JP2005196953A - Cd及びdvdにパターンを作成するためのスタンパを製造する方法及び装置 - Google Patents

Cd及びdvdにパターンを作成するためのスタンパを製造する方法及び装置 Download PDF

Info

Publication number
JP2005196953A
JP2005196953A JP2004373021A JP2004373021A JP2005196953A JP 2005196953 A JP2005196953 A JP 2005196953A JP 2004373021 A JP2004373021 A JP 2004373021A JP 2004373021 A JP2004373021 A JP 2004373021A JP 2005196953 A JP2005196953 A JP 2005196953A
Authority
JP
Japan
Prior art keywords
layer
resist
forming
substrate
stamper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004373021A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005196953A5 (cg-RX-API-DMAC7.html
Inventor
Christopher H Bajorek
エイチ バジョレック クリストファー
Anthony D Calcaterra
ディー カルカテラ アンソニー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WD Media LLC
Original Assignee
Komag Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komag Inc filed Critical Komag Inc
Publication of JP2005196953A publication Critical patent/JP2005196953A/ja
Publication of JP2005196953A5 publication Critical patent/JP2005196953A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263Preparing and using a stamper, e.g. pressing or injection molding substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP2004373021A 2004-01-08 2004-12-24 Cd及びdvdにパターンを作成するためのスタンパを製造する方法及び装置 Pending JP2005196953A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US53538004P 2004-01-08 2004-01-08
US10/837,859 US20050151283A1 (en) 2004-01-08 2004-05-03 Method and apparatus for making a stamper for patterning CDs and DVDs

Publications (2)

Publication Number Publication Date
JP2005196953A true JP2005196953A (ja) 2005-07-21
JP2005196953A5 JP2005196953A5 (cg-RX-API-DMAC7.html) 2008-01-24

Family

ID=34704402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004373021A Pending JP2005196953A (ja) 2004-01-08 2004-12-24 Cd及びdvdにパターンを作成するためのスタンパを製造する方法及び装置

Country Status (4)

Country Link
US (2) US20050151283A1 (cg-RX-API-DMAC7.html)
EP (1) EP1564735A3 (cg-RX-API-DMAC7.html)
JP (1) JP2005196953A (cg-RX-API-DMAC7.html)
MY (1) MY153240A (cg-RX-API-DMAC7.html)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1303793B1 (en) 2000-07-17 2015-01-28 Board Of Regents, The University Of Texas System Method and system of automatic fluid dispensing for imprint lithography processes
US6908861B2 (en) * 2002-07-11 2005-06-21 Molecular Imprints, Inc. Method for imprint lithography using an electric field
US20050151283A1 (en) * 2004-01-08 2005-07-14 Bajorek Christopher H. Method and apparatus for making a stamper for patterning CDs and DVDs
KR100811768B1 (ko) * 2007-04-23 2008-03-07 삼성전기주식회사 인쇄회로기판의 제조방법
JP5117895B2 (ja) 2008-03-17 2013-01-16 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気記録媒体及びその製造方法
JP2009238299A (ja) * 2008-03-26 2009-10-15 Hoya Corp 垂直磁気記録媒体および垂直磁気記録媒体の製造方法
JP5453666B2 (ja) 2008-03-30 2014-03-26 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスク及びその製造方法
JP2011034603A (ja) * 2008-03-31 2011-02-17 Hoya Corp 垂直磁気記録媒体
US9177586B2 (en) 2008-09-30 2015-11-03 WD Media (Singapore), LLC Magnetic disk and manufacturing method thereof
WO2010064724A1 (ja) 2008-12-05 2010-06-10 Hoya株式会社 磁気ディスク及びその製造方法
US9558778B2 (en) 2009-03-28 2017-01-31 Wd Media (Singapore) Pte. Ltd. Lubricant compound for magnetic disk and magnetic disk
JP2010257567A (ja) 2009-03-30 2010-11-11 Wd Media Singapore Pte Ltd 垂直磁気記録媒体およびその製造方法
US20100300884A1 (en) 2009-05-26 2010-12-02 Wd Media, Inc. Electro-deposited passivation coatings for patterned media
US8496466B1 (en) 2009-11-06 2013-07-30 WD Media, LLC Press system with interleaved embossing foil holders for nano-imprinting of recording media
US9330685B1 (en) 2009-11-06 2016-05-03 WD Media, LLC Press system for nano-imprinting of recording media with a two step pressing method
JP5643516B2 (ja) 2010-01-08 2014-12-17 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気記録媒体
JP5574414B2 (ja) 2010-03-29 2014-08-20 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスクの評価方法及び磁気ディスクの製造方法
JP5645476B2 (ja) 2010-05-21 2014-12-24 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP5634749B2 (ja) 2010-05-21 2014-12-03 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP2011248967A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスクの製造方法
JP2011248968A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2011248969A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2012009086A (ja) 2010-06-22 2012-01-12 Wd Media (Singapore) Pte. Ltd 垂直磁気記録媒体及びその製造方法
US8889275B1 (en) 2010-08-20 2014-11-18 WD Media, LLC Single layer small grain size FePT:C film for heat assisted magnetic recording media
US8743666B1 (en) 2011-03-08 2014-06-03 Western Digital Technologies, Inc. Energy assisted magnetic recording medium capable of suppressing high DC readback noise
US8711499B1 (en) 2011-03-10 2014-04-29 WD Media, LLC Methods for measuring media performance associated with adjacent track interference
US8491800B1 (en) 2011-03-25 2013-07-23 WD Media, LLC Manufacturing of hard masks for patterning magnetic media
US9028985B2 (en) 2011-03-31 2015-05-12 WD Media, LLC Recording media with multiple exchange coupled magnetic layers
US20130143002A1 (en) * 2011-12-05 2013-06-06 Seagate Technology Llc Method and system for optical callibration discs
US8565050B1 (en) 2011-12-20 2013-10-22 WD Media, LLC Heat assisted magnetic recording media having moment keeper layer
US9029308B1 (en) 2012-03-28 2015-05-12 WD Media, LLC Low foam media cleaning detergent
US9269480B1 (en) 2012-03-30 2016-02-23 WD Media, LLC Systems and methods for forming magnetic recording media with improved grain columnar growth for energy assisted magnetic recording
US8941950B2 (en) 2012-05-23 2015-01-27 WD Media, LLC Underlayers for heat assisted magnetic recording (HAMR) media
US20130337176A1 (en) * 2012-06-19 2013-12-19 Seagate Technology Llc Nano-scale void reduction
US8993134B2 (en) 2012-06-29 2015-03-31 Western Digital Technologies, Inc. Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates
US9034492B1 (en) 2013-01-11 2015-05-19 WD Media, LLC Systems and methods for controlling damping of magnetic media for heat assisted magnetic recording
US10115428B1 (en) 2013-02-15 2018-10-30 Wd Media, Inc. HAMR media structure having an anisotropic thermal barrier layer
US9153268B1 (en) 2013-02-19 2015-10-06 WD Media, LLC Lubricants comprising fluorinated graphene nanoribbons for magnetic recording media structure
US9183867B1 (en) 2013-02-21 2015-11-10 WD Media, LLC Systems and methods for forming implanted capping layers in magnetic media for magnetic recording
US9196283B1 (en) 2013-03-13 2015-11-24 Western Digital (Fremont), Llc Method for providing a magnetic recording transducer using a chemical buffer
US9190094B2 (en) 2013-04-04 2015-11-17 Western Digital (Fremont) Perpendicular recording media with grain isolation initiation layer and exchange breaking layer for signal-to-noise ratio enhancement
US9093122B1 (en) 2013-04-05 2015-07-28 WD Media, LLC Systems and methods for improving accuracy of test measurements involving aggressor tracks written to disks of hard disk drives
US8947987B1 (en) 2013-05-03 2015-02-03 WD Media, LLC Systems and methods for providing capping layers for heat assisted magnetic recording media
US8867322B1 (en) 2013-05-07 2014-10-21 WD Media, LLC Systems and methods for providing thermal barrier bilayers for heat assisted magnetic recording media
US9296082B1 (en) 2013-06-11 2016-03-29 WD Media, LLC Disk buffing apparatus with abrasive tape loading pad having a vibration absorbing layer
US9406330B1 (en) 2013-06-19 2016-08-02 WD Media, LLC Method for HDD disk defect source detection
US9607646B2 (en) 2013-07-30 2017-03-28 WD Media, LLC Hard disk double lubrication layer
US9389135B2 (en) 2013-09-26 2016-07-12 WD Media, LLC Systems and methods for calibrating a load cell of a disk burnishing machine
US9177585B1 (en) 2013-10-23 2015-11-03 WD Media, LLC Magnetic media capable of improving magnetic properties and thermal management for heat-assisted magnetic recording
US9581510B1 (en) 2013-12-16 2017-02-28 Western Digital Technologies, Inc. Sputter chamber pressure gauge with vibration absorber
US9382496B1 (en) 2013-12-19 2016-07-05 Western Digital Technologies, Inc. Lubricants with high thermal stability for heat-assisted magnetic recording
US9824711B1 (en) 2014-02-14 2017-11-21 WD Media, LLC Soft underlayer for heat assisted magnetic recording media
US9447368B1 (en) 2014-02-18 2016-09-20 WD Media, LLC Detergent composition with low foam and high nickel solubility
US9431045B1 (en) 2014-04-25 2016-08-30 WD Media, LLC Magnetic seed layer used with an unbalanced soft underlayer
US9042053B1 (en) 2014-06-24 2015-05-26 WD Media, LLC Thermally stabilized perpendicular magnetic recording medium
US9159350B1 (en) 2014-07-02 2015-10-13 WD Media, LLC High damping cap layer for magnetic recording media
US10054363B2 (en) 2014-08-15 2018-08-21 WD Media, LLC Method and apparatus for cryogenic dynamic cooling
US9082447B1 (en) 2014-09-22 2015-07-14 WD Media, LLC Determining storage media substrate material type
US9227324B1 (en) 2014-09-25 2016-01-05 WD Media, LLC Mandrel for substrate transport system with notch
US9685184B1 (en) 2014-09-25 2017-06-20 WD Media, LLC NiFeX-based seed layer for magnetic recording media
US8995078B1 (en) 2014-09-25 2015-03-31 WD Media, LLC Method of testing a head for contamination
US9449633B1 (en) 2014-11-06 2016-09-20 WD Media, LLC Smooth structures for heat-assisted magnetic recording media
US9818442B2 (en) 2014-12-01 2017-11-14 WD Media, LLC Magnetic media having improved magnetic grain size distribution and intergranular segregation
US9401300B1 (en) 2014-12-18 2016-07-26 WD Media, LLC Media substrate gripper including a plurality of snap-fit fingers
US9218850B1 (en) 2014-12-23 2015-12-22 WD Media, LLC Exchange break layer for heat-assisted magnetic recording media
US9257134B1 (en) 2014-12-24 2016-02-09 Western Digital Technologies, Inc. Allowing fast data zone switches on data storage devices
US9990940B1 (en) 2014-12-30 2018-06-05 WD Media, LLC Seed structure for perpendicular magnetic recording media
US9280998B1 (en) 2015-03-30 2016-03-08 WD Media, LLC Acidic post-sputter wash for magnetic recording media
US9275669B1 (en) 2015-03-31 2016-03-01 WD Media, LLC TbFeCo in PMR media for SNR improvement
US9822441B2 (en) 2015-03-31 2017-11-21 WD Media, LLC Iridium underlayer for heat assisted magnetic recording media
US11074934B1 (en) 2015-09-25 2021-07-27 Western Digital Technologies, Inc. Heat assisted magnetic recording (HAMR) media with Curie temperature reduction layer
US10236026B1 (en) 2015-11-06 2019-03-19 WD Media, LLC Thermal barrier layers and seed layers for control of thermal and structural properties of HAMR media
US9406329B1 (en) 2015-11-30 2016-08-02 WD Media, LLC HAMR media structure with intermediate layer underlying a magnetic recording layer having multiple sublayers
US10121506B1 (en) 2015-12-29 2018-11-06 WD Media, LLC Magnetic-recording medium including a carbon overcoat implanted with nitrogen and hydrogen

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4164754A (en) * 1974-07-16 1979-08-14 Thomson-Brandt Method of manufacturing a die designed to duplicate a video frequency signal recording
GB1574910A (en) * 1976-04-07 1980-09-10 Rca Corp Fabrication of diffractive subtractive filter embossing master
US4520647A (en) * 1983-08-31 1985-06-04 International Business Machines Corporation Surface finishing process
JPS6079351A (ja) * 1983-10-07 1985-05-07 Ricoh Co Ltd スタンパの作製法
JPH0243380A (ja) * 1988-08-02 1990-02-13 Toshiba Corp 光ディスク基板成形用金型及びその製造方法
US5368789A (en) * 1990-09-28 1994-11-29 Canon Kabushiki Kaisha Method for forming substrate sheet for optical recording medium
US5281371A (en) * 1990-11-16 1994-01-25 Canon Kabushiki Kaisha Method and apparatus for forming substrate sheet for optical recording medium
NL9400225A (nl) * 1994-02-14 1995-09-01 Od & Me Bv Werkwijze voor het zonder tussenkomst van een master vervaardigen van een stamper voor het voortbrengen van optische schijven.
CN1129489A (zh) * 1994-06-08 1996-08-21 菲利浦电子有限公司 记录主盘及其衍生的光可读数据载体
US5783371A (en) * 1994-07-29 1998-07-21 Trustees Of Boston University Process for manufacturing optical data storage disk stamper
JP3635588B2 (ja) * 1995-09-19 2005-04-06 パイオニア株式会社 光ディスクの製造方法及び多層光ディスク
JP3436843B2 (ja) * 1996-04-25 2003-08-18 東京応化工業株式会社 リソグラフィー用下地材及びそれを用いたリソグラフィー用レジスト材料
NL1007216C2 (nl) * 1997-10-07 1999-04-08 Od & Me Bv Werkwijze voor het vervaardigen van een stamper voor het voortbrengen van optische schijven, aldus verkregen stamper en optische schijf verkregen onder toepassing van een dergelijke stamper.
US6022604A (en) * 1998-01-16 2000-02-08 Odme Optical disk mastering system
US6190838B1 (en) * 1998-04-06 2001-02-20 Imation Corp. Process for making multiple data storage disk stampers from one master
JPH11296918A (ja) * 1998-04-08 1999-10-29 Ricoh Co Ltd 光情報記録媒体用スタンパの製造方法
NL1009106C2 (nl) * 1998-05-08 1999-11-09 Od & Me Bv Werkwijze voor het vervaardigen van een stamper, stamper verkregen volgens een dergelijke werkwijze alsmede optische schijf verkregen onder toepassing van een dergelijke stamper.
US6391418B1 (en) * 1998-12-24 2002-05-21 Mitsubishi Engineering-Plastics Corp. Substrate for information recording media
US6329118B1 (en) * 1999-06-21 2001-12-11 Intel Corporation Method for patterning dual damascene interconnects using a sacrificial light absorbing material
NL1013003C2 (nl) * 1999-09-08 2001-03-12 Odme Internat B V Inrichting geschikt voor het vervaardigen van een optische registratiedrager zoals bijvoorbeeld een moederplaat.
US6238118B1 (en) * 2000-07-27 2001-05-29 Traci L. Tryon Toothbrush with toothpaste feed system
TW474022B (en) * 2001-02-08 2002-01-21 United Microelectronics Corp Structure for dual-bit non-volatile memory unit and the read/write method thereof
KR20020086291A (ko) * 2001-05-11 2002-11-18 후지 샤신 필름 가부시기가이샤 자기전사용 마스터담체
JP3885518B2 (ja) * 2001-05-29 2007-02-21 住友金属工業株式会社 スタンパ用基板の製造方法及びNi圧延板の研磨方法
TWI226059B (en) * 2001-06-11 2005-01-01 Sony Corp Method for manufacturing master disk for optical recording medium having pits and projections, stamper, and optical recording medium
JP3656591B2 (ja) * 2001-06-28 2005-06-08 ソニー株式会社 光学記録媒体製造用スタンパの製造方法および光学記録媒体の製造方法
US6638692B1 (en) * 2001-07-16 2003-10-28 Imation Corp. Replicated regions on optical disks
JP2003085829A (ja) * 2001-09-06 2003-03-20 Tdk Corp 光情報媒体用スタンパの製造方法およびこれに用いるフォトレジスト原盤、ならびに、光情報媒体用スタンパおよび光情報媒体
JP3592678B2 (ja) * 2002-02-27 2004-11-24 松下電器産業株式会社 ブランク盤の製造方法とダイレクトスタンパーの製作方法
TW200502710A (en) * 2003-04-23 2005-01-16 Koninkl Philips Electronics Nv Photolithographic process, stamper, use of said stamper and optical data storage medium
US20050151283A1 (en) * 2004-01-08 2005-07-14 Bajorek Christopher H. Method and apparatus for making a stamper for patterning CDs and DVDs

Also Published As

Publication number Publication date
US20050151283A1 (en) 2005-07-14
EP1564735A2 (en) 2005-08-17
MY153240A (en) 2015-01-29
EP1564735A3 (en) 2007-01-10
US20050167867A1 (en) 2005-08-04

Similar Documents

Publication Publication Date Title
JP2005196953A (ja) Cd及びdvdにパターンを作成するためのスタンパを製造する方法及び装置
US6874262B2 (en) Method for manufacturing master substrate used for manufacturing grooved molding substrate, method for manufacturing stamper for manufacturing grooved molding substrate, method for manufacturing grooved molding substrate, grooved molding substrate, memory medium, memory device, and computer
US6814897B2 (en) Method for manufacturing a molding tool used for substrate molding
US6207247B1 (en) Method for manufacturing a molding tool used for sustrate molding
US5051340A (en) Master for optical element replication
KR20000005157A (ko) 광 데이터 기억 디스크 스탬퍼 제조 공정
EP1460625A1 (en) Information medium master manufacturing method, information medium stamper manufacturing method, information medium master manufacturing apparatus, and information medium stamper manufacturing apparatus
JPS59224320A (ja) 金型の製造方法
JPH09115190A (ja) 光ディスク用スタンパの製造方法
US20060290018A1 (en) Process for produicng stamper for direct mastering, and stamper produced by such process and optical disc
JP2009080871A (ja) 光情報記録媒体
JP3227742B2 (ja) スタンパの製造方法及び光記録媒体の製造方法
JP3136759B2 (ja) スタンパ、その製造方法、及び光記録媒体
JPH11350181A (ja) スタンパの製造方法
JPH09134547A (ja) 光学記録媒体およびその製造方法
JP2739841B2 (ja) 情報記録媒体の製造方法
JP4755680B2 (ja) 光情報記録媒体およびその製造方法
US20030193101A1 (en) Super resolution optical disk mother mold
JP2004532498A (ja) 光ディスクの金型の製造方法
JP3235620B2 (ja) スタンパの製造方法
JPH10312584A (ja) ディスク用金属原盤の製造方法
JP2003067983A (ja) スタンパーおよびその製造方法
JP2000215529A (ja) マスタスタンパ及びその製造方法
JPH01235044A (ja) 光ディスク基板およびその製造方法
JPH07169117A (ja) スタンパ及びその製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071129

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071129

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080428

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080512

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080812

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080815

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081112

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090216

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20090803