GB2602625B - Method for stopping a vacuum pump - Google Patents

Method for stopping a vacuum pump Download PDF

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Publication number
GB2602625B
GB2602625B GB2019818.0A GB202019818A GB2602625B GB 2602625 B GB2602625 B GB 2602625B GB 202019818 A GB202019818 A GB 202019818A GB 2602625 B GB2602625 B GB 2602625B
Authority
GB
United Kingdom
Prior art keywords
stopping
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2019818.0A
Other versions
GB202019818D0 (en
GB2602625A (en
Inventor
Glyn Horler Richard
Smerek Petr
Keech Ian
James Thickett Stephen
Lee Harkin Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards sro
Original Assignee
Edwards sro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards sro filed Critical Edwards sro
Priority to GB2019818.0A priority Critical patent/GB2602625B/en
Publication of GB202019818D0 publication Critical patent/GB202019818D0/en
Priority to PCT/EP2021/085632 priority patent/WO2022129009A1/en
Priority to CN202180084847.0A priority patent/CN116635634A/en
Priority to US18/256,141 priority patent/US20240035472A1/en
Priority to JP2023536513A priority patent/JP2023554413A/en
Priority to EP21835310.0A priority patent/EP4264054A1/en
Priority to TW110146989A priority patent/TW202237988A/en
Publication of GB2602625A publication Critical patent/GB2602625A/en
Application granted granted Critical
Publication of GB2602625B publication Critical patent/GB2602625B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/05—Speed
    • F04C2270/052—Speed angular
    • F04C2270/0525—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/17—Tolerance; Play; Gap
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB2019818.0A 2020-12-15 2020-12-15 Method for stopping a vacuum pump Active GB2602625B (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GB2019818.0A GB2602625B (en) 2020-12-15 2020-12-15 Method for stopping a vacuum pump
PCT/EP2021/085632 WO2022129009A1 (en) 2020-12-15 2021-12-14 Method for stopping a vacuum pump
CN202180084847.0A CN116635634A (en) 2020-12-15 2021-12-14 Method for stopping a vacuum pump
US18/256,141 US20240035472A1 (en) 2020-12-15 2021-12-14 Method for stopping a vacuum pump
JP2023536513A JP2023554413A (en) 2020-12-15 2021-12-14 How to stop a vacuum pump
EP21835310.0A EP4264054A1 (en) 2020-12-15 2021-12-14 Method for stopping a vacuum pump
TW110146989A TW202237988A (en) 2020-12-15 2021-12-15 Method for stopping a vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2019818.0A GB2602625B (en) 2020-12-15 2020-12-15 Method for stopping a vacuum pump

Publications (3)

Publication Number Publication Date
GB202019818D0 GB202019818D0 (en) 2021-01-27
GB2602625A GB2602625A (en) 2022-07-13
GB2602625B true GB2602625B (en) 2023-05-31

Family

ID=74189081

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2019818.0A Active GB2602625B (en) 2020-12-15 2020-12-15 Method for stopping a vacuum pump

Country Status (7)

Country Link
US (1) US20240035472A1 (en)
EP (1) EP4264054A1 (en)
JP (1) JP2023554413A (en)
CN (1) CN116635634A (en)
GB (1) GB2602625B (en)
TW (1) TW202237988A (en)
WO (1) WO2022129009A1 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1900943A1 (en) * 2006-09-12 2008-03-19 Kabushiki Kaisha Toyota Jidoshokki Method of controlling the stopping operation of vacuum pump and device therefor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0224709D0 (en) 2002-10-24 2002-12-04 Boc Group Plc Improvements in dry pumps
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
JP4987660B2 (en) 2007-10-12 2012-07-25 株式会社荏原製作所 Operation control device and operation stop method for vacuum pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1900943A1 (en) * 2006-09-12 2008-03-19 Kabushiki Kaisha Toyota Jidoshokki Method of controlling the stopping operation of vacuum pump and device therefor

Also Published As

Publication number Publication date
CN116635634A (en) 2023-08-22
GB202019818D0 (en) 2021-01-27
TW202237988A (en) 2022-10-01
US20240035472A1 (en) 2024-02-01
WO2022129009A1 (en) 2022-06-23
JP2023554413A (en) 2023-12-27
GB2602625A (en) 2022-07-13
EP4264054A1 (en) 2023-10-25

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