーボンナノチューブを精製することを含む、請求項12に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブの溶液の準備は、水とアルコールとの溶液に、カーボンナノチューブを分散させることを含む、請求項12に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記溶液の塗布は、アトマイザで前記溶液を吹きつけることを含む、請求項12に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブ被膜に含浸させることは、あらかじめ定められたパターンを有するカーボンナノチューブ被膜上にバインダーを印刷することを含む、請求項12に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブを取り除くことは、水と界面活性剤との混合物で、前記カーボンナノチューブ被膜をスプレー洗浄することを含む、請求項12に記載のカーボンナノチューブ被覆物をパターン化する方法。
- カーボンナノチューブの溶液を準備すること、
前記溶液を基板に塗布し、前記基板上に、固定されたカーボンナノチューブの被膜を形成すること、
前記カーボンナノチューブ被膜にフォトレジストを含浸させること、
フォトレジストを含浸されたカーボンナノチューブ被膜にあらかじめ定められたパターンを投影して、前記カーボンナノチューブ被膜の一部を固定すること、
前記基板から、投影によって固定されていないカーボンナノチューブ被膜の少なくとも一部を取り除くこと、
を含む、カーボンナノチューブ被覆物をパターン化する方法。 - 前記カーボンナノチューブの溶液を準備することは、前記カーボンナノチューブを精製することを含む、請求項18に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブの溶液を準備することは、水とアルコールとの溶液に前記カーボンナノチューブを分散させることを含む、請求項18に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記溶液の塗布は、アトマイザで前記溶液を吹きつけることを含む、請求項18に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブ被膜を含浸させることは、前記基板上のフォトレジストをロッドコーティングすること、または前記基板上のフォトレジストを回転塗布法することを含む、請求項18に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブ被膜の取り除くことは、前記フォトレジストの現像溶液で前記カーボンナノチューブ被膜の固定されていない部分を取り除くことを含む、請求項18に記載のカーボンナノチューブ被覆物をパターン化する方法。
- カーボンナノチューブの溶液を準備すること、
前記溶液を基板に塗布し、前記基板上に、固定されたカーボンナノチューブの被膜を形成すること、
マスクを介して光源にカーボンナノチューブ被膜を晒すこと、
晒されたカーボンナノチューブ被膜にバインダーを含浸させること、
を含む、カーボンナノチューブ被覆物をパターン化する方法。 - 前記カーボンナノチューブの溶液を準備することは、精製することを含む、請求項25に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブの溶液を準備することは、水とアルコールとの溶液にカーボンナノチューブを分散させることを含む、請求項25に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記溶液を塗布することは、アトマイザで前記溶液を吹きつけることを含む、請求項25に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブ被膜を含浸させることは、前記バインダーを吹き付けることを含む、請求項25に記載のカーボンナノチューブ被覆物をパターン化する方法。
- カーボンナノチューブおよび溶媒を含む、被覆混合物を準備すること、
基板上に被覆混合物を塗布し、あらかじめ定められたパターンを形成すること、
前記基板上に印刷された被覆混合物から前記溶媒を取り除き、前記基板に固定されたカーボンナノチューブの被膜を残すこと、
前記カーボンナノチューブ被膜にバインダーを含浸させること
を含む、カーボンナノチューブ被覆物をパターン化する方法。 - 前記被覆混合物を準備することは、精製することを含む、請求項30のカーボンナノチューブ被覆物をパターン化する方法。
- 前記被覆混合物を準備することは、水溶液にカーボンナノチューブを分散させることを含む、請求項30に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記被覆混合物の塗布は、スクリーン印刷、ジェット印刷またはグラビア回転印刷を含む、請求項30に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記溶媒を取り除くことは、前記基板を加熱することを含む、請求項30に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブ被膜を含浸させることは、前記バインダーを吹き付けることを含む、請求項30に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記被覆混合物を準備することは、粘性変性剤を加えることを含む、請求項30に記載のカーボンナノチューブ被覆物をパターン化する方法。
- カーボンナノチューブの溶液を準備すること、
前記溶液を基板に塗布し、前記基板上に、固定されたカーボンナノチューブの被膜を形成すること、
前記基板からカーボンナノチューブ被膜の少なくとも一部を取り除くこと、
前記基板上に残るカーボンナノチューブ被膜にバインダーを含浸させること
を含む、カーボンナノチューブ被覆物をパターン化する方法。 - 前記カーボンナノチューブの溶液を準備することは、前記カーボンナノチューブを精製することを含む、請求項37に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブの溶液を準備することは、水とアルコールとの溶液に前記カーボンナノチューブを分散させることを含む、請求項37に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記溶液の塗布は、アトマイザで前記溶液を吹きつけることを含む、請求項37に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブ被膜を含浸させることは、前記バインダーを吹き付けることを含む、請求項12に記載のカーボンナノチューブ被覆物をパターン化する方法。
- 前記カーボンナノチューブを取り除くことは、前記基板から粘着性表面へ前記カーボンナノチューブ被膜の一部を移すことを含む、請求項12に記載のカーボンナノチューブ被覆物をパターン化する方法。
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US38180902P | 2002-05-21 | 2002-05-21 | |
US38181002P | 2002-05-21 | 2002-05-21 | |
PCT/US2003/015819 WO2003099709A2 (en) | 2002-05-21 | 2003-05-21 | Method for patterning carbon nanotube coating and carbon nanotube wiring |
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EP (1) | EP1513621A4 (ja) |
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CN (1) | CN100341629C (ja) |
AU (1) | AU2003229333A1 (ja) |
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Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2005530350A (ja) * | 2002-06-13 | 2005-10-06 | コナルカ テクノロジーズ インコーポレイテッド | 光電子素子用の電極およびその使用 |
JP2009509358A (ja) * | 2005-09-21 | 2009-03-05 | ユニバーシティ オブ フロリダ リサーチ ファンデーション インコーポレーティッド | パターン化導電性薄膜を形成するための低温法およびそれに由来するパターン化物品 |
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Also Published As
Publication number | Publication date |
---|---|
EP1513621A2 (en) | 2005-03-16 |
US20060111008A1 (en) | 2006-05-25 |
WO2003099709A2 (en) | 2003-12-04 |
US20040099438A1 (en) | 2004-05-27 |
EP1513621A4 (en) | 2005-07-06 |
CN100341629C (zh) | 2007-10-10 |
US6988925B2 (en) | 2006-01-24 |
CN1671481A (zh) | 2005-09-21 |
AU2003229333A1 (en) | 2003-12-12 |
WO2003099709A3 (en) | 2004-03-18 |
CA2487294A1 (en) | 2003-12-04 |
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