|
US6244121B1
(en)
*
|
1998-03-06 |
2001-06-12 |
Applied Materials, Inc. |
Sensor device for non-intrusive diagnosis of a semiconductor processing system
|
|
SE9900123L
(sv)
*
|
1999-01-15 |
2000-07-16 |
Abb Ab |
Metod för robot
|
|
US6887026B1
(en)
*
|
2000-12-22 |
2005-05-03 |
Infineon Technologie Sc300 Gmbh & Co. Kg |
Semiconductor product container and system for handling a semiconductor product container
|
|
KR100383260B1
(ko)
*
|
2001-03-08 |
2003-05-09 |
삼성전자주식회사 |
레티클 위치감지장치기능을 갖는 포크 암을 구비한 레이클이송장치
|
|
JP3694808B2
(ja)
*
|
2001-04-13 |
2005-09-14 |
株式会社安川電機 |
ウェハ搬送用ロボットの教示方法および教示用プレート
|
|
US6678583B2
(en)
*
|
2001-08-06 |
2004-01-13 |
Seminet, Inc. |
Robotic storage buffer system for substrate carrier pods
|
|
JP3832292B2
(ja)
*
|
2001-08-31 |
2006-10-11 |
株式会社ダイフク |
荷保管設備
|
|
CN100431806C
(zh)
*
|
2001-09-07 |
2008-11-12 |
株式会社安川电机 |
晶片位置教示方法和教示用夹具
|
|
US20030053892A1
(en)
*
|
2001-09-17 |
2003-03-20 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Loadport equipped with automatic height adjustment means and method for operating
|
|
US7289230B2
(en)
|
2002-02-06 |
2007-10-30 |
Cyberoptics Semiconductors, Inc. |
Wireless substrate-like sensor
|
|
US7233841B2
(en)
*
|
2002-04-19 |
2007-06-19 |
Applied Materials, Inc. |
Vision system
|
|
US7085622B2
(en)
|
2002-04-19 |
2006-08-01 |
Applied Material, Inc. |
Vision system
|
|
US6825485B1
(en)
*
|
2002-05-08 |
2004-11-30 |
Storage Technology Corporation |
System and method for aligning a robot device in a data storage library
|
|
US7039499B1
(en)
*
|
2002-08-02 |
2006-05-02 |
Seminet Inc. |
Robotic storage buffer system for substrate carrier pods
|
|
US6795786B2
(en)
*
|
2002-12-31 |
2004-09-21 |
Intel Corporation |
Robotic sensor calibration system
|
|
US7397539B2
(en)
*
|
2003-03-31 |
2008-07-08 |
Asml Netherlands, B.V. |
Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof
|
|
SG125948A1
(en)
*
|
2003-03-31 |
2006-10-30 |
Asml Netherlands Bv |
Supporting structure for use in a lithographic apparatus
|
|
KR101015778B1
(ko)
*
|
2003-06-03 |
2011-02-22 |
도쿄엘렉트론가부시키가이샤 |
기판 처리장치 및 기판 수수 위치의 조정 방법
|
|
JP4137711B2
(ja)
*
|
2003-06-16 |
2008-08-20 |
東京エレクトロン株式会社 |
基板処理装置及び基板搬送手段の位置合わせ方法
|
|
US6934606B1
(en)
*
|
2003-06-20 |
2005-08-23 |
Novellus Systems, Inc. |
Automatic calibration of a wafer-handling robot
|
|
US7458763B2
(en)
*
|
2003-11-10 |
2008-12-02 |
Blueshift Technologies, Inc. |
Mid-entry load lock for semiconductor handling system
|
|
US10086511B2
(en)
|
2003-11-10 |
2018-10-02 |
Brooks Automation, Inc. |
Semiconductor manufacturing systems
|
|
US20070269297A1
(en)
|
2003-11-10 |
2007-11-22 |
Meulen Peter V D |
Semiconductor wafer handling and transport
|
|
US20050111956A1
(en)
*
|
2003-11-10 |
2005-05-26 |
Blueshift Technologies, Inc. |
Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
|
|
KR100577582B1
(ko)
*
|
2004-06-09 |
2006-05-08 |
삼성전자주식회사 |
반도체 포토 스피너 설비 및 이를 이용한 웨이퍼 티칭불량방지방법
|
|
JP4775584B2
(ja)
*
|
2004-06-25 |
2011-09-21 |
株式会社安川電機 |
ポジショナおよび複合カールコード
|
|
US20060047363A1
(en)
*
|
2004-08-31 |
2006-03-02 |
Farrelly Philip J |
Machine vision system for lab workcells
|
|
US8000837B2
(en)
|
2004-10-05 |
2011-08-16 |
J&L Group International, Llc |
Programmable load forming system, components thereof, and methods of use
|
|
TWI447061B
(zh)
*
|
2005-07-11 |
2014-08-01 |
Brooks Automation Inc |
備有自動化對準功能的基板移送裝置
|
|
US7933685B1
(en)
*
|
2006-01-10 |
2011-04-26 |
National Semiconductor Corporation |
System and method for calibrating a wafer handling robot and a wafer cassette
|
|
US20070271638A1
(en)
*
|
2006-05-03 |
2007-11-22 |
Data I/O Corporation |
Auto-teaching system
|
|
WO2008051544A1
(en)
*
|
2006-10-23 |
2008-05-02 |
Cyberoptics Semiconductor, Inc. |
Improved calibration of a substrate handling robot
|
|
US8260461B2
(en)
*
|
2007-08-30 |
2012-09-04 |
Applied Materials, Inc. |
Method and system for robot calibrations with a camera
|
|
US8224607B2
(en)
*
|
2007-08-30 |
2012-07-17 |
Applied Materials, Inc. |
Method and apparatus for robot calibrations with a calibrating device
|
|
US8588958B2
(en)
*
|
2007-09-04 |
2013-11-19 |
Musashi Engineering, Inc. |
Moving program making-out program and device
|
|
JP4863985B2
(ja)
*
|
2007-12-20 |
2012-01-25 |
大日本スクリーン製造株式会社 |
基板処理装置
|
|
US9269529B2
(en)
*
|
2007-12-27 |
2016-02-23 |
Lam Research Corporation |
Systems and methods for dynamic alignment beam calibration
|
|
CN101911276B
(zh)
*
|
2007-12-27 |
2012-04-25 |
朗姆研究公司 |
使用至少一个光源校准末端执行器对准的系统和方法
|
|
SG195592A1
(en)
*
|
2007-12-27 |
2013-12-30 |
Lam Res Corp |
Arrangements and methods for determining positions and offsets in plasma processing system
|
|
US8751047B2
(en)
*
|
2007-12-27 |
2014-06-10 |
Lam Research Corporation |
Systems and methods for calibrating end effector alignment in a plasma processing system
|
|
US7921690B2
(en)
*
|
2008-01-10 |
2011-04-12 |
Parata Systems, Llc |
System and method for calibrating an automated materials handling system
|
|
NL1036673A1
(nl)
*
|
2008-04-09 |
2009-10-12 |
Asml Holding Nv |
Robot Position Calibration Tool (RPCT).
|
|
US8242730B2
(en)
*
|
2008-06-10 |
2012-08-14 |
Nichols Michael J |
Automated robot teach tool and method of use
|
|
CN101625528B
(zh)
*
|
2008-07-08 |
2010-09-29 |
中芯国际集成电路制造(上海)有限公司 |
掩模版夹具
|
|
US8886354B2
(en)
*
|
2009-01-11 |
2014-11-11 |
Applied Materials, Inc. |
Methods, systems and apparatus for rapid exchange of work material
|
|
DE102009016811A1
(de)
*
|
2009-04-09 |
2010-10-14 |
Aes Motomation Gmbh |
Verfahren zur automatischen Vermessung und zum Einlernen von Lagepositionen von Objekten innerhalb eines Substratprozessiersystems mittels Sensorträger und zugehöriger Sensorträger
|
|
KR101445911B1
(ko)
*
|
2009-04-13 |
2014-09-29 |
히라따기꼬오 가부시키가이샤 |
기판캐리어 측정 지그, 충돌방지 지그 및 그것을 이용한 충돌방지 방법
|
|
US8676537B2
(en)
*
|
2009-08-07 |
2014-03-18 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Portable wireless sensor
|
|
US8459922B2
(en)
*
|
2009-11-13 |
2013-06-11 |
Brooks Automation, Inc. |
Manipulator auto-teach and position correction system
|
|
KR101064084B1
(ko)
|
2010-03-25 |
2011-09-08 |
엘지이노텍 주식회사 |
발광소자 패키지 및 그 제조방법
|
|
CN101907577B
(zh)
*
|
2010-07-13 |
2012-01-04 |
友达光电股份有限公司 |
卡匣校正系统及其方法
|
|
JP5849403B2
(ja)
*
|
2011-02-15 |
2016-01-27 |
セイコーエプソン株式会社 |
ロボットコントローラー、ロボット、及び、ロボットシステム
|
|
US9233377B2
(en)
|
2011-04-13 |
2016-01-12 |
Siemens Healthcare Diagnostics Inc. |
Method, system, and apparatus for aligning the angle of a polar coordinate system device to the axis of an end-effector
|
|
US20170028557A1
(en)
|
2015-07-28 |
2017-02-02 |
Comprehensive Engineering Solutions, Inc. |
Robotic navigation system and method
|
|
DE102012200220A1
(de)
*
|
2011-06-20 |
2012-12-20 |
Semilev Gmbh |
Verfahren zum Kalibrieren eines aktiv magnetgelagerten Roboters
|
|
US8646404B2
(en)
*
|
2011-09-26 |
2014-02-11 |
Todd E. Hendricks, SR. |
Modular system with platformed robot, booth, and fluid delivery system for tire spraying
|
|
US20130173039A1
(en)
*
|
2012-01-04 |
2013-07-04 |
Seagate Technology Llc |
Methods and devices for determining a teaching point location using pressure measurements
|
|
US20130269615A1
(en)
*
|
2012-04-16 |
2013-10-17 |
Asm Ip Holding B.V. |
Vertical wafer boat
|
|
JP6114060B2
(ja)
*
|
2013-02-27 |
2017-04-12 |
東京エレクトロン株式会社 |
基板搬送装置、基板受渡位置確認方法及び基板処理システム
|
|
SG2013025770A
(en)
|
2013-04-05 |
2014-11-27 |
Sigenic Pte Ltd |
Apparatus and method for detecting position drift in a machine operation using a robot arm
|
|
US10203683B2
(en)
|
2013-07-16 |
2019-02-12 |
Seagate Technology Llc |
Coordinating end effector and vision controls
|
|
US10780586B2
(en)
|
2013-08-09 |
2020-09-22 |
Nidec Sankyo Corporation |
Horizontal articulated robot with bevel gears
|
|
JP6374156B2
(ja)
*
|
2013-08-09 |
2018-08-15 |
日本電産サンキョー株式会社 |
水平多関節ロボットおよび水平多関節ロボットの製造方法
|
|
JP6309220B2
(ja)
*
|
2013-08-12 |
2018-04-11 |
株式会社ダイヘン |
搬送システム
|
|
US9666465B2
(en)
*
|
2013-12-12 |
2017-05-30 |
Seagate Technology Llc |
Positioning apparatus
|
|
US9658316B2
(en)
*
|
2013-12-30 |
2017-05-23 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Device and method for positioning and calibrating a wafer transportation apparatus
|
|
CN107112266B
(zh)
|
2014-11-10 |
2020-12-08 |
布鲁克斯自动化公司 |
工具自动教导方法和设备
|
|
US10730180B2
(en)
*
|
2015-05-29 |
2020-08-04 |
Abb Schweiz Ag |
User interface for a teleoperated robot
|
|
US20170028549A1
(en)
*
|
2015-07-28 |
2017-02-02 |
Comprehensive Engineering Solutions, Inc. |
Robotic navigation system and method
|
|
US9966290B2
(en)
|
2015-07-30 |
2018-05-08 |
Lam Research Corporation |
System and method for wafer alignment and centering with CCD camera and robot
|
|
JP6444940B2
(ja)
*
|
2016-05-17 |
2018-12-26 |
ファナック株式会社 |
被加工物保持システム
|
|
JP6741538B2
(ja)
*
|
2016-09-28 |
2020-08-19 |
川崎重工業株式会社 |
ロボット、ロボットの制御装置、及び、ロボットの位置教示方法
|
|
JP6685213B2
(ja)
*
|
2016-09-29 |
2020-04-22 |
株式会社Ｓｃｒｅｅｎホールディングス |
基板整列装置、基板処理装置、基板配列装置、基板整列方法、基板処理方法および基板配列方法
|
|
TWI617995B
(zh)
*
|
2016-11-04 |
2018-03-11 |
廣明光電股份有限公司 |
機器人視覺定位的驗證方法
|
|
DE102018100003B4
(de)
*
|
2017-08-08 |
2020-03-12 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Methodologie zum automatischen Anlernen eines EFEM-Roboters
|
|
US10861723B2
(en)
*
|
2017-08-08 |
2020-12-08 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
EFEM robot auto teaching methodology
|
|
US10020216B1
(en)
*
|
2017-09-08 |
2018-07-10 |
Kawasaki Jukogyo Kabushiki Kaisha |
Robot diagnosing method
|
|
JP7187147B2
(ja)
*
|
2017-12-12 |
2022-12-12 |
東京エレクトロン株式会社 |
搬送装置のティーチング方法及び基板処理システム
|
|
JP7049909B2
(ja)
*
|
2018-05-11 |
2022-04-07 |
川崎重工業株式会社 |
基板搬送ロボット及び基板保持ハンドの光軸ずれ検出方法
|
|
CN110931377B
(zh)
|
2018-09-20 |
2023-11-03 |
台湾积体电路制造股份有限公司 |
反射率测量系统与方法
|
|
US11756840B2
(en)
*
|
2018-09-20 |
2023-09-12 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Reflectance measurement system and method thereof
|
|
WO2020163657A1
(en)
|
2019-02-08 |
2020-08-13 |
Yaskawa America, Inc. |
Through-beam auto teaching
|
|
CN113557434B
(zh)
|
2019-03-07 |
2025-10-17 |
简·探针公司 |
加工仪器中用于运输和保持消耗品的系统和方法
|
|
US11524410B2
(en)
*
|
2020-06-12 |
2022-12-13 |
Hexagon Metrology, Inc. |
Robotic alignment method for workpiece measuring systems
|
|
US11676845B2
(en)
|
2020-06-30 |
2023-06-13 |
Brooks Automation Us, Llc |
Automated teach apparatus for robotic systems and method therefor
|
|
US12121229B2
(en)
*
|
2021-02-05 |
2024-10-22 |
Shenzhen Institutes Of Advanced Technology Chinese Academy Of Sciences |
Soft-bodied apparatus and method for opening eyelid
|
|
JP2025514965A
(ja)
|
2022-05-04 |
2025-05-13 |
エフ． ホフマン－ラ ロシュ アーゲー |
スライド撮像設備
|
|
JP2024118194A
(ja)
|
2023-02-20 |
2024-08-30 |
株式会社安川電機 |
ロボットシステム、キャリブレーションツール、及びキャリブレーション方法
|