JP6685213B2 - 基板整列装置、基板処理装置、基板配列装置、基板整列方法、基板処理方法および基板配列方法 - Google Patents
基板整列装置、基板処理装置、基板配列装置、基板整列方法、基板処理方法および基板配列方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 746
- 238000012545 processing Methods 0.000 title claims description 101
- 238000000034 method Methods 0.000 title claims description 34
- 238000003672 processing method Methods 0.000 title claims description 4
- 230000007246 mechanism Effects 0.000 claims description 103
- 239000007788 liquid Substances 0.000 claims description 88
- 230000002093 peripheral effect Effects 0.000 claims description 19
- 230000036544 posture Effects 0.000 description 116
- 239000000126 substance Substances 0.000 description 33
- 230000003028 elevating effect Effects 0.000 description 32
- 230000007723 transport mechanism Effects 0.000 description 9
- 238000001035 drying Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000012546 transfer Methods 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01L21/67781—Batch transfer of wafers
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- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Description
9 基板
10 基板処理装置
21 第1薬液槽
22 第1リンス液槽
23 第2薬液槽
24 第2リンス液槽
27 第1リフタ
28 第2リフタ
41 バッチハンド
52 垂直保持部
61 昇降保持部
62 保持部昇降機構
81 モータ
93 ノッチ
100 制御部
101 記憶部
S11〜S13,S21,S22,S31,S32 ステップ
Claims (10)
- 周縁部にノッチを有する複数の基板を整列させる基板整列装置であって、
垂直姿勢にて基板保持部により下縁部を保持される予定の複数の基板を、順次または同時に周方向に回転する回転部と、
前記複数の基板の反り状態と、前記反り状態の基板が前記基板保持部により保持された際に適切な姿勢となるノッチ位置との複数の組み合わせを含む反り−ノッチ位置情報を記憶する記憶部と、
前記回転部を制御する制御部と、
を備え、
前記複数の基板の反り状態について入力された入力情報、および、前記反り−ノッチ位置情報に基づいて、前記制御部が前記回転部を制御し、前記複数の基板を順次または同時に前記周方向に回転させて前記複数の基板の前記ノッチの前記周方向の位置を決定することにより、前記基板保持部により保持された状態における前記各基板の下縁部と上端との間の厚さ方向の距離を小さくすることを特徴とする基板整列装置。 - 基板処理装置であって、
請求項1に記載の基板整列装置と、
前記基板整列装置により整列された前記複数の基板を保持する前記基板保持部と、
前記基板保持部により保持された前記複数の基板が浸漬される処理液を貯溜する液処理部と、
を備えることを特徴とする基板処理装置。 - 基板配列装置であって、
請求項1に記載の基板整列装置と、
前記基板整列装置により整列された前記複数の基板を保持する前記基板保持部と、
他の基板保持部により保持された他の複数の基板の間に、前記基板保持部により保持された前記複数の基板をそれぞれ配置する基板配列機構と、
を備えることを特徴とする基板配列装置。 - 周縁部にノッチを有する複数の基板を整列させる基板整列装置であって、
水平姿勢にて基板保持部により下面を支持される予定の複数の基板を、順次または同時に周方向に回転する回転部と、
前記複数の基板の反り状態と、前記反り状態の基板が前記基板保持部により保持された際に適切な姿勢となるノッチ位置との複数の組み合わせを含む反り−ノッチ位置情報を記憶する記憶部と、
前記回転部を制御する制御部と、
を備え、
前記複数の基板の反り状態について入力された入力情報、および、前記反り−ノッチ位置情報に基づいて、前記制御部が前記回転部を制御し、前記複数の基板を順次または同時に前記周方向に回転させて前記複数の基板の前記ノッチの前記周方向の位置を決定することにより、前記基板保持部により保持された状態における前記各基板の上端と前記周縁部のうち前記基板保持部に当接する当接部との間の厚さ方向の距離を小さくすることを特徴とする基板整列装置。 - 請求項1または4に記載の基板整列装置であって、
前記各基板が、
第1の径方向において前記厚さ方向の一方側に第1の曲率にて湾曲し、
前記第1の径方向に直交する第2の径方向において、前記厚さ方向の前記一方側に前記第1の曲率よりも大きい第2の曲率にて湾曲することを特徴とする基板整列装置。 - 請求項1または4に記載の基板整列装置であって、
前記各基板が、
第1の径方向において前記厚さ方向の一方側に湾曲し、
前記第1の径方向に直交する第2の径方向において前記厚さ方向の他方側に湾曲することを特徴とする基板整列装置。 - 周縁部にノッチを有する複数の基板を整列させる基板整列方法であって、
a)垂直姿勢にて基板保持部により下縁部を保持される予定の複数の基板の反り状態と、前記反り状態の基板が前記基板保持部により保持された際に適切な姿勢となるノッチ位置との複数の組み合わせを含む反り−ノッチ位置情報を記憶する工程と、
b)前記複数の基板を順次または同時に周方向に回転する工程と、
c)前記b)工程よりも後に、整列後の前記複数の基板のノッチの前記周方向の位置を順次または同時に決定する工程と、
を備え、
前記c)工程にておいて、前記複数の基板の反り状態について入力された入力情報、および、前記反り−ノッチ位置情報に基づいて、前記各基板の前記ノッチの前記周方向の位置が決定されることにより、前記基板保持部により保持された状態における前記各基板の下縁部と上端との間の厚さ方向の距離が小さくされることを特徴とする基板整列方法。 - 基板処理方法であって、
請求項7に記載の基板整列方法により前記複数の基板を整列する工程と、
前記基板整列方法により整列された前記複数の基板を前記基板保持部により保持する工程と、
前記基板保持部により保持された前記複数の基板を処理液に浸漬する工程と、
を備えることを特徴とする基板処理方法。 - 基板配列方法であって、
請求項7に記載の基板整列方法により前記複数の基板を整列する工程と、
前記基板整列方法により整列された前記複数の基板を前記基板保持部により保持する工程と、
他の基板保持部により保持された他の複数の基板の間に、前記基板保持部により保持された前記複数の基板をそれぞれ配置する工程と、
を備えることを特徴とする基板配列方法。 - 周縁部にノッチを有する複数の基板を整列させる基板整列方法であって、
a)水平姿勢にて基板保持部により下面を支持される予定の複数の基板の反り状態と、前記反り状態の基板が前記基板保持部により保持された際に適切な姿勢となるノッチ位置との複数の組み合わせを含む反り−ノッチ位置情報を記憶する工程と、
b)前記複数の基板を順次または同時に周方向に回転する工程と、
c)前記b)工程よりも後に、整列後の前記複数の基板のノッチの前記周方向の位置を順次または同時に決定する工程と、
を備え、
前記c)工程にておいて、前記複数の基板の反り状態について入力された入力情報、および、前記反り−ノッチ位置情報に基づいて、前記複数の基板の前記ノッチの前記周方向の位置が決定されることにより、前記基板保持部により保持された状態における前記各基板の上端と前記周縁部のうち前記基板保持部に当接する当接部との間の厚さ方向の距離が小さくされることを特徴とする基板整列方法。
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JP2016190860A JP6685213B2 (ja) | 2016-09-29 | 2016-09-29 | 基板整列装置、基板処理装置、基板配列装置、基板整列方法、基板処理方法および基板配列方法 |
KR1020170108538A KR101999439B1 (ko) | 2016-09-29 | 2017-08-28 | 기판 정렬 장치, 기판 처리 장치, 기판 배열 장치, 기판 정렬 방법, 기판 처리 방법 및 기판 배열 방법 |
US15/693,708 US10229848B2 (en) | 2016-09-29 | 2017-09-01 | Substrate alignment apparatus, substrate processing apparatus, substrate arrangement apparatus, substrate alignment method, substrate processing method, and substrate arrangement method |
TW106130822A TWI637457B (zh) | 2016-09-29 | 2017-09-08 | 基板對齊裝置、基板處理裝置、基板排列裝置、基板對齊方法、基板處理方法及基板排列方法 |
CN201710813810.2A CN107887297B (zh) | 2016-09-29 | 2017-09-11 | 基板对齐装置及方法、基板处理装置及方法、基板排列装置及方法 |
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JP6862163B2 (ja) * | 2016-12-09 | 2021-04-21 | 東京エレクトロン株式会社 | 基板処理装置 |
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JP2001127136A (ja) * | 1999-10-29 | 2001-05-11 | Applied Materials Inc | 基板搬送ロボットの検査装置 |
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