KR870010320A - 2단 진공펌프장치 및 그 운전방법 - Google Patents

2단 진공펌프장치 및 그 운전방법 Download PDF

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KR870010320A
KR870010320A KR870003507A KR870003507A KR870010320A KR 870010320 A KR870010320 A KR 870010320A KR 870003507 A KR870003507 A KR 870003507A KR 870003507 A KR870003507 A KR 870003507A KR 870010320 A KR870010320 A KR 870010320A
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Prior art keywords
vacuum pump
stage
screw
pressure
stage vacuum
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KR870003507A
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English (en)
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KR940008174B1 (ko
Inventor
리이찌 우찌다
세이지 쓰루
가즈아끼 시미노끼
고오다료오 나야
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미다 가쓰시게
가부시기 가이샤 히다찌세이사꾸쇼
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

내용 없음.

Description

2단 진공펌프장치 및 그 운정방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 1실시예의 계통도.
제2도는 제1도 실시예에 적용가능한 오일회전 진공펌프 일례의 단면도.
제3도는 제1도의 실시예에 있어서의 스크류진공펌프의 상세한 단면도.
제4도는 제3도의 IV-IV선에 연하는 단면도.

Claims (8)

  1. 작동실을 갖는 주케이싱과 이 주케이싱의 작동실에 연통하여 형성된 흡입구 및 토출구와 이 주케이싱의 작동실에 회전가능하게 수용되는 암수 한쌍의 스크류 로우터와, 이양 스코류 로우터를 지지하는 베아링수단과 각 베아링 수단 및 작동실의 사이의 위치에 배치되는 씨일링 수단과,
    상기 양 스크류 로우터의 축부 사이에 배치되는 쌍의 타이밍 기어를 구비하고, 상기 흡입구가 피배기개에 연결되어 있는 전단 진공펌프를 원형의 작동실을 갖는 케이싱과 이 작동실내에 회전자유로히 배치되는 로우터와, 이 로우터에 수납되고 반경방향으로 출입되는 베인과를 구비하고 상기 전단진공펌프의 토출구에 연결되는 후단진공 펌프를 구비한 구조의 2단 진공펌프장치.
  2. 제1항에 있어서,
    상기 스코류진공펌프는 상기 쌍의 타이밍 기어의 한쪽에 치합되는 드라이브 기어를 가진 구성의 2단진공펌프 장치.
  3. 피배기계에 연결된 전단진공펌프와 이전단진공펌프의 토출측에 연결되는 후단진공펌프를 구비하고,
    상기 전단진공펌프는 스크류진공펌프이고 교차하는 두개의 원주형 형상의 작동실과 작동실에 연결된 흡입구 토출구를 가진 케이싱, 이 케이싱의 작동실에 상호치합하는 상태로 회전가능하게 수용된 암수 한쌍의 스크류로우터, 이들 각 스크류로우터의 각축부와 상기 케이싱과의 사이에서 배치되고, 각 스크류로우터를 회전자유로히 지지하는 베아링 수단, 이들 각 베아링수단과 작동실의 사이의 위치에 배치되고 상기 작동실과 각 베아링수단과의 사이에서 가스 및 오일방울이 혼합된 가스의 유통을 저지하는 씨일링수단, 상기 각 스크류로우터의 각축부에 배치되어 상호치합하는 쌍의 타이밍기어를 가진 구성의 2단진공펌프장치.
  4. 제3항에 있어서,
    전단진공펌프의 토출구와 후단진공펌프의 흡입구가 배관을 통해서 연결되는 구성의 2단진공펌프장치.
  5. 피배기계에 연결되고 제1의 전동기에 의하여 구동되는 제1단 스크류진공펌프와, 이 스크류 진공펌프의 토출측에 연결되고 제2의 전동기에 의하여 구동되는 제2단 진공펌프와 상기 제1단 스크류진공펌프의 흡입구에 부착되는 제2의 압력검출수단과, 상기 흡입구의 압력의 기준치인 Pi를 설정하는 기준흡입 압력설정기와, 상기 토출구의 배압의 기준치인 Pm을 설정하는 기준배압설정기와, 기준흡입압력(Pi)과 제1의 압력검출수단에 의하여 검출된 흡기압력(Pid)과를 비교하여 상기 제1전동기를 위한 회전수변경 신호를 형성하는 제1의 비교기와 상기 기준배압(Pm)과 제2의 압력검출수단에 의하여 검출된 배압(Pmd)을 비교하여 상기 제2전동기를 위한 회전수변경 신호를 형성하는 제2의 비교기와 제1의 비교기의 회전수 변경신호에 의하여 제1전동기의 회전수를 제어하여 제2의 비교기 회전수 변경신호에 의하여 제2전동기의 회전수를 제어하는 회전수 제어수단을 가진 제어유니트를 구비한 구성의 2단진공펌프장치.
  6. 제5항에 있어서,
    상기 제어유니트에서의 배압의 기준치인 Pm-가 1-100 Torr의 범위에서 선택하는 임의의 값에서 설정되는 2단진공펌프장치.
  7. 전단진공펌프와 후단진공펌프로 되며 전단진공펌프로서 스크류진공펌프를 사용하는 2단 진공펌프장치의 운전방법에 있어서,
    상기 스크류 진공펌프의 토출측압력을 1-100Torr의 범위내에서 유지하며 운전하는 것이 특징이 2단진공펌프장치의 운전방법.
  8. 제7항에 있어서,
    후단진공펌프의 회전수를 전단진공펌프의 토출압력이 1-100 Torr로 되도록 제어하는 것이 특징인 2단 진공펌프장치의 운전방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870003507A 1986-04-14 1987-04-13 2단 진공펌프장치 및 그 운전방법 KR940008174B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP86-85636 1986-04-14
JP85636 1986-04-14
JP61085636A JPS62243982A (ja) 1986-04-14 1986-04-14 ２段型真空ポンプ装置およびその運転方法

Publications (2)

Publication Number Publication Date
KR870010320A true KR870010320A (ko) 1987-11-30
KR940008174B1 KR940008174B1 (ko) 1994-09-07

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KR1019870003507A KR940008174B1 (ko) 1986-04-14 1987-04-13 2단 진공펌프장치 및 그 운전방법

Country Status (4)

Country Link
US (1) US4770609A (ko)
JP (1) JPS62243982A (ko)
KR (1) KR940008174B1 (ko)
DE (2) DE3711143A1 (ko)

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KR20210004783A (ko) * 2019-07-05 2021-01-13 김태화 반도체 제조 장비용 펌프 백 스트림 방지 구조

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DE8717934U1 (ko) 1991-05-08
US4770609A (en) 1988-09-13
DE3711143C2 (ko) 1992-02-13
KR940008174B1 (ko) 1994-09-07
JPS62243982A (ja) 1987-10-24
DE3711143A1 (de) 1987-10-15

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