JP2005025199A5 - - Google Patents

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Publication number
JP2005025199A5
JP2005025199A5 JP2004194590A JP2004194590A JP2005025199A5 JP 2005025199 A5 JP2005025199 A5 JP 2005025199A5 JP 2004194590 A JP2004194590 A JP 2004194590A JP 2004194590 A JP2004194590 A JP 2004194590A JP 2005025199 A5 JP2005025199 A5 JP 2005025199A5
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JP
Japan
Prior art keywords
mirror
exposure system
substrate
reticle
aspheric
Prior art date
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Pending
Application number
JP2004194590A
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English (en)
Japanese (ja)
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JP2005025199A (ja
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Publication date
Priority claimed from US10/831,210 external-priority patent/US7158215B2/en
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Publication of JP2005025199A publication Critical patent/JP2005025199A/ja
Publication of JP2005025199A5 publication Critical patent/JP2005025199A5/ja
Pending legal-status Critical Current

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JP2004194590A 2003-06-30 2004-06-30 フラットパネルディスプレイ製造用露光システムおよびフラットパネルディスプレイ製造用ユニット拡大環状光学系 Pending JP2005025199A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48322003P 2003-06-30 2003-06-30
US10/831,210 US7158215B2 (en) 2003-06-30 2004-04-26 Large field of view protection optical system with aberration correctability for flat panel displays

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008153338A Division JP5121588B2 (ja) 2003-06-30 2008-06-11 フラットパネルディスプレイ製造用露光システム

Publications (2)

Publication Number Publication Date
JP2005025199A JP2005025199A (ja) 2005-01-27
JP2005025199A5 true JP2005025199A5 (enExample) 2005-11-04

Family

ID=33436773

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2004194590A Pending JP2005025199A (ja) 2003-06-30 2004-06-30 フラットパネルディスプレイ製造用露光システムおよびフラットパネルディスプレイ製造用ユニット拡大環状光学系
JP2008153338A Expired - Fee Related JP5121588B2 (ja) 2003-06-30 2008-06-11 フラットパネルディスプレイ製造用露光システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2008153338A Expired - Fee Related JP5121588B2 (ja) 2003-06-30 2008-06-11 フラットパネルディスプレイ製造用露光システム

Country Status (7)

Country Link
US (3) US7158215B2 (enExample)
EP (1) EP1494076A3 (enExample)
JP (2) JP2005025199A (enExample)
KR (1) KR100832509B1 (enExample)
CN (1) CN100587601C (enExample)
SG (1) SG110098A1 (enExample)
TW (1) TWI309754B (enExample)

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