JP2005196953A5 - - Google Patents

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Publication number
JP2005196953A5
JP2005196953A5 JP2004373021A JP2004373021A JP2005196953A5 JP 2005196953 A5 JP2005196953 A5 JP 2005196953A5 JP 2004373021 A JP2004373021 A JP 2004373021A JP 2004373021 A JP2004373021 A JP 2004373021A JP 2005196953 A5 JP2005196953 A5 JP 2005196953A5
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JP
Japan
Prior art keywords
layer
forming
resist
patterned resist
substrate
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Pending
Application number
JP2004373021A
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English (en)
Japanese (ja)
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JP2005196953A (ja
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Publication date
Priority claimed from US10/837,859 external-priority patent/US20050151283A1/en
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Publication of JP2005196953A publication Critical patent/JP2005196953A/ja
Publication of JP2005196953A5 publication Critical patent/JP2005196953A5/ja
Pending legal-status Critical Current

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JP2004373021A 2004-01-08 2004-12-24 Ｃｄ及びｄｖｄにパターンを作成するためのスタンパを製造する方法及び装置 Pending JP2005196953A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US53538004P 2004-01-08 2004-01-08
US10/837,859 US20050151283A1 (en) 2004-01-08 2004-05-03 Method and apparatus for making a stamper for patterning CDs and DVDs

Publications (2)

Publication Number Publication Date
JP2005196953A JP2005196953A (ja) 2005-07-21
JP2005196953A5 true JP2005196953A5 (cg-RX-API-DMAC7.html) 2008-01-24

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004373021A Pending JP2005196953A (ja) 2004-01-08 2004-12-24 Ｃｄ及びｄｖｄにパターンを作成するためのスタンパを製造する方法及び装置

Country Status (4)

Country Link
US (2) US20050151283A1 (cg-RX-API-DMAC7.html)
EP (1) EP1564735A3 (cg-RX-API-DMAC7.html)
JP (1) JP2005196953A (cg-RX-API-DMAC7.html)
MY (1) MY153240A (cg-RX-API-DMAC7.html)

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