JP2005175128A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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Abstract
【解決手段】 半導体基板11の電極15部に開口部があるレジストをアッシング処理、酸浸漬処理、シャワー水洗いした後、電解めっきによりはんだを開口部に形成することにより、はんだボール13の電極間ピッチをX1とし、バリアメタル12の直径をX2とし、はんだボール13の半導体基板11からの高さをX3としたとき、このX1,X2,X3が、X1/2≦X2≦(3X1/4)で、かつX1/2≦X3≦(3X1/4)となる半導体装置を製造する。
【選択図】 図1
Description
半導体基板の電極にバリアメタルが形成されると共に、該バリアメタルに突起電極が形成されてなる半導体装置において、
前記突起電極の突起電極間ピッチをX1とし、
前記バリアメタルの直径をX2とし、
前記突起電極の前記半導体基板からの高さをX3としたとき、
前記X1,X2,X3が、(X1/2)≦X2≦(3X1/4)で、かつ(X1/2)≦X3≦(3X1/4)となるよう構成したことを特徴とするものである。
請求項1記載の半導体装置において、
前記バリアメタル層は、上層からNi層、Cu層、Ti層からなり、Ti層はCu層に対し100nm以上200nm以下のサイドエッチ構造を有することを特徴とするものである。
半導体基板上にシード層を形成するシード層形成工程と、
前記半導体基板に設けられた電極の形成位置と対応する位置にレジスト開口部を有したレジストを形成するレジスト形成工程と、
前記開口部内の前記シード層上にバリアメタルを形成するバリアメタル形成工程と、
前記開口部内の前記バリアメタル上に突起電極をめっき形成する突起電極形成工程とを含み、
前記レジスト形成工程後に、前記レジストに対して、少なくともアッシング処理、酸浸漬処理、シャワー水洗いのいずれか一つの処理を行なう前工程を実施することを特徴とするものである。
請求項3記載の半導体装置の製造方法において、
突起電極形成工程が終了した後、前記レジストを剥離すると共に、
前記バリアメタルをウェットエッチングで整形することを特徴とするものである。
請求項3記載の半導体装置の製造方法において、
前記突起電極形成工程において形成された突起電極に対し、カルボン酸を用いたフラックスレス・リフローを実施することにより突起電極を整形する突起電極整形工程を設けたことを特徴とするものである。
(X1/2)≦X2≦(3X1/4)……(1)
で、かつ
(X1/2)≦X3≦(3X1/4)……(2)
となるよう構成している。
12 バリアメタル
13 はんだボール
15 アルミ電極
16 カバー膜
17 開口部
20 Ti層
21 Cu層
22 Ni層
25 レジスト
26 レジスト開口パターン
27 はんだ
Claims (5)
- 半導体基板上の電極にバリアメタルが形成されると共に、該バリアメタルに突起電極が形成されてなる半導体装置において、
前記突起電極の突起電極間ピッチをX1とし、
前記バリアメタルの直径をX2とし、
前記突起電極の前記半導体基板からの高さをX3としたとき、
前記X1,X2,X3が、(X1/2)≦X2≦(3X1/4)で、かつX1/2≦X3≦(3X1/4)となるよう構成したことを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記バリアメタル層は、上層からNi層、Cu層、Ti層からなり、Ti層はCu層に対し100nm以上200nm以下のサイドエッチ構造を有することを特徴とする半導体装置。 - 半導体基板上にシード層を形成するシード層形成工程と、
前記半導体基板に設けられた電極の形成位置と対応する位置にレジスト開口部を有したレジストを形成するレジスト形成工程と、
前記開口部内の前記シード層上にバリアメタルを形成するバリアメタル形成工程と、
前記開口部内の前記バリアメタル上に突起電極をめっき形成する突起電極形成工程とを含み、
前記レジスト形成工程後に、前記レジストに対して、少なくともアッシング処理、酸浸漬処理、シャワー水洗いのいずれか一つの処理を行なう前工程を実施することを特徴とする半導体装置の製造方法。 - 請求項3記載の半導体装置の製造方法において、
突起電極形成工程が終了した後、前記レジストを剥離すると共に、
前記バリアメタルをウェットエッチングで整形することを特徴とする半導体装置の製造方法。 - 請求項3記載の半導体装置の製造方法において、
前記突起電極形成工程において形成された突起電極に対し、カルボン酸を用いたフラックスレス・リフローを実施することにより突起電極を整形する突起電極整形工程を設けたことを特徴とする半導体装置の製造方法。
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JP2003411592A JP2005175128A (ja) | 2003-12-10 | 2003-12-10 | 半導体装置及びその製造方法 |
US10/995,081 US7064436B2 (en) | 2003-12-10 | 2004-11-23 | Semiconductor device and method of fabricating the same |
TW093136146A TWI251285B (en) | 2003-12-10 | 2004-11-24 | Semiconductor device and method of fabricating the same |
CNA2004100973604A CN1627512A (zh) | 2003-12-10 | 2004-11-29 | 半导体器件及其制造方法 |
KR1020040099132A KR100636722B1 (ko) | 2003-12-10 | 2004-11-30 | 반도체 장치 및 그 제조 방법 |
US11/412,127 US20060258045A1 (en) | 2003-12-10 | 2006-04-27 | Semiconductor device and method of fabricating the same |
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US (2) | US7064436B2 (ja) |
JP (1) | JP2005175128A (ja) |
KR (1) | KR100636722B1 (ja) |
CN (1) | CN1627512A (ja) |
TW (1) | TWI251285B (ja) |
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-
2003
- 2003-12-10 JP JP2003411592A patent/JP2005175128A/ja active Pending
-
2004
- 2004-11-23 US US10/995,081 patent/US7064436B2/en not_active Expired - Fee Related
- 2004-11-24 TW TW093136146A patent/TWI251285B/zh not_active IP Right Cessation
- 2004-11-29 CN CNA2004100973604A patent/CN1627512A/zh active Pending
- 2004-11-30 KR KR1020040099132A patent/KR100636722B1/ko not_active IP Right Cessation
-
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- 2006-04-27 US US11/412,127 patent/US20060258045A1/en not_active Abandoned
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JP2013239756A (ja) * | 2013-09-04 | 2013-11-28 | Rohm Co Ltd | 半導体装置 |
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TW200525669A (en) | 2005-08-01 |
US7064436B2 (en) | 2006-06-20 |
KR20050056865A (ko) | 2005-06-16 |
TWI251285B (en) | 2006-03-11 |
KR100636722B1 (ko) | 2006-10-23 |
CN1627512A (zh) | 2005-06-15 |
US20060258045A1 (en) | 2006-11-16 |
US20050140004A1 (en) | 2005-06-30 |
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