JP2006059481A - 半導体記憶装置 - Google Patents
半導体記憶装置 Download PDFInfo
- Publication number
- JP2006059481A JP2006059481A JP2004241991A JP2004241991A JP2006059481A JP 2006059481 A JP2006059481 A JP 2006059481A JP 2004241991 A JP2004241991 A JP 2004241991A JP 2004241991 A JP2004241991 A JP 2004241991A JP 2006059481 A JP2006059481 A JP 2006059481A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 83
- 238000013500 data storage Methods 0.000 claims description 4
- 230000007547 defect Effects 0.000 abstract description 10
- 230000006866 deterioration Effects 0.000 abstract 2
- 238000003754 machining Methods 0.000 abstract 2
- 238000007667 floating Methods 0.000 description 27
- 238000010586 diagram Methods 0.000 description 22
- 238000000034 method Methods 0.000 description 17
- 238000012360 testing method Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 101100476983 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) SDT1 gene Proteins 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 101000622430 Homo sapiens Vang-like protein 2 Proteins 0.000 description 1
- 102100023520 Vang-like protein 2 Human genes 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/14—Word line organisation; Word line lay-out
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Read Only Memory (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004241991A JP2006059481A (ja) | 2004-08-23 | 2004-08-23 | 半導体記憶装置 |
| US11/180,659 US7301815B2 (en) | 2004-08-23 | 2005-07-14 | Semiconductor memory device comprising controllable threshould voltage dummy memory cells |
| US11/976,299 US20080055983A1 (en) | 2004-08-23 | 2007-10-23 | Semiconductor memory device comprising controllable threshold voltage dummy memory cells |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004241991A JP2006059481A (ja) | 2004-08-23 | 2004-08-23 | 半導体記憶装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006059481A true JP2006059481A (ja) | 2006-03-02 |
| JP2006059481A5 JP2006059481A5 (enExample) | 2007-04-12 |
Family
ID=35909456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004241991A Pending JP2006059481A (ja) | 2004-08-23 | 2004-08-23 | 半導体記憶装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US7301815B2 (enExample) |
| JP (1) | JP2006059481A (enExample) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009026369A (ja) * | 2007-07-18 | 2009-02-05 | Toshiba Corp | 半導体記憶装置 |
| KR100900851B1 (ko) | 2006-05-31 | 2009-06-04 | 가부시끼가이샤 도시바 | 비휘발성 반도체 메모리 |
| JP2009193631A (ja) * | 2008-02-14 | 2009-08-27 | Toshiba Corp | 不揮発性半導体記憶装置 |
| JP2009301691A (ja) * | 2008-06-17 | 2009-12-24 | Renesas Technology Corp | 不揮発性半導体記憶装置 |
| US7697355B2 (en) | 2006-08-17 | 2010-04-13 | Fujitsu Microelectronics Limited | Semiconductor memory and system with matching characteristics of signal supplied to a dummy signal line and a real signal line |
| JP2010250891A (ja) * | 2009-04-14 | 2010-11-04 | Toshiba Corp | 不揮発性半導体記憶装置 |
| JP2011524063A (ja) * | 2008-06-12 | 2011-08-25 | マイクロン テクノロジー, インク. | フラッシュメモリデバイスにデータを格納する方法 |
| JP2012195051A (ja) * | 2007-12-13 | 2012-10-11 | Toshiba Corp | 半導体記憶装置 |
| US8289774B2 (en) | 2008-04-18 | 2012-10-16 | Samsung Electronics Co., Ltd. | Flash memory device and operating method of flash memory device |
| US8885411B2 (en) | 2013-03-15 | 2014-11-11 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device |
| KR101927667B1 (ko) | 2018-03-15 | 2018-12-10 | 한국과학기술원 | 단일 사건 현상과 누적 이온화 현상에 강인한 내방사선 단위 모스펫 |
| US10163513B2 (en) | 2016-02-26 | 2018-12-25 | Samsung Electronics Co., Ltd. | Program method of memory device and memory system using the same |
| US10409499B2 (en) | 2017-03-16 | 2019-09-10 | Toshiba Memory Corporation | NAND flash memory device and system including SLC and MLC write modes |
| JP2019161009A (ja) * | 2018-03-13 | 2019-09-19 | 東芝メモリ株式会社 | 記憶装置 |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100697285B1 (ko) * | 2005-05-11 | 2007-03-20 | 삼성전자주식회사 | 워드라인과 선택라인 사이에 보호라인을 가지는 낸드플래시 메모리 장치 |
| US7616490B2 (en) * | 2006-10-17 | 2009-11-10 | Sandisk Corporation | Programming non-volatile memory with dual voltage select gate structure |
| US7691710B2 (en) * | 2006-10-17 | 2010-04-06 | Sandisk Corporation | Fabricating non-volatile memory with dual voltage select gate structure |
| US7586157B2 (en) * | 2006-10-17 | 2009-09-08 | Sandisk Corporation | Non-volatile memory with dual voltage select gate structure |
| US7508703B2 (en) * | 2006-11-13 | 2009-03-24 | Sandisk Corporation | Non-volatile memory with boost structures |
| US7696035B2 (en) * | 2006-11-13 | 2010-04-13 | Sandisk Corporation | Method for fabricating non-volatile memory with boost structures |
| US7508710B2 (en) * | 2006-11-13 | 2009-03-24 | Sandisk Corporation | Operating non-volatile memory with boost structures |
| JP2008146771A (ja) * | 2006-12-12 | 2008-06-26 | Toshiba Corp | 半導体記憶装置 |
| US20080232169A1 (en) * | 2007-03-20 | 2008-09-25 | Atmel Corporation | Nand-like memory array employing high-density nor-like memory devices |
| KR100854914B1 (ko) | 2007-04-06 | 2008-08-27 | 주식회사 하이닉스반도체 | 플래시 메모리 장치 및 이의 동작 방법 |
| KR100897603B1 (ko) * | 2007-06-20 | 2009-05-14 | 삼성전자주식회사 | 반도체 메모리 장치 |
| US7808826B2 (en) * | 2007-06-25 | 2010-10-05 | Sandisk Corporation | Non-volatile storage with individually controllable shield plates between storage elements |
| US7636260B2 (en) * | 2007-06-25 | 2009-12-22 | Sandisk Corporation | Method for operating non-volatile storage with individually controllable shield plates between storage elements |
| US7781286B2 (en) * | 2007-06-25 | 2010-08-24 | Sandisk Corporation | Method for fabricating non-volatile storage with individually controllable shield plates between storage elements |
| KR101291667B1 (ko) * | 2007-08-20 | 2013-08-01 | 삼성전자주식회사 | 불휘발성 메모리 장치 및 그 독출 방법 |
| US7872917B2 (en) * | 2007-12-25 | 2011-01-18 | Samsung Electronics Co., Ltd. | Non-volatile semiconductor memory device and memory system including the same |
| KR101478149B1 (ko) | 2008-10-20 | 2015-01-05 | 삼성전자주식회사 | 더미 트랜지스터를 갖는 플래시 메모리 장치 |
| JP4987927B2 (ja) * | 2009-09-24 | 2012-08-01 | 株式会社東芝 | 半導体記憶装置 |
| US20140192598A1 (en) * | 2012-06-04 | 2014-07-10 | Kabushiki Kaisha Toshiba | Semiconductor memory device |
| KR102000634B1 (ko) | 2012-06-07 | 2019-07-16 | 삼성전자주식회사 | 비휘발성 메모리 장치 및 그것의 소거 방법 |
| KR20150004215A (ko) * | 2013-07-02 | 2015-01-12 | 에스케이하이닉스 주식회사 | 반도체 메모리 장치 및 그것의 동작 방법 |
| JP2015097245A (ja) * | 2013-11-15 | 2015-05-21 | 株式会社東芝 | 不揮発性半導体記憶装置、及びメモリシステム |
| KR102345597B1 (ko) * | 2015-06-30 | 2022-01-03 | 삼성전자주식회사 | 더미 워드 라인을 갖는 3차원 플래시 메모리 장치 |
| KR102673490B1 (ko) | 2016-11-28 | 2024-06-11 | 삼성전자주식회사 | 부분 읽기 동작을 수행하는 불휘발성 메모리 장치 및 그것의 읽기 방법 |
| CN113409858B (zh) * | 2019-03-26 | 2022-07-05 | 长江存储科技有限责任公司 | 3d nand存储器及其抑制顶层存储层编程串扰的方法 |
| US12133389B2 (en) * | 2020-04-20 | 2024-10-29 | SK Hynix Inc. | Semiconductor memory device including pass transistors with variable sizes |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4086662A (en) * | 1975-11-07 | 1978-04-25 | Hitachi, Ltd. | Memory system with read/write control lines |
| FR2528613B1 (fr) * | 1982-06-09 | 1991-09-20 | Hitachi Ltd | Memoire a semi-conducteurs |
| JPS6390096A (ja) * | 1986-10-01 | 1988-04-20 | Nec Corp | 半導体記憶装置 |
| US5406516A (en) * | 1992-01-17 | 1995-04-11 | Sharp Kabushiki Kaisha | Semiconductor memory device |
| US6188608B1 (en) * | 1999-04-23 | 2001-02-13 | Matsushita Electric Industrial Co., Ltd. | Nonvolatile semiconductor memory device |
| JP4058219B2 (ja) | 1999-09-17 | 2008-03-05 | 株式会社ルネサステクノロジ | 半導体集積回路 |
| JP4005895B2 (ja) * | 2002-09-30 | 2007-11-14 | 株式会社東芝 | 不揮発性半導体メモリ装置 |
| JP4398195B2 (ja) * | 2003-08-08 | 2010-01-13 | パナソニック株式会社 | 半導体記憶装置 |
| KR100506941B1 (ko) * | 2003-08-19 | 2005-08-05 | 삼성전자주식회사 | 더미 셀들을 갖는 플래쉬 메모리소자 및 그것의 소거방법들 |
| JP2005085903A (ja) * | 2003-09-05 | 2005-03-31 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| JP4398750B2 (ja) * | 2004-02-17 | 2010-01-13 | 株式会社東芝 | Nand型フラッシュメモリ |
-
2004
- 2004-08-23 JP JP2004241991A patent/JP2006059481A/ja active Pending
-
2005
- 2005-07-14 US US11/180,659 patent/US7301815B2/en not_active Expired - Fee Related
-
2007
- 2007-10-23 US US11/976,299 patent/US20080055983A1/en not_active Abandoned
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100900851B1 (ko) | 2006-05-31 | 2009-06-04 | 가부시끼가이샤 도시바 | 비휘발성 반도체 메모리 |
| US7697355B2 (en) | 2006-08-17 | 2010-04-13 | Fujitsu Microelectronics Limited | Semiconductor memory and system with matching characteristics of signal supplied to a dummy signal line and a real signal line |
| JP2009026369A (ja) * | 2007-07-18 | 2009-02-05 | Toshiba Corp | 半導体記憶装置 |
| JP2012195051A (ja) * | 2007-12-13 | 2012-10-11 | Toshiba Corp | 半導体記憶装置 |
| JP2009193631A (ja) * | 2008-02-14 | 2009-08-27 | Toshiba Corp | 不揮発性半導体記憶装置 |
| US8289774B2 (en) | 2008-04-18 | 2012-10-16 | Samsung Electronics Co., Ltd. | Flash memory device and operating method of flash memory device |
| JP2011524063A (ja) * | 2008-06-12 | 2011-08-25 | マイクロン テクノロジー, インク. | フラッシュメモリデバイスにデータを格納する方法 |
| US8595423B2 (en) | 2008-06-12 | 2013-11-26 | Micron Technology, Inc. | Method of storing data on a flash memory device |
| US9230658B2 (en) | 2008-06-12 | 2016-01-05 | Micron Technology, Inc. | Method of storing data on a flash memory device |
| JP2009301691A (ja) * | 2008-06-17 | 2009-12-24 | Renesas Technology Corp | 不揮発性半導体記憶装置 |
| JP2010250891A (ja) * | 2009-04-14 | 2010-11-04 | Toshiba Corp | 不揮発性半導体記憶装置 |
| US8885411B2 (en) | 2013-03-15 | 2014-11-11 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device |
| US10163513B2 (en) | 2016-02-26 | 2018-12-25 | Samsung Electronics Co., Ltd. | Program method of memory device and memory system using the same |
| US10409499B2 (en) | 2017-03-16 | 2019-09-10 | Toshiba Memory Corporation | NAND flash memory device and system including SLC and MLC write modes |
| JP2019161009A (ja) * | 2018-03-13 | 2019-09-19 | 東芝メモリ株式会社 | 記憶装置 |
| KR101927667B1 (ko) | 2018-03-15 | 2018-12-10 | 한국과학기술원 | 단일 사건 현상과 누적 이온화 현상에 강인한 내방사선 단위 모스펫 |
Also Published As
| Publication number | Publication date |
|---|---|
| US7301815B2 (en) | 2007-11-27 |
| US20060039230A1 (en) | 2006-02-23 |
| US20080055983A1 (en) | 2008-03-06 |
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