JP2005197376A - 成膜装置と成膜方法 - Google Patents
成膜装置と成膜方法 Download PDFInfo
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- JP2005197376A JP2005197376A JP2004000685A JP2004000685A JP2005197376A JP 2005197376 A JP2005197376 A JP 2005197376A JP 2004000685 A JP2004000685 A JP 2004000685A JP 2004000685 A JP2004000685 A JP 2004000685A JP 2005197376 A JP2005197376 A JP 2005197376A
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- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000010408 film Substances 0.000 claims abstract description 147
- 238000010926 purge Methods 0.000 claims abstract description 83
- 239000002994 raw material Substances 0.000 claims abstract description 66
- 239000010409 thin film Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 230000008021 deposition Effects 0.000 claims description 16
- 239000007789 gas Substances 0.000 description 401
- 239000002245 particle Substances 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 17
- 238000000151 deposition Methods 0.000 description 16
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 15
- 239000012159 carrier gas Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- ZYLGGWPMIDHSEZ-UHFFFAOYSA-N dimethylazanide;hafnium(4+) Chemical compound [Hf+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C ZYLGGWPMIDHSEZ-UHFFFAOYSA-N 0.000 description 7
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000013067 intermediate product Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45531—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations specially adapted for making ternary or higher compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
Abstract
【解決手段】成膜室8と、前記成膜室8へ原料ガスを供給する原料ガス供給配管2と、前記成膜室8へ反応性ガスを供給する反応性ガス供給配管1と、前記原料ガス及び前記反応性ガスをパージするパージガスを供給するパージガス供給配管3とを備え、
前記原料ガスの供給又は反応性ガスの供給とパージとを交互に行うことにより、前記成膜室8内で基板82上に薄膜を成膜する成膜装置であって、
前記原料ガス供給配管2の一部又は全部に設定され、前記原料ガスの非供給時に前記原料ガスを封入し得る、一定容積を有した中間配管22、及び/又は前記反応性ガス供給配管1の一部又は全部に設定され、前記反応性ガスの非供給時に前記反応性ガスを封入し得る、一定容積を有した中間配管12を備えていることを特徴とする成膜装置。
【選択図】図1
Description
12…中間配管(反応性ガス中間配管)
1b1…反応性ガス中間配管入口バルブ
1b2…反応性ガス中間配管出口バルブ
2…原料ガス供給配管
22…中間配管(原料ガス中間配管)
2b1…原料ガス中間配管入口バルブ
2b2…原料ガス中間配管出口バルブ
3…パージガス供給配管
8…成膜室
82…基板
Claims (9)
- 成膜室と、
前記成膜室へ原料ガスを供給する原料ガス供給配管と、
前記成膜室へ反応性ガスを供給する反応性ガス供給配管と、
前記原料ガス及び前記反応性ガスをパージするパージガスを供給するパージガス供給配管とを備え、
前記原料ガスの供給又は反応性ガスの供給とパージとを交互に行うことにより、前記成膜室内で基板上に薄膜を成膜する成膜装置であって、
前記原料ガス供給配管の一部又は全部に設定され、前記原料ガスの非供給時に前記原料ガスを封入し得る、一定容積を有した中間配管、及び/又は
前記反応性ガス供給配管の一部又は全部に設定され、前記反応性ガスの非供給時に前記反応性ガスを封入し得る、一定容積を有した中間配管を備えていることを特徴とする成膜装置。 - 前記中間配管の入口及び出口に開閉バルブを設け、前記中間配管を構成する管体の断面積及び前記各バルブ間の距離により前記中間配管の容積を規定する請求項1記載の成膜装置。
- 前記開閉バルブが三方バルブである請求項2記載の成膜装置。
- 前記パージガス供給配管を、前記中間配管が設定されている前記原料ガス供給配管及び/又は反応性ガス供給配管に接続し、前記中間配管に封入された原料ガス及び/又は反応性ガスをパージガスにより押し出すことで前記成膜室へ供給するように構成した請求項1乃至3のいずれかに記載の成膜装置。
- 前記原料ガス及び/又は反応性ガスの前記成膜室への供給を0.1〜2秒で行う請求項1乃至4のいずれかに記載の成膜装置。
- 前記原料ガス供給配管及び前記反応性ガス供給配管にガスの濃度を調整するための濃度調整手段を接続し、その各濃度調整手段が各々のガスの濃度を成膜する基板面積に対し0.15×10−6mol/cm2以上で供給するように調整した請求項1乃至5のいずれかに記載の成膜装置。
- 前記原料ガス供給配管及び反応性ガス供給配管を前記成膜室に対して各々独立に接続した請求項1乃至6のいずれかに記載の成膜装置。
- 前記成膜室内を2秒以下で、原料ガス及び/又は反応性ガスの濃度が1/1000以下となるようにパージするようにした請求項1乃至7記載のいずれかに記載の成膜装置。
- 成膜室と、
前記成膜室へ原料ガスを供給する原料ガス供給配管と、
前記成膜室へ反応性ガスを供給する反応性ガス供給配管と、
前記原料ガス及び前記反応性ガスをパージするパージガスを供給するパージガス供給配管とを利用し、
前記原料ガスの供給又は反応性ガスの供給とパージとを交互に行うことにより、前記成膜室内で基板上に薄膜を成膜する成膜方法であって、
前記原料ガス供給配管の一部又は全部に、一定容積を有する中間配管を設定し、前記原料ガスの非供給時に前記中間配管へ前記原料ガスを封入し、及び/又は、
前記反応性ガス供給配管の一部又は全部に、一定容積を有する中間配管を設定し、前記反応性ガスの非供給時に前記中間配管へ前記反応性ガスを封入することを特徴とする成膜方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004000685A JP4399517B2 (ja) | 2004-01-05 | 2004-01-05 | 成膜装置と成膜方法 |
EP04807596A EP1705699A4 (en) | 2004-01-05 | 2004-12-22 | FILM GENERATING DEVICE AND FILM GENERATING METHOD |
KR1020067015465A KR100758081B1 (ko) | 2004-01-05 | 2004-12-22 | 성막 장치와 성막 방법 |
US10/585,267 US20080026148A1 (en) | 2004-01-05 | 2004-12-22 | Film Forming System And Method For Forming Film |
PCT/JP2004/019239 WO2005067015A1 (ja) | 2004-01-05 | 2004-12-22 | 成膜装置と成膜方法 |
TW094100295A TWI286162B (en) | 2004-01-05 | 2005-01-05 | Film forming device and film forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004000685A JP4399517B2 (ja) | 2004-01-05 | 2004-01-05 | 成膜装置と成膜方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005197376A true JP2005197376A (ja) | 2005-07-21 |
JP4399517B2 JP4399517B2 (ja) | 2010-01-20 |
Family
ID=34746957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004000685A Expired - Lifetime JP4399517B2 (ja) | 2004-01-05 | 2004-01-05 | 成膜装置と成膜方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20080026148A1 (ja) |
EP (1) | EP1705699A4 (ja) |
JP (1) | JP4399517B2 (ja) |
KR (1) | KR100758081B1 (ja) |
TW (1) | TWI286162B (ja) |
WO (1) | WO2005067015A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007152211A (ja) * | 2005-12-02 | 2007-06-21 | Asahi Organic Chem Ind Co Ltd | フラッシング装置 |
JP2010514927A (ja) * | 2006-12-26 | 2010-05-06 | コーウィン ディーエスティー カンパニー リミテッド | 薄膜蒸着装置の原料ガス供給装置及び残留ガス処理処置及びその方法 |
JP2014120614A (ja) * | 2012-12-17 | 2014-06-30 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置の製造方法および成膜装置 |
JP2016528739A (ja) * | 2013-08-19 | 2016-09-15 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 不純物が積層したエピタキシーのための装置 |
JP2017505383A (ja) * | 2014-01-23 | 2017-02-16 | ウルトラテック インク | 蒸気供給システム |
Families Citing this family (10)
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KR100555575B1 (ko) * | 2004-09-22 | 2006-03-03 | 삼성전자주식회사 | 원자층 증착 장치 및 방법 |
US7422983B2 (en) * | 2005-02-24 | 2008-09-09 | International Business Machines Corporation | Ta-TaN selective removal process for integrated device fabrication |
JP4986845B2 (ja) * | 2005-03-24 | 2012-07-25 | 株式会社アルバック | 真空成膜システム |
US8900695B2 (en) * | 2007-02-23 | 2014-12-02 | Applied Microstructures, Inc. | Durable conformal wear-resistant carbon-doped metal oxide-comprising coating |
JP5231117B2 (ja) * | 2008-07-24 | 2013-07-10 | 株式会社ニューフレアテクノロジー | 成膜装置および成膜方法 |
JP2010278319A (ja) * | 2009-05-29 | 2010-12-09 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
JP6109657B2 (ja) * | 2013-07-08 | 2017-04-05 | 株式会社ニューフレアテクノロジー | 気相成長装置および気相成長方法 |
JP5859586B2 (ja) * | 2013-12-27 | 2016-02-10 | 株式会社日立国際電気 | 基板処理システム、半導体装置の製造方法および記録媒体 |
JP2016134569A (ja) * | 2015-01-21 | 2016-07-25 | 株式会社東芝 | 半導体製造装置 |
CN113604794A (zh) * | 2021-05-07 | 2021-11-05 | 联芯集成电路制造(厦门)有限公司 | 改良的半导体沉积方法 |
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US5769950A (en) * | 1985-07-23 | 1998-06-23 | Canon Kabushiki Kaisha | Device for forming deposited film |
JPH02235327A (ja) * | 1989-03-08 | 1990-09-18 | Fujitsu Ltd | 半導体成長装置および半導体成長方法 |
JPH0547665A (ja) * | 1991-08-12 | 1993-02-26 | Fujitsu Ltd | 気相成長方法 |
KR100279208B1 (ko) * | 1998-11-23 | 2001-02-01 | 이경수 | 반도체 기판의 박막 제거용 식각장치_ |
TW515032B (en) * | 1999-10-06 | 2002-12-21 | Samsung Electronics Co Ltd | Method of forming thin film using atomic layer deposition method |
US7011710B2 (en) * | 2000-04-10 | 2006-03-14 | Applied Materials Inc. | Concentration profile on demand gas delivery system (individual divert delivery system) |
US6645302B2 (en) * | 2000-04-26 | 2003-11-11 | Showa Denko Kabushiki Kaisha | Vapor phase deposition system |
WO2002015243A1 (fr) * | 2000-08-11 | 2002-02-21 | Tokyo Electron Limited | Dispositif et traitement de substrat |
KR20020045294A (ko) * | 2000-12-08 | 2002-06-19 | 윤종용 | 반도체 제조용 화학기상증착 설비 |
KR100881681B1 (ko) * | 2001-01-18 | 2009-02-06 | 가부시키가이샤 와타나베 쇼코 | 기화기 및 이를 이용한 각종 장치와 기화 방법 |
US6852167B2 (en) * | 2001-03-01 | 2005-02-08 | Micron Technology, Inc. | Methods, systems, and apparatus for uniform chemical-vapor depositions |
KR100377096B1 (ko) * | 2001-05-08 | 2003-03-26 | (주)넥소 | 개선된 샤워헤드를 구비한 반도체 제조장치 |
KR100434493B1 (ko) * | 2001-10-05 | 2004-06-05 | 삼성전자주식회사 | 원자층 증착 장치 및 그 구동 방법 |
KR100439948B1 (ko) * | 2002-04-19 | 2004-07-12 | 주식회사 아이피에스 | 리모트 플라즈마 ald 장치 및 이를 이용한 ald 박막증착방법 |
JP2003338497A (ja) * | 2002-05-21 | 2003-11-28 | Tokyo Electron Ltd | 基板処理装置および基板処理方法 |
-
2004
- 2004-01-05 JP JP2004000685A patent/JP4399517B2/ja not_active Expired - Lifetime
- 2004-12-22 WO PCT/JP2004/019239 patent/WO2005067015A1/ja active Application Filing
- 2004-12-22 EP EP04807596A patent/EP1705699A4/en not_active Withdrawn
- 2004-12-22 US US10/585,267 patent/US20080026148A1/en not_active Abandoned
- 2004-12-22 KR KR1020067015465A patent/KR100758081B1/ko not_active IP Right Cessation
-
2005
- 2005-01-05 TW TW094100295A patent/TWI286162B/zh not_active IP Right Cessation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007152211A (ja) * | 2005-12-02 | 2007-06-21 | Asahi Organic Chem Ind Co Ltd | フラッシング装置 |
JP2010514927A (ja) * | 2006-12-26 | 2010-05-06 | コーウィン ディーエスティー カンパニー リミテッド | 薄膜蒸着装置の原料ガス供給装置及び残留ガス処理処置及びその方法 |
JP2014120614A (ja) * | 2012-12-17 | 2014-06-30 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置の製造方法および成膜装置 |
JP2016528739A (ja) * | 2013-08-19 | 2016-09-15 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 不純物が積層したエピタキシーのための装置 |
JP2017505383A (ja) * | 2014-01-23 | 2017-02-16 | ウルトラテック インク | 蒸気供給システム |
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JP4399517B2 (ja) | 2010-01-20 |
EP1705699A1 (en) | 2006-09-27 |
TW200523390A (en) | 2005-07-16 |
KR100758081B1 (ko) | 2007-09-11 |
EP1705699A4 (en) | 2008-08-20 |
US20080026148A1 (en) | 2008-01-31 |
KR20060129356A (ko) | 2006-12-15 |
WO2005067015A1 (ja) | 2005-07-21 |
TWI286162B (en) | 2007-09-01 |
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