JP2005120955A5 - - Google Patents

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Publication number
JP2005120955A5
JP2005120955A5 JP2003358424A JP2003358424A JP2005120955A5 JP 2005120955 A5 JP2005120955 A5 JP 2005120955A5 JP 2003358424 A JP2003358424 A JP 2003358424A JP 2003358424 A JP2003358424 A JP 2003358424A JP 2005120955 A5 JP2005120955 A5 JP 2005120955A5
Authority
JP
Japan
Prior art keywords
pump
vacuum
rotor
booster
rotational speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003358424A
Other languages
English (en)
Japanese (ja)
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JP4218756B2 (ja
JP2005120955A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2003358424A external-priority patent/JP4218756B2/ja
Priority to JP2003358424A priority Critical patent/JP4218756B2/ja
Priority to PCT/JP2004/015563 priority patent/WO2005038255A2/en
Priority to US10/563,255 priority patent/US9541088B2/en
Priority to EP04792713.2A priority patent/EP1673539B1/en
Priority to TW093131306A priority patent/TWI326330B/zh
Publication of JP2005120955A publication Critical patent/JP2005120955A/ja
Publication of JP2005120955A5 publication Critical patent/JP2005120955A5/ja
Publication of JP4218756B2 publication Critical patent/JP4218756B2/ja
Application granted granted Critical
Priority to US12/769,284 priority patent/US20100209259A1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003358424A 2003-10-17 2003-10-17 真空排気装置 Expired - Lifetime JP4218756B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003358424A JP4218756B2 (ja) 2003-10-17 2003-10-17 真空排気装置
PCT/JP2004/015563 WO2005038255A2 (en) 2003-10-17 2004-10-14 Evacuation apparatus
US10/563,255 US9541088B2 (en) 2003-10-17 2004-10-14 Evacuation apparatus
EP04792713.2A EP1673539B1 (en) 2003-10-17 2004-10-14 Evacuation apparatus
TW093131306A TWI326330B (en) 2003-10-17 2004-10-15 Evacuation apparatus
US12/769,284 US20100209259A1 (en) 2003-10-17 2010-04-28 Evacuation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003358424A JP4218756B2 (ja) 2003-10-17 2003-10-17 真空排気装置

Publications (3)

Publication Number Publication Date
JP2005120955A JP2005120955A (ja) 2005-05-12
JP2005120955A5 true JP2005120955A5 (enExample) 2006-02-23
JP4218756B2 JP4218756B2 (ja) 2009-02-04

Family

ID=34463300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003358424A Expired - Lifetime JP4218756B2 (ja) 2003-10-17 2003-10-17 真空排気装置

Country Status (5)

Country Link
US (2) US9541088B2 (enExample)
EP (1) EP1673539B1 (enExample)
JP (1) JP4218756B2 (enExample)
TW (1) TWI326330B (enExample)
WO (1) WO2005038255A2 (enExample)

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DE102016102954A1 (de) 2016-02-19 2017-08-24 Multivac Sepp Haggenmüller Se & Co. Kg Vakuumpumpe
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DE102016216279A1 (de) 2016-08-30 2018-03-01 Leybold Gmbh Vakuumpumpen-Schraubenrotor
DE202016005207U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Vakuumpumpen-Rotor
DE202016005209U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Schraubenvakuumpumpe
ES2709763T3 (es) * 2016-10-28 2019-04-17 Almig Kompressoren Gmbh Compresor de aire de tornillo inyectado de aceite de dos etapas
JP2018178846A (ja) 2017-04-12 2018-11-15 株式会社荏原製作所 真空ポンプ装置の運転制御装置、及び運転制御方法
CN107084135A (zh) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 一种干式螺旋真空泵
CN111375325B (zh) * 2018-12-31 2022-01-07 中国石油化工股份有限公司 一种联动式燃料油混合器、混油系统及混油方法
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
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US11668304B2 (en) 2020-02-27 2023-06-06 Gardner Denver, Inc. Low coefficient of expansion rotors for vacuum boosters
US11313368B2 (en) * 2020-03-05 2022-04-26 Elivac Company, Ltd. Multistage pump assembly with at least one co-used shaft
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