JP2006303426A5 - - Google Patents
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- Publication number
- JP2006303426A5 JP2006303426A5 JP2005359118A JP2005359118A JP2006303426A5 JP 2006303426 A5 JP2006303426 A5 JP 2006303426A5 JP 2005359118 A JP2005359118 A JP 2005359118A JP 2005359118 A JP2005359118 A JP 2005359118A JP 2006303426 A5 JP2006303426 A5 JP 2006303426A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric layer
- piezoelectric element
- piezoelectric
- liquid ejecting
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 239000000654 additive Substances 0.000 claims 1
- 230000000996 additive effect Effects 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 229910052712 strontium Inorganic materials 0.000 claims 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005359118A JP5170356B2 (ja) | 2005-03-22 | 2005-12-13 | 圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
| EP20060005622 EP1705725A1 (en) | 2005-03-22 | 2006-03-20 | Piezoelectric element, method of manufacturing the same, liquid-jet head, method of manufacturing the same, and liquid-jet apparatus |
| US11/384,324 US7362039B2 (en) | 2005-03-22 | 2006-03-21 | Piezoelectric element, method of manufacturing the same, liquid-jet head, method of manufacturing the same, and liquid-jet apparatus |
| KR20060026069A KR100835036B1 (ko) | 2005-03-22 | 2006-03-22 | 압전 요소, 그 제조 방법, 액체 분사 헤드, 그 제조 방법,및 액체 분사 장치 |
| US12/038,875 US7520038B2 (en) | 2005-03-22 | 2008-02-28 | Piezoelectric element, method of manufacturing the same, liquid-jet head, method of manufacturing the same, and liquid-jet apparatus |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005081729 | 2005-03-22 | ||
| JP2005081729 | 2005-03-22 | ||
| JP2005359118A JP5170356B2 (ja) | 2005-03-22 | 2005-12-13 | 圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008294164A Division JP2009049433A (ja) | 2005-03-22 | 2008-11-18 | 圧電素子及びその製造方法、液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006303426A JP2006303426A (ja) | 2006-11-02 |
| JP2006303426A5 true JP2006303426A5 (enExample) | 2009-01-15 |
| JP5170356B2 JP5170356B2 (ja) | 2013-03-27 |
Family
ID=36601144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005359118A Expired - Fee Related JP5170356B2 (ja) | 2005-03-22 | 2005-12-13 | 圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US7362039B2 (enExample) |
| EP (1) | EP1705725A1 (enExample) |
| JP (1) | JP5170356B2 (enExample) |
| KR (1) | KR100835036B1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5170356B2 (ja) * | 2005-03-22 | 2013-03-27 | セイコーエプソン株式会社 | 圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
| JP4337833B2 (ja) * | 2006-03-24 | 2009-09-30 | セイコーエプソン株式会社 | 液滴吐出ヘッドおよび液滴吐出装置 |
| JP2010131979A (ja) * | 2008-10-27 | 2010-06-17 | Seiko Epson Corp | 液体噴射装置、及び、液体噴射装置の制御方法 |
| JP5884959B2 (ja) * | 2010-11-16 | 2016-03-15 | セイコーエプソン株式会社 | 圧電体膜の製造方法、圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
| JP5394451B2 (ja) * | 2011-07-26 | 2014-01-22 | 株式会社アドバンテスト | アクチュエータの製造方法、スイッチ装置、伝送路切替装置、および試験装置 |
| JP6146067B2 (ja) * | 2013-03-14 | 2017-06-14 | 株式会社リコー | 電気−機械変換素子、電気−機械変換素子の製造方法、液滴吐出ヘッド、液滴吐出装置 |
| EP3196952B1 (en) * | 2016-01-21 | 2019-06-19 | AT & S Austria Technologie & Systemtechnik Aktiengesellschaft | Mems piezoelectric transducer formed at a pcb support structure |
| JP6990053B2 (ja) * | 2017-07-10 | 2022-01-12 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド及び液体噴射装置 |
| JP7194528B2 (ja) * | 2018-07-18 | 2022-12-22 | 株式会社アルバック | Ｐｚｔ素子、ｐｚｔ素子製造方法 |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB509838A (en) | 1938-01-21 | 1939-07-21 | Ass Equipment Co Ltd | Improvements in or relating to liquid-fuel injection internal-combustion engines |
| US3110626A (en) | 1961-08-17 | 1963-11-12 | Minnesota Mining & Mfg | Apparatus for coating discrete solid material |
| US3496323A (en) | 1965-12-20 | 1970-02-17 | Air Reduction | Gas shielded arc welding of steel |
| JPS5143199B2 (enExample) * | 1971-09-25 | 1976-11-19 | ||
| US4397886A (en) * | 1981-05-06 | 1983-08-09 | Sprague Electric Company | Method for making a ceramic intergranular barrier-layer capacitor |
| US4726099A (en) * | 1986-09-17 | 1988-02-23 | American Cyanamid Company | Method of making piezoelectric composites |
| US4933230A (en) * | 1986-09-17 | 1990-06-12 | American Cyanamid | Piezoelectric composites |
| US5112433A (en) * | 1988-12-09 | 1992-05-12 | Battelle Memorial Institute | Process for producing sub-micron ceramic powders of perovskite compounds with controlled stoichiometry and particle size |
| US5219811A (en) * | 1989-08-31 | 1993-06-15 | Central Glass Company, Limited | Powder composition for sintering into modified barium titanate semiconductive ceramic |
| GB9025706D0 (en) * | 1990-11-27 | 1991-01-09 | Xaar Ltd | Laminate for use in manufacture of ink drop printheads |
| JP3327149B2 (ja) | 1995-12-20 | 2002-09-24 | セイコーエプソン株式会社 | 圧電体薄膜素子及びこれを用いたインクジェット式記録ヘッド |
| US5969935A (en) * | 1996-03-15 | 1999-10-19 | Ramtron International Corporation | Use of calcium and strontium dopants to improve retention performance in a PZT ferroelectric film |
| US6340621B1 (en) * | 1996-10-30 | 2002-01-22 | The Research Foundation Of State University Of New York | Thin film capacitor and method of manufacture |
| JP3576788B2 (ja) * | 1998-02-13 | 2004-10-13 | 株式会社東芝 | 電子部品及びその製造方法 |
| US6398349B1 (en) | 1998-03-04 | 2002-06-04 | Seiko Epson Corporation | Piezoelectric device, ink-jet printing head, and method for manufacturing same, and printer |
| US6203608B1 (en) * | 1998-04-15 | 2001-03-20 | Ramtron International Corporation | Ferroelectric thin films and solutions: compositions |
| JP2000173301A (ja) | 1998-12-10 | 2000-06-23 | Seiko Epson Corp | 圧電発光素子、表示装置およびそれらの製造方法 |
| JP3671791B2 (ja) | 1999-02-08 | 2005-07-13 | 株式会社村田製作所 | 圧電磁器組成物およびそれを用いた圧電セラミック素子 |
| JP2001113705A (ja) | 1999-10-19 | 2001-04-24 | Casio Comput Co Ltd | ドライエッチング用金属マスク、これを備えたインクジェットプリンタヘッド及びその製造方法 |
| JP2001152360A (ja) * | 1999-11-25 | 2001-06-05 | Ricoh Co Ltd | セラミックス誘電体膜の形成方法、セラミックス誘電体膜／基板の積層構造体、及び電気−機械変換素子 |
| JP3202012B1 (ja) | 2000-03-29 | 2001-08-27 | 松下電器産業株式会社 | 圧電アクチュエータ、インクジェットヘッド及びインクジェット式記録装置 |
| JP2001302348A (ja) | 2000-04-19 | 2001-10-31 | Tokin Corp | 圧電磁器組成物 |
| JP2001302349A (ja) | 2000-04-19 | 2001-10-31 | Tokin Corp | 圧電磁器組成物 |
| JP2001302350A (ja) | 2000-04-19 | 2001-10-31 | Tokin Corp | 圧電磁器組成物 |
| JP2002226266A (ja) | 2001-01-30 | 2002-08-14 | Nec Tokin Corp | 圧電磁器組成物 |
| JP4752156B2 (ja) * | 2001-08-23 | 2011-08-17 | 株式会社村田製作所 | 積層圧電素子用圧電磁器組成物、積層圧電素子、積層圧電素子の製造方法および積層圧電装置 |
| CA2438360C (en) | 2001-12-18 | 2010-02-09 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element, ink jet head, angular velocity sensor, manufacturing method thereof, and ink jet printing apparatus |
| JP2004107181A (ja) * | 2002-09-20 | 2004-04-08 | Canon Inc | 圧電体素子形成用組成物、圧電体膜の製造方法、圧電体素子及びインクジェット記録ヘッド |
| JP3971279B2 (ja) * | 2002-09-20 | 2007-09-05 | キヤノン株式会社 | 圧電体素子の製造方法 |
| KR100631346B1 (ko) * | 2002-09-20 | 2006-10-09 | 캐논 가부시끼가이샤 | 압전체막 형성용 조성물, 압전체막의 제조 방법, 압전체소자 및 잉크젯 기록 헤드 |
| JP2004111835A (ja) * | 2002-09-20 | 2004-04-08 | Canon Inc | 圧電体素子の製造方法、圧電体素子及びインクジェット式記録ヘッド |
| JP2004235553A (ja) | 2003-01-31 | 2004-08-19 | Canon Inc | 圧電体膜成膜用支持基板、圧電体素子、インクジェット記録ヘッド |
| JP2005082424A (ja) | 2003-09-05 | 2005-03-31 | Nec Tokin Corp | 圧電磁器組成物 |
| US7132057B2 (en) * | 2003-10-15 | 2006-11-07 | Piezotech, Llc | Compositions for high power piezoelectric ceramics |
| JP2006303425A (ja) * | 2005-03-22 | 2006-11-02 | Seiko Epson Corp | 圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
| JP5170356B2 (ja) * | 2005-03-22 | 2013-03-27 | セイコーエプソン株式会社 | 圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
-
2005
- 2005-12-13 JP JP2005359118A patent/JP5170356B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-20 EP EP20060005622 patent/EP1705725A1/en not_active Withdrawn
- 2006-03-21 US US11/384,324 patent/US7362039B2/en not_active Expired - Fee Related
- 2006-03-22 KR KR20060026069A patent/KR100835036B1/ko not_active Expired - Fee Related
-
2008
- 2008-02-28 US US12/038,875 patent/US7520038B2/en not_active Expired - Fee Related
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