JP2009544842A - 原子層堆積用の前駆体溶液を気化及び供給するための方法及び装置 - Google Patents
原子層堆積用の前駆体溶液を気化及び供給するための方法及び装置 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
【選択図】図1
Description
本発明は原子層堆積(atomic layer deposition:ALD)プロセスを使用して薄膜を製造するための新規且つ有用な方法及び装置に関する。幅広い種類の前駆体から高品質の薄膜を製造するために溶液ALD前駆体の気化及び供給のための方法及び装置について記載する。
シリコンウエハプロセスの中で、原子層堆積は、次世代導体バリヤ層、高-kゲート誘電層、高-k静電容量層、キャッピング層及び金属ゲート電極を実現するための技術である。ALDは、フラットパネルディスプレイ、化合物半導体、磁気及び光学記録、太陽電池、ナノテクノロジー及びナノ材料などの他のエレクトロニクス産業にも利用されてきた。ALDは、循環堆積プロセスで1回あたり単原子層(monolayer)1層分の、金属、酸化物、窒化物及びその他のからなる超薄高共形層(ultra thin and highly conformal layer)を形成するために使用される。アルミニウム、チタン、ジルコニウム、ハフニウム及びタンタルなどの多くの典型金属元素及び遷移金属元素の酸化物及び窒化物は、酸化反応または窒化反応を利用するALDプロセスによって製造されてきた。Ru、Cu、Ta及びその他などの純粋な金属層も、還元反応または燃焼反応によってALDプロセスを利用して堆積することができる。
本発明は、溶液ALD前駆体を気化及び供給するための改良された方法及び装置を提供する。本発明は特に、低揮発性金属、金属酸化物、金属窒化物及び他の薄層前駆体を処理するために有用である。本発明は、真のALD蒸気パルスを発生させるために完全気化チャンバ及び室温弁システムを使用する。本発明では、溶液前駆体の利用効率は、気相パルススキームと液体注入(liquid dosing)を組み合わせることによって向上する。本発明によれば、幅広い種類の前駆体から高品質ALD薄膜を堆積させることができる。
本発明は、正確なALD用量(dose)の溶液前駆体を供給するために調節される又はパルス供給される液相及び気相の組み合わせを使用する方法及び装置に関する。本発明は、従来公知であった方法及び装置より有利な点を数多く有する。
20 ポンプ
30 気化器
35 チェッカー弁またはインジェクタノズル
40 堆積チャンバ
50 ガス供給源容器
55 液体反応物質容器
60 レギュレータ
70 システムポンプ
80 質量流量コントローラ
90、91、92、93、94、95、96、97、98 弁
Claims (7)
- 原子層堆積装置であって、
前駆体溶液供給源容器、
反応物質供給源、
第一パージガス供給源、
第二パージガス供給源、
前記前駆体溶液供給源容器と前記第一パージガス供給源の両方と流体連通している気化器、
前記反応物質供給源、前記第一パージガス供給源、前記第二パージガス供給源及び前記気化器のそれぞれと流体連通している堆積チャンバ、及び
前記反応物質供給源、前記気化器及び前記堆積チャンバのそれぞれと流体連通しているシステムポンプ
を含む、装置。 - 前記前駆体溶液供給源容器と前記気化器の間で流体連通するポンプ、
前記反応物質供給源に付随するレギュレータ、
前記第一パージガス供給源に付随する第一の質量流量コントローラ、及び
前記第二パージガス供給源に付随する第二の質量流量コントローラ
をさらに含む、請求項1に記載の装置。 - 前記気化器にチェッカー弁またはインジェクタノズルをさらに含む、請求項1に記載の装置。
- 前記反応物質供給源が気体容器である、請求項1に記載の装置。
- 前記反応物質供給源が液体容器である、請求項1に記載の装置。
- 薄膜の堆積方法であって、
請求項1に記載の装置を準備する工程、
前記第一パージガス供給源と前記第二パージガス供給源から堆積チャンバを通るようパージガスを流すことによって、堆積チャンバをパージする工程、
前記反応物質供給源から堆積チャンバへ反応物質を供給する工程、
前記第一パージガス供給源と前記第二パージガス供給源から堆積チャンバを通るようにパージガスを流すことによって、堆積チャンバをパージする工程、
前記前駆体溶液供給源容器から気化器へ前駆体溶液を供給する工程、
前記前駆体溶液を気化させる工程、
気化した前駆体溶液を前記堆積チャンバへ供給する工程、
前記第一パージガス供給源と前記第二パージガス供給源から堆積チャンバを通るようにパージガスを流すことよって、堆積チャンバをパージする工程、及び
所望の厚さの薄膜が得られるまで上記工程を繰り返す工程、
を含む、前記方法。 - 請求項6に記載の方法により堆積させた薄膜。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US83255806P | 2006-07-21 | 2006-07-21 | |
PCT/US2007/015596 WO2008013665A2 (en) | 2006-07-21 | 2007-07-06 | Methods and apparatus for the vaporization and delivery of solution precursors for atomic layer deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009544842A true JP2009544842A (ja) | 2009-12-17 |
Family
ID=38981960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009520752A Pending JP2009544842A (ja) | 2006-07-21 | 2007-07-06 | 原子層堆積用の前駆体溶液を気化及び供給するための方法及び装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20100151261A1 (ja) |
EP (1) | EP2047009B1 (ja) |
JP (1) | JP2009544842A (ja) |
KR (1) | KR20090038461A (ja) |
TW (1) | TWI427182B (ja) |
WO (1) | WO2008013665A2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160137400A (ko) * | 2015-05-22 | 2016-11-30 | 램 리써치 코포레이션 | 온 디맨드 충진 앰플 재충진 |
US11959175B2 (en) | 2014-08-22 | 2024-04-16 | Lam Research Corporation | Fill on demand ampoule refill |
US11970772B2 (en) | 2014-08-22 | 2024-04-30 | Lam Research Corporation | Dynamic precursor dosing for atomic layer deposition |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011011207A2 (en) * | 2009-07-24 | 2011-01-27 | Boston Scientific Scimed, Inc. | Medical devices having an inorganic coating layer formed by atomic layer deposition |
US8628618B2 (en) | 2009-09-29 | 2014-01-14 | Novellus Systems Inc. | Precursor vapor generation and delivery system with filters and filter monitoring system |
US20110143035A1 (en) * | 2009-12-16 | 2011-06-16 | Byoung Ha Cho | Thin Film Deposition System and Method for Depositing Thin Film |
US20150211126A1 (en) * | 2012-09-07 | 2015-07-30 | Ce Ma | Direct liquid injection of solution based precursors for atomic layer deposition |
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JP2004288684A (ja) * | 2003-03-19 | 2004-10-14 | Matsushita Electric Ind Co Ltd | 金属酸化膜の製造方法および容量素子の製造方法 |
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2007
- 2007-07-06 KR KR1020097003373A patent/KR20090038461A/ko not_active Application Discontinuation
- 2007-07-06 US US12/374,066 patent/US20100151261A1/en not_active Abandoned
- 2007-07-06 EP EP07796728.9A patent/EP2047009B1/en not_active Not-in-force
- 2007-07-06 JP JP2009520752A patent/JP2009544842A/ja active Pending
- 2007-07-06 WO PCT/US2007/015596 patent/WO2008013665A2/en active Application Filing
- 2007-07-20 TW TW96126673A patent/TWI427182B/zh not_active IP Right Cessation
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JP2005068074A (ja) * | 2003-08-25 | 2005-03-17 | Asahi Denka Kogyo Kk | 希土類金属錯体、薄膜形成用原料及び薄膜の製造方法 |
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EP2047009A4 (en) | 2010-05-19 |
US20100151261A1 (en) | 2010-06-17 |
EP2047009A2 (en) | 2009-04-15 |
WO2008013665A3 (en) | 2008-03-20 |
TWI427182B (zh) | 2014-02-21 |
KR20090038461A (ko) | 2009-04-20 |
WO2008013665A2 (en) | 2008-01-31 |
EP2047009B1 (en) | 2016-04-27 |
TW200815622A (en) | 2008-04-01 |
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