JP2005504013A5 - - Google Patents
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- Publication number
- JP2005504013A5 JP2005504013A5 JP2003501993A JP2003501993A JP2005504013A5 JP 2005504013 A5 JP2005504013 A5 JP 2005504013A5 JP 2003501993 A JP2003501993 A JP 2003501993A JP 2003501993 A JP2003501993 A JP 2003501993A JP 2005504013 A5 JP2005504013 A5 JP 2005504013A5
- Authority
- JP
- Japan
- Prior art keywords
- phenyl
- alkyl
- substituted
- unsubstituted
- sulfonyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- -1 camphorylsulfonyl Chemical group 0.000 claims 38
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 29
- 125000000217 alkyl group Chemical group 0.000 claims 26
- 125000003170 phenylsulfonyl group Chemical group C1(=CC=CC=C1)S(=O)(=O)* 0.000 claims 19
- 125000004390 alkyl sulfonyl group Chemical group 0.000 claims 17
- 229910052736 halogen Inorganic materials 0.000 claims 17
- 150000002367 halogens Chemical class 0.000 claims 17
- 150000001875 compounds Chemical class 0.000 claims 16
- 125000004642 (C1-C12) alkoxy group Chemical group 0.000 claims 15
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims 12
- 229910052739 hydrogen Inorganic materials 0.000 claims 12
- 239000001257 hydrogen Substances 0.000 claims 12
- 239000002253 acid Substances 0.000 claims 10
- 150000002431 hydrogen Chemical class 0.000 claims 10
- 125000001589 carboacyl group Chemical group 0.000 claims 9
- 125000002088 tosyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1C([H])([H])[H])S(*)(=O)=O 0.000 claims 8
- 125000004765 (C1-C4) haloalkyl group Chemical group 0.000 claims 7
- 125000005146 naphthylsulfonyl group Chemical group C1(=CC=CC2=CC=CC=C12)S(=O)(=O)* 0.000 claims 7
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 claims 7
- 125000003118 aryl group Chemical group 0.000 claims 6
- 229920002120 photoresistant polymer Polymers 0.000 claims 6
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 claims 5
- 125000005144 cycloalkylsulfonyl group Chemical group 0.000 claims 5
- 125000004441 haloalkylsulfonyl group Chemical group 0.000 claims 5
- 238000000034 method Methods 0.000 claims 5
- 125000001037 p-tolyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])([H])[H] 0.000 claims 4
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 claims 3
- 229910052717 sulfur Inorganic materials 0.000 claims 3
- JIZRGGUCOQKGQD-UHFFFAOYSA-N 2-nitrothiophene Chemical compound [O-][N+](=O)C1=CC=CS1 JIZRGGUCOQKGQD-UHFFFAOYSA-N 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 2
- 125000003545 alkoxy group Chemical group 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 2
- 150000004820 halides Chemical class 0.000 claims 2
- 239000012442 inert solvent Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 125000001624 naphthyl group Chemical group 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 2
- 125000006678 phenoxycarbonyl group Chemical group 0.000 claims 2
- 125000002030 1,2-phenylene group Chemical group [H]C1=C([H])C([*:1])=C([*:2])C([H])=C1[H] 0.000 claims 1
- 150000008065 acid anhydrides Chemical class 0.000 claims 1
- 239000000654 additive Substances 0.000 claims 1
- 150000008064 anhydrides Chemical class 0.000 claims 1
- 125000002490 anilino group Chemical group [H]N(*)C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004132 cross linking Methods 0.000 claims 1
- 125000000753 cycloalkyl group Chemical group 0.000 claims 1
- 125000006331 halo benzoyl group Chemical group 0.000 claims 1
- 125000001188 haloalkyl group Chemical group 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 125000004957 naphthylene group Chemical group 0.000 claims 1
- 150000002923 oximes Chemical class 0.000 claims 1
- 125000005561 phenanthryl group Chemical group 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP01810533 | 2001-06-01 | ||
| PCT/EP2002/005667 WO2002098870A1 (en) | 2001-06-01 | 2002-05-23 | Substituted oxime derivatives and the use thereof as latent acids |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005504013A JP2005504013A (ja) | 2005-02-10 |
| JP2005504013A5 true JP2005504013A5 (enExample) | 2005-12-22 |
| JP4408220B2 JP4408220B2 (ja) | 2010-02-03 |
Family
ID=8183942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003501993A Expired - Fee Related JP4408220B2 (ja) | 2001-06-01 | 2002-05-23 | 置換オキシム誘導体及びその潜在酸としての使用 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US7026094B2 (enExample) |
| EP (1) | EP1392675B1 (enExample) |
| JP (1) | JP4408220B2 (enExample) |
| KR (1) | KR100875612B1 (enExample) |
| CN (1) | CN100338056C (enExample) |
| AT (1) | ATE288907T1 (enExample) |
| DE (1) | DE60202950T2 (enExample) |
| DK (1) | DK1392675T3 (enExample) |
| WO (1) | WO2002098870A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2446722A1 (en) * | 2001-06-11 | 2002-12-19 | Ciba Specialty Chemicals Holding Inc. | Oxime ester photoinitiators having a combined structure |
| JP3849486B2 (ja) * | 2001-10-19 | 2006-11-22 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
| BR0307501A (pt) * | 2002-02-06 | 2004-12-07 | Ciba Sc Holding Ag | Derivados de sulfonato e o uso destes como ácidos latentes |
| WO2004074242A2 (en) * | 2003-02-19 | 2004-09-02 | Ciba Specialty Chemicals Holding Inc. | Halogenated oxime derivatives and the use thereof as latent acids |
| JP2004333865A (ja) * | 2003-05-07 | 2004-11-25 | Osaka Gas Co Ltd | 光酸発生剤及びそれを含む光重合性樹脂組成物 |
| WO2006046398A1 (ja) * | 2004-10-29 | 2006-05-04 | Nissan Chemical Industries, Ltd. | 光酸発生剤を含む染料含有レジスト組成物及びそれを用いるカラーフィルター |
| JP2006225476A (ja) * | 2005-02-16 | 2006-08-31 | Shin Etsu Chem Co Ltd | ポジ型レジスト材料及びパターン形成方法 |
| KR101115089B1 (ko) * | 2005-03-02 | 2012-02-29 | 주식회사 동진쎄미켐 | 유기 반사방지막 형성용 유기 중합체 및 이를 포함하는 유기 조성물 |
| US20070077452A1 (en) * | 2005-10-04 | 2007-04-05 | Jie Liu | Organic light emitting devices having latent activated layers and methods of fabricating the same |
| CN101341172B (zh) * | 2005-12-20 | 2013-01-16 | 西巴控股有限公司 | 肟酯光引发剂 |
| US20070176167A1 (en) * | 2006-01-27 | 2007-08-02 | General Electric Company | Method of making organic light emitting devices |
| JP4548617B2 (ja) * | 2006-06-09 | 2010-09-22 | 信越化学工業株式会社 | 化学増幅レジスト材料用光酸発生剤、及び該光酸発生剤を含有するレジスト材料、並びにこれを用いたパターン形成方法 |
| US7816069B2 (en) * | 2006-06-23 | 2010-10-19 | International Business Machines Corporation | Graded spin-on organic antireflective coating for photolithography |
| US8466096B2 (en) | 2007-04-26 | 2013-06-18 | Afton Chemical Corporation | 1,3,2-dioxaphosphorinane, 2-sulfide derivatives for use as anti-wear additives in lubricant compositions |
| GB2450975B (en) | 2007-07-12 | 2010-02-24 | Ciba Holding Inc | Yellow radiation curing inks |
| JP4637221B2 (ja) * | 2007-09-28 | 2011-02-23 | 富士フイルム株式会社 | ポジ型感光性樹脂組成物及びそれを用いた硬化膜形成方法 |
| WO2010112408A1 (en) | 2009-03-30 | 2010-10-07 | Basf Se | Uv-dose indicator films |
| KR20110129692A (ko) * | 2010-05-26 | 2011-12-02 | 삼성전자주식회사 | 포토레지스트 조성물 및 이를 이용한 포토레지스트 패턴의 형성 방법 |
| US10487050B2 (en) | 2014-08-29 | 2019-11-26 | Basf Se | Oxime sulfonate derivatives |
| KR102295614B1 (ko) * | 2014-09-29 | 2021-08-27 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 |
| CN110325912B (zh) * | 2017-02-23 | 2023-07-14 | 艾曲迪微系统股份有限公司 | 感光性树脂组合物、图案的制造方法、固化物、层间绝缘膜、覆盖涂层、保护膜和电子部件 |
| WO2020031240A1 (ja) | 2018-08-06 | 2020-02-13 | 日立化成デュポンマイクロシステムズ株式会社 | 感光性樹脂組成物、パターン硬化膜の製造方法、硬化膜、層間絶縁膜、カバーコート層、表面保護膜及び電子部品 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4540598A (en) * | 1983-08-17 | 1985-09-10 | Ciba-Geigy Corporation | Process for curing acid-curable finishes |
| DE3660255D1 (en) * | 1985-04-12 | 1988-07-07 | Ciba Geigy Ag | Oxime sulphonates containing reactive groups |
| GB8608528D0 (en) | 1986-04-08 | 1986-05-14 | Ciba Geigy Ag | Production of positive images |
| EP0571330B1 (de) * | 1992-05-22 | 1999-04-07 | Ciba SC Holding AG | Hochauflösender I-Linien Photoresist mit höherer Empfindlichkeit |
| JP3830183B2 (ja) * | 1995-09-29 | 2006-10-04 | 東京応化工業株式会社 | オキシムスルホネート化合物及びレジスト用酸発生剤 |
| MY117352A (en) | 1995-10-31 | 2004-06-30 | Ciba Sc Holding Ag | Oximesulfonic acid esters and the use thereof as latent sulfonic acids. |
| US6770420B2 (en) * | 1996-09-02 | 2004-08-03 | Ciba Specialty Chemicals Corporation | Alkylsulfonyloximes for high-resolution i-line photoresists of high sensitivity |
| TW550439B (en) | 1997-07-01 | 2003-09-01 | Ciba Sc Holding Ag | New oxime sulfonates as latent acids and compositions and photoresists comprising said oxime sulfonates |
| DE69904073T2 (de) * | 1998-10-29 | 2003-07-17 | Ciba Speciality Chemicals Holding Inc., Basel | Oximderivate und ihre verwendung als latente saüre |
| ATE330254T1 (de) * | 1999-03-03 | 2006-07-15 | Ciba Sc Holding Ag | Oximderivate und ihre verwendung als photoinitiatoren |
| TWI272451B (en) * | 2000-09-25 | 2007-02-01 | Ciba Sc Holding Ag | Chemically amplified photoresist composition, process for preparation of a photoresist, and use of said chemically amplified photoresist composition |
-
2002
- 2002-05-23 JP JP2003501993A patent/JP4408220B2/ja not_active Expired - Fee Related
- 2002-05-23 CN CNB028109317A patent/CN100338056C/zh not_active Expired - Fee Related
- 2002-05-23 AT AT02732733T patent/ATE288907T1/de not_active IP Right Cessation
- 2002-05-23 DK DK02732733T patent/DK1392675T3/da active
- 2002-05-23 US US10/478,963 patent/US7026094B2/en not_active Expired - Fee Related
- 2002-05-23 WO PCT/EP2002/005667 patent/WO2002098870A1/en not_active Ceased
- 2002-05-23 EP EP02732733A patent/EP1392675B1/en not_active Expired - Lifetime
- 2002-05-23 DE DE60202950T patent/DE60202950T2/de not_active Expired - Lifetime
- 2002-05-23 KR KR1020037015730A patent/KR100875612B1/ko not_active Expired - Fee Related
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