JP2006506806A5 - - Google Patents

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Publication number
JP2006506806A5
JP2006506806A5 JP2004550790A JP2004550790A JP2006506806A5 JP 2006506806 A5 JP2006506806 A5 JP 2006506806A5 JP 2004550790 A JP2004550790 A JP 2004550790A JP 2004550790 A JP2004550790 A JP 2004550790A JP 2006506806 A5 JP2006506806 A5 JP 2006506806A5
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JP
Japan
Prior art keywords
layer
dielectric layer
hard mask
dielectric
mask layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004550790A
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English (en)
Japanese (ja)
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JP2006506806A (ja
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Publication date
Priority claimed from US10/294,139 external-priority patent/US6917108B2/en
Application filed filed Critical
Publication of JP2006506806A publication Critical patent/JP2006506806A/ja
Publication of JP2006506806A5 publication Critical patent/JP2006506806A5/ja
Pending legal-status Critical Current

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JP2004550790A 2002-11-14 2003-11-07 ハイブリッド誘電体を備えた高信頼低誘電率相互接続構造 Pending JP2006506806A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/294,139 US6917108B2 (en) 2002-11-14 2002-11-14 Reliable low-k interconnect structure with hybrid dielectric
PCT/GB2003/004814 WO2004044978A1 (en) 2002-11-14 2003-11-07 Reliable low-k interconnect structure with hybrid dielectric

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010247790A Division JP2011061228A (ja) 2002-11-14 2010-11-04 ハイブリッド誘電体を備えた高信頼低誘電率相互接続構造

Publications (2)

Publication Number Publication Date
JP2006506806A JP2006506806A (ja) 2006-02-23
JP2006506806A5 true JP2006506806A5 (enExample) 2006-12-07

Family

ID=32296906

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2004550790A Pending JP2006506806A (ja) 2002-11-14 2003-11-07 ハイブリッド誘電体を備えた高信頼低誘電率相互接続構造
JP2010247790A Pending JP2011061228A (ja) 2002-11-14 2010-11-04 ハイブリッド誘電体を備えた高信頼低誘電率相互接続構造

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010247790A Pending JP2011061228A (ja) 2002-11-14 2010-11-04 ハイブリッド誘電体を備えた高信頼低誘電率相互接続構造

Country Status (8)

Country Link
US (2) US6917108B2 (enExample)
EP (1) EP1561241A1 (enExample)
JP (2) JP2006506806A (enExample)
KR (1) KR100773003B1 (enExample)
CN (1) CN1314101C (enExample)
AU (1) AU2003279460A1 (enExample)
TW (1) TWI234231B (enExample)
WO (1) WO2004044978A1 (enExample)

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